| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 04/12/1995 | EP0647905A1 Integrated circuit having current monitoring cells for testing |
| 04/12/1995 | EP0647884A1 Photoresist strippers containing reducing agents to reduce metal corrosion |
| 04/12/1995 | EP0647828A2 Cofocal optical systems for thickness measurements of patterned wafers |
| 04/12/1995 | EP0647827A2 Film thickness measurement of structures containing a scattering surface |
| 04/12/1995 | EP0647788A1 Tare supporting apparatus |
| 04/12/1995 | EP0647383A1 Single crystal silicon arrayed devices for projection displays |
| 04/12/1995 | EP0647357A1 Semiconductor chip encapsulation method, device produced by this method and its application to three dimensional chip interconnection |
| 04/12/1995 | EP0647356A1 Process for producing a dish capacitor |
| 04/12/1995 | EP0647355A1 Process for producing a semiconductor storage device |
| 04/12/1995 | EP0647354A1 Process for manufacturing an active matrix display |
| 04/12/1995 | EP0647352A1 Transport system for wafer processing line |
| 04/12/1995 | EP0647310A1 Method of an apparatus for interferometrically inspecting a surface of an object. |
| 04/12/1995 | EP0647163A1 A plasma cleaning method for removing residues in a plasma treatment chamber |
| 04/12/1995 | EP0629312A4 IMPROVED METHOD FOR ISOLATING SiO 2? LAYERS FROM PZT, PLZT, AND PLATINUM LAYERS. |
| 04/12/1995 | EP0601093A4 Igbt process and device with platinum lifetime control. |
| 04/12/1995 | EP0570424A4 Carrier ring for semiconductor packages. |
| 04/12/1995 | EP0530230B1 Single wafer processor apparatus |
| 04/12/1995 | EP0513180B1 Electronic component carrier |
| 04/12/1995 | EP0401354B1 Semiconductor device comprising an integrated circuit having a vertical transistor |
| 04/12/1995 | CN1101458A Wafer-like processing after sawing dmds |
| 04/12/1995 | CN1101457A A method for making a metal oxide semiconductor-field effect transistor with drain separated from channel |
| 04/12/1995 | CN1101451A Nonvolatile semiconductor memories with a nand logic cell structure |
| 04/12/1995 | CN1101367A Adhesive sheet for wafer and process for preparing semiconductor apparatus using the same |
| 04/12/1995 | CN1028192C Process for compensating collecting zone by local ion implanation |
| 04/12/1995 | CN1028191C Direct bonding process for silicon plate |
| 04/11/1995 | US5406636 Signal processing device |
| 04/11/1995 | US5406524 Nonvolatile semiconductor memory that eases the dielectric strength requirements |
| 04/11/1995 | US5406521 Semiconductor memory device and data erase method for it |
| 04/11/1995 | US5406515 Method for fabricating low leakage substrate plate trench DRAM cells and devices formed thereby |
| 04/11/1995 | US5406511 Mask ROM for storing plural-bit data |
| 04/11/1995 | US5406498 Floor-planning system for predetermining a layout for a PCB or an LSI based on a block diagram |
| 04/11/1995 | US5406447 Semiconductor device |
| 04/11/1995 | US5406446 Thin film capacitor |
| 04/11/1995 | US5406373 Alignment mark and aligning method using the same |
| 04/11/1995 | US5406372 QFP lead quality inspection system and method |
| 04/11/1995 | US5406312 Semiconductor integrated circuit and display apparatus |
| 04/11/1995 | US5406232 Semiconductor capacitor element and a circuit employing the same |
| 04/11/1995 | US5406211 Jigs for burn-in test |
| 04/11/1995 | US5406210 Apparatus and method for testing bare dies with low contact resistance between the die and testing station |
| 04/11/1995 | US5406194 High speed resolution |
| 04/11/1995 | US5406133 BICMOS reprogrammable logic |
| 04/11/1995 | US5406123 Single crystal titanium nitride epitaxial on silicon |
| 04/11/1995 | US5406115 Semiconductor device including bipolar transistor having shallowed base and method for manufacturing the same |
| 04/11/1995 | US5406114 Bipolar high-frequency transistor |
| 04/11/1995 | US5406112 Semiconductor device having a buried well and a crystal layer with similar impurity concentration |
| 04/11/1995 | US5406108 Interconnection construction of semiconductor device |
| 04/11/1995 | US5406107 Static semiconductor memory device having capacitors for increased soft error immunity |
| 04/11/1995 | US5406106 Semiconductor Bi-MIS device and method of manufacturing the same |
| 04/11/1995 | US5406105 Electro static discharge protecting circuit |
| 04/11/1995 | US5406102 Semiconductor device and manufacturing method thereof |
| 04/11/1995 | US5406101 Signal charge transfer device |
| 04/11/1995 | US5406100 Semiconductor integrated circuit device having multi-contact wiring structure |
| 04/11/1995 | US5406099 High electron mobility transistor |
| 04/11/1995 | US5406098 Semiconductor circuit device and method for production thereof |
| 04/11/1995 | US5406096 Device and method for high performance high voltage operation |
