Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/1995
07/04/1995US5428861 Method and apparatus for cleaning a processing tube
06/1995
06/30/1995CA2133898A1 Integrated circuits with passivation and metallization for hermetic protection
06/29/1995WO1995017768A1 Address line repair structure and method for thin film imager devices
06/29/1995WO1995017767A1 Repair line structure for thin film electronic devices
06/29/1995WO1995017766A1 A method for fabricating integrated circuits
06/29/1995WO1995017533A1 Material of chemical compounds with a metal in group iv a of the periodic system, nitrogen and oxygen and process for producing it
06/29/1995DE4446983A1 Mfg. capacitor with higher capacitance for semiconductor device
06/29/1995DE4446881A1 Durchgangsloch und Herstellungsverfahren eines Durchgangslochs Through-hole, and manufacturing method of a through hole
06/29/1995DE4446852A1 Forming microstructure for semiconductor device
06/29/1995DE4446850A1 Transistor mfg. process for semiconductor device prodn.
06/29/1995DE4445864A1 Insulation thickness measuring system for semiconductor wafer
06/29/1995DE4443593A1 Semiconductor device using transistor with silicide structure
06/29/1995DE4442648A1 Semiconductor component mfr. is subsequent steps
06/29/1995DE4426604A1 Forming semiconductor insulating region on semiconductor substrate
06/29/1995DE4400033C1 Dynamic random access memory cell mfr.
06/29/1995DE4343843A1 Structured metallisation prodn. on substrate surface
06/28/1995EP0660655A1 A tray assembly for transporting precision devices
06/28/1995EP0660525A1 Tree structure with logic gates of the type "Exclusive-OR" and frequency multiplier using the same
06/28/1995EP0660524A1 Integrated exclusive-OR logic gate
06/28/1995EP0660500A1 Electrostatic chuck with reference electrode
06/28/1995EP0660499A1 Guard ring electrostatic chuck
06/28/1995EP0660429A1 Method for encapsulating a ceramic device for embedding in composite structures
06/28/1995EP0660421A2 Photoelectric converter, its driving method, and system including the photoelectric converter
06/28/1995EP0660420A1 A linear field effect transistor
06/28/1995EP0660419A2 Drain/source doping profile of high voltage transistor for sub-micron CMOS processes
06/28/1995EP0660418A2 Conductor-insulator-semiconductor (CIS) transistor
06/28/1995EP0660417A2 A method and structure of enhancing the current gain of bipolar junction transistors
06/28/1995EP0660415A1 Stacked high voltage transistor unit
06/28/1995EP0660412A1 Switching element with memory provided with Schottky tunnelling barrier
06/28/1995EP0660411A2 Integrated semiconductor circuit with capacitors having exactly defined capacities
06/28/1995EP0660409A1 Method for fabricating integrated circuits
06/28/1995EP0660407A1 Adhesive for semiconductor device and reinforcing material using the same
06/28/1995EP0660403A1 Semiconductor device
06/28/1995EP0660402A1 Integrated structure pad assembly for wire bonding on active area in power semiconductor devices, particularly with cellular structure, and manufacturing process therefor
06/28/1995EP0660396A1 Power MOS device chip and package assembly
06/28/1995EP0660395A2 Self-aligned contact with zero offset to gate
06/28/1995EP0660394A1 CMOS integrated circuit fabrication
06/28/1995EP0660393A1 Method and dielectric structure for facilitating overetching of metal without damage to inter-level dielectric
06/28/1995EP0660392A1 Method and interlevel dielectric structure for improved metal step coverage
06/28/1995EP0660391A2 Semiconductor device with a trench isolation region and method of manufacturing the same
06/28/1995EP0660390A2 Isolation structure using liquid phase oxide deposition
06/28/1995EP0660389A2 Method of manufacturing semiconductor devices having element separating regions
06/28/1995EP0660388A1 Method of making an electrostatic chuck with oxide insulator
06/28/1995EP0660387A2 Method and apparatus for measuring oxide charge on a semiconductor wafer
06/28/1995EP0660386A1 Test structure for integrated circuit
06/28/1995EP0660385A2 Intelligent test line system
06/28/1995EP0660384A1 Method for electrodeposition of solder
06/28/1995EP0660383A1 Electronic device package
06/28/1995EP0660382A2 Hybrid circuits and a method of manufacture
