| Patents for H02N 13 - Clutches or holding devices using electrostatic attraction, e.g. using johnson-rahbek effect (1,323) |
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| 12/17/2008 | CN101326627A Electrode sheet for electrostatic chuck, and electrostatic chuck |
| 12/17/2008 | CN100444349C Electrostatic chuck including a heater mechanism |
| 12/16/2008 | US7466531 Substrate holding system and exposure apparatus using the same |
| 12/11/2008 | WO2007100571A3 Johnsen-rahbek electrostatic chuck driven with ac voltage |
| 12/04/2008 | US20080297758 Lithographic support structure |
| 12/03/2008 | EP1998365A1 Electrostatic attraction apparatus for glass substrate and method for attracting and releasing such glass substrate |
| 12/03/2008 | EP1997135A1 Method and device for electrostatically fixing substrates having a conductive layer |
| 12/03/2008 | CN101317328A Micro-electromechanical device |
| 12/03/2008 | CN100440637C Feeding power connector and electro-static chuck device |
| 11/26/2008 | CN100437968C High temperature electrostatic chuck |
| 11/25/2008 | US7457097 Pressure assisted wafer holding apparatus and control method |
| 11/13/2008 | WO2008076320A3 Processing apparatus, coated article and associated method |
| 11/12/2008 | CN100433286C Electrostatic chuck for substrate stage, electrode used for same, and processing system having the chuck and electrode |
| 10/29/2008 | EP1986228A1 Electrostatic chuck |
| 10/16/2008 | WO2008123525A1 Fabry-perot type wavelength-variable filter and its manufacturing method |
| 10/02/2008 | WO2008118683A1 Electrostatic chuck with separated electrodes |
| 09/17/2008 | CN201118486Y Wheel hub electromotor brake energy-saving device |
| 08/26/2008 | US7416793 Dielectric ceramic layer of an alumina sintered body and an electrode formed on one surface; volume resistivity equal to or greater than 1x1017 Omega cm at room temperature |
| 08/21/2008 | WO2008099789A1 Electrostatic chuck |
| 08/20/2008 | EP1959488A1 Electrode sheet for electrostatic chuck, and electrostatic chuck |
| 08/20/2008 | CN101244801A Micro-drive structure for implementing coplane and off-plane movement |
| 08/19/2008 | US7414823 Holder for use in semiconductor or liquid-crystal manufacturing device and semiconductor or liquid-crystal manufacturing device in which the holder is installed |
| 08/13/2008 | EP1956706A1 Micro-electromechanical device |
| 08/12/2008 | US7411773 Having a laminated structure formed by sequentially laminating a first insulation layer, an electrode layer, and a second insulation layer on a metal substrate; attraction performance over a long period while ensuring the good durability and heat resistance |
| 08/06/2008 | EP1952436A1 Bipolar carrier wafer and mobile bipolar electrostatic wafer arrangement |
| 08/06/2008 | CN101238568A Electrostatic chuck for semiconductor workpieces |
| 07/31/2008 | WO2008051369A3 Low-cost electrostatic clamp with fast declamp time and the manufacture |
| 07/23/2008 | EP1947689A2 High temperature fine grain aluminium heater |
| 07/17/2008 | WO2008084822A1 Liquid device, liquid device manufacturing apparatus and method, and image display device |
| 07/17/2008 | WO2008084770A1 Electrostatic chuck |
| 07/16/2008 | EP1532728A4 Improved platen for electrostatic wafer clamping apparatus |
| 07/16/2008 | CN101223637A Apparatus for removing foreign material from substrate and method for removing foreign material from substrate |
| 07/08/2008 | US7397648 Electrostatic chuck including a heater mechanism |
| 07/08/2008 | US7397539 Transfer apparatus for transferring an object, lithographic apparatus employing such a transfer apparatus, and method of use thereof |
| 07/01/2008 | US7394640 Electrostatic chuck and substrate fixing method using the same |
| 06/26/2008 | WO2008075749A1 Exposure method and apparatus and substrate holding apparatus |
| 06/18/2008 | CN100395661C Sucker, photoetching projective apparatus, method for producing sucker and component producing method |
| 06/12/2008 | WO2008070201A2 Electroadhesion |
| 06/05/2008 | WO2008066103A1 Substrate processing apparatus |
| 05/29/2008 | WO2007135682B1 Apparatus for generating pressure and methods of manufacture thereof |
| 05/14/2008 | CN101180721A Electrostatic chuck |
| 05/13/2008 | US7372690 Substrate holder which is self-adjusting for substrate deformation |
| 05/13/2008 | US7372689 Guard wafer for semiconductor structure fabrication |
| 05/08/2008 | WO2008053934A1 Electrostatic chuck device |
| 05/07/2008 | EP1918982A2 Substrate supporting member |
| 05/06/2008 | US7369393 Electrostatic chucks having barrier layer |
| 04/23/2008 | CN101167174A Electrostatic chuck device |
