Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/1995
06/06/1995US5422163 Flexible substrate with projections to block resin flow
06/06/1995US5421979 Load-lock drum-type coating apparatus
06/06/1995US5421974 Integrated circuit having silicide-nitride based multi-layer metallization
06/06/1995US5421958 Forming pattern of defects by applying energy beam through window in photoresist on single crystal silicon surface, removing photoresist, selectively etching damaged crystal to form pattern of light emitting porous silicon
06/06/1995US5421957 Applying reactive gas comprising nitrogen trifluoride, chlorine trifluoride, sulfur hexafluoride, or carbon tetrafluoride to evacuated chamber
06/06/1995US5421954 Process of patterning compound semiconductor film in halogen containing etching gas
06/06/1995US5421953 Method and apparatus for direct bonding two bodies
06/06/1995US5421934 Dry-etching process simulator
06/06/1995US5421905 Method for washing wafers
06/06/1995US5421902 Using fluorine and nitrogen trifluoride to remove laminar deposits of silicon
06/06/1995US5421896 Graphite heater for molecular beam source of carbon
06/06/1995US5421895 Apparatus for vaporizing liquid raw material and apparatus for forming thin film
06/06/1995US5421894 Power loss recovery for wafer heater
06/06/1995US5421893 Susceptor drive and wafer displacement mechanism
06/06/1995US5421892 Vertical heat treating apparatus
06/06/1995US5421889 Method and apparatus for inverting samples in a process
06/06/1995US5421769 Apparatus for planarizing semiconductor wafers, and a polishing pad for a planarization apparatus
06/06/1995US5421723 Sequential step belt furnace with individual concentric cooling elements
06/06/1995US5421695 Transfer apparatus and method
06/06/1995US5421595 Vacuum chuck with venturi jet for converting positive pressure to a vacuum
06/06/1995US5421503 Fine pitch capillary bonding tool
06/06/1995US5421401 Compound clamp ring for semiconductor wafers
06/06/1995US5421365 Flow control apparatus
06/06/1995US5421288 Process for growing silicon epitaxial layer
06/06/1995US5421056 Spin chuck and treatment apparatus using same
06/06/1995CA2021315C Plasma removal of unwanted material
06/03/1995CA2135580A1 Process and apparatus for producing a laminate
06/01/1995WO1995015020A1 Electrical interconnects
06/01/1995WO1995015013A1 Method of mounting a piezoelectric element to a substrate
06/01/1995WO1995015012A1 Plasma deposition process with substrate temperature control
06/01/1995WO1995015007A1 Electronic chip carrier package and method of making thereof
06/01/1995WO1995015006A1 Washing apparatus, semiconductor production apparatus and semiconductor production line
06/01/1995WO1995015005A1 Methods for selective salicidation of source/drain regions of a transistor
06/01/1995WO1995015004A1 Support element for an automatic loading tray of an exposure unit for silicon wafers
06/01/1995DE4442239A1 Appts. for prodn. of single crystals
06/01/1995DE4442106A1 Transistor arrangement for e.g. MOSFet
06/01/1995DE4442067A1 Programmable permanent memory cell
06/01/1995DE4441542A1 SOI-semiconductor device manufacturing method
06/01/1995DE4441512A1 Positioning and stopping system for levitating linear motor vehicles
06/01/1995DE4430483A1 MOS-transistor for e.g. DRAM semiconductor memory device
06/01/1995DE4415412C1 Field effect-controllable semiconductor device prodn.
