Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/1995
09/21/1995DE19509202A1 Electrically conducting connection
09/20/1995EP0673190A1 IC socket
09/20/1995EP0673071A2 Flash EEPROM and EPROM arrays
09/20/1995EP0673070A2 Semiconductor integrated circuit device with elements isolated by trenches
09/20/1995EP0673069A2 Insulated gate semiconductor device and method for fabricating the same
09/20/1995EP0673068A1 Overvoltage protection device in integrated circuits
09/20/1995EP0673063A2 Method for forming a silane based boron phosphorous silicate planarization structure
09/20/1995EP0673062A1 Isolation process for active zones of a semiconductor substrate using shallow planarised trenches, and device comprising such trenches
09/20/1995EP0673061A1 Isolation method for active regions in a semiconductor substrate using shallow trenches, especially not large, and corresponding device
09/20/1995EP0673060A1 Jig and manufacturing method for a semiconductor device
09/20/1995EP0673059A2 Semiconductor wafer with pre-process denudation
09/20/1995EP0673058A2 Semiconductor manufacturing apparatus
09/20/1995EP0673056A1 Plasma processing chamber and method of treating substrates in a plasma processing chamber
09/20/1995EP0673054A1 Ion implanter and method for implanting an ion beam
09/20/1995EP0673037A1 Non-volatile semiconductor memory device
09/20/1995EP0673023A1 Ceramic substrate and its manufacture, and substrate vacuum-clamping device using ceramic vacuum-clamping board
09/20/1995EP0672952A1 Positive photoresist composition
09/20/1995EP0672951A2 Lead-frame forming material
09/20/1995EP0672595A1 Device for transporting substrates
09/20/1995EP0672499A1 Apparatus for polishing wafers
09/20/1995EP0672300A1 Antifuse structure with increased breakdown at edges
09/20/1995EP0672299A1 Transistor fabrication methods and methods of forming multiple layers of photoresist
09/20/1995EP0672298A1 Substrates for the growth of 3c-silicon carbide
09/20/1995EP0672297A1 Wafer processing machine vacuum front end method and apparatus
09/20/1995EP0672295A1 Ion implantation target charge control system.
09/20/1995EP0672269A1 Binary vapor adhesion promoters and methods of using the same
09/20/1995EP0245431B1 Photoimaging processes and compositions
09/20/1995CN1108817A Varactor and method of forming
09/20/1995CN1108816A Switching element with memory provided with schottky tunnelling barrier
09/20/1995CN1108815A High efficiency electrically adjustable width field effect transistor and method therefor
09/20/1995CN1108812A Package for mating with a semiconductor die and method of manufacture
09/20/1995CN1108811A Integrated circuit electronic information-storage card and its packing method
09/20/1995CN1108810A A method for applying adhesive to microelectronic chips
09/20/1995CN1108809A A method for manufacturing the same
09/20/1995CN1108808A Method for recovering bare semiconductor chips from plastic packaged moduler
09/20/1995CN1108807A Method for forming contact holes of a semiconductor device
09/20/1995CN1108806A Method of fabricating semiconductor device
09/20/1995CN1108805A Method of forming a dielectric and an apparatus therefor
09/20/1995CN1108804A Semiconductor device and method of manufacturing the same
09/20/1995CN1108768A Drycorrosion apparatus
09/20/1995CN1108591A Workpiece holder for rotary grinding machines for grinding semiconductor wafers, and method of positioning the workpiece holder
09/19/1995US5452250 Non-volatile register system utilizing thin-film floating-gate amorphous transistors
09/19/1995US5452249 Non-volatile semiconductor memory device with verify mode for verifying data written to memory cells
09/19/1995US5452245 Memory efficient gate array cell
09/19/1995US5452244 Electronic memory and methods for making and using the same
09/19/1995US5452228 In an electronic apparatus
09/19/1995US5452182 Flexible high density interconnect structure and flexibly interconnected system
09/19/1995US5452178 Structure and method of making a capacitor for an intergrated circuit
09/19/1995US5452177 Electrostatic wafer clamp
09/19/1995US5452171 Electrostatic discharge protection circuit for integrated circuits
09/19/1995US5452090 Microlithography system
