Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/1995
07/18/1995US5434044 Method for the formation of tin barrier layer with preferential (111) crystallographic orientation
07/18/1995US5434026 Exposure condition measurement method
07/18/1995US5433975 Deposition of tungsten films from mixtures of tungsten hexafluoride organohydrosilanes and hydrogen
07/18/1995US5433836 Arc source macroparticle filter
07/18/1995US5433823 Semiconductor integrated circuits with passivation films of silicon oxides on silicon nitrides, photoresists, etching with gases
07/18/1995US5433813 Semiconductor device manufacturing apparatus
07/18/1995US5433812 Apparatus for enhanced inductive coupling to plasmas with reduced sputter contamination
07/18/1995US5433794 Semiconductors
07/18/1995US5433790 Chemical vapor deposition with discharge plasma from microwave source
07/18/1995US5433787 Apparatus for forming deposited film including light transmissive diffusion plate
07/18/1995US5433785 Thermal treatment apparatus, semiconductor device fabrication apparatus, load-lock chamber
07/18/1995US5433784 Vertical treating apparatus having a restricting means for avoiding misalignment
07/18/1995US5433780 Vacuum processing apparatus and exhaust system that prevents particle contamination
07/18/1995US5433651 In-situ endpoint detection and process monitoring method and apparatus for chemical-mechanical polishing
07/18/1995US5433650 Method for polishing a substrate
07/18/1995US5433574 For conveying semiconductor wafers
07/18/1995US5433371 Wire bonding apparatus and method
07/18/1995US5433369 Wire bonding apparatus and method
07/18/1995US5433258 Gettering of particles during plasma processing
07/18/1995US5433170 Bis/magnesium cyclopentadienyl derivatives
07/18/1995US5433168 Method of producing semiconductor substrate
07/18/1995US5432999 Integrated circuit lamination process
07/18/1995CA2055663C High-frequency oscillator
07/15/1995CA2140311A1 Multilayer laminate product and process
07/13/1995WO1995019047A1 A self-aligned dual-bit split gate (dsg) flash eeprom cell
07/13/1995WO1995019045A1 Process for filling contact holes
07/13/1995WO1995019044A1 Felt having a dielectrically isolated gate connect
07/13/1995WO1995019043A1 Fet having minimized parasitic gate capacitance
07/13/1995WO1995019012A1 Apparatus and methods for viewing identification marks on semiconductor wafers
07/13/1995WO1995018975A1 Reversible chip contacting device
07/13/1995WO1995018880A1 Method and apparatus for solid surface treatment, and apparatus for forming passivation film, and process apparatus
07/13/1995WO1995018879A1 Polymeric resin for depositing catalytic palladium on a substrate
07/13/1995DE4434896A1 Memory node electrode of capacitor
07/13/1995DE4423558A1 Conductive layer esp. for MOSFET
07/13/1995DE4408565A1 Semiconductor memory device esp. DRAM
07/13/1995DE4406257A1 Semiconductor device with isolation region
07/13/1995DE4404885A1 Selective etching process in semiconductors mfr.
07/12/1995EP0662721A1 Electromagnetic radiation detector and method of fabrication
07/12/1995EP0662719A1 An apparatus and method for increasing breakdown voltage ruggedness in semiconductor devices
07/12/1995EP0662718A2 A method of decreasing the bandgap of silicon for bipolar heterojunction transistors
07/12/1995EP0662717A2 High voltage/high beta semiconductor devices and methods of fabrication thereof
07/12/1995EP0662716A2 Improvements in or relating to gate array cells
07/12/1995EP0662714A1 Semiconductor device and process for producing same
07/12/1995EP0662712A1 Antifuse and method of manufacturing it
07/12/1995EP0662711A1 A hermetic package for a high power semiconductor device
07/12/1995EP0662710A1 Method of fabricating a conducting connection between at least two metallisations of an integrated circuit
07/12/1995EP0662709A2 Method of testing semiconductor circuit layers
07/12/1995EP0662708A1 Thermocompression bonding using an aluminium-gold intermetallic
07/12/1995EP0662707A1 Mos devices with drain-side channel implants
07/12/1995EP0662706A2 Manufacture of thin-film transistors having self-aligned plural gates
07/12/1995EP0662705A2 Cleaning agent for semiconductor device and method for manufacturing semiconductor device
07/12/1995EP0662616A2 Boundary-scan-compliant multi-chip module
07/12/1995EP0662532A1 Process for crystal growth of III-V group compound semiconductor
07/12/1995EP0662269A1 Controlled semiconductor capacitors
07/12/1995EP0662247A1 Process for rapidly generating a chalkopyrite semiconductor on a substrate
07/12/1995EP0662243A1 Antireflex layer and process for lithographically structuring such a layer
07/12/1995EP0662223A1 Photoresist stripping process using n,n-dimethyl-bis(2-hydroxyethyl) quaternary ammonium hydroxide
07/12/1995EP0662222A1 Positive-working photoresist composition.
