| Patents for H02N 13 - Clutches or holding devices using electrostatic attraction, e.g. using johnson-rahbek effect (1,323) |
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| 06/17/2010 | US20100149720 Bipolar electrostatic chuck |
| 06/10/2010 | US20100144147 Sample holding tool, sample suction device using the same and sample processing method using the same |
| 06/09/2010 | CN101326627B Electrode sheet for electrostatic chuck, and electrostatic chuck |
| 06/08/2010 | US7733625 Substrate holding system and exposure apparatus using the same |
| 05/25/2010 | US7724493 Electrostatic chuck device |
| 05/14/2010 | WO2010019430A3 Electrostatic chuck assembly |
| 05/05/2010 | CN101116170B Encapsulated wafer processing device and process for making thereof |
| 04/29/2010 | WO2010047311A1 Method for inspecting electrostatic chuck, and electrostatic chuck apparatus |
| 04/22/2010 | WO2010044398A1 Electrostatic chuck, and method for manufacturing the chuck |
| 04/21/2010 | CN101379607B 静电卡盘 The electrostatic chuck |
| 04/15/2010 | WO2010041409A1 Substrate managing method |
| 04/01/2010 | WO2010035689A1 Electrostatic chuck |
| 03/31/2010 | CN101688295A Electrostatic chuck with separated electrodes |
| 03/25/2010 | WO2010032703A1 Electrostatic chuck |
| 03/25/2010 | WO2010032676A1 Two-sided fixing structure, exhibiting or indicating apparatus using same, dust collecting apparatus, and plant growing apparatus |
| 03/11/2010 | WO2010026893A1 Electrostatic chuck device and method for determining adsorbed state of wafer |
| 03/04/2010 | WO2010024354A1 Electrostatic chuck and method for producing same |
| 03/04/2010 | WO2010024146A1 Electrostatic chuck and vacuum processing apparatus |
| 03/02/2010 | US7672111 Electrostatic chuck and method for manufacturing same |
| 02/25/2010 | WO2010021317A1 Method for determining service limit of electrostatic chuck |
| 02/25/2010 | US20100046134 Electrostatic chuck device |
| 02/18/2010 | WO2010019430A2 Electrostatic chuck assembly |
| 02/09/2010 | US7660098 Substrate holding system and exposure apparatus using the same |
| 01/28/2010 | US20100020463 High temperature electrostatic chuck and method of using |
| 01/19/2010 | US7649729 Electrostatic chuck assembly |
| 01/14/2010 | WO2010004915A1 Bipolar electrostatic chuck |
| 12/15/2009 | US7633738 Electrostatic chuck and manufacturing method thereof |
| 11/26/2009 | WO2009142710A1 Electrostatic chuck |
| 11/25/2009 | CN100562983C Electrostatic chuck |
| 11/24/2009 | US7623334 Electrostatic chuck device |
| 11/11/2009 | CN101578545A Liquid device, liquid device manufacturing apparatus and method, and image display device |
| 11/11/2009 | CN100558627C Micro-drive structure for implementing coplane and off-plane movement |
| 11/10/2009 | US7615133 Electrostatic chuck module and cooling system |
| 11/05/2009 | WO2009134345A2 Gas bearing eletrostatic chuck |
| 11/05/2009 | US20090273879 Electrostatic Attraction Apparatus for Glass Substrate and Method of Attracting and Releasing the Same |
| 11/05/2009 | US20090273878 Gas bearing electrostatic chuck |
| 10/14/2009 | CN101558660A Apparatus and methods for generating pressure waves |
| 10/01/2009 | WO2009078949A3 Method for using an rc circuit to model trapped charge in an electrostatic chuck |
| 10/01/2009 | US20090243236 Electrostatic chuck and manufacturing method thereof |
| 09/17/2009 | WO2009113481A1 Plasma treatment apparatus, and method for controlling substrate attraction force in plasma treatment apparatus |
| 09/17/2009 | WO2009085991A3 Electrostatic chuck and method of forming it |
| 08/06/2009 | WO2009096459A1 Resin composition, and method for temporarily fixing workpiece |
| 08/05/2009 | CN101501834A Electrostatic chuck device |
| 08/05/2009 | CN100524685C High-performance electrostatic clamp comprising a resistive layer, micro-grooves, and dielectric layer |
| 08/05/2009 | CN100524682C Method for moving chip and electrostatic sucking disc device |
| 07/30/2009 | WO2009066290A3 Digital speaker apparatus |
| 07/28/2009 | US7567423 Pressure assisted wafer holding apparatus and control method |
| 07/28/2009 | US7567421 Bipolar electrostatic chuck |
| 07/22/2009 | CN100517074C Chuck system, lithographic apparatus using the same and device manufacturing method |
| 07/21/2009 | US7564672 Transfer-ESC based on a wafer |
