Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/1995
05/10/1995EP0652594A1 Integrated circuit with power element and low voltage elements
05/10/1995EP0652593A2 Semiconductor integrated circuit device and production method thereof
05/10/1995EP0652592A2 Semiconductor memory device and manufacturing method thereof
05/10/1995EP0652591A1 Oxide in silicon-on-insulator structures
05/10/1995EP0652590A1 Method of fabricating a semiconductor device with a bump electrode
05/10/1995EP0652589A1 Method of manufacturing a semiconductor device comprising two coplanar electrical conductors separated by a dielectric layer and semiconductor device obtained by suel a method
05/10/1995EP0652588A2 Process for etching conductor layers in integrated circuits
05/10/1995EP0652585A1 Process and device for etching thin layers, preferably Indium-Tin-Oxide layers
05/10/1995EP0652567A2 Electrical circuit including an electrically interruptible circuit element
05/10/1995EP0652565A2 A semiconductor memory device having word line driver requiring single word line drive signal
05/10/1995EP0652522A1 Data output latch control circuit and process for semiconductor memory system
05/10/1995EP0652488A2 Resist materials and related processes
05/10/1995EP0652486A2 Fabrication of electronic and optoelectronic components
05/10/1995EP0652485A1 A process for fabricating a device
05/10/1995EP0652484A2 Positive resist composition
05/10/1995EP0652308A2 Method of and apparatus for forming single-crystalline thin film
05/10/1995EP0651914A1 Structure for use in producing semiconductor devices with buried contacts and method for its preparation
05/10/1995EP0651893A1 Hexahydroxybenzophenone sulfonate esters of diazonaphthoquinone sensitizers and positive photoresists employing same
05/10/1995EP0651886A1 Structure and method for testing wiring segments in an integrated circuit device
05/10/1995EP0651693A1 Method and apparatus for separating circuit dies from a wafer
05/10/1995EP0610183B1 Exposure device
05/10/1995CN1102507A Gallium nitride-based III-V group compound semiconductor device having an ohmic electrode, and method of producing the same
05/10/1995CN1102506A A highly intergrated semiconductor wiring structure and a method for manufacturing the same
05/10/1995CN1102504A Method for manufacturing chip bump
05/10/1995CN1102499A Reading-only memory device
05/09/1995US5414693 Self-aligned dual-bit split gate (DSG) flash EEPROM cell
05/09/1995US5414668 Semiconductor memory device
05/09/1995US5414665 Method of erasing data stored in electrically erasable and programmable read only memory device without deterioration of characteristics
05/09/1995US5414660 Double word line type dynamic RAM having redundant sub-array of cells
05/09/1995US5414655 Semiconductor memory device having a stack-type capacitor
05/09/1995US5414654 Driving circuit of a ferroelectric memory device and a method for driving the same
05/09/1995US5414637 Intra-module spare routing for high density electronic packages
05/09/1995US5414636 Method for fabricating a dynamic random access memory
05/09/1995US5414519 Method for aligning a semiconductor chip to be repaired with a repair system and a laser repair target used therefor
05/09/1995US5414515 Surface position detecting device
05/09/1995US5414504 Interference removal
05/09/1995US5414467 Charge transfer device wherein the time constant between the clock means and the transfer gate electrodes are substantially equal
05/09/1995US5414458 Semiconductor device lead inspection system
05/09/1995US5414404 Semiconductor device having a thin-film resistor
05/09/1995US5414369 Coil spring-pressed needle contact probe modules with offset needles
05/09/1995US5414364 In an integrated circuit
05/09/1995US5414361 Method of measuring very small quantity of impurity in gas
05/09/1995US5414302 Semiconductor device with a multilayered contact structure having a boro-phosphate silicate glass planarizing layer
05/09/1995US5414301 High temperature interconnect system for an integrated circuit
05/09/1995US5414297 Semiconductor device chip with interlayer insulating film covering the scribe lines
05/09/1995US5414295 Avalance diode incorporated in a bipolar integrated circuit
05/09/1995US5414289 Dynamic memory device having a vertical transistor
05/09/1995US5414288 Vertical transistor having an underlying gate electrode contact
