Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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02/16/1988 | US4725722 Automatic focusing method and apparatus utilizing contrasts of projected pattern |
02/16/1988 | US4725566 Self-insulated; small distance separation |
02/16/1988 | US4725565 Mixing gallium arsenide powder with donor and heating in tube furnace |
02/16/1988 | US4725564 Method of manufacturing a semiconductor device, in which a dopant is diffused from its oxide into a semiconductor body |
02/16/1988 | US4725562 Without short circuiting |
02/16/1988 | US4725561 Process for the production of mutually electrically insulated monocrystalline silicon islands using laser recrystallization |
02/16/1988 | US4725560 Silicon oxynitride storage node dielectric |
02/16/1988 | US4725333 Metal-glass laminate and process for producing same |
02/16/1988 | US4725112 Buried undercut mesa-like waveguide |
02/16/1988 | US4724963 Wafer processing cassette |
02/16/1988 | US4724874 For use with processing equipment |
02/16/1988 | US4724621 Wafer processing chuck using slanted clamping pins |
02/16/1988 | US4724619 Single wafer centrifugal dryer |
02/16/1988 | US4724611 Method for producing semiconductor module |
02/16/1988 | EP0231207A4 Contrast enhancement layer. |
02/16/1988 | CA1232981A1 Apparatus for imaging a mask pattern on a substrate |
02/16/1988 | CA1232980A1 Sputtering apparatus and method |
02/16/1988 | CA1232979A1 Method for fabricating semiconductor devices |
02/16/1988 | CA1232978A1 Process for minimizing distortion in multilayer ceramic substrates |
02/16/1988 | CA1232977A1 Semiconductor device comprising insulated gate field effect transistors |
02/16/1988 | CA1232976A1 Field effect transistor with elongated ohmic contacts |
02/16/1988 | CA1232975A1 Noncontact full-line dynamic ac tester for integrated circuits |
02/16/1988 | CA1232972A1 Equal density distribution process |
02/16/1988 | CA1232953A1 Circuit for generating a substrate bias |
02/11/1988 | WO1988001102A1 Semiconductor devices having improved metallization |
02/11/1988 | WO1988001101A1 Process for the production of bipolar devices |
02/11/1988 | WO1988001100A1 Fabrication technique of a semiconductor structure |
02/11/1988 | WO1988001060A1 Integrated circuits and method of testing same |
02/11/1988 | WO1988000985A1 Process for photochemical vapor deposition of oxide layers at enhanced deposition rates |
02/10/1988 | EP0255718A2 Use of amphiphilic amide compounds in Z-type Langmuir-Blodgett films |
02/10/1988 | EP0255589A2 A wireable circuit cell for a vlsi circuit |
02/10/1988 | EP0255585A2 Schottky diode and ohmic contact metallurgy |
02/09/1988 | US4724531 Gate array with bidirectional symmetry |
02/09/1988 | US4724530 Five transistor CMOS memory cell including diodes |
02/09/1988 | US4724517 Microcomputer with prefixing functions |
02/09/1988 | US4724510 Electrostatic wafer clamp |
02/09/1988 | US4724475 Semiconductor device |
02/09/1988 | US4724328 Lithographic apparatus for the production of microstructures |
02/09/1988 | US4724325 Adhesion cooling for an ion implantation system |
02/09/1988 | US4724322 Method for non-contact xyz position sensing |
02/09/1988 | US4724300 Temperature control in vacuum |
02/09/1988 | US4724223 Method of making electrical contacts |
02/09/1988 | US4724222 Holding semiconductor piece to be lithographically patterened |
02/09/1988 | US4724221 Diffusion of impuritites perpendicular to surface of epitaxial layer |
02/09/1988 | US4724220 Masking, photon bombardment |
02/09/1988 | US4724219 Radiation melting of semiconductor surface areas through a remote mask |
02/09/1988 | US4724218 Method of forming a semiconductor device having several gate levels |
02/09/1988 | US4724171 Process for protecting polished silicon surfaces |
02/09/1988 | US4724106 Process for forming organic film |
02/09/1988 | US4724030 Adhesive aided transfer of chips |
02/09/1988 | US4724021 Applying and firing two different layers of dispersed dielectric solid and glass particles |
02/09/1988 | US4723978 Forming organoglass by treating silsesquiokane ladder polymer with oxygen plasma |
