Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/1994
09/28/1994CN1092907A Semiconductor device
09/28/1994CN1092906A Nested transistor electrodes and its making technology
09/28/1994CN1026041C Semiconductor device having polysilicon thin-film
09/27/1994US5351255 Inverted integrated heterostructure of group II-VI semiconductor materials including epitaxial ohmic contact and method of fabricating same
09/27/1994US5351213 Integrated semiconductor memory device utilizing a test circuit
09/27/1994US5351211 Semiconductor integrated circuit device having circuit inspection function
09/27/1994US5351163 High Q monolithic MIM capacitor
09/27/1994US5351011 Low noise, low distortion MOS amplifier circuit
09/27/1994US5350948 Semiconductor device
09/27/1994US5350947 Film carrier semiconductor device
09/27/1994US5350944 Insulator films on diamonds
09/27/1994US5350942 Low resistance silicided substrate contact
09/27/1994US5350941 Trench isolation structure having a trench formed in a LOCOS structure and a channel stop region on the sidewalls of the trench
09/27/1994US5350939 Semiconductor device and method of manufacturing thereof
09/27/1994US5350938 Nonvolatile semiconductor memory circuit with high speed read-out
09/27/1994US5350937 Non-volatile memory device having a floating gate
09/27/1994US5350936 Linear field effect transistor
09/27/1994US5350934 Conductivity modulation type insulated gate field effect transistor
09/27/1994US5350932 High voltage structures with oxide isolated source and resurf drift region in bulk silicon
09/27/1994US5350926 Compact high current broad beam ion implanter
09/27/1994US5350924 Ion-optical imaging system
09/27/1994US5350899 Semiconductor wafer temperature determination by optical measurement of wafer expansion in processing apparatus chamber
09/27/1994US5350715 Chip identification scheme
09/27/1994US5350712 Integrated circuits
09/27/1994US5350711 Method of fabricating high temperature refractory metal nitride contact and interconnect structure
09/27/1994US5350709 Diffusing silicon from silicon oxide film into gallium arsenide
09/27/1994US5350708 Method of making dynamic random access semiconductor memory device
09/27/1994US5350707 Method for making a capacitor having an electrode surface with a plurality of trenches formed therein
09/27/1994US5350706 Row and column pattern, avoids field oxide corner rounding, metal oxide semiconductor
09/27/1994US5350705 Ferroelectric memory cell arrangement having a split capacitor plate structure
09/27/1994US5350703 Method for fabrication mask ROM
09/27/1994US5350702 Method for fabricating a dual-gate metal-semiconductor field effect transistor
09/27/1994US5350700 Method of fabricating bipolar transistors with buried collector region
09/27/1994US5350699 Heat resistance, silicon carbide
09/27/1994US5350698 Multilayer polysilicon gate self-align process for VLSI CMOS device
09/27/1994US5350662 Maskless process for forming refractory metal layer in via holes of GaAs chips
09/27/1994US5350649 Microminiaturization optical masking and supports, exposure to light and focusing ion beams
09/27/1994US5350499 Method of producing microscopic structure
09/27/1994US5350492 Oxide removal method for improvement of subsequently grown oxides
09/27/1994US5350491 Oxide removal method for improvement of subsequently grown oxides for a twin-tub CMOS process
09/27/1994US5350488 Process for etching high copper content aluminum films
09/27/1994US5350487 Treatment with base, rinsing and recovering
09/27/1994US5350486 Semiconductor planarization process
09/27/1994US5350485 High-resolution lithography and semiconductor device manufacturing method
09/27/1994US5350484 Method for the anisotropic etching of metal films in the fabrication of interconnects
09/27/1994US5350480 Surface cleaning and conditioning using hot neutral gas beam array
09/27/1994US5350479 Electrostatic chuck for high power plasma processing
09/27/1994US5350461 Semiconductors
09/27/1994US5350460 High temperature phosphorus oxide diffusion source
09/27/1994US5350428 Electrostatic apparatus and method for removing particles from semiconductor wafers
09/27/1994US5350427 Wafer retaining platen having peripheral clamp and wafer lifting means
