| Patents for H02N 13 - Clutches or holding devices using electrostatic attraction, e.g. using johnson-rahbek effect (1,323) |
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| 11/16/1999 | US5986875 Puncture resistant electrostatic chuck |
| 11/16/1999 | US5986874 Electrostatic support assembly having an integral ion focus ring |
| 11/16/1999 | US5986873 Creating surface topography on an electrostatic chuck with a mandrel |
| 11/16/1999 | US5986381 Electrostatic actuator with spatially alternating voltage patterns |
| 11/09/1999 | US5982607 Monopolar electrostatic chuck having an electrode in contact with a workpiece |
| 11/09/1999 | US5981913 Static electricity chuck and wafer stage |
| 11/02/1999 | US5978202 Electrostatic chuck having a thermal transfer regulator pad |
| 10/21/1999 | WO1999053603A1 Electrostatic wafer clamp having low particulate contamination of wafers |
| 10/19/1999 | US5969934 Electrostatic wafer clamp having low particulate contamination of wafers |
| 10/14/1999 | WO1999052144A1 Electrostatic chuck power supply |
| 10/13/1999 | EP0948805A1 Wafer electrical discharge control by wafer lifter system |
| 10/06/1999 | CN1230774A Method and apparatus for determining wafer warpage for optimized electrostatic chuck clamping voltage |
| 09/28/1999 | US5956837 Method of detaching object to be processed from electrostatic chuck |
| 09/23/1999 | WO1999048148A1 Method and apparatus for predicting failure of an electrostatic chuck |
| 09/22/1999 | CN1229269A Operating method and device of base plate and sticking checking method and device used thereof |
| 09/16/1999 | WO1999028950A9 Electrostatic chuck employing thermoelectric cooling |
| 09/14/1999 | US5953200 Multiple pole electrostatic chuck with self healing mechanism for wafer clamping |
| 09/08/1999 | EP0940845A2 Susceptor for semiconductor manufacturing equipment and process for producing the same |
| 09/08/1999 | CN1227968A Susceptor for semiconductor manufacturing equipment and process for producing the same |
| 09/07/1999 | US5948986 Monitoring of wafer presence and position in semiconductor processing operations |
| 09/02/1999 | WO1999029001A3 Electrostatic chuck capable of rapidly dechucking a substrate |
| 08/31/1999 | US5946183 Electrostatic chuck |
| 08/05/1999 | WO1999028950A3 Electrostatic chuck employing thermoelectric cooling |
| 08/03/1999 | US5933314 Method and an apparatus for offsetting plasma bias voltage in bi-polar electro-static chucks |
| 07/28/1999 | CN1224544A Electrostatic chucks |
| 07/13/1999 | US5923521 For retaining a workpiece |
| 06/30/1999 | EP0926708A2 Method and apparatus for processing semiconductor wafers |
| 06/29/1999 | US5917327 To apply an electrostatic force to hold a semiconductor wafer during process |
| 06/29/1999 | US5916689 Electrostatic chuck with an impregnated, porous layer that exhibits the Johnson-Rahbeck effect |
| 06/23/1999 | EP0700593B1 Releasing a workpiece from an electrostatic chuck |
| 06/22/1999 | US5914568 For processing a target substrate |
| 06/10/1999 | WO1999029030A1 Improved ceramic electrostatic chuck and method of fabricating same |
| 06/10/1999 | WO1999029001A2 Electrostatic chuck capable of rapidly dechucking a substrate |
| 06/10/1999 | WO1999028950A2 Electrostatic chuck employing thermoelectric cooling |
| 06/09/1999 | EP0920973A2 Apparatus for pinning a film, leaving a film die, onto a turning haul off drum |
| 06/01/1999 | US5909355 Ceramic electrostatic chuck and method of fabricating same |
| 06/01/1999 | US5909354 Electrostatic chuck member having an alumina-titania spray coated layer and a method of producing the same |
| 06/01/1999 | US5908334 Electrical connector for power transmission in an electrostatic chuck |
| 05/20/1999 | WO1999025063A1 Electrostatic chuck |
| 05/18/1999 | US5905626 Electrostatic chuck with ceramic pole protection |
| 05/18/1999 | US5905566 Laser ablation top surface reference chuck |
| 05/18/1999 | US5904779 Wafer electrical discharge control by wafer lifter system |
| 05/12/1999 | DE19749320A1 Equipment laying film extruded by wide slot nozzle onto rotating roller |
| 05/04/1999 | US5901030 Electrostatic chuck employing thermoelectric cooling |
| 05/04/1999 | US5900062 Lift pin for dechucking substrates |
| 04/20/1999 | US5896148 Ink jet recording apparatus with control electrode on recording heads preventing adhesion of satellite droplets |
| 04/14/1999 | EP0907964A1 Methods and apparatuses for clamping and declamping a semiconductor wafer in a wafer processing system |
| 04/13/1999 | US5894400 Method and apparatus for clamping a substrate |