02/09/1988 | US4723799 Wafer carrier transport system interface |
02/09/1988 | US4723508 Plasma CVD apparatus |
02/09/1988 | US4723507 Isolation passageway including annular region |
02/09/1988 | US4723363 Injection of organic halosilane |
02/09/1988 | CA1232568A1 Process for fabricating an optical device |
02/09/1988 | CA1232497A1 Stripped gold plating process |
02/05/1988 | EP0174950A4 Wafer scale package system and header and method of manufacture thereof. |
02/04/1988 | DE3625873A1 solder glass, and process for the production of a solder connection between silicon substrates |
02/03/1988 | EP0255489A2 Nonvolatile, semiconductor memory device |
02/03/1988 | EP0255454A2 Apparatus for chemical vapor deposition |
02/03/1988 | EP0255416A1 Double channel heterojunction semiconductor device, its use in a field effect transistor, and its use in a negative transductance device |
02/03/1988 | EP0255344A1 Production technique of a semiconductor structure |
02/03/1988 | EP0255298A2 Means and methods for heating semiconductor ribbons and wafers with microwaves |
02/03/1988 | EP0255247A2 Hot chuck assembly for integrated circuit wafers |
02/03/1988 | EP0255167A2 Method of removing undesired particles from a surface of a substrate |
02/03/1988 | EP0255159A2 Process for making structures including E2PROM nonvolatile memory cells with self-aligned layers of silicon and associated transistors |
02/03/1988 | EP0255125A2 Integrated circuit having two circuit blocks therein independently energized through different power supply terminals |
02/03/1988 | EP0255037A2 A method for forming polyimide film by chemical vapor deposition |
02/03/1988 | EP0255023A1 Zirconia toughening of glass-ceramic materials |
02/03/1988 | EP0254980A1 Integrated sense amplifier circuit |
02/03/1988 | EP0254973A1 Method for making twin tub integrated devices, in particular twin tub CMOS devices |
02/03/1988 | EP0254919A2 A conveyor system including a buffer store |
02/03/1988 | EP0254871A2 Reverse dark field alignment system for scanning lithographic aligner |
02/03/1988 | EP0254853A2 Lithographic method employing thermally stable photoresists with high sensitivity forming a hydogen-bonded network |
02/03/1988 | EP0160701B1 Lpe growth on group iii-v compound semiconductor substrates containing phosphorus |
02/03/1988 | EP0083716B1 Process for forming iii-v semiconductor mesfet devices, having self-aligned raised source and drain regions |
02/03/1988 | CN87103187A Semiconductor light-controlled variable capacitor |
02/03/1988 | CN85104935B Semiconductor integrated circuit and a method for designing circuit pattern thereof |
02/02/1988 | USH422 Apparatus for inverting articles and method for using same |
02/02/1988 | US4723197 Semiconductors; lateral interconnects |
02/02/1988 | US4723194 Structure of capacitor circuit |
02/02/1988 | US4723156 EPROM device and a manufacturing method thereof |
02/02/1988 | US4723086 Coarse and fine motion positioning mechanism |
02/02/1988 | US4723082 Signal transfer circuit for use in laminated multilayer electric circuit |
02/02/1988 | US4723062 Hydrogen containing silicon nitride film over area to be cut with a laser beam |
02/02/1988 | US4722913 Doped semiconductor vias to contacts |
02/02/1988 | US4722912 Method of forming a semiconductor structure |
02/02/1988 | US4722911 Vapor phase epitaxy using complex premixing system |
02/02/1988 | US4722910 Partially self-aligned metal contact process |
02/02/1988 | US4722909 Integrated circuits; gates of different conductivity on the same substrate |
02/02/1988 | US4722908 Fabrication of a bipolar transistor with a polysilicon ribbon |
02/02/1988 | US4722883 Process for producing fine patterns |
02/02/1988 | US4722882 Dry etching using etch resistant photoresist |
02/02/1988 | US4722878 Photomask material |
02/02/1988 | US4722856 Continuous transportation and compression by surface fluid flow |
02/02/1988 | US4722752 Apparatus and method for rinsing and drying silicon wafers |
02/02/1988 | US4722659 Semiconductor wafer carrier transport apparatus |
02/02/1988 | US4722441 Package structure for semiconductors |