Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/1995
08/02/1995EP0487656B1 Charge neutralization apparatus for ion implantation system
08/02/1995EP0479968B1 X-ray imaging system
08/02/1995EP0426868B1 Positioning table
08/02/1995EP0391906B1 Chemical vapor deposition system
08/02/1995CN1106164A Semiconductor device and a manufacturing method therefor
08/02/1995CN1106163A Electrode for semiconductor element and semiconductor device having the electrode and process for producing the same
08/02/1995CN1029442C Method and system for manufacturing semiconductor devices
08/01/1995US5438545 Data output buffer of semiconductor memory device for preventing noises
08/01/1995US5438542 Nonvolatile semiconductor memory device
08/01/1995US5438541 Semiconductor dynamic random access memory cell free from leakage between accumulating electrode and counter electrode
08/01/1995US5438539 Memory device, method for reading information from the memory device, method for writing information into the memory device, and method for producing the memory device
08/01/1995US5438537 Static random access memory which has a pair of thin film transistors and wherein the capacitance and resistance between the gate electrodes and the conductor layers are increased so as to reduce the time constant between them
08/01/1995US5438527 Yield surface modeling methodology
08/01/1995US5438524 Logic synthesizer
08/01/1995US5438477 Die-attach technique for flip-chip style mounting of semiconductor dies
08/01/1995US5438419 Precision wafer driving device by utilizing solid type actuator
08/01/1995US5438418 Robot-teaching cassette
08/01/1995US5438413 Process for measuring overlay misregistration during semiconductor wafer fabrication
08/01/1995US5438305 High frequency module including a flexible substrate
08/01/1995US5438281 Semiconductor integrated circuit device and data processing system having an interface with reduced parasitic capacitance
08/01/1995US5438277 Ground bounce isolated output buffer
08/01/1995US5438276 Apparatus for measuring the life time of minority carriers of a semiconductor wafer
08/01/1995US5438241 Single crystal silicon arrayed devices for display panels
08/01/1995US5438221 Method and device in which bottoming of a well in a dielectrically isolated island is assured
08/01/1995US5438220 High breakdown voltage semiconductor device
08/01/1995US5438218 Semiconductor device with Shottky junction
08/01/1995US5438214 Metal oxide semiconductor device having a common gate electrode for N and P channel MOS transistors
08/01/1995US5438212 Semiconductor device with heat dissipation structure
08/01/1995US5438209 Apparatus for detecting position of a notch in a semiconductor wafer
08/01/1995US5438207 Electron beam direct writing system for ULSI lithography with facilitated rotation and gain corrections of shot patterns and electron beam direct writing method for same
08/01/1995US5438203 System and method for unipolar magnetic scanning of heavy ion beams
08/01/1995US5438165 Integrated circuit interconnect leads releasably mounted on film
08/01/1995US5438023 Passivation method and structure for a ferroelectric integrated circuit using hard ceramic materials or the like
08/01/1995US5438022 Method for using low dielectric constant material in integrated circuit fabrication
08/01/1995US5438020 Process for flip-chip bonding a semiconductor chip using wire leads
08/01/1995US5438019 Vapor deposition, adsorption, decomposition
08/01/1995US5438018 Method of making semiconductor device by selective epitaxial growth
08/01/1995US5438016 Method of semiconductor device isolation employing polysilicon layer for field oxide formation
08/01/1995US5438015 Silicon-on-insulator technique with buried gap
08/01/1995US5438014 Method of manufacturing semiconductor device
08/01/1995US5438013 Method of making a semiconductor memory device having a capacitor
08/01/1995US5438012 Removing natural oxide film; forming tantalum oxide film doped with impurities and titanium nitride layer on upper electrode
08/01/1995US5438011 Method of forming a capacitor using a photoresist contact sidewall having standing wave ripples
08/01/1995US5438010 Method of reliably and readily manufacturing a semiconductor device having a cylindrical electrode
08/01/1995US5438008 Method of making a semiconductor device having two transistors forming a memory cell and a peripheral circuit, wherein the impurity region of the first transistor is not subjected to an etching atmosphere
08/01/1995US5438007 Method of fabricating field effect transistor having polycrystalline silicon gate junction
