H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/1994
10/26/1994	EP0621640A1 Semiconductor power device
10/26/1994	EP0621639A1 Light-receiving semiconductor device
10/26/1994	EP0621634A1 Voltage supply for an integrated semiconductor device
10/26/1994	EP0621632A1 Trench capacitor dram
10/26/1994	EP0621631A1 Method of forming resistors for integrated circuits by using trenches
10/26/1994	EP0621630A1 Polishstop planarization method and structure
10/26/1994	EP0621629A2 Method for reducing dislocations in integrated circuit devices
10/26/1994	EP0621628A1 Ion implanter
10/26/1994	EP0621509A1 Radiation sensitive resin composition
10/26/1994	EP0621486A1 Apparatus for evaluating characteristics of semiconductor device and method of evaluating characteristics of semiconductor device using the same
10/26/1994	EP0621484A1 Method and apparatus for coupling a semiconductor device with a tester
10/26/1994	EP0621355A2 Process for manufacturing a hole structure in a silicium substrate
10/26/1994	EP0621299A1 Solutions of polyimide-forming substances and their use as coating material
10/26/1994	EP0621245A1 Multilayer glass ceramic substrate and method of fabricating the same
10/26/1994	EP0621130A2 Solid phase bonding method
10/26/1994	EP0621103A1 Welding and cleaning method for superhigh purity fluid pipe system
10/26/1994	EP0620953A1 Electrostatic wafer clamp
10/26/1994	EP0620931A1 Improved mask for photolithography
10/26/1994	EP0620870A1 Process for surface treatment with ions
10/26/1994	EP0620822A1 Hybridization of polynucleotides conjugated with chromophores and fluorophores to generate donor-to-donor energy transfer system
10/26/1994	EP0517727B1 Process for producing an insulated monocrystalline silicon island
10/26/1994	EP0506675B1 Process for determining the position of a pn transition
10/26/1994	EP0427853B1 Metal oxidation apparatus and method
10/26/1994	CN1094189A Transistors and methods for fabrication thereof
10/26/1994	CN1094188A Transverse GalnAs photoelectric transistor and its integrating technique
10/26/1994	CN1094187A Ion beam fine processing technology for multi-printing on plane
10/26/1994	CN1026357C Test device for electric circuits on boards
10/25/1994	US5359693 Method and apparatus for a rapid thermal processing of delicate components
10/25/1994	US5359566 Dynamic random access memory
10/25/1994	US5359556 Semiconductor memories with serial sensing scheme
10/25/1994	US5359555 Column selector circuit for shared column CMOS EPROM
10/25/1994	US5359554 Semiconductor memory device having an energy gap for high speed operation
10/25/1994	US5359552 Power supply tracking regulator for a memory array
10/25/1994	US5359539 Logic design system and circuit transformation rule compiler
10/25/1994	US5359534 Verification method of logical circuit layout patterns
10/25/1994	US5359496 Hermetic high density interconnected electronic system
10/25/1994	US5359407 Optical scanning apparatus, surface-state inspection apparatus and exposure apparatus
10/25/1994	US5359389 Exposure apparatus including two illuminating systems and exposure process using the same
10/25/1994	US5359242 Programmable logic with carry-in/carry-out between logic blocks
10/25/1994	US5359226 Static memory with self aligned contacts and split word lines
10/25/1994	US5359224 Insulated lead frame for integrated circuits and method of manufacture thereof
10/25/1994	US5359223 Lead frame used for semiconductor integrated circuits and method of tape carrier bonding of lead frames
10/25/1994	US5359222 TCP type semiconductor device capable of preventing crosstalk
10/25/1994	US5359221 Semiconductor device
10/25/1994	US5359220 Hybrid bipolar/field-effect power transistor in group III-V material system
10/25/1994	US5359218 Semiconductor memory device with selection gate in a groove
10/25/1994	US5359217 MOS semiconductor memory device having stack capacitor with metal plug
10/25/1994	US5359215 Semiconductor memory cell for holding data with small power consumption
10/25/1994	US5359214 Field effect devices formed from porous semiconductor materials
10/25/1994	US5359213 Charge transfer device and solid state image sensor using the same
10/25/1994	US5359210 Integrated circuit
10/25/1994	US5359206 Thin film transistor substrate, liquid crystal display panel and liquid crystal display equipment
10/25/1994	US5359202 Electron beam exposure apparatus employing blanking aperture array
10/25/1994	US5359148 Heat-treating apparatus
10/25/1994	US5359101 Acrylate polymers with strong electron withdrawing groups
10/25/1994	US5358907 Method of electrolessly depositing metals on a silicon substrate by immersing the substrate in hydrofluoric acid containing a buffered metal salt solution
10/25/1994	US5358904 Semiconductor device
10/25/1994	US5358903 Contact of a semiconductor device and its manufacturing process