| 03/23/1999 | US5886866 Electrostatic chuck having a combination electrode structure for substrate chucking, heating and biasing |
| 03/23/1999 | US5886865 Method and apparatus for predicting failure of an eletrostatic chuck |
| 03/23/1999 | US5886864 Substrate support member for uniform heating of a substrate |
| 03/23/1999 | US5886863 Wafer support member |
| 03/23/1999 | US5885469 Topographical structure of an electrostatic chuck and method of fabricating same |
| 03/16/1999 | US5883778 Electrostatic chuck with fluid flow regulator |
| 03/10/1999 | EP0900475A1 Electrostatic chuck |
| 03/09/1999 | US5880924 Electrostatic chuck capable of rapidly dechucking a substrate |
| 02/23/1999 | US5874361 Method of processing a wafer within a reaction chamber |
| 02/16/1999 | US5872694 Method and apparatus for determining wafer warpage for optimized electrostatic chuck clamping voltage |
| 02/10/1999 | EP0896362A1 Semiconductor supporting device |
| 02/09/1999 | US5870271 For forming a seal around a chuck |
| 02/02/1999 | US5867359 For attachment to a wafer transfer mechanism |
| 01/26/1999 | US5864459 Process for providing a glass dielectric layer on an electrically conductive substrate and electrostatic chucks made by the process |
| 01/13/1999 | EP0890189A1 Dynamic feedback electrostatic wafer chuck |
| 01/12/1999 | US5858099 Used in chemical or pharmeceutical assaying or manufacturing |
| 01/07/1999 | WO1999000889A1 A method and an apparatus for offsetting plasma bias voltage in bipolar electrostatic chucks |
| 01/05/1999 | US5856906 Apparatus for retaining a workpiece |
| 12/30/1998 | EP0887853A2 Electrostatic chucks for holding substrates in process chambers |
| 12/30/1998 | CN1203443A Method and apparatus of removing sample adsorbed by static electricity from sample stage |
| 12/23/1998 | EP0886298A2 Method and apparatus of removing a sample adsorbed by static electricity from the sample stage |
| 12/23/1998 | CN1202867A Device for conveying sheets in a printing machine |
| 12/17/1998 | WO1998057418A1 Cover layer for a substrate support chuck and method of fabricating same |
| 12/17/1998 | WO1998057359A1 Method and apparatus for wafer detection |
| 12/10/1998 | WO1998056102A1 Electrostatic support assembly having an integral ion focus ring |
| 12/08/1998 | US5847813 Mask holder for microlithography exposure |
| 12/08/1998 | US5846595 Method of making pharmaceutical using electrostatic chuck |
| 12/03/1998 | WO1998054829A1 Method and apparatus for clamping a substrate |
| 12/02/1998 | EP0880818A1 Low voltage electrostatic clamp for substrates such as dielectric substrates |
| 12/02/1998 | EP0839404A4 Electrostatic chuck assembly |
| 11/24/1998 | US5841624 For covering a support surface of a workpiece support chuck |
| 11/24/1998 | US5841623 Chuck for substrate processing and method for depositing a film in a radio frequency biased plasma chemical depositing system |
| 11/17/1998 | US5838529 Low voltage electrostatic clamp for substrates such as dielectric substrates |
| 11/17/1998 | US5838528 For retaining a wafer in a processing chamber |
| 11/11/1998 | EP0876608A1 Process and device for generating resonance phenomena in particle suspensions |
| 11/10/1998 | US5835335 Unbalanced bipolar electrostatic chuck power supplies and methods thereof |
| 11/10/1998 | US5835333 Negative offset bipolar electrostatic chucks |
| 10/13/1998 | US5822171 For holding a substrate on a base |
| 10/13/1998 | US5822170 Hydrophobic coating for reducing humidity effect in electrostatic actuators |
| 10/06/1998 | US5818682 Method and apparatus for optimizing a dechucking period used to dechuck a workpiece from an electrostatic chuck |
| 10/01/1998 | WO1998043291A1 Unbalanced bipolar electrostatic chuck power supplies and methods therefor |
| 09/30/1998 | EP0867933A2 Electrostatic chuck having a unidirectionally conducting coupler layer |
| 09/23/1998 | CN1194066A Electrostatic chuck assembly |
| 09/22/1998 | US5812362 Method and apparatus for the use of diamond films as dielectric coatings on electrostatic chucks |
| 09/22/1998 | US5812361 Dynamic feedback electrostatic wafer chuck |
| 09/16/1998 | EP0865151A2 Electrostatic actuator |
| 09/09/1998 | EP0863545A2 Monocrystalline ceramic electrostatic chuck |
| 09/09/1998 | EP0863544A2 Substrate for use in wafer attracting apparatus and manufacturing method thereof |
| 09/01/1998 | US5801915 For holding a substrate in a process chamber |
| 09/01/1998 | US5800871 Electrostatic chuck with polymeric impregnation and method of making |
| 08/26/1998 | EP0860861A1 Actuated sealing ring for chucks |
| 08/25/1998 | US5798904 For a vacuum processing chamber |