Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/1995
06/21/1995EP0658758A1 Method and apparatus for real-time, in-situ endpoint detection and closed loop etch process control
06/21/1995EP0658436A1 Diffusion patterning process and screen therefor
06/21/1995EP0658276A1 METHOD FOR PREPARING A CuInSe2 COMPOUND
06/21/1995EP0658272A1 Coil molded into magnetic stator.
06/21/1995EP0646288A4 Single polysilicon layer flash e?2 prom cell.
06/21/1995EP0613585A4 Semiconductor nanocrystals covalently bound to solid inorganic surfaces using self-assembled monolayers.
06/21/1995EP0467944B1 Substitutional carbon in silicon
06/21/1995EP0414859B1 Improved etch chamber with gas dispersing membrane
06/21/1995CN2201727Y Ceramic package semi-conductor anti-electrophoresis device
06/21/1995CN1029043C Process for the vapor deposition of polysilanes
06/20/1995US5426658 Semiconductor laser including ridge confining buffer layer
06/20/1995US5426614 Memory cell with programmable antifuse technology
06/20/1995US5426605 Semiconductor memory device
06/20/1995US5426604 MOS semiconductor device with memory cells each having storage capacitor and transfer transistor
06/20/1995US5426563 Three-dimensional multichip module
06/20/1995US5426558 Anti-stick electrostatic chuck for a low pressure environment
06/20/1995US5426399 Film carrier signal transmission line having separating grooves
06/20/1995US5426383 NCMOS - a high performance logic circuit
06/20/1995US5426331 Semiconductor device with multi-layered heat-resistive electrode in titanium-titanium nitride-plantinum-gold system
06/20/1995US5426330 A interconnector for integrated circuits having a protective coating encapsulated the electrical lines; wear resistance, corrosion resistance
06/20/1995US5426329 Uniformity doping
06/20/1995US5426328 BICDMOS structures
06/20/1995US5426327 MOS semiconductor with LDD structure having gate electrode and side spacers of polysilicon with different impurity concentrations
06/20/1995US5426325 Metal crossover in high voltage IC with graduated doping control
06/20/1995US5426324 High capacitance multi-level storage node for high density TFT load SRAMs with low soft error rates
06/20/1995US5426323 Integrated semiconductor circuit with ESD protection
06/20/1995US5426322 Semiconductor structure
06/20/1995US5426321 Semiconductor memory element and semiconductor memory device
06/20/1995US5426319 High-frequency semiconductor device including microstrip transmission line
06/20/1995US5426318 Horizontal charge coupled device having a multiple reset gate
06/20/1995US5426266 Die bonding connector and method
06/20/1995US5426164 Photodefinable polymers containing perfluorocyclobutane groups
06/20/1995US5426076 Dielectric deposition and cleaning process for improved gap filling and device planarization
06/20/1995US5426075 Semiconductors
06/20/1995US5426074 Process for fabricating an active matrix circuit
06/20/1995US5426073 Method of fabricating semiconductor devices using an intermediate grinding step
06/20/1995US5426072 Process of manufacturing a three dimensional integrated circuit from stacked SOI wafers using a temporary silicon substrate
06/20/1995US5426071 Polyimide copolymer film for lift-off metallization
06/20/1995US5426069 Implanting silicon substrate with germanium ions to form active alloy regions which are free from defects
06/20/1995US5426068 Method of manufacturing compound semiconductor wafer
06/20/1995US5426067 Method for manufacturing semiconductor device with reduced junction capacitance
06/20/1995US5426066 Late programming mask ROM and process for producing the same
06/20/1995US5426065 Method of making transistor devices in an SRAM cell
06/20/1995US5426064 Method of fabricating a semiconductor device
06/20/1995US5426063 Method of making a field effect transistor with submicron channel length and threshold implant using oblique implantation
06/20/1995US5426061 Impurity gettering in semiconductors
06/20/1995US5426059 Method of making vertically stacked bipolar semiconductor structure
06/20/1995US5426058 Method of manufacturing solid-state imaging device
06/20/1995US5426057 Reacting solution of inorganic compound with organic material on surface to form precipitate which can then be dissolved and measured
06/20/1995US5426017 Composition and method for removing photoresist composition from substrates surfaces