06/01/1995DE4410461C1 Thyristor with anode side getter region
06/01/1995DE4340592A1 Non-volatile semiconductor memory, especially EEPROM
06/01/1995DE4340226A1 Semiconductor element having reduced bird beak formation
06/01/1995CA2151510A1 Method of mounting a piezoelectric element to a substrate
05/1995
05/31/1995EP0655884A1 Transport-by-suction type die
05/31/1995EP0655883A1 General-purpose lead working machine
05/31/1995EP0655827A1 Constant voltage generating circuit having step-up circuit
05/31/1995EP0655815A1 an instrument for the electrical connection of integrated circuits
05/31/1995EP0655789A1 Method for producing high-temperature superconducting Josephson devices
05/31/1995EP0655788A1 A volatile memory cell
05/31/1995EP0655786A2 Gate electrode formed in trench and method of making the same
05/31/1995EP0655785A2 Nonvolatile semiconductor memory device and its manufacturing method
05/31/1995EP0655784A1 Triangular protection component
05/31/1995EP0655783A1 Fuse for integrated circuit
05/31/1995EP0655782A2 Resin-sealed semiconductor device and method of fabricating same
05/31/1995EP0655781A2 Integrated circuit processing
05/31/1995EP0655780A1 Method for forming an aluminum contact
05/31/1995EP0655779A1 Method of forming solder bumps on an integrated circuit flip chip
05/31/1995EP0655778A2 Manufacturing method of semiconductor memory devices
05/31/1995EP0655777A2 Varactor and method of forming
05/31/1995EP0655776A1 Autoplanarizing process for the passivation of an integrated circuit
05/31/1995EP0655775A1 Dry etching process for SIOX compounds
05/31/1995EP0655774A2 Method of forming polycrystalline silicon layer and surface treatment apparatus therefor
05/31/1995EP0655773A1 Lithographic image size reduction
05/31/1995EP0655772A2 Method and apparatus for scrubbing substrate
05/31/1995EP0655705A2 Method for manufacturing identity cards having electronic modules
05/31/1995EP0655669A1 Stable reference voltage generator circuit
05/31/1995EP0655620A1 Real-time wafer temperature measurement based on light scattering
05/31/1995EP0655514A1 Film depositing apparatus and process for preparing layered structure including oxide superconductor thin film
05/31/1995EP0655513A1 Apparatus and method for stepwise and automatic loading and unloading of a coating apparatus
05/31/1995EP0655323A2 Single strip moulding apparatus with means for exerting pressure
05/31/1995EP0390871B1 Plasma pinch system and method of using same
05/31/1995EP0308516B1 Method of determining end point of cleaning in an apparatus for manufacturing semiconductor devices
05/31/1995CN2199596Y Band sticking device for silicons single crystal slice
05/31/1995CN1103227A Method for detecting state of focusing
05/31/1995CN1103203A Mass simultaneous sealing and electrical connection of electronic devices
05/31/1995CN1103115A Improved method for growing silicon crystal
05/31/1995CN1103077A Photopolymerisable compositions
05/31/1995CN1028691C Method for manufacturing semiconductor
05/31/1995CN1028670C In situ monitoring technique and apparatus for chemical/mechanical planarization endpoint detection
05/30/1995US5420869 Semiconductor integrated circuit device
05/30/1995US5420824 Large-scale semiconductor integrated circuit device and method for relieving the faults thereof
05/30/1995US5420823 Semiconductor memory with improved power supply control circuit
05/30/1995US5420819 Method for sensing data in a magnetoresistive memory using large fractions of memory cell films for data storage
05/30/1995US5420817 Semiconductor integrated circuit device comprising memory area in which structurally different memory cells are included
05/30/1995US5420812 Bidirectional type CCD
05/30/1995US5420803 Enhanced resolution wafer thickness measurement system
05/30/1995US5420800 Layout method for a semiconductor integrated circuit device
05/30/1995US5420796 Method of inspecting planarity of wafer surface after etchback step in integrated circuit fabrication
05/30/1995US5420756 Memory card including stacked semiconductor memory elements located on a printed circuit board having a straight wiring pattern
05/30/1995US5420752 GPT system for encapsulating an integrated circuit package
05/30/1995US5420751 Ultra high density modular integrated circuit package
05/30/1995US5420558 Thin film transformer
05/30/1995US5420544 Semiconductor integrated circuit, method of designing the same and method of manufacturing the same
05/30/1995US5420524 Differential gain stage for use in a standard bipolar ECL process
05/30/1995US5420520 Method and apparatus for testing of integrated circuit chips
05/30/1995US5420513 Dielectric breakdown prediction and dielectric breakdown life-time prediction using iterative voltage step stressing
05/30/1995US5420505 Direct current booster with test circuit
05/30/1995US5420462 Semiconductor device with conductors on stepped substrate having planar upper surfaces
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