10/25/1994	US5358902 Method of producing conductive pillars in semiconductor device
10/25/1994	US5358901 Forming first metal-containing layer on semiconductor substrate, then reacting this layer with second metal-containing gas yields intermetallic of first and second metals
10/25/1994	US5358900 Minimization to increase operating speed and improve density
10/25/1994	US5358899 Oxygen assisted ohmic contact formation to n-type gallium arsenide
10/25/1994	US5358895 Low temperature silicon epitaxy with germanium doping
10/25/1994	US5358894 Oxidation enhancement in narrow masked field regions of a semiconductor wafer
10/25/1994	US5358893 Isolation method for semiconductor device
10/25/1994	US5358892 Etch stop useful in avoiding substrate pitting with poly buffered locos
10/25/1994	US5358891 Trench isolation with planar topography and method of fabrication
10/25/1994	US5358890 Process for fabricating isolation regions in a semiconductor device
10/25/1994	US5358889 Formation of ruthenium oxide for integrated circuits
10/25/1994	US5358888 Method for manufacturing a capacitor of an integrated semiconductor device having increased surface area
10/25/1994	US5358887 Ulsi mask ROM structure and method of manufacture
10/25/1994	US5358886 Method of making integrated circuit structure with programmable conductive electrode/interconnect material
10/25/1994	US5358885 Method of manufacturing a field effect transistor with a T-shaped gate electrode and reduced capacitance
10/25/1994	US5358884 Dual purpose collector contact and isolation scheme for advanced bicmos processes
10/25/1994	US5358883 Forming collector region by doping substrate with retrograde doping profile; positioning emitter electrode between base and collector electrodes
10/25/1994	US5358882 Producing bipolar transistor in substrate, surrounding with insulating trench, depositing silicon dioxide layer by thermal decomposition of tetraethyl silicate, structuring to form active regions
10/25/1994	US5358881 Silicon topography control method
10/25/1994	US5358879 Forming polysilicon sidegate adjacent gate electrode, forming nitride spacer, implanting heavy neutral ions into gate region to electrically short gate electrode and sidegate together
10/25/1994	US5358878 Forming mask which covers active zone at surface of multilayer structure, etching isotropically to substrate, underetching under mask to shape mesa, depositing dielectric uniformly, etching dielectric, removing mask
10/25/1994	US5358877 Minimizing detrimental effect on electrical characteristics of semiconductor layer
10/25/1994	US5358827 Using an optical focusing system having a lateral magnification that focuses radiation
10/25/1994	US5358826 A metal barrier is interposed between the metals to prevent diffusion from one metal to an adjoining portion of other metal; multilayered; sputtering, vapor deposition, etching, photolithography
10/25/1994	US5358824 Photosensitive resin composition utilizing 1,2-naphthoquinone diazide compound having spirobichroman or spirobiindane ring
10/25/1994	US5358823 Radiation-sensitive composition containing esterification product of (1,2-naphthoquinone-2-diazide)-sulfonic acid with 2,3,4,4'-tetrahydroxybenzophenone and a di- or tri-hydroxybenzophenone
10/25/1994	US5358809 Methods of fabricating thin film structures by imaging through the substrate in different directions
10/25/1994	US5358807 Improved resolution
10/25/1994	US5358795 Low thermal expansion metal sheet clad on one surface with high thermal expansion foil and having through-holes formed in thickness welded to metal sheet of high expansion so as to protrude and expose to foil surface
10/25/1994	US5358743 Using an organosilicon compound
10/25/1994	US5358740 Method for low pressure spin coating and low pressure spin coating apparatus
10/25/1994	US5358739 Coating electronic substrates with silica derived from silazane polymers
10/25/1994	US5358621 Method of manufacturing semiconductor devices
10/25/1994	US5358616 Filling of vias and contacts employing an aluminum-germanium alloy
10/25/1994	US5358601 Process for isotropically etching semiconductor devices
10/25/1994	US5358600 Method of making silicon quantum wires
10/25/1994	US5358599 Process for etching a semiconductor device using an improved protective etching mask
10/25/1994	US5358597 Coating with metal, then etching to form circuit patterns and expose aluminum nitride surface, covering exposed surfaces with dielectric coating and dipping into alkaline electroless gold plating bath
10/25/1994	US5358590 Method of manufacturing individual element arrays
10/25/1994	US5358396 Multi-functional mould
10/25/1994	US5358017 Method, system and apparatus for forming leads for semiconductors packages
10/25/1994	US5357991 Gas phase semiconductor processor with liquid phase mixing

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