Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/1995
06/08/1995WO1995015406A1 Ultrapure gas and pure water feed duct, system and process equipment
06/08/1995DE4443013A1 Charge transfer device e.g. for two=dimensional linear sensor or delay element
06/08/1995DE4442432A1 Prodn. of a capacitor for semiconductor storage device
06/08/1995DE4414969C1 Micromechanical component for acceleration or inclination sensor
06/08/1995DE4341634A1 Transport of substrate discs in a vacuum coating plant
06/08/1995DE4341517A1 Transistor constructional element preventing short circuit channel effect
06/08/1995DE4341516A1 Mfr. of submicron transistors, e.g. CMOS transistors
06/08/1995DE4341509A1 Prodn. of LDD MOS transistor
06/08/1995DE4341506A1 MOSFET with potentially unconnected source and drain regions
06/08/1995DE4340956A1 Working integrated circuits with high energy beam
06/07/1995EP0656741A2 Semiconductor package
06/07/1995EP0656689A2 Transistor circuit apparatus
06/07/1995EP0656664A1 Polycrystalline silicon photoelectric transducer and process for its production
06/07/1995EP0656663A2 Non-volatile semiconductor memory device and method for erasure and production thereof
06/07/1995EP0656660A2 BiCMOS process for supporting merged devices
06/07/1995EP0656656A2 Integrated interconnect for very high density DRAMS
06/07/1995EP0656655A2 A self-aligned buried strap for trench type DRAM cells
06/07/1995EP0656654A2 Methods for fabricating low leakage substrate plate trench dram cells and devices formed thereby
06/07/1995EP0656653A1 Method of manufacturing shallow junction field effect transistor
06/07/1995EP0656652A2 Method of forming isolation trenches in integrated circuits
06/07/1995EP0656651A2 Process for the manufacturing of an integrated circuit device
06/07/1995EP0656650A1 Method of evaluating current-driven conductive material
06/07/1995EP0656649A1 Field effect transistor with landing pad
06/07/1995EP0656648A1 Circuit and method of using an oxide layer to attach a semiconductor die to a die pad
06/07/1995EP0656647A1 Method of fabricating an integrated circuit device comprising at least a MOS transistor
06/07/1995EP0656646A1 Method of making devices with buried layers by epitaxial growth
06/07/1995EP0656645A2 Field effect transistor with a sealed diffusion junction
06/07/1995EP0656644A1 Method of manufacturing a crystallized semiconductor layer and semiconductor devices using it
06/07/1995EP0656643A1 Method for determining the minority carrier surface recombination lifetime constant(ts) of a specimen of semiconductor material
06/07/1995EP0656629A2 Gate power supply
06/07/1995EP0656627A2 An adjustable threshold voltage circuit
06/07/1995EP0656573A2 Method for moving a material removal tool with low tool accelerations
06/07/1995EP0656565A1 Exposure method and method of producing a photolithographic mask
06/07/1995EP0656431A2 Metal-organic chemical vapor-phase deposition process
06/07/1995EP0656405A2 Aqueous stripping compositions containing a hydroxylamine and an alkanolamine and use thereof
06/07/1995EP0656310A1 Method and apparatus for producing a laminate
06/07/1995EP0656151A1 Antifuse structure and method for forming
06/07/1995EP0656149A1 Improved back-side hydrogenation technique for defect passivation in silicon solar cells
06/07/1995EP0656031A1 Polymeric substrate with polymeric microelements
06/07/1995CN1103511A Process for smoothing the edge of semiconductor wafers
06/07/1995CN1103501A A device for applying a lacquer coating to a disc-shaped registration carrier
06/07/1995CN1103423A Electrically conductive adhesives
06/07/1995CN1028819C Method and apparatus for forming diffusion junctions in solar cell substrates
06/07/1995CN1028817C Method to form interlamination insulation film of semiconductor device
06/06/1995US5422844 Nonvolatile semiconductor memory
06/06/1995US5422843 Method of erasing information in memory cells
06/06/1995US5422839 Semiconductor memory device
06/06/1995US5422788 Technique for enhancing adhesion capability of heat spreaders in molded packages
06/06/1995US5422731 Semiconductor arrangement made of compound semiconductor material
06/06/1995US5422724 Multiple-scan method for wafer particle analysis
06/06/1995US5422723 Diffraction gratings for submicron linewidth measurement
06/06/1995US5422592 Input circuit of semiconductor integrated circuit device
06/06/1995US5422582 Diode coupled CMOS logic design for quasi-static resistive dissipation with multi-output capability
06/06/1995US5422579 Method of identifying probe position and probing method in prober
