Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/1995
09/05/1995US5448084 Field effect transistors on spinel substrates
09/05/1995US5448075 Electron-beam exposure system having an improved rate of exposure throughput
09/05/1995US5448014 Mass simultaneous sealing and electrical connection of electronic devices
09/05/1995US5447890 Method for production of wafer
09/05/1995US5447889 Method of preparing polycrystalline silicon film
09/05/1995US5447888 Process of ejecting an encapsulated semiconductor device from a mold by directly contacting exterior leads with ejector pins
09/05/1995US5447887 Method for capping copper in semiconductor devices
09/05/1995US5447886 Method for mounting semiconductor chip on circuit board
09/05/1995US5447885 Isolation method of semiconductor device
09/05/1995US5447884 Shallow trench isolation with thin nitride liner
09/05/1995US5447883 Method of manufacturing semiconductor device
09/05/1995US5447882 Method for fabricating capacitor of semiconductor memory device
09/05/1995US5447881 Multilayer element with insulating film, transistors, patterns of photosensitive films, polysilicon films to etch, removal and charge storage electrodes
09/05/1995US5447878 Method for manufacturing a semiconductor memory device having a capacitor with increased effective area
09/05/1995US5447877 Method of manufacturing nonvolatile semiconductor memory device
09/05/1995US5447875 Self-aligned silicided gate process
09/05/1995US5447874 Multilayer element with barriers, dielectrics, masking and polishing
09/05/1995US5447872 Manufacturing method of CMOS transistor including heat treatments of gate electrodes and LDD regions at reducing temperatures
09/05/1995US5447871 Electrically conductive interconnection through a body of semiconductor material
09/05/1995US5447615 Plating device for wafer
09/05/1995US5447613 Preventing of via poisoning by glow discharge induced desorption
09/05/1995US5447599 Self-aligned process for capping copper lines
09/05/1995US5447598 Process for forming resist mask pattern
09/05/1995US5447596 Apparatus for producing semiconductor wafers
09/05/1995US5447595 Electrodes for plasma etching apparatus and plasma etching apparatus using the same
09/05/1995US5447585 Method of manufacturing and testing integrated optical components
09/05/1995US5447570 Purge gas in wafer coating area selection
09/05/1995US5447409 Robot assembly
09/05/1995US5447294 Vertical type heat treatment system
09/05/1995US5447266 Mounting apparatus for mounting chip component on mounting portion and method for controlling load on chip component
09/05/1995US5447264 Recessed via apparatus for testing, burn-in, and/or programming of integrated circuit chips, and for placing solder bumps thereon
09/05/1995US5447229 Cot/tab protective shipping apparatus and method
09/05/1995US5447189 Method of making heat sink having elliptical pins
09/05/1995US5447117 Crystal article, method for producing the same and semiconductor device utilizing the same
09/05/1995US5447002 Clean room wall system
09/05/1995US5446961 Method for repairing semiconductor substrates
09/05/1995US5446959 Method of packaging a power semiconductor device
09/05/1995US5446954 Method for manufacturing a frequency control device
08/1995
08/31/1995WO1995023432A1 Bicmos structures and methods of fabrication
08/31/1995WO1995023430A1 Bipolar and bicmos structures and methods of fabrication
08/31/1995WO1995023429A1 Providing a low resistance to integrated circuit devices
08/31/1995WO1995023428A2 Chemical vapor deposition chamber
08/31/1995WO1995023427A2 Apparatus for thermal treatment of thin film wafer
08/31/1995WO1995023397A2 Method of manufacturing a reflective display
08/31/1995WO1995023057A1 Method and apparatus for molding electrical or other parts on a carrier
08/31/1995WO1995022173A3 Process for producing a diffusion region adjacent to a recess in a substrate
08/31/1995DE4410274A1 Multilayer resist prodn. process
08/31/1995DE4400032C1 Semiconductor device with insulating film having trench
08/31/1995DE19506759A1 Halbleitervorrichtung, zugehöriges Herstellungsverfahren, Verfahren zum Testen von Halbleiterelementen, Testsubstrat für das Verfahren sowie Verfahren zur Herstellung des Testsubstrats A semiconductor device manufacturing method thereof, method for testing semiconductor devices, the test substrate for the process and method of manufacturing the test substrate
08/31/1995DE19506386A1 Semiconductor device e.g. IGBT
08/31/1995DE19504994A1 DRAM with cell matrix of transistors
08/30/1995EP0669658A2 Field effect type semiconductor device and manufacturing method thereof
08/30/1995EP0669656A2 Source/drain of MISFET in semiconductor device and method of manufacturing the same
08/30/1995EP0669655A2 Ferroelectric capacitor renewal method
08/30/1995EP0669654A1 Memory cell
08/30/1995EP0669652A1 Pressure contact type semiconductor device
08/30/1995EP0669649A1 Resin tablet for sealing semiconductor
08/30/1995EP0669648A2 Multilayer metal leadframe and method for making same
08/30/1995EP0669647A2 Method for making a bipolar transistor
08/30/1995EP0669646A1 Improvements in or relating to semiconductor devices
08/30/1995EP0669645A1 Semiconductor device having a planarized surface and method of manufacturing the same.
