H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/1994
10/11/1994	US5354593 Hydrophilic photoprocessable polymer
10/11/1994	US5354490 Slurries for chemical mechanically polishing copper containing metal layers
10/11/1994	US5354443 Method and apparatus for physical-vapor deposition of material layers
10/11/1994	US5354433 Method for producing a flow of triisobutylaluminum from liquid triisobutylaluminum containing isobutene
10/11/1994	US5354422 Nickel or nickel-base alloy plating layers on both sides of an iron-based or copper-based material; single layer thickness; photoresist layer; etching
10/11/1994	US5354421 Dry etching method
10/11/1994	US5354420 Maskless laser assisted etching of indium phosphide or gallium arsenide
10/11/1994	US5354418 Method for dry etching
10/11/1994	US5354417 Etching MoSi2 using SF6, HBr and O2
10/11/1994	US5354416 Dry etching method
10/11/1994	US5354412 Forming intermetallic containing arsenic
10/11/1994	US5354408 Film splicer
10/11/1994	US5354387 Void-free surface resistant to loss of boron in subsequent etching steps
10/11/1994	US5354386 Method for plasma etching tapered and stepped vias
10/11/1994	US5354384 Method for cleaning surface by heating and a stream of snow
10/11/1994	US5354382 Electron cyclotron resonance apparatus comprising wafer cooling pedestal
10/11/1994	US5354381 Cold cathode discharging; very short high voltage ionization pulses; synchronously produced electron flow to neutralize positively charged wafer surfaces
10/11/1994	US5354205 Electrical connections with shaped contacts
10/11/1994	US5354198 Movable cantilevered purge system
10/11/1994	US5353934 Substrate holding case
10/11/1994	US5353737 Method for forming boron-doped semiconducting diamond films
10/11/1994	US5353638 Sensor for measuring air flow
10/11/1994	US5353499 Method of manufacturing a multilayered wiring board
10/11/1994	US5353498 Method for fabricating an integrated circuit module
10/11/1994	CA1332343C Deposition feedstock and dopant materials useful in the fabrication of hydrogenated amorphous silicon alloys for photovoltaic devices and other semiconductor devices
10/11/1994	CA1332342C Process for producing crystal
10/11/1994	CA1332341C Semiconductor structures and a method of manufacturing semiconductor structures
10/11/1994	CA1332323C Cryogenic process for metal lift off
10/06/1994	DE4411442A1 Non-volatile semiconductor memory having a cell structure which is suitable for high-speed operation and a low power supply voltage
10/06/1994	DE4310444A1 Fast power diode
10/06/1994	DE4310345A1 Method for dry etching of SiC
10/06/1994	CA2118743A1 Optical illumination and inspection system for wafer and solar cell defects
10/05/1994	EP0618720A2 Method and apparatus for reducing blooming in output of a CCD image sensor
10/05/1994	EP0618679A1 High reliable integrated circuit structure for MOS power devices
10/05/1994	EP0618624A2 Light emitting device and method of manufacturing the same
10/05/1994	EP0618621A1 Non-volatile semiconductor memory device
10/05/1994	EP0618620A1 Semiconductor fuse structures
10/05/1994	EP0618619A1 Ultra-thick thick films for thermal management and current-carrying capabilities in hybrid circuits
10/05/1994	EP0618617A2 Process for metallized vias in polyimide
10/05/1994	EP0618616A2 Transistor isolation process
10/05/1994	EP0618615A1 Method of defect determination and defect engineering on product wafers of advanced submicron technologies
10/05/1994	EP0618612A2 Method of cleaning semiconductor device and equipment for cleaning semiconductor device
10/05/1994	EP0618611A2 Method and apparatus for washing substrates
10/05/1994	EP0618610A2 Method of making a compound semiconductor device
10/05/1994	EP0618606A1 Apparatus for DC reactive plasma vapor deposition of an electrically insulating material using a shielded secondary anode
10/05/1994	EP0618598A1 Improved electrode interface for high-dielectric-constant materials
10/05/1994	EP0618597A1 Lightly donor doped electrodes for high-dielectric-constant materials
10/05/1994	EP0618590A2 Non-volatile semiconductor memory device having verify function
10/05/1994	EP0618589A2 Nonvolatile storage device
10/05/1994	EP0618586A1 Non-volatile memory device
10/05/1994	EP0618584A1 Method and circuit for configuring I/O devices
10/05/1994	EP0618548A1 Method and device for manufacturing a memory card
10/05/1994	EP0618535A2 EEprom card with defective cell substitution
10/05/1994	EP0618455A2 Method of making and testing a semiconductor device
10/05/1994	EP0618425A1 Sensor head and method for its manufacture
10/05/1994	EP0618309A1 Metal powder composition for metallization and metallized substrate
10/05/1994	EP0617842A1 Thermal transfer posts for high density multichip substrates and formation method
10/05/1994	EP0617841A1 Method of making semiconductor components with recovery of the substrate by electrochemical means
10/05/1994	EP0617840A1 Negative biasing of isolation trench fill to attract mobile positive ions away from bipolar device regions
10/05/1994	EP0617839A1 Method of making semiconductor components, in particular on GaAs or InP, with recovery of the substrate by chemical means
10/05/1994	EP0617709A1 Metal ion reduction in novolak resins.