06/06/1995US5422516 Electronic parts loaded module including thermal stress absorbing projecting electrodes
06/06/1995US5422512 Semiconductor device and reticle used for fabricating the same
06/06/1995US5422509 Integrated current-limiter device for power MOS transistors
06/06/1995US5422508 BiCDMOS structure
06/06/1995US5422507 Electrical isolation in integrated circuits
06/06/1995US5422506 Field effect transistor structure heavily doped source/drain regions and lightly doped source/drain regions
06/06/1995US5422505 FET having gate insulating films whose thickness is different depending on portions
06/06/1995US5422502 Base region comprises of silicon-germanium alloy or super-lattice structure comprising alternate layers of silicon and silicon-germanium alloy; telecommunication application
06/06/1995US5422501 Method of integrating heterojunction bipolar transistors with heterojunction FETs and PIN diodes
06/06/1995US5422499 Semiconductor memory cell
06/06/1995US5422496 Interband single-electron tunnel transistor and integrated circuit
06/06/1995US5422441 Master slice integrated circuit having a reduced chip size and a reduced power supply noise
06/06/1995US5422315 Method for forming self-aligned contact hole and semiconductor device having self-aligned contact hole
06/06/1995US5422314 Lead frame and production method for producing semiconductor device using the lead frame
06/06/1995US5422313 Integrated circuit device and manufacturing method using photoresist lead covering
06/06/1995US5422312 Method for forming metal via
06/06/1995US5422311 Depositing in situ phosphorus doped amorphous silicon film on substrate, annealing to form polysilicon and increase grain size, depositing tungsten silicide film, annealing to form polycide film with silicon layer at boundary, patterning
06/06/1995US5422310 Method of forming interconnection in semiconductor device
06/06/1995US5422309 Method for producing a metallization level having contacts and interconnects connecting the contacts
06/06/1995US5422308 Method of fabricating a tungsten contact
06/06/1995US5422306 Method of forming semiconductor hetero interfaces
06/06/1995US5422305 Method of forming implanted silicon resonant tunneling barriers
06/06/1995US5422304 Forming transparent electrode, and thin film of chalcopyrite compouds by sputtering, and using ion beam or molecular beam; doping chalcopyrite film to form a homojunction
06/06/1995US5422303 Method for manufacturing a laterally limited, single-crystal region on a substrate and the employment thereof for the manufacture of an MOS transistor and a bipolar transistor
06/06/1995US5422302 Method for producing a three-dimensional semiconductor device
06/06/1995US5422301 Method of manufacturing semiconductor device with MOSFET
06/06/1995US5422300 Method for forming electrical isolation in an integrated circuit
06/06/1995US5422299 Method of forming single crystalline electrical isolated wells
06/06/1995US5422298 Method of manufacturing a precision integrated resistor
06/06/1995US5422297 Method for forming a semiconductor device
06/06/1995US5422296 Process for forming a static-random-access memory cell
06/06/1995US5422295 Method for forming a semiconductor memory device having a vertical multi-layered storage electrode
06/06/1995US5422293 Method for manufacturing a TFT panel
06/06/1995US5422292 Process for fabricating split gate flash EEPROM memory
06/06/1995US5422291 Method of making an EPROM cell with a readily scalable interpoly dielectric
06/06/1995US5422290 Method of fabricating BiCMOS structures
06/06/1995US5422289 Method of manufacturing a fully planarized MOSFET and resulting structure
06/06/1995US5422288 Method of doping a JFET region in a MOS-gated semiconductor device
06/06/1995US5422287 Thin film transistor and process for producing the same
06/06/1995US5422286 Process for fabricating high-voltage semiconductor power device
06/06/1995US5422228 Method of producing thin film multi-layered substrate
06/06/1995US5422223 Polysilsesquioxanes having diazonaphthoquinone sulfonyloxy group modifiers; barrier films for lithographic process
06/06/1995US5422221 Hydrogen atoms of hydroxyl groups in novolac resin replaced by 1,2-naphthoquinonediazidosulfonyl group; sensitiivity, resolution, heat resistance
06/06/1995US5422206 Anti-reflection film inserted between a transparent glass substrate and light shielding pattern
06/06/1995US5422205 Micropattern forming method
06/06/1995US5422190 Via fill paste and method of using the same containing specific amounts of silver, gold and refractory oxides