08/30/1995EP0669644A2 Electrostatic chuck
08/30/1995EP0669643A1 Power loss recovery for wafer heater
08/30/1995EP0669642A2 Apparatus and methods for processing substrates
08/30/1995EP0669641A1 High temperature and high pressure cleaning equipment
08/30/1995EP0669640A1 Susceptor for deposition apparatus
08/30/1995EP0669637A1 Plasma process apparatus
08/30/1995EP0669636A1 Manufacturing system error detection
08/30/1995EP0669623A1 Test circuit of semiconductor memory device having data scramble function
08/30/1995EP0669619A2 A semiconductor integrated circuit for generating an internal power source voltage with reduced potential changes
08/30/1995EP0669537A1 Integrated semiconductor device
08/30/1995EP0669411A2 Method of forming single-crystalline thin film
08/30/1995EP0669300A2 Aqueous noble metal preparations and their use in the making of noble metal decorations
08/30/1995EP0669287A1 Method and apparatus for supplying gaseous raw material
08/30/1995EP0647354A4 Process for manufacturing an active matrix display.
08/30/1995EP0428738B1 Method of making complementary semiconductor integrated circuit devices
08/30/1995EP0375919B1 Calculating AC chip performance using the LSSD scan path
08/30/1995CN1107641A Gold-alloy bonding wire
08/30/1995CN1107612A Resin tablet for sealing semiconductor
08/30/1995CN1107611A Semiconductor device having a reducing/oxidizing deviceive material and a process for forming the...
08/30/1995CN1107523A Integrated sputter target assembly
08/29/1995USRE35027 Pick and place method and apparatus
08/29/1995US5446825 High performance multi-zone illuminator module for semiconductor wafer processing
08/29/1995US5446824 Lamp-heated chuck for uniform wafer processing
08/29/1995US5446748 Apparatus for performing logic simulation
08/29/1995US5446688 Non-volatile semiconductor memory device
08/29/1995US5446675 Developing method and apparatus of hierarchical graphic data for use in a semiconductor integrated circuit
08/29/1995US5446649 Data-hiding and skew scan for unioning of shapes in electron beam lithography post-processing
08/29/1995US5446620 Ultra high density integrated circuit packages
08/29/1995US5446587 Projection method and projection system and mask therefor
08/29/1995US5446584 Compact specimen processing station
08/29/1995US5446542 Mark position determining apparatus for use in exposure system
08/29/1995US5446537 Method of sorting semiconductor lasers
08/29/1995US5446519 Stage device
08/29/1995US5446450 Genus tower light controller
08/29/1995US5446407 Trimming circuit
08/29/1995US5446402 Noise tolerant code setting circuit
08/29/1995US5446395 Test circuit for large scale integrated circuits on a wafer
08/29/1995US5446316 Hermetic package for a high power semiconductor device
08/29/1995US5446314 Low profile metal-ceramic-metal packaging
1 ... 6016 6017 6018 6019 6020 6021 6022 6023 6024 6025 6026 6027 6028 6029 6030 6031 6032 6033 6034 6035 6036 ... 6590