10/05/1994	EP0541571B1 Device for one-sidedly etching a semiconductor slice
10/05/1994	EP0481998B1 Uv-cured adhesive for semiconductor-chip assembly
10/05/1994	EP0473594B1 Method for depositing a layer on a substrate and also a processing system for that purpose
10/05/1994	EP0353254B1 Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment
10/05/1994	EP0314707B1 Wire bonds and electrical contacts of an integrated circuit device
10/05/1994	CN1026134C System for controlling crystal growth apparatus and melt replenishment system therefor
10/05/1994	CN1026132C Process for forming functional zinc oxide film using alkyl zinc compound and oxygen-containing gas
10/04/1994	US5353369 Device for heating a chemical tank with an inert heat exchange fluid using linear and impulsive control
10/04/1994	US5353295 Semiconductor laser device with coupled cavities
10/04/1994	US5353252 Semiconductor integrated circuit device having digit line biasing means
10/04/1994	US5353251 Memory cell circuit with single bit line latch
10/04/1994	US5353246 Programmable semiconductor antifuse structure and method of fabricating
10/04/1994	US5353245 Memory integrated circuit with balanced resistance
10/04/1994	US5353138 Display device and support plate with transverse electrode arrangement
10/04/1994	US5353116 Defect inspection system for phase shift masks
10/04/1994	US5352998 Microwave integrated circuit having a passive circuit substrate mounted on a semiconductor circuit substrate
10/04/1994	US5352942 Gate array semiconductor circuit device, input circuit, output circuit and voltage lowering circuit
10/04/1994	US5352927 Self-aligned contact studs for semiconductor structures
10/04/1994	US5352926 Semiconductor package
10/04/1994	US5352923 Trench resistors for integrated circuits
10/04/1994	US5352917 A semiconductor has a fluorinated inorganic dielectric film
10/04/1994	US5352916 Fully CMOS-type SRAM device with grounding wire having contact holes
10/04/1994	US5352914 Field-effect transistor with structure for suppressing hot-electron effects, and method of fabricating the transistor
10/04/1994	US5352913 Dynamic memory storage capacitor having reduced gated diode leakage
10/04/1994	US5352912 Graded bandgap single-crystal emitter heterojunction bipolar transistor
10/04/1994	US5352909 Field effect transistor and method for manufacturing the same
10/04/1994	US5352907 Thin-film transistor
10/04/1994	US5352902 Method for controlling plasma surface-treatments with a plurality of photodetectors and optical filters
10/04/1994	US5352637 Process for producing storage-stable silicon wafer surfaces having advantageous oxidation properties and silicon wafer fored thereby
10/04/1994	US5352636 In situ method for cleaning silicon surface and forming layer thereon in same chamber
10/04/1994	US5352634 Process for fabricating an active matrix circuit
10/04/1994	US5352632 Multichip packaged semiconductor device and method for manufacturing the same
10/04/1994	US5352631 Method for forming a transistor having silicided regions
10/04/1994	US5352630 Having resistivity against cracking and planarization without voids
10/04/1994	US5352629 Isostatic pressing and heating of a chip having a solder preform placed on a solder-wettable substrate window
10/04/1994	US5352628 Heat treating the epitaxial growth multilayer structure to migrate the diffusers
10/04/1994	US5352627 Monolithic high voltage nonlinear transmission line fabrication process
10/04/1994	US5352626 Impurity diffusion layers become active regions
10/04/1994	US5352625 Epitaxial growth a dielectric films, forming the groove, filling the groove, polishing the filler film to form isolated structure

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