| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) | 
|---|
| 02/16/1988 | US4725722 Automatic focusing method and apparatus utilizing contrasts of projected pattern  | 
| 02/16/1988 | US4725566 Self-insulated; small distance separation  | 
| 02/16/1988 | US4725565 Mixing gallium arsenide powder with donor and heating in tube furnace  | 
| 02/16/1988 | US4725564 Method of manufacturing a semiconductor device, in which a dopant is diffused from its oxide into a semiconductor body  | 
| 02/16/1988 | US4725562 Without short circuiting  | 
| 02/16/1988 | US4725561 Process for the production of mutually electrically insulated monocrystalline silicon islands using laser recrystallization  | 
| 02/16/1988 | US4725560 Silicon oxynitride storage node dielectric  | 
| 02/16/1988 | US4725333 Metal-glass laminate and process for producing same  | 
| 02/16/1988 | US4725112 Buried undercut mesa-like waveguide  | 
| 02/16/1988 | US4724963 Wafer processing cassette  | 
| 02/16/1988 | US4724874 For use with processing equipment  | 
| 02/16/1988 | US4724621 Wafer processing chuck using slanted clamping pins  | 
| 02/16/1988 | US4724619 Single wafer centrifugal dryer  | 
| 02/16/1988 | US4724611 Method for producing semiconductor module  | 
| 02/16/1988 | EP0231207A4 Contrast enhancement layer.  | 
| 02/16/1988 | CA1232981A1 Apparatus for imaging a mask pattern on a substrate  | 
| 02/16/1988 | CA1232980A1 Sputtering apparatus and method  | 
| 02/16/1988 | CA1232979A1 Method for fabricating semiconductor devices  | 
| 02/16/1988 | CA1232978A1 Process for minimizing distortion in multilayer ceramic substrates  | 
| 02/16/1988 | CA1232977A1 Semiconductor device comprising insulated gate field effect transistors  | 
| 02/16/1988 | CA1232976A1 Field effect transistor with elongated ohmic contacts  | 
| 02/16/1988 | CA1232975A1 Noncontact full-line dynamic ac tester for integrated circuits  | 
| 02/16/1988 | CA1232972A1 Equal density distribution process  | 
| 02/16/1988 | CA1232953A1 Circuit for generating a substrate bias  | 
| 02/11/1988 | WO1988001102A1 Semiconductor devices having improved metallization  | 
| 02/11/1988 | WO1988001101A1 Process for the production of bipolar devices  | 
| 02/11/1988 | WO1988001100A1 Fabrication technique of a semiconductor structure  | 
| 02/11/1988 | WO1988001060A1 Integrated circuits and method of testing same  | 
| 02/11/1988 | WO1988000985A1 Process for photochemical vapor deposition of oxide layers at enhanced deposition rates  | 
| 02/10/1988 | EP0255718A2 Use of amphiphilic amide compounds in Z-type Langmuir-Blodgett films  | 
| 02/10/1988 | EP0255589A2 A wireable circuit cell for a vlsi circuit  | 
| 02/10/1988 | EP0255585A2 Schottky diode and ohmic contact metallurgy  | 
| 02/09/1988 | US4724531 Gate array with bidirectional symmetry  | 
| 02/09/1988 | US4724530 Five transistor CMOS memory cell including diodes  | 
| 02/09/1988 | US4724517 Microcomputer with prefixing functions  | 
| 02/09/1988 | US4724510 Electrostatic wafer clamp  | 
| 02/09/1988 | US4724475 Semiconductor device  | 
| 02/09/1988 | US4724328 Lithographic apparatus for the production of microstructures  | 
| 02/09/1988 | US4724325 Adhesion cooling for an ion implantation system  | 
| 02/09/1988 | US4724322 Method for non-contact xyz position sensing  | 
| 02/09/1988 | US4724300 Temperature control in vacuum  | 
| 02/09/1988 | US4724223 Method of making electrical contacts  | 
| 02/09/1988 | US4724222 Holding semiconductor piece to be lithographically patterened  | 
| 02/09/1988 | US4724221 Diffusion of impuritites perpendicular to surface of epitaxial layer  | 
| 02/09/1988 | US4724220 Masking, photon bombardment  | 
| 02/09/1988 | US4724219 Radiation melting of semiconductor surface areas through a remote mask  | 
| 02/09/1988 | US4724218 Method of forming a semiconductor device having several gate levels  | 
| 02/09/1988 | US4724171 Process for protecting polished silicon surfaces  | 
| 02/09/1988 | US4724106 Process for forming organic film  | 
| 02/09/1988 | US4724030 Adhesive aided transfer of chips  | 
| 02/09/1988 | US4724021 Applying and firing two different layers of dispersed dielectric solid and glass particles  | 
| 02/09/1988 | US4723978 Forming organoglass by treating silsesquiokane ladder polymer with oxygen plasma  | 