06/28/1995EP0660381A1 Method of manufacturing a transparent conductor pattern and a liquid crystal display device
06/28/1995EP0660380A2 Bandgap tuning of semiconductor quantum well structures
06/28/1995EP0660379A2 Method for semiconductor crystal growth
06/28/1995EP0660378A1 Electrostatic chuck with oxide insulator
06/28/1995EP0660377A1 Method for applying a wafer to a mount plate
06/28/1995EP0660371A2 Reticle having a number of subfields
06/28/1995EP0660370A2 Electron beam lithography system
06/28/1995EP0660369A1 Scan and tilt apparatus for an ion implanter
06/28/1995EP0660190A1 Method of removing photo resist
06/28/1995EP0660189A2 Method for stripping photoresist
06/28/1995EP0660188A1 Lens system with lens elements arranged in a gas-filled holder, and photolithographic apparatus including such a system
06/28/1995EP0660187A1 Radiation-sensitive resin composition
06/28/1995EP0660185A2 Simplified fabrication methods for rim phase-shift masks
06/28/1995EP0660184A2 Phase shift mask using liquid phase oxide deposition
06/28/1995EP0660183A2 Mask for transferring a pattern for use in a semiconductor device and method for manufacturing the same
06/28/1995EP0660169A1 Projection exposure apparatus
06/28/1995EP0660140A1 Method for making a relief structure on a substrate from semiconductor material
06/28/1995EP0659905A1 Plasma chemical vapor deposition device capable of suppressing generation of polysilane powder
06/28/1995EP0659904A2 Vaporized hydrogen silsesquioxane for depositing a coating
06/28/1995EP0659858A2 Copper-based metal polishing solution and method for manufacturing a semiconductor device
06/28/1995EP0659707A1 An aluminium nitride body and method for forming said body utilizing a vitreous sintering additive
06/28/1995EP0659564A2 Ink jet head cartridge and ink jet apparatus
06/28/1995EP0659298A1 Ohmic contact structure between platinum and silicon carbide
06/28/1995EP0659282A1 Color filter system for display panels
06/28/1995EP0602076B1 Process for cleaning hard surfaces, in particular in clean-room conditions
06/28/1995EP0506690B1 Transport system, in particular for transporting silicon monocrystals through the tank of a research reactor
06/28/1995EP0417484B1 Semiconductor memory device and process for making the same
06/28/1995CN1104415A 半导体器件 Semiconductor devices
06/28/1995CN1104372A Apparatus for coating base sheet of semiconductor products with film
06/28/1995CN1104371A Method for processing semiconductor device, apparatus for processing a semiconductor and apparatus for processing semiconductor device
06/28/1995CN1104341A Wafer-like processing after sawing dmds
06/28/1995CN1104264A Hot-wall sealed low-temp-pressure silicon dioxide thin-film deposition technology
06/28/1995CN1104262A Method for controlling a collimated sputtering source
06/28/1995CN1029135C Method and apparatus for vapor deposition of diamond
06/28/1995CA2139072A1 Apparatus and method for increasing breakdown voltage ruggedness in semiconductor devices
06/27/1995US5428580 Nonvolatile semiconductor memory having an address-transition-detection circuit
06/27/1995US5428572 Program element for use in redundancy technique for semiconductor memory device
06/27/1995US5428570 Nonvolatile semiconductor memory device
06/27/1995US5428552 Data compaction techniques for generation of a complex image
06/27/1995US5428498 Office environment level electrostatic discharge protection
06/27/1995US5428478 Optical mask and exposure method using the optical mask
06/27/1995US5428442 Inspection system with in-lens, off-axis illuminator
06/27/1995US5428312 ECL interface circuit
06/27/1995US5428304 Programmable gate array with special interconnects for adjacent gates and isolation devices used during programming
06/27/1995US5428302 Logic circuit with controlled current supply output
06/27/1995US5428298 Probe structure for testing a semiconductor chip and a press member for same
06/27/1995US5428255 Gate array base cell with multiple P-channel transistors
06/27/1995US5428251 Multi-layer wiring structure having continuous grain boundaries
06/27/1995US5428247 Down-bonded lead-on-chip type semiconductor device
06/27/1995US5428244 Metal silicide layer functions as electrode or as a wire
06/27/1995US5428243 Bipolar transistor with a self-aligned heavily doped collector region and base link regions.