Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/1995
07/11/1995US5432116 Method for the fabrication of dynamic random access memory capacitor
07/11/1995US5432115 Process for making a contact betwen a capacitor electrode disposed in a trench and an MOS transistor source/drain region disposed outside the trench
07/11/1995US5432114 Process for integration of gate dielectric layers having different parameters in an IGFET integrated circuit
07/11/1995US5432113 Method of making a semiconductor memory device
07/11/1995US5432112 Process for EPROM, flash memory with high coupling ratio
07/11/1995US5432110 Method for fabricating non-volatile semiconductor memory device having two-layered gate structure transistor
07/11/1995US5432109 Device method for manufacturing a semiconductor memory
07/11/1995US5432108 Method for fabricating a thin film transistor
07/11/1995US5432107 Semiconductor fabricating method forming channel stopper with diagonally implanted ions
07/11/1995US5432106 Manufacture of an asymmetric non-volatile memory cell
07/11/1995US5432105 Method for fabricating self-aligned polysilicon contacts on FET source/drain areas
07/11/1995US5432104 Method for fabricating a vertical bipolar transistor with reduced parasitic capacitance between base and collector regions
07/11/1995US5432102 Method of making thin film transistor with channel and drain adjacent sidewall of gate electrode
07/11/1995US5432073 Method for metal deposition without poison via
07/11/1995US5432044 Method of forming a pattern using a phase shifting mask
07/11/1995US5431964 Method of pretreating the deposition chamber and/or the substrate for the selective deposition of tungsten
07/11/1995US5431863 Method of mounting semiconductor device
07/11/1995US5431799 Collimation hardware with RF bias rings to enhance sputter and/or substrate cavity ion generation efficiency
07/11/1995US5431778 Dry etch method using non-halocarbon source gases
07/11/1995US5431777 Methods and compositions for the selective etching of silicon
07/11/1995US5431774 Copper etching
07/11/1995US5431773 Method of manufacturing semiconductor device
07/11/1995US5431772 Hexafluorosulfide, hydrobromic acid
07/11/1995US5431770 Semiconductor integrated circuits
07/11/1995US5431769 Method and system for plasma treatment
07/11/1995US5431766 System for the photoelectrochemical etching of silicon in an anhydrous environment
07/11/1995US5431740 Carbon dioxide precision cleaning system for cylindrical substrates
07/11/1995US5431736 Method for transforming a liquid flow into a gas flow and a device for implementing the method
07/11/1995US5431734 Aluminum oxide low pressure chemical vapor deposition (LPCVD) system-fourier transform infrared (FTIR) source chemical control
07/11/1995US5431700 Vertical multi-process bake/chill apparatus
07/11/1995US5431600 Automatic transferring system using portable closed container
07/11/1995US5431599 Modular assembly
07/11/1995US5431571 Electrical conductive polymer matrix
07/11/1995US5431561 Method and apparatus for heat treating
07/11/1995US5431529 Articulated arm transfer device
07/11/1995US5431527 Non-contact type moving table system
07/11/1995US5431421 Semiconductor processor wafer holder
07/11/1995US5431332 Method and apparatus for solder sphere placement using an air knife
07/11/1995US5431329 Method of forming a ball end for a solder wire
07/11/1995US5431328 Method for forming a bonded structure
07/11/1995US5431324 Ultrasonic bonding apparatus and quality monitoring method
07/11/1995US5431179 Wafer drying apparatus and fire-extinguishing method therefor
07/11/1995US5431178 Centrifugal type, enclosed cleaning apparatus
07/11/1995US5431126 Method of forming semiconductor crystal and semiconductor device
07/11/1995CA2038162C Programmable connector
07/07/1995CA2139454A1 Thermocompression bonding using an aluminum-gold intermetallic
07/07/1995CA2139452A1 Hermetic package for a high power semiconductor device
07/06/1995WO1995018488A1 Semiconductor circuit
07/06/1995WO1995018480A1 Holographic technique for extreme microcircuitry size reduction
07/06/1995WO1995018463A1 Single crystal silicon on quartz
