Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/1995
07/05/1995EP0660886A1 Growing a nitrogen doped epitaxial ii-vi compound layer on a single crystal substrate
07/05/1995EP0660757A1 Wafer retaining platen and lifting means
07/05/1995EP0620953A4 Electrostatic wafer clamp.
07/05/1995EP0540578A4 Compact sram cell layout
07/05/1995EP0444350B1 Method for fabricating selfstabilized semiconductor gratings
07/05/1995EP0311696B1 Method and apparatus for processing with plasma
07/05/1995CN1104804A Resin coating method for semiconductor laser device capable of coating thinly and uniformly surfaces of a semiconductor laser chip and photodiode chips with a resin
07/05/1995CN1104772A Method and composition for determination of sodium ions in fluids
07/05/1995CN1029274C Multichip module and integrated circuit substrates having planarized patterned surfaces
07/05/1995CN1029273C Method of manufacturing semiconductor device, and semiconductor device obtained by this method
07/04/1995USH1463 Method for detecting positions of photomask and substrate
07/04/1995US5430734 Fault-tolerant waferscale integrated circuit device and method
07/04/1995US5430595 Electrostatic discharge protection circuit
07/04/1995US5430548 Method and apparatus for pattern detection
07/04/1995US5430403 Field effect transistor with switchable body to source connection
07/04/1995US5430393 Integrated circuit with a low-power mode and clock amplifier circuit for same
07/04/1995US5430389 Output circuit with a current injection circuit including a reference voltage generator
07/04/1995US5430386 Method and apparatus for evaluating semiconductor wafers by irradiation with microwave and excitation light
07/04/1995US5430355 RF induction plasma source for plasma processing
07/04/1995US5430331 Plastic encapsulated integrated circuit package having an embedded thermal dissipator
07/04/1995US5430330 Semiconductor device, resin for sealing same and method of fabricating same
07/04/1995US5430329 Semiconductor device with bonding pad electrode
07/04/1995US5430328 Process for self-align contact
07/04/1995US5430327 Ohmic contact for III-V semiconductor materials
07/04/1995US5430325 Semiconductor chip having dummy pattern
07/04/1995US5430324 High voltage transistor having edge termination utilizing trench technology
07/04/1995US5430320 Thin film transistor having a lightly doped drain and an offset structure for suppressing the leakage current
07/04/1995US5430319 Resistor-capacitor-transistor type integrated circuit, method for the manufacture of such a circuit and application to an oscillator
07/04/1995US5430318 BiCMOS SOI structure having vertical BJT and method of fabricating same
07/04/1995US5430317 Semiconductor device
07/04/1995US5430316 VDMOS transistor with improved breakdown characteristics
07/04/1995US5430315 Bi-directional power trench MOS field effect transistor having low on-state resistance and low leakage current
07/04/1995US5430313 Transistor with an offset gate structure
07/04/1995US5430311 Constant-voltage diode for over-voltage protection
07/04/1995US5430310 Field effect transistor
07/04/1995US5430304 Blanking aperture array type charged particle beam exposure
07/04/1995US5430271 Method of heat treating a substrate with standby and treatment time periods
07/04/1995US5430258 Copper interconnection structure and method of preparing same
07/04/1995US5429995 Method of manufacturing silicon oxide film containing fluorine
07/04/1995US5429994 Wiring forming method, wiring restoring method and wiring pattern changing method
07/04/1995US5429993 Semiconductor accelerometer and method of its manufacture
07/04/1995US5429991 Method of forming thin film for semiconductor device
07/04/1995US5429990 Spin-on-glass planarization process with ion implantation
07/04/1995US5429989 Process for fabricating a metallization structure in a semiconductor device
07/04/1995US5429988 Process for producing high density conductive lines
07/04/1995US5429987 Method for profile control of selective metallization
07/04/1995US5429986 Electrode forming process
07/04/1995US5429985 Fabrication of optically reflecting ohmic contacts for semiconductor devices