| 04/17/2008 | US20080089002 Electroadhesion |
| 04/17/2008 | US20080089001 Detachable electrostatic chuck having sealing assembly |
| 04/09/2008 | EP1909308A1 Electrostatic chuck and electrode sheet for electrostatic chuck |
| 04/09/2008 | EP1908531A1 Apparatus for removing foreign material from substrate and method for removing foreign material from substrate |
| 04/03/2008 | WO2007135682A3 Apparatus for generating pressure and methods of manufacture thereof |
| 03/12/2008 | EP1898457A1 Substrate support with a protective layer for plasma resistance |
| 03/12/2008 | CN100375263C Electrostatic chuck and treating device |
| 02/28/2008 | WO2007135678B1 Direct digital speaker apparatus having a desired directivity pattern |
| 02/14/2008 | WO2008018341A1 Electrostatic chuck device |
| 02/12/2008 | US7330346 Etching apparatus, method for measuring self-bias voltage, and method for monitoring etching apparatus |
| 01/30/2008 | CN101116170A Encapsulated wafer processing device and process for making thereof |
| 01/30/2008 | CN100365795C Dipolar electrostatic chuck |
| 01/24/2008 | WO2008010436A1 Electrostatic actuator and method for manufacturing same |
| 01/24/2008 | WO2007135681B1 Arrays of current bearing elements useful for generating pressure waves |
| 01/24/2008 | WO2007135680B1 Apparatus and methods for generating pressure waves |
| 01/23/2008 | EP1191581B1 Method for Electrostatically Attracting and Processing a Glass Insulative Substrate |
| 01/17/2008 | WO2007135678A3 Direct digital speaker apparatus having a desired directivity pattern |
| 01/17/2008 | US20080014363 Electro-Static Chucking Mechanism and Surface Processing Apparatus |
| 01/15/2008 | CA2350653C Process for electrostatic stabilization and device for implementing the said process |
| 01/08/2008 | US7317606 Particle trap for electrostatic chuck |
| 01/01/2008 | US7315106 Actuator element and production method therefor |
| 12/26/2007 | CN101095277A Mechanical meta-materials |
| 12/25/2007 | US7312974 Electrostatic chuck |
| 11/29/2007 | WO2007135681A1 Arrays of current bearing elements useful for generating pressure waves |
| 11/29/2007 | WO2007135680A1 Apparatus and methods for generating pressure waves |
| 11/29/2007 | WO2007135678A2 Direct digital speaker apparatus having a desired directivity pattern |
| 11/07/2007 | EP1852907A1 Electrostatic chuck and processing apparatus |
| 11/06/2007 | US7292428 Electrostatic chuck with smart lift-pin mechanism for a plasma reactor |
| 11/06/2007 | US7292426 Substrate holding system and exposure apparatus using the same |
| 10/25/2007 | US20070247780 Substrate holding system and exposure apparatus using the same |
| 10/16/2007 | US7283346 Electrostatic chuck and its manufacturing method |
| 10/09/2007 | US7280341 Electrostatic chuck |
| 10/04/2007 | WO2007110191A1 Method and device for electrostatically fixing substrates having a conductive layer |
| 09/27/2007 | WO2007108192A1 Electrostatic attraction apparatus for glass substrate and method for attracting and releasing such glass substrate |
| 09/27/2007 | US20070223173 Bipolar Electrostatic Chuck |
| 09/13/2007 | WO2007102598A1 Electrostatic holding device |
| 09/07/2007 | WO2007100571A2 Johnsen-rahbek electrostatic chuck driven with ac voltage |
| 09/04/2007 | US7265962 Electrostatic chuck and production method therefor |
| 08/29/2007 | CN101026119A Etch resistant wafer processing apparatus and method for producing the same |
| 08/21/2007 | US7259955 Electrostatic holding device and electrostatic tweezers using the same |
| 08/16/2007 | WO2007091619A1 Electrostatic chuck |
| 08/08/2007 | EP1595284B1 Electrostatic bonding chuck with integrated radio frequency electrode and thermostatic means |
| 08/01/2007 | CN101010791A 静电卡盘 The electrostatic chuck |
| 07/17/2007 | US7245357 Lithographic apparatus and device manufacturing method |
| 07/11/2007 | CN1325981C Working platform structure of binding machine and its control method |
| 06/27/2007 | EP1801961A2 Electrostatic chuck |
| 06/27/2007 | EP1244821A4 Articles coated with aluminum nitride by chemical vapor deposition |
| 06/14/2007 | WO2007066572A1 Electrode sheet for electrostatic chuck, and electrostatic chuck |
| 06/14/2007 | WO2005089176A3 Mechanical meta-materials |
| 05/31/2007 | WO2007060838A1 Micro-electromechanical device |
| 05/31/2007 | WO2007059887A1 Bipolar carrier wafer and mobile bipolar electrostatic wafer arrangement |
| 05/30/2007 | CN1319144C Electrode piece for electrostatic chuck, electrostatic chuck device and its adsorpting method |
| 05/22/2007 | US7220319 Electrostatic chucking stage and substrate processing apparatus |