06/20/1995US5426016 Method of forming and removing resist pattern
06/20/1995US5426007 Photomask and process of making semiconductor device by the use of the photomask
06/20/1995US5425982 Multi-layer wiring structure for semiconductor device and method of making the same
06/20/1995US5425848 Method of providing a patterned relief of cured photoresist on a flat substrate surface and device for carrying out such a method
06/20/1995US5425846 Etching in gaseous atmosphere
06/20/1995US5425845 Method for selective removal of hard trench masks
06/20/1995US5425844 Method of making layer containing magnetic material
06/20/1995US5425843 Using mixture of hydrogen and inert gas
06/20/1995US5425833 Semiconductor chip removal process and apparatus
06/20/1995US5425812 Reaction chamber for a chemical vapor deposition apparatus and a chemical vapor deposition apparatus using such a reaction chamber
06/20/1995US5425811 Apparatus for manufacturing a nitrogen containing compound thin film
06/20/1995US5425808 Ion implanting pattern of nucleation surface sites on portion of non-nucleation surface, supplying gas phase material to form film, growing mixed crystal compound film only on nucleation surface
06/20/1995US5425793 Coupling-type clean space apparatus
06/20/1995US5425611 Substrate handling and processing system
06/20/1995US5425493 Selective addition of a solder ball to an array of solder balls
06/20/1995US5425491 Comprising a shank, a concave end pressing surface formed of a hard material selected from the group selected from polycrystalline diamond, single crystal diamond, sintered diamond compacts and cubic boron nitride; uniform pressing
06/20/1995US5425392 Method DRAM polycide rowline formation
06/20/1995CA1335950C Method of forming semiconducting amorphous silicon films from the thermal decomposition of dihalosilanes
06/15/1995WO1995016280A1 Porous semiconductor material
06/15/1995WO1995016277A1 Surface cleaning method and surface cleaning agent of substrate
06/15/1995WO1995016276A1 Display device and its manufacture
06/15/1995WO1995016274A1 Method of writing a pattern by an electron beam
06/15/1995WO1995016192A1 Method of producing cavity structures
06/15/1995WO1995016177A1 Heat sink with a heat plate
06/15/1995WO1995015905A1 Detaching linerless labels
06/15/1995CA2153803A1 Detaching linerless labels
06/14/1995EP0658073A1 Plasma generating apparatus and method
06/14/1995EP0657944A2 Gate controlled lateral bipolar junction transistor and method of fabrication thereof
06/14/1995EP0657942A2 Lateral bipolar transistor
06/14/1995EP0657940A2 Dielectrically isolated semiconductor devices having improved characteristics
06/14/1995EP0657935A2 Semiconductor memory device and method of making it
06/14/1995EP0657934A1 Semiconductor integrated circuit
06/14/1995EP0657933A1 Integrated structure active clamp for the protection of power semiconductor devices against overvoltages
06/14/1995EP0657932A2 Terminal electrode for a chip package, assembly and method of production
06/14/1995EP0657930A2 Integrated circuit structure with at least a CMOS NAND gate and method of fabricating the same
06/14/1995EP0657929A2 Mosfets with improved short channel effects and method of making the same
06/14/1995EP0657928A1 Non-volatile memory devices
06/14/1995EP0657927A1 Flash EPROM devices
06/14/1995EP0657926A2 Window processing for silicon components
06/14/1995EP0657925A1 Enhanced planarization technique for an integrated circuit
06/14/1995EP0657924A2 Method for analyzing an impurity on a semiconductor substrate
06/14/1995EP0657923A2 Method of protecting a solder ball during an etch process, by applying a resist around the base of the solder ball
06/14/1995EP0657922A1 A packaged semiconductor device and method of its manufacture
06/14/1995EP0657921A1 Semiconductor device and method of producing the same
06/14/1995EP0657920A1 An automatic wafer etching method and apparatus
06/14/1995EP0657919A1 Device for handling wafers
06/14/1995EP0657918A2 Method and apparatus for baking and cooling semiconductor wafers and the like
06/14/1995EP0657917A1 Wire bonding apparatus
06/14/1995EP0657916A1 Electron beam direct writing system for ULSI lithography with easy rotation and gain corrections of shot patterns and electron beam direct writing method for the same
06/14/1995EP0657900A1 Hybrid magnetic substrate and method for producing the same