07/04/1995US5429983 Method of manufacturing semiconductor device
07/04/1995US5429982 Method for growing field oxides in LOCOS technique
07/04/1995US5429981 Method of making linear capacitors for high temperature applications
07/04/1995US5429980 Method of forming a stacked capacitor using sidewall spacers and local oxidation
07/04/1995US5429979 Method of forming a dram cell having a ring-type stacked capacitor
07/04/1995US5429978 Method of forming a high density self-aligned stack in trench
07/04/1995US5429976 Self-aligned method for forming polysilicon word lines on top of gate electrodes to increase capacitance of a stacked capacitor in a DRAM cell
07/04/1995US5429975 Method of implanting during manufacture of ROM device
07/04/1995US5429974 Post passivation mask ROM programming method
07/04/1995US5429973 Trench buried-bit line mask ROM process
07/04/1995US5429972 Method of fabricating a capacitor with a textured polysilicon interface and an enhanced dielectric
07/04/1995US5429971 Method of making single bit erase flash EEPROM
07/04/1995US5429970 Method of making flash EEPROM memory cell
07/04/1995US5429969 Process for forming electrically programmable read-only memory cell with a merged select/control gate
07/04/1995US5429968 Method of forming a mask programmable read only memory device with multi-level memory cell array
07/04/1995US5429967 Process for producing a very high density mask ROM
07/04/1995US5429966 Method of fabricating a textured tunnel oxide for EEPROM applications
07/04/1995US5429965 Method for manufacturing a semiconductor memory
07/04/1995US5429964 Low on-resistance power MOS technology
07/04/1995US5429963 Twin-tub complementary heterostructure field effect transistor fab process
07/04/1995US5429962 Method for fabricating a liquid crystal display
07/04/1995US5429961 Method for manufacturing a thin film transistor
07/04/1995US5429960 Method of making flash EEPROM memory
07/04/1995US5429959 Process for simultaneously fabricating a bipolar transistor and a field-effect transistor
07/04/1995US5429958 Process for forming twin well CMOS integrated circuits
07/04/1995US5429957 Method of manufacturing an heterojunction bipolar transistor
07/04/1995US5429956 Method for fabricating a field effect transistor with a self-aligned anti-punchthrough implant channel
07/04/1995US5429955 Method for constructing semiconductor-on-insulator
07/04/1995US5429954 Creating p-n junction; protecting surface contacts during rough etching
07/04/1995US5429910 Method of forming a critical resist pattern
07/04/1995US5429905 Positive working photoresist composition containing naphthoquinone diazide sulfonic acid ester of polyhydroxy compound
07/04/1995US5429904 Positive resist composition
07/04/1995US5429896 Photomask and pattern forming method employing the same
07/04/1995US5429733 Plating device for wafer
07/04/1995US5429714 Concurrent etching of silicon nitride and doped polysilicon with phosphoric acid
07/04/1995US5429711 Method for manufacturing wafer
07/04/1995US5429710 Dry etching method
07/04/1995US5429709 Method of manufacturing polyimide multilayer printed wiring boards
07/04/1995US5429708 Reaction with free radicals and hydrogenated silicon surface
07/04/1995US5429705 Apparatus for coating and/or etching substrates in a vacuum chamber
07/04/1995US5429704 Etching tool
07/04/1995US5429673 Binary vapor adhesion promoters and methods of using the same
07/04/1995US5429642 Method for transferring wafers from one processing station to another sequentially and system therefor
07/04/1995US5429544 Polishing apparatus for notch portion of wafer
07/04/1995US5429498 Thermal processing system
07/04/1995US5429488 Encapsulating molding equipment and method
07/04/1995US5429251 Semiconductor wafer end effector
07/04/1995US5429070 High density plasma deposition and etching apparatus
07/04/1995US5429068 Deposition method for compound semiconductor forming device
07/04/1995US5428990 Method of evaluation segregation of solid-liquid interface and segregation apparatus thereof
07/04/1995US5428982 Machine tool with cam gear, in particular for punching and shaping the lead-outs of integrated circuits
07/04/1995US5428885 Method of making a multilayer hybrid circuit