Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/1995
08/23/1995EP0426877B1 Method of producing compound semiconductor devices
08/23/1995CN1107257A Thin film semiconductor integrated circuit and method of fabricating the same
08/23/1995CN1107256A A packaged semiconductor device having a flange at its side surface and its manufacturing method
08/23/1995CN1107255A A semiconductor device equipped with antifuse elements and a method for manufacturing an fpga
08/23/1995CN1107254A Process and apparatus for producing semiconductor integrated circuit
08/23/1995CN1107087A Process for metal surface treatment
08/22/1995US5444815 Multi-zone lamp interference correction system
08/22/1995US5444756 X-ray machine, solid state radiation detector and method for reading radiation detection information
08/22/1995US5444753 X-ray lithography mask, light exposure apparatus and process therefore
08/22/1995US5444716 Boundary-scan-based system and method for test and diagnosis
08/22/1995US5444715 AC interconnect test of integrated circuit chips
08/22/1995US5444655 Non-volatile semiconductor memory device with a small distribution width of cell transistor threshold voltage after erasing data
08/22/1995US5444654 ROM with Bi-CMOS gate arrays
08/22/1995US5444653 Semiconductor memory device with stack type memory cell
08/22/1995US5444652 Semiconductor memory device having a memory cell unit including a plurality of transistors connected in series
08/22/1995US5444637 Programmable semiconductor wafer for sensing, recording and retrieving fabrication process conditions to which the wafer is exposed
08/22/1995US5444632 Apparatus and method for controlling and scheduling processing machines
08/22/1995US5444600 Lead frame capacitor and capacitively-coupled isolator circuit using the same
08/22/1995US5444597 Wafer release method and apparatus
08/22/1995US5444557 Single crystal silicon arrayed devices for projection displays
08/22/1995US5444529 Method of inspecting particles on semiconductor devices
08/22/1995US5444399 Mixer circuit
08/22/1995US5444393 Semiconductor integrated circuit for selectively performing a rewiring or a logical operation
08/22/1995US5444391 Tie-up and tie-down circuits with a primary input for testability improvement of logic networks
08/22/1995US5444389 Method and apparatus for measuring lifetime of minority carriers in semiconductor
08/22/1995US5444388 Apparatus for testing semiconductor devices using a conductive sheet
08/22/1995US5444386 Probing apparatus having an automatic probe card install mechanism and a semiconductor wafer testing system including the same
08/22/1995US5444384 Method and device of contactless measurement of electric voltages in a unit under measurement with an insulating surface
08/22/1995US5444302 Semiconductor device including multi-layer conductive thin film of polycrystalline material
08/22/1995US5444301 Semiconductor package and method for manufacturing the same
08/22/1995US5444300 Semiconductor apparatus with heat sink
08/22/1995US5444292 Integrated thin film approach to achieve high ballast levels for overlay structures
08/22/1995US5444291 Integrated bridge device for optimizing conduction power losses
08/22/1995US5444289 Vertical and lateral isolation for a semiconductor device
08/22/1995US5444288 CMOS integrated circuit having improved power-supply filtering
08/22/1995US5444285 Complementary bipolar polysilicon emitter devices
08/22/1995US5444284 Semiconductor device including polysilicon semiconductor element and MOS-FET as the element thereof
08/22/1995US5444283 Dopant-diffusion buffered buried contact module for integrated circuits
08/22/1995US5444282 Semiconductor device and a method of manufacturing thereof
08/22/1995US5444281 Charge transfer device capable of suppressing reset noise
08/22/1995US5444279 Floating gate memory device having discontinuous gate oxide thickness over the channel region
08/22/1995US5444278 Semiconductor device and manufacturing method thereof
08/22/1995US5444276 Semiconductor integrated circuit macro cells with wide lines
08/22/1995US5444271 Conductivity-modulated semiconductor device with high breakdown voltage
08/22/1995US5444267 Quantum device utilizing the quantum effect
08/22/1995US5444259 Plasma processing apparatus
08/22/1995US5444257 Electron-beam exposure system for reduced distortion of electron beam spot
08/22/1995US5444245 Method of automatically setting coordinate conversion factor
08/22/1995US5444217 Rapid thermal processing apparatus for processing semiconductor wafers
08/22/1995US5444188 Flexible circuit wiring board and method of producing the same
08/22/1995US5444186 Multilayer conductive wire for semiconductor device and manufacturing method thereof
08/22/1995US5444026 Method for manufacturing semiconductor device by forming insulator-layer to suppress bubble formation