07/12/1995EP0662215A1 Extraction of spatially varying dielectric function from ellipsometric data
07/12/1995EP0662019A1 Method for making a ceramic metal composite
07/12/1995EP0640244A4 Plasma treatment apparatus and method in which a uniform electric field is induced by a dielectric window.
07/12/1995EP0607415A4 Hollow-anode glow discharge apparatus.
07/12/1995EP0504170B1 Method of making silicon quantum wires
07/12/1995CN2203499Y Improved lead attaching machine
07/12/1995CN1105145A Non-volatile semiconductor store and data programing method
07/12/1995CN1105120A Cooling apparatusm and assembling method thereof
07/11/1995US5432739 Non-volatile sidewall memory cell method of fabricating same
07/11/1995US5432734 Magnetoresistive element and devices utilizing the same
07/11/1995US5432733 Semiconductor memory device
07/11/1995US5432732 Dynamic semiconductor memory
07/11/1995US5432714 System and method for preparing shape data for proximity correction
07/11/1995US5432679 Pressure equalizer for an integrated circuit chip interconnected to circuitry on a thin film membrane
07/11/1995US5432670 Generation of ionized air for semiconductor chips
07/11/1995US5432381 Manufacturing method for a self-aligned through hole and semiconductor structure
07/11/1995US5432380 Apparatus for tape-mounting a semiconductor device
07/11/1995US5432377 Dielectrically isolated semiconductor device and a method for its manufacture
07/11/1995US5432376 Semiconductor devices containing power and control transistors
07/11/1995US5432371 Monolithically integrated circuit
07/11/1995US5432370 High withstand voltage M I S field effect transistor and semiconductor integrated circuit
07/11/1995US5432368 For protecting an integrated circuit
07/11/1995US5432367 Semiconductor device having sidewall insulating film
07/11/1995US5432366 P-I-N MOSFET for ULSI applications
07/11/1995US5432365 Semiconductor memory device
07/11/1995US5432364 Output circuit device for charge transfer element
07/11/1995US5432363 Solid-state image pickup device and manufacturing method of the same
07/11/1995US5432360 Semiconductor device including an anode layer having low density regions by selective diffusion
07/11/1995US5432352 Ion beam scan control
07/11/1995US5432341 Process and apparatus for producing agglomerate rays
07/11/1995US5432318 Apparatus for segmenting stacked IC chips
07/11/1995US5432314 Transparent mask plate for charged particle beam exposure apparatus and charged particle beam exposure process using the transparent mask plate
07/11/1995US5432129 Method of forming low resistance contacts at the junction between regions having different conductivity types
07/11/1995US5432128 Reliability enhancement of aluminum interconnects by reacting aluminum leads with a strengthening gas
07/11/1995US5432126 Fabrication process of compound semiconductor device comprising L-shaped gate electrode
07/11/1995US5432125 Method of manufacturing semiconductor device
07/11/1995US5432122 Method of making a thin film transistor by overlapping annealing using lasers
07/11/1995US5432121 Method for fabricating a multilayer epitaxial structure
07/11/1995US5432120 Method for producing a laterally limited single-crystal region with selective epitaxy and the employment thereof for manufacturing a bipolar transistor as well as a MOS transistor
07/11/1995US5432119 High yield electron-beam gate fabrication method for sub-micron gate FETS
07/11/1995US5432118 Process for forming field isolation
07/11/1995US5432117 Method of producing semiconductor device