| 02/09/1988 | US4723799 Wafer carrier transport system interface  | 
| 02/09/1988 | US4723508 Plasma CVD apparatus  | 
| 02/09/1988 | US4723507 Isolation passageway including annular region  | 
| 02/09/1988 | US4723363 Injection of organic halosilane  | 
| 02/09/1988 | CA1232568A1 Process for fabricating an optical device  | 
| 02/09/1988 | CA1232497A1 Stripped gold plating process  | 
| 02/05/1988 | EP0174950A4 Wafer scale package system and header and method of manufacture thereof.  | 
| 02/04/1988 | DE3625873A1 solder glass, and process for the production of a solder connection between silicon substrates  | 
| 02/03/1988 | EP0255489A2 Nonvolatile, semiconductor memory device  | 
| 02/03/1988 | EP0255454A2 Apparatus for chemical vapor deposition  | 
| 02/03/1988 | EP0255416A1 Double channel heterojunction semiconductor device, its use in a field effect transistor, and its use in a negative transductance device  | 
| 02/03/1988 | EP0255344A1 Production technique of a semiconductor structure  | 
| 02/03/1988 | EP0255298A2 Means and methods for heating semiconductor ribbons and wafers with microwaves  | 
| 02/03/1988 | EP0255247A2 Hot chuck assembly for integrated circuit wafers  | 
| 02/03/1988 | EP0255167A2 Method of removing undesired particles from a surface of a substrate  | 
| 02/03/1988 | EP0255159A2 Process for making structures including E2PROM nonvolatile memory cells with self-aligned layers of silicon and associated transistors  | 
| 02/03/1988 | EP0255125A2 Integrated circuit having two circuit blocks therein independently energized through different power supply terminals  | 
| 02/03/1988 | EP0255037A2 A method for forming polyimide film by chemical vapor deposition  | 
| 02/03/1988 | EP0255023A1 Zirconia toughening of glass-ceramic materials  | 
| 02/03/1988 | EP0254980A1 Integrated sense amplifier circuit  | 
| 02/03/1988 | EP0254973A1 Method for making twin tub integrated devices, in particular twin tub CMOS devices  | 
| 02/03/1988 | EP0254919A2 A conveyor system including a buffer store  | 
| 02/03/1988 | EP0254871A2 Reverse dark field alignment system for scanning lithographic aligner  | 
| 02/03/1988 | EP0254853A2 Lithographic method employing thermally stable photoresists with high sensitivity forming a hydogen-bonded network  | 
| 02/03/1988 | EP0160701B1 Lpe growth on group iii-v compound semiconductor substrates containing phosphorus  | 
| 02/03/1988 | EP0083716B1 Process for forming iii-v semiconductor mesfet devices, having self-aligned raised source and drain regions  | 
| 02/03/1988 | CN87103187A Semiconductor light-controlled variable capacitor  | 
| 02/03/1988 | CN85104935B Semiconductor integrated circuit and a method for designing circuit pattern thereof  | 
| 02/02/1988 | USH422 Apparatus for inverting articles and method for using same  | 
| 02/02/1988 | US4723197 Semiconductors; lateral interconnects  | 
| 02/02/1988 | US4723194 Structure of capacitor circuit  | 
| 02/02/1988 | US4723156 EPROM device and a manufacturing method thereof  | 
| 02/02/1988 | US4723086 Coarse and fine motion positioning mechanism  | 
| 02/02/1988 | US4723082 Signal transfer circuit for use in laminated multilayer electric circuit  | 
| 02/02/1988 | US4723062 Hydrogen containing silicon nitride film over area to be cut with a laser beam  | 
| 02/02/1988 | US4722913 Doped semiconductor vias to contacts  | 
| 02/02/1988 | US4722912 Method of forming a semiconductor structure  | 
| 02/02/1988 | US4722911 Vapor phase epitaxy using complex premixing system  | 
| 02/02/1988 | US4722910 Partially self-aligned metal contact process  | 
| 02/02/1988 | US4722909 Integrated circuits; gates of different conductivity on the same substrate  | 
| 02/02/1988 | US4722908 Fabrication of a bipolar transistor with a polysilicon ribbon  | 
| 02/02/1988 | US4722883 Process for producing fine patterns  | 
| 02/02/1988 | US4722882 Dry etching using etch resistant photoresist  | 
| 02/02/1988 | US4722878 Photomask material  | 
| 02/02/1988 | US4722856 Continuous transportation and compression by surface fluid flow  | 
| 02/02/1988 | US4722752 Apparatus and method for rinsing and drying silicon wafers  | 
| 02/02/1988 | US4722659 Semiconductor wafer carrier transport apparatus  | 
| 02/02/1988 | US4722441 Package structure for semiconductors  |