09/27/1994US5350336 Building and method for manufacture of integrated semiconductor circuit devices
09/27/1994US5350106 Semiconductor wire bonding method
09/27/1994US5349978 Cleaning device for cleaning planar workpiece
09/27/1994US5349762 Vacuum processing apparatus and operating method therefor
09/27/1994CA1332176C Electronic package comprising aluminum nitride and aluminum nitride-borosilicate glass composite
09/27/1994CA1332142C Implantation and electrical activation of dopants into monocrystalline silicon carbide
09/27/1994CA1332141C Iii-v semiconductor growth initiation on silicon
09/27/1994CA1332119C Resist compositions and use
09/23/1994CA2119547A1 Semiconductor device capacitor and method for manufacturing the same
09/22/1994DE4409374A1 Electron-beam lithography device with an electron-optics correction system
09/22/1994DE4409202A1 Thin-film transistor and method for its production
09/22/1994DE4409170A1 Method for producing silicon in the form of rods
09/22/1994DE4409018A1 Method and device for producing a semiconductor substrate and production method for a semiconductor device
09/22/1994DE4408791A1 Method for producing a silicon oxide semiconductor film
09/22/1994DE4408764A1 Semiconductor arrangement
09/22/1994DE4408758A1 Word-line structure in a semiconductor memory device
09/22/1994DE4406478A1 Moulding machine and moulding process
09/22/1994DE4404270A1 Semiconductor storage device which can write and erase information electrically and a method for the production of the same
09/22/1994DE4400840A1 Semiconductor device comprising a bipolar transistor and method of production of the same
09/22/1994DE4324853C1 Voltage-generating circuit
09/22/1994DE4308958A1 Method for producing bipolar transistors
09/21/1994EP0616430A2 Buffer circuit
09/21/1994EP0616378A2 Luminescent silicon
09/21/1994EP0616376A1 Wafer bonding of light emitting diode layers
09/21/1994EP0616372A2 Short channel trenched DMOS transistor
09/21/1994EP0616371A2 Silicon on insulator semiconductor device and its fabrication method
09/21/1994EP0616370A2 Semiconductor bipolar device including SiGe and method for manufacturing the same
09/21/1994EP0616369A1 MOS-type semiconductor device
09/21/1994EP0616368A2 Nonvolatile semiconductor memory that eases the dielectric strength requirements
09/21/1994EP0616364A1 Apparatus for and method of manufacturing semiconductor wafer
09/21/1994EP0616363A1 A method of forming a bump having a rugged side and a semiconductor device having the bump, and a method of mounting a semiconductor unit and a semiconductor device
09/21/1994EP0616362A2 Method for polishing work piece and apparatus therefor
09/21/1994EP0616361A1 Formation of silicided junctions in deep sub-micron MOSFETS by defect enhanced CoSi2 formation
09/21/1994EP0616360A2 Method and apparatus for cooling semiconductor wafers
09/21/1994EP0616335A2 Nonvolatile semiconductor memory device having a status register and test method for the same
09/21/1994EP0616334A1 Non-volatile semiconductor memory device having floating gate
09/21/1994EP0616333A1 Method of biasing a nonvolatile flash-EEPROM memory array
09/21/1994EP0616332A1 Nonvolatile flash-EEPROM memory array
09/21/1994EP0616331A2 Semiconductor memory device
09/21/1994EP0616258A1 Radiation sensitive composition and process for forming relief structures with improved contrast
09/21/1994EP0616241A2 A method of manufacturing a liquid crystal display device with excimer laser
09/21/1994EP0616223A1 A testing contactor for small-size semiconductor devices
09/21/1994EP0616053A1 Self accelerating and replenishing non-formaldehyde immersion coating method and composition
09/21/1994EP0615964A2 Aluminium nitride ceramics and method for preparing the same
09/21/1994EP0615824A1 Magnetic transfer device
09/21/1994EP0615790A1 System for supplying ultrapure water and method of washing substrate, and system for producing ultrapure water and method of producing ultrapure water
09/21/1994EP0588944A4 An improved miniature transponder device
09/21/1994EP0536227B1 Process for manufacturing pmos-transistors and pmos-transistors thus produced
09/21/1994EP0432189B1 Process and device for measuring states and variations over time of a signal