05/09/1995US5414287 For an erasable programmable read-only memory or flash-memory
05/09/1995US5414285 Semiconductor device having cladding layer and process for production of the same
05/09/1995US5414284 ESD Protection of ISFET sensors
05/09/1995US5414279 cBN semiconductor device having an ohmic electrode and a method of making the same
05/09/1995US5414277 Thin film transistor which prevents generation of hot carriers
05/09/1995US5414276 Transistors using crystalline silicon devices on glass
05/09/1995US5414273 Heterojunction bipolar transistor
05/09/1995US5414265 Line-width measurements of metallization coated with insulator on microelectronic circuits using energy dispersive x-ray analysis
05/09/1995US5414244 Semiconductor wafer heat treatment apparatus
05/09/1995US5414214 Resistance heated, sealed microfabricated device package method and apparatus
05/09/1995US5413968 Semiconductor device and manufacturing method thereof
05/09/1995US5413967 Method of manufacturing semiconductor devices
05/09/1995US5413966 Semiconductors
05/09/1995US5413965 Method of making microelectronic device package containing a liquid
05/09/1995US5413964 Photo-definable template for semiconductor chip alignment
05/09/1995US5413963 Method for depositing an insulating interlayer in a semiconductor metallurgy system
05/09/1995US5413962 Multi-level conductor process in VLSI fabrication utilizing an air bridge
05/09/1995US5413961 Method for forming a contact of a semiconductor device
05/09/1995US5413959 Method of modifying transparent conductive oxide film including method of manufacturing photovoltaic device
05/09/1995US5413958 Method for manufacturing a liquid crystal display substrate
05/09/1995US5413957 Method for fabricating MOS transistor having source/drain region of shallow junction and silicide film
05/09/1995US5413954 Method of making a silicon-based device comprising surface plasma cleaning
05/09/1995US5413953 Method for planarizing an insulator on a semiconductor substrate using ion implantation
05/09/1995US5413952 Direct wafer bonded structure method of making
05/09/1995US5413951 Composite semiconductor substrate and a fabrication process thereof
05/09/1995US5413950 Method of forming a DRAM stacked capacitor cell
05/09/1995US5413949 Method of making self-aligned MOSFET
05/09/1995US5413948 Method for forming a dual transistor structure
05/09/1995US5413947 Method for manufacturing a semiconductor device with an epitaxial void
05/09/1995US5413946 Method of making flash memory cell with self-aligned tunnel dielectric area
05/09/1995US5413945 Blanket N-LDD implantation for sub-micron MOS device manufacturing
05/09/1995US5413944 Twin tub CMOS process
05/09/1995US5413943 Semiconductor device and method of manufacturing the same
05/09/1995US5413942 Monolithic electronic structures
05/09/1995US5413940 Process of treating SOG layer using end-point detector for outgassing
05/09/1995US5413899 Light-sensitive mixture containing an 0-naphthoquinonediazide-sulfonic acid ester and recording material produced therewith wherein the 0-naphthoquinone diazides are partial esters
05/09/1995US5413898 Method of forming a pattern on a substrate having a step change in height
05/09/1995US5413895 Photosensitive patterns
05/09/1995US5413820 Vacuum vapor deposition with ionization for films
05/09/1995US5413751 Method for making heat-dissipating elements for micro-electronic devices
05/09/1995US5413678 Ammonium hydroxide, hydrogen peroxide, water, semiconductors
05/09/1995US5413673 Plasma processing apparatus
05/09/1995US5413670 Method for plasma etching or cleaning with diluted NF3
05/09/1995US5413669 Metal CVD process with post-deposition removal of alloy produced by CVD process
05/09/1995US5413664 Apparatus for preparing a semiconductor device, photo treatment apparatus, pattern forming apparatus and fabrication apparatus
05/09/1995US5413663 Plasma processing apparatus
05/09/1995US5413527 Environmental control apparatus
05/09/1995US5413521 Inner diameter saw slicing machine
05/09/1995US5413471 Resin-sealing apparatus including a gas spring
05/09/1995US5413167 For use in an exposure apparatus
05/09/1995US5413164 Heating furnace in combination with electronic circuit modules
05/09/1995US5412868 Process of removing polymers in semiconductor vias
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