| 04/11/1995 | US5406094 Quantum interference effect semiconductor device and method of producing the same |
| 04/11/1995 | US5406092 Apparatus and method using optical sensors recessed in channel walls for detector substrates in a support |
| 04/11/1995 | US5406088 Scan and tilt apparatus for an ion implanter |
| 04/11/1995 | US5406080 Process for monitoring ion-assisted processing procedures on wafers and an apparatus for carrying out the same |
| 04/11/1995 | US5406025 VLSI-chips package with floatingly mounted chip means |
| 04/11/1995 | US5405810 Alignment method and apparatus |
| 04/11/1995 | US5405809 Semiconductor device, an image sensor device, and methods for producing the same |
| 04/11/1995 | US5405807 Semiconductor hybrids and method of making same |
| 04/11/1995 | US5405806 Method for forming a metal silicide interconnect in an integrated circuit |
| 04/11/1995 | US5405805 Forming multilevel wiring structure by forming interlayer insulating films, exposing to alkoxyfluorosilane vapor |
| 04/11/1995 | US5405804 Method of manufacturing a semiconductor device by laser annealing a metal layer through an insulator |
| 04/11/1995 | US5405803 Method of manufacturing a semiconductor device |
| 04/11/1995 | US5405802 Process of fabricating a semiconductor substrate |
| 04/11/1995 | US5405801 Method for manufacturing a capacitor of a semiconductor device |
| 04/11/1995 | US5405799 Forming lower and upper electrode plates separated by predetermined distance and connected by electroconductive bars |
| 04/11/1995 | US5405798 Method of producing a dynamic random access memory device having improved contact hole structures |
| 04/11/1995 | US5405797 Method of producing a monolithically integrated millimeter wave circuit |
| 04/11/1995 | US5405796 Capacitor and method of formation and a memory cell formed therefrom |
| 04/11/1995 | US5405795 Method of forming a SOI transistor having a self-aligned body contact |
| 04/11/1995 | US5405794 Method of producing VDMOS device of increased power density |
| 04/11/1995 | US5405793 Multilayer; variations in doping concentration |
| 04/11/1995 | US5405792 Method of manufacturing schottky barrier gate type fet |
| 04/11/1995 | US5405791 Process for fabricating ULSI CMOS circuits using a single polysilicon gate layer and disposable spacers |
| 04/11/1995 | US5405790 Method of forming a semiconductor structure having MOS, bipolar, and varactor devices |
| 04/11/1995 | US5405789 Method of manufacturing a semiconductor device whereby a laterally bounded semiconductor zone is formed in a semiconductor body in a self-aligning manner |
| 04/11/1995 | US5405788 Method for forming and tailoring the electrical characteristics of semiconductor devices |
| 04/11/1995 | US5405787 Structure and method of manufacture for MOS field effect transistor having lightly doped drain and source diffusion regions |
| 04/11/1995 | US5405783 Removing photoremovable protective group from region of substrate, contacting with protected amino acid, repeating to form peptide |
| 04/11/1995 | US5405734 Applying photoresist; exposure to light; solvent removal of exposured photoresist |
| 04/11/1995 | US5405721 Phase-shifting lithographic masks having phase-shifting layers of differing compositions |
| 04/11/1995 | US5405720 Radiation-sensitive composition containing 1,2 quinonediazide compound, alkali-soluble resin and monooxymonocarboxylic acid ester solvent |
| 04/11/1995 | US5405535 Method of removing metal impurity |
| 04/11/1995 | US5405518 Workpiece holder apparatus |
| 04/11/1995 | US5405508 Method for regenerating tetraalkylammonium hydroxide |
| 04/11/1995 | US5405492 Independently and selectively generating plasma or activated species using plurity of remote plasma generating energy sources associated with semiconductor wafer fabrication reactor without gas cycling |
| 04/11/1995 | US5405491 Plasma etching process |
| 04/11/1995 | US5405489 Surface treatment of borophosphosilicate glass |
| 04/11/1995 | US5405481 Gas expansion chamber equipped with gas supply for producing patterns, microcapillaries for gas discharge, optical fiber coupled to light source, means for detecting and processing light signal reflected from sample |
| 04/11/1995 | US5405480 Induction plasma source |
| 04/11/1995 | US5405476 Method of mounting a piezoelectric element to a substrate using compliant conductive materials |
| 04/11/1995 | US5405454 Comprising a quantum dot or wire disposed between at least two insulating layers formed by oxidizing the silicon substrate, the boundary having positional accuracy, flatness and linearity |
| 04/11/1995 | US5405447 Plasma CVD apparatus |
| 04/11/1995 | US5405446 Apparatus for heat processing a substrate |
| 04/11/1995 | US5405444 Process chamber purge module for semiconductor processing equipment |
| 04/11/1995 | US5405443 Substrates processing device |