08/01/1995US5438006 Method of fabricating gate stack having a reduced height
08/01/1995US5437961 Forming carbon layer on light reflective layer, photosensitive layer over carbon layer, selectively patterning it by light while carbon layer is patterned by etching, using patterned resin layer as mask, finally pattering reflective layer
08/01/1995US5437948 Process for adjusting a photolithographic exposure machine and associated device
08/01/1995US5437947 Phase shifting mask and method of manufacturing the same
08/01/1995US5437946 Multiple reticle stitching for scanning exposure system
08/01/1995US5437932 High speed aqueous solvent developable photopolymer compositions
08/01/1995US5437895 Intermittent generation the high frequency discharge, applying electrode to vapor deposition
08/01/1995US5437893 Method for suppression of electrification
08/01/1995US5437777 Apparatus for forming a metal wiring pattern of semiconductor devices
08/01/1995US5437765 Semiconductor processing
08/01/1995US5437764 Lead frame and manufacturing method therefor
08/01/1995US5437763 Method for formation of contact vias in integrated circuits
08/01/1995US5437762 Method and apparatus for semiconductor memory
08/01/1995US5437757 Clamp ring for domed pedestal in wafer processing chamber
08/01/1995US5437739 Forming raised ring around structure which has greater resistance to selective etch than substrate
08/01/1995US5437733 A treatment liquid held between the surface and liquid holder having apertures; noncontamination; cleaning and etching semiconductor; removing photoresists
08/01/1995US5437096 Method for making a multilayer metal leadframe
08/01/1995US5437095 Method of making plastic encapsulated integrated circuit package
08/01/1995CA1336476C Dielectric ceramics for electrostatic chucks and method of making them
07/1995
07/28/1995CA2114345A1 Solid phase epitaxy reactor, the most cost effective gaas epitaxial growth technology (the)
07/27/1995WO1995020263A1 Hybrid electrostatic chuck
07/27/1995WO1995020243A1 Electrostatic discharge protection of isfet sensors
07/27/1995WO1995020139A1 Grating-grating interferometric alignment system
07/27/1995WO1995020127A1 Chemical refill system for high purity chemicals
07/27/1995DE4428911A1 Forming silicon@ insulating film in semiconductor component
07/27/1995DE4418779C1 Irradiation device for X-ray lithography
07/27/1995DE4402070A1 Silicide contact plug prodn. in via
07/27/1995DE4401858A1 Forming ohmic contact on p-conductive semiconductor layer
07/27/1995DE4401608C1 Thermally conductive electrically insulating adhesive joint
07/27/1995DE4401590A1 Forming lacquer structure with overhanging edges
07/27/1995DE19501556A1 Semiconductor component with trench structure
07/27/1995CA2180941A1 Grating-grating interferometric alignment system
07/26/1995EP0664606A1 Method of high frequency current amplification using mosfet devices
07/26/1995EP0664569A1 Microelectronics device
07/26/1995EP0664567A1 Microwave power transistor with double recess and its fabrication process
07/26/1995EP0664566A1 MOS transistor and method for making the same
07/26/1995EP0664564A1 Integrated circuit including a protection against electrostatic discharges
07/26/1995EP0664563A1 TAB Bonding pads geometry for semiconductor devices
07/26/1995EP0664562A1 Ball grid array plastic package
07/26/1995EP0664561A2 Method for manufacturing polycrystalline layer having uniform metal silicide layer thereon
07/26/1995EP0664560A2 Method of forming insulating film
07/26/1995EP0664559A2 Process for planarizing surface of a semiconductor device
07/26/1995EP0664558A1 Method for drying wafer
07/26/1995EP0664557A2 Bonded semi-conductor device
07/26/1995EP0664540A2 Substrate independent superpolishing process and slurry
07/26/1995EP0664512A1 Design for testability technique of CMOS and BiCMOS ICs
07/26/1995EP0664501A1 Temperature control apparatus and method with recirculated coolant
07/26/1995EP0664490A1 Waterborne photoresists having associate thickeners
07/26/1995EP0664446A2 Inspection system and method for cross-sectional imaging
07/26/1995EP0664350A1 Process and device for the production of crystalline films
07/26/1995EP0664345A1 Insulating boards and method of manufacturing the same
07/26/1995EP0664343A2 Method for improving substrate adhesion in fluoropolymer deposition processes
07/26/1995EP0664051A1 METHOD FOR FORMING THIN TUNNELING WINDOWS IN EEPROMs
07/26/1995EP0664050A1 Device for transporting wafer magazines
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