| 07/09/2009 | WO2009085991A2 Electrostatic chuck and method of forming it |
| 07/01/2009 | CN100508355C Improved platen for electrostatic wafer clamping apparatus |
| 06/25/2009 | WO2009078949A2 Method for using an rc circuit to model trapped charge in an electrostatic chuck |
| 06/17/2009 | EP2071610A2 Corrosion-resistant multilayer ceramic member |
| 06/11/2009 | US20090147434 Using multiple coulomb islands to reduce voltage stress |
| 06/11/2009 | US20090147432 Forming large planar structures from substrates using edge coulomb forces |
| 06/11/2009 | US20090147431 Assembling stacked substrates that can form cylindrical inductors and adjustable transformers |
| 06/03/2009 | EP2066015A2 Microstructure with enlarged mass and electrode area for kinetic to electrical energy conversion |
| 05/28/2009 | WO2009066290A2 Digital speaker apparatus |
| 05/27/2009 | CN101443900A Johnsen-rahbek electrostatic chuck driven with ac voltage |
| 05/27/2009 | CN100492174C Supporting structure used for photoetching equipment |
| 05/27/2009 | CN100492172C Chuck, photoetching apparatus and components producing method |
| 05/14/2009 | WO2009060906A1 Microactuator, optical device, display, exposure apparatus and device manufacturing method |
| 05/14/2009 | US20090122459 Electrostatic chuck device |
| 05/13/2009 | CN100487576C Transferring equipment used for transferring matter and its use method and photoetching projection equipment containing said transferring equipment |
| 04/23/2009 | WO2009051079A1 Electrostatic reinforcing apparatus |
| 04/23/2009 | US20090103232 Substrate Holding System and Exposure Apparatus Using the Same |
| 04/22/2009 | CN100481369C Electrostatic chuck device |
| 04/16/2009 | US20090097185 Time-based wafer de-chucking from an electrostatic chuck having separate RF bias and DC chucking electrodes |
| 04/14/2009 | US7516714 Immobilizing device |
| 04/08/2009 | EP2045834A2 Heating apparatus |
| 04/02/2009 | US20090086401 Electrostatic chuck apparatus |
| 04/02/2009 | US20090086400 Electrostatic chuck apparatus |
| 04/02/2009 | DE4216218B4 Verfahren und Vorrichtung zum elektrostatischen Halten eines Körpers mittels einer elektrostatischen Haltevorrichtung Method and apparatus for electrostatically retaining a body by means of an electrostatic chuck |
| 04/01/2009 | CN101401292A Electrostatic holding device vacuum environment device using the device and connection device |
| 04/01/2009 | CN101401198A Electrostatic attraction apparatus for glass substrate and method for attracting and releasing such glass substrate |
| 03/31/2009 | US7511936 Method and apparatus for dynamic plasma treatment of bipolar ESC system |
| 03/19/2009 | WO2009035002A1 Electrostatic chuck |
| 03/18/2009 | CN100470756C Electrostatic chuck |
| 03/18/2009 | CN100470755C Bipolar electrostatic chuck |
| 03/12/2009 | WO2009031566A1 Method for manufacturing gas supply structure in electrostatic chuck apparatus, gas supply structure in electrostatic chuck apparatus, and electrostatic chuck apparatus |
| 03/11/2009 | EP1452239B1 Immobilizing device |
| 03/05/2009 | US20090059462 Electrostatic chuck device |
| 03/05/2009 | US20090056112 Electrostatic chuck member, method of manufacturing the same, and electrostatic chuck device |
| 03/04/2009 | CN101379607A Electrostatic chuck |
| 03/04/2009 | CN101378030A Electrostatic chuck |
| 02/18/2009 | EP2025196A1 Apparatus and methods for generating pressure waves |
| 02/12/2009 | WO2009005921A3 Polyceramic e-chuck |
| 02/10/2009 | US7489494 Guard wafer for semiconductor structure fabrication |
| 02/05/2009 | WO2009017088A1 Method of manufacturing electrostatic chuck mechanism |
| 02/05/2009 | US20090034150 Substrate holding system and exposure apparatus using the same |
| 02/05/2009 | US20090034148 Method of making an electrostatic chuck with reduced plasma penetration and arcing |
| 02/04/2009 | CN100459093C Method and system adsorbing semiconductor wafers to an electrostatic chuck |
| 02/03/2009 | US7486384 Lithographic support structure |
| 01/08/2009 | WO2009005921A2 Polyceramic e-chuck |
| 01/08/2009 | US20090009924 Nanoscale grasping device, method for fabricating the same, and method for operating the same |
| 01/01/2009 | US20090002913 Polyceramic e-chuck |
| 12/31/2008 | CN101335227A Polyceramic e-chuck |
| 12/23/2008 | US7468880 Electrostatic chuck |
| 12/18/2008 | US20080308230 Plasma processing apparatus |