08/22/1995US5444025 Process for encapsulating a semiconductor package having a heat sink using a jig
08/22/1995US5444024 Method for low energy implantation of argon to control titanium silicide formation
08/22/1995US5444023 Method of fabricating a semiconductor device having a multilayer wiring structure and using a fluorine compound-containing gas
08/22/1995US5444022 Method of fabricating an interconnection structure for an integrated circuit
08/22/1995US5444021 Method for making a contact hole of a semiconductor device
08/22/1995US5444020 Method for forming contact holes having different depths
08/22/1995US5444019 Semiconductor contact via structure and method
08/22/1995US5444018 Metallization process for a semiconductor device
08/22/1995US5444017 Method of making cBN semiconductor device having an ohmic electrode
08/22/1995US5444016 Forming n and p type regions on gallium arsenide epitaxial structure, doping p type reginon with beryllium and a dopant, activating both reginons by anneling, depositing nickel, then germenium on nickel and tungsten on germenium
08/22/1995US5444015 Larce scale IC personalization method employing air dielectric structure for extended conductors
08/22/1995US5444014 Method for fabricating semiconductor device
08/22/1995US5444013 Method of forming a capacitor
08/22/1995US5444012 Method for manufacturing semiconductor integrated circuit device having a fuse element
08/22/1995US5444011 Forming polysilicon layer on semiconductor substrate, forming yttrium or hafnium lower electrode, forming dielectric metal oxide film, annealing so at thinner portions of film lower electrode is oxidized more heavily, forming upper electrode
08/22/1995US5444010 Method for forming a stacked capacitor in a semiconductor device
08/22/1995US5444009 Fabricating a semiconductor with an insulative coating
08/22/1995US5444008 High-performance punchthrough implant method for MOS/VLSI
08/22/1995US5444007 Formation of trenches having different profiles
08/22/1995US5444006 Method of manufacturing a capacitor in a semiconductor memory device
08/22/1995US5444005 Method for manufacturing a capacitor of a semiconductor memory device
08/22/1995US5444003 Method and structure for creating a self-aligned bicmos-compatible bipolar transistor with a laterally graded emitter structure
08/22/1995US5444002 Method of fabricating a short-channel DMOS transistor with removable sidewall spacers
08/22/1995US5444001 Method of manufacturing a semiconductor device readily capable of removing contaminants from a silicon substrate
08/22/1995US5444000 Method of fabricating integrated circuit with improved yield rate
08/22/1995US5443998 Reacting silicon nitride with chlorine source, formed layer is resistance to sulfuric/ phosphoric/ hydrofluoric acid and steam
08/22/1995US5443997 Method for transferring heat to or from a semiconductor wafer using a portion of a process gas
08/22/1995US5443996 Forming metal layer on insulator, forming silicon layer, masking and etching silicon to form connecting strip, forming second metal layer, heating to form nonsilicided metal over strip of metal silicide, removing metal, reheating silicide
08/22/1995US5443995 Method for metallizing a semiconductor wafer
08/22/1995US5443994 Bipolar transistor
08/22/1995US5443993 Method for manufacturing a capacitor for a semiconductor device
08/22/1995US5443992 Method for manufacturing an integrated circuit having at least one MOS transistor
08/22/1995US5443932 Exposure method
08/22/1995US5443863 Low-temperature oxidation at surfaces using ozone decomposition products formed by microwave discharge
08/22/1995US5443860 Semiconductor processing
08/22/1995US5443786 Oxidation and nitriding
08/22/1995US5443707 Apparatus for electroplating the main surface of a substrate
08/22/1995US5443690 Pattern formation material and pattern formation method
08/22/1995US5443689 Dry etching process utilizing a recessed electrode
08/22/1995US5443688 Patterning a film
08/22/1995US5443685 Surface treating substrate by applying erodible material and exposing to radiation to cause energy variations that result in angular tapers; etching
08/22/1995US5443684 Forming heterostructure device on wafer, etching a crater in wafer with ion beam at low angle, removing material from crater with etchant, measureing with magnifying optical microscope
08/22/1995US5443679 Tape bonding apparatus
08/22/1995US5443675 Plastic mold package device decapsulator with flat, separate etch head and etch plate
08/22/1995US5443661 SOI (silicon on insulator) substrate with enhanced gettering effects
08/22/1995US5443649 Silicon carbide carrier for wafer processing in vertical furnaces
08/22/1995US5443648 Vertical heat treatment apparatus with a rotary holder turning independently of a liner plate
08/22/1995US5443646 Method and apparatus for forming thin film and multilayer film