09/19/1995US5452078 Method and apparatus for finding wafer index marks and centers
09/19/1995US5452053 Wafer stepper
09/19/1995US5451887 Programmable logic module and architecture for field programmable gate array device
09/19/1995US5451886 Method of evaluating lifetime of semiconductor material and apparatus for the same
09/19/1995US5451863 Fiber optic probe with a magneto-optic film on an end surface for detecting a current in an integrated circuit
09/19/1995US5451819 Semiconductor device having conductive plug projecting from contact hole and connected at side surface thereof to wiring layer
09/19/1995US5451814 Multi-chip module integrated circuit
09/19/1995US5451813 Semiconductor device with lead frame having different thicknesses
09/19/1995US5451810 Metal-to-metal antifuse structure
09/19/1995US5451809 Smooth surface doped silicon film formation
09/19/1995US5451807 Metal oxide semiconductor field effect transistor
09/19/1995US5451805 VDMOS transistor with reduced projective area of source region
09/19/1995US5451804 VLSI device with global planarization
09/19/1995US5451803 Semiconductor memory device and method of manufacturing the same
09/19/1995US5451802 Charge transfer device having a high-resistance electrode and a low-resistance electrode
09/19/1995US5451800 Metal oxide semiconductor heterojunction field effect transistor (MOSHFET)
09/19/1995US5451798 Semiconductor device and its fabrication method
09/19/1995US5451797 Method of fabricating a silicon carbide vertical MOSFET and device
09/19/1995US5451784 Composite diagnostic wafer for semiconductor wafer processing systems
09/19/1995US5451774 High density, three-dimensional, intercoupled optical sensor circuit
09/19/1995US5451716 Resin-packaged electronic component having bent lead terminals
09/19/1995US5451655 Mixing perylene dianhydride with one or more aminosilanes and heating to form a coating
09/19/1995US5451551 Multilevel metallization process using polishing
09/19/1995US5451550 Method of laser CVD seal a die edge
09/19/1995US5451549 Semiconductor dicing method which uses variable sawing speeds
09/19/1995US5451548 Multilayer semiconductors with dielectrics and insulators by evaporation of single crystal thin films
09/19/1995US5451547 Method of manufacturing semiconductor substrate
09/19/1995US5451546 Masking method used in salicide process for improved yield by preventing damage to oxide spacers
09/19/1995US5451545 Process for forming stable local interconnect/active area silicide structure VLSI applications
09/19/1995US5451544 Method of manufacturing a back contact for semiconductor die
09/19/1995US5451543 Multilayer semiconductor with conductor layers and dielectric layers formed by etchhing and coating, filling and removal
09/19/1995US5451542 Surface passivation process of compound semiconductor material using UV photosulfidation
09/19/1995US5451541 Method for fabricating a semiconductor device
09/19/1995US5451540 Poly-buffered LOCOS method for manufacturing an isolation region in a semiconductor device
09/19/1995US5451539 Method for fabricating capacitor of semiconductor memory device
09/19/1995US5451538 Method for forming a vertically integrated dynamic memory cell
09/19/1995US5451537 Method of forming a DRAM stack capacitor with ladder storage node
09/19/1995US5451535 Method for manufacturing a memory cell
09/19/1995US5451532 Process for making self-aligned polysilicon base contact in a bipolar junction transistor
09/19/1995US5451531 Method of fabricating an insulated gate semiconductor device
09/19/1995US5451530 Method for forming integrated circuits having buried doped regions
09/19/1995US5451529 Method of making a real time ion implantation metal silicide monitor
09/19/1995US5451489 Multilayer element wafers with photoresist layers treated with light
09/19/1995US5451488 Reticle having sub-patterns and a method of exposure using the same
09/19/1995US5451487 Electron beam lithographic method and apparatus
09/19/1995US5451484 Positive resist composition
09/19/1995US5451479 Method of forming a pattern of a multilayer type semiconductor device
09/19/1995US5451435 Method for forming dielectric
09/19/1995US5451293 Method of making a wiring layer wherein the masking material is ashed using an alcohol containing plasma