07/06/1995WO1995018462A1 Method and device for manufacturing semiconductor substrate
07/06/1995WO1995018461A1 Method and pellet for encapsulating lead frames and device for manufacturing pellets
07/06/1995WO1995018460A1 Thin film formation method
07/06/1995WO1995018459A1 Apparatus and method for processing of semiconductors, such as silicon chips
07/06/1995WO1995018353A1 Method and apparatus for monitoring thin films
07/06/1995WO1995018246A1 Stainless steel and piping system
07/06/1995WO1995018240A1 Austenitic stainless steel, piping system and fluid-contacting parts
07/06/1995WO1995018190A1 Isolation film of semiconductor device, coating fluid for forming the film, and process for producing the film
07/06/1995WO1995017993A1 Method and apparatus for continuously producing a multiplicity of types
07/06/1995DE4447266A1 Prodn. of dynamic semiconductor storage device
07/06/1995DE4447264A1 Prodn. of phase shift mask with improved yield
07/06/1995DE4447255A1 Semiconductor device comprising MOSFETs of reduced size
07/06/1995DE4447254A1 Prodn. of MOSFET used in semiconductor switches
07/06/1995DE4447229A1 Semiconductor DRAM memory mfr. using source-coupled MOSFETs
07/06/1995DE4447149A1 Completely planar, concave MOS transistor for VLSI circuit
07/06/1995DE4447148A1 Forming field oxide insulating film using LOCOS process for semiconductor device mfr.
07/06/1995DE4444584A1 Semiconductor wafer for burn-in testing of integrated circuits
07/06/1995DE4400097A1 Semiconductor material lifetime testing
07/05/1995EP0661813A2 Diode coupled CMOS logic design for quasi-static resistive dissipation with multi-output capability
07/05/1995EP0661783A1 Method for fabricating semiconductor light integrated circuit
07/05/1995EP0661761A2 Method of manufacturing photoelectric transducer
07/05/1995EP0661760A2 Method and apparatus for forming deposited film
07/05/1995EP0661756A1 Non-volatile memory cell with double polisilicon level
07/05/1995EP0661754A2 A substrate providing a ferroelectric crystal thin film, its production method and a device using said substrate
07/05/1995EP0661753A1 Semiconductor structure with field limiting ring and method for making
07/05/1995EP0661752A2 Dynamic random access memory device and method for producing the same
07/05/1995EP0661751A1 CMOS device with high and low voltage transistors
07/05/1995EP0661750A1 Semiconductor device capable of assembling adjacent sub chips into one chip
07/05/1995EP0661746A1 Microwave integrated circuit and their fabrication
07/05/1995EP0661745A1 Metal-to-metal antifuse including etch stop layer
07/05/1995EP0661744A1 Semiconductor integrated circuit device
07/05/1995EP0661743A2 Film carrier tape for use in tape automated bonding
07/05/1995EP0661742A1 Integrated circuits with passivation and metallization for hermetic protection
07/05/1995EP0661738A1 Cavity down mounting seam welding ceramic package for semiconducteur device
07/05/1995EP0661737A1 Grid array masking tape process
07/05/1995EP0661736A1 Method for fabricating multilayer semiconductor device
07/05/1995EP0661735A1 Process for the manufacturing of integrated circuits, particularly of intelligent power semiconductor devices
07/05/1995EP0661734A2 Method of forming via holes in an insulation film and method of cutting the insulation film
07/05/1995EP0661733A2 One dimensional silicon quantum wire devices and the method of manufacture thereof
07/05/1995EP0661732A2 A method of forming silicon oxy-nitride films by plasma-enhanced chemical vapor deposition
07/05/1995EP0661731A2 A single chamber CVD process for thin film transistors
07/05/1995EP0661730A1 Manufacturing method of semiconductor devices
07/05/1995EP0661710A2 Semiconductor memory device including a boost potential generation circuit
07/05/1995EP0661666A2 Process for the production of an identity card
07/05/1995EP0661550A2 Method for burning-in semiconductor chips
07/05/1995EP0661386A1 A film deposition method
07/05/1995EP0661385A1 Method for forming oxide film
07/05/1995EP0661244A2 Fabrication of thin film materials
07/05/1995EP0661110A1 Process for oxidation of an article surface
07/05/1995EP0660967A1 Methods and apparatus for producing integrated circuit devices