Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/1996
04/04/1996WO1996010046A1 Milled carbon fiber reinforced polymer composition
04/04/1996WO1996009900A1 Application of optical processing for growth of silicon dioxide
04/04/1996WO1996009899A1 Stainless steel acid treatment
04/04/1996WO1996009787A1 Semiconductor wafer cassette
04/04/1996DE4441898C1 Semiconductor component with electrically conductive contacts and/or tracks
04/04/1996DE4434891A1 Semiconductor component bridge face exposure
04/04/1996DE19536495A1 Lateral field effect transistor with thick oxide layer LOCOS
04/04/1996DE19536253A1 Epitaxial crystal growth for semiconductor lasers and SHF applications
04/04/1996CA2201112A1 Field-enhanced diffusion using optical activation
04/03/1996EP0704910A2 A thin-film transistor and method for forming the same
04/03/1996EP0704909A2 MOS-type semiconductor device and method for making the same
04/03/1996EP0704907A2 Bipolar transistor with a base layer having an extremely low resistance and method for fabricating the same
04/03/1996EP0704906A2 Electrode of semiconductor device and method of fabricating thereof
04/03/1996EP0704905A2 Silicon semiconductor device with junction breakdown prevention
04/03/1996EP0704902A1 Power semiconductor device with monolithically integrated sense device, its method of fabrication and its application
04/03/1996EP0704900A2 Film carrier semiconductor device
04/03/1996EP0704899A2 Method of manufacturing chip-size package-type semiconductor device
04/03/1996EP0704898A2 Carrier film
04/03/1996EP0704897A2 Semiconductor device
04/03/1996EP0704895A2 Process for manufacturing semiconductor device and semiconductor wafer
04/03/1996EP0704894A2 Process for forming a low ohmic contact between a metallic layer and a semiconductor material
04/03/1996EP0704893A2 Improved device planarity
04/03/1996EP0704892A2 Process for producing semiconductor substrate
04/03/1996EP0704891A1 Quartz glass jig for heat-treating semiconductor wafers and method for producing same
04/03/1996EP0704890A2 A method of evaluating a mis-type semiconductor device
04/03/1996EP0704889A2 Power semiconductors with monolithically integrated test resistor and its fabrication
04/03/1996EP0704887A2 A method and device for controlling tensile and compressive stresses and mechanical problems in thin films on substrates
04/03/1996EP0704886A1 Process for etching cobalt silicide layers
04/03/1996EP0704885A2 Method of depositing fluorine doped oxide
04/03/1996EP0704884A2 Highly selective silicon oxide etching method
04/03/1996EP0704883A2 Refractory metal silicide cap for protecting multi-layer polycide structure
04/03/1996EP0704882A2 Formation of closely spaced metal electrodes in a semiconductor device
04/03/1996EP0704878A1 Uniform film thickness deposition of sputtered materials
04/03/1996EP0704852A2 Novolatile semiconductor memory cell capable of saving overwritten cell and its saving method
04/03/1996EP0704851A1 Byte erasable EEPROM fully compatible with a single power supply flash-EPROM process
04/03/1996EP0704847A1 Dynamic type memory having shared sense amplifiers
04/03/1996EP0704811A2 Method and apparatus for use in simulation of electrical characteristics of electronic device
04/03/1996EP0704554A1 Wafer supporting boat
04/03/1996EP0704553A1 Electrochemical generation of silane
04/03/1996EP0704552A1 Plasma processing method and plasma generator
04/03/1996EP0704551A1 Method of processing a substrate in a vacuum processing chamber
04/03/1996EP0704550A2 Process for forming a dielectric film and a capacitive structure in microelectronic devices
04/03/1996EP0704289A1 Method for manufacturing thin plastic packages
04/03/1996EP0704145A1 Method of manufacturing a device, by irradiating some parts of the surface of the device directly through a mask, and other parts indirectly through the mask and via a reflecting surface, thereby producing a pattern
04/03/1996EP0704108A1 Metal-semiconductor diode and methods for producing metal semiconductor diodes
04/03/1996EP0704107A1 Method of producing a resistor in an integrated circuit
04/03/1996EP0704106A1 Method and apparatus for automatically positioning electronic die within component packages
04/03/1996EP0704105A2 Method of manufacturing a semiconductor device with a semiconductor body having a surface provided with a multilayer wiring structure
04/03/1996EP0680663A4 Method of mounting a piezoelectric element to a substrate.
04/03/1996EP0662215A4 Extraction of spatially varying dielectric function from ellipsometric data.
04/03/1996EP0531430B1 A method of making semiconductor components as well as a solar cell made therefrom
04/03/1996EP0511294B1 Heating apparatus for semiconductor wafers or substrates
04/03/1996EP0441958B1 X-ray phosphor imaging screen and method of making same
04/03/1996CN1119879A Polymeric resin for depositing catalytic palladium on a substrate
04/03/1996CN1119790A Crystalline silicon film, and semiconductor device and method for producing the same
04/03/1996CN1119789A Semiconductor circuit for electro-optical device and method of manufacturing the same
04/03/1996CN1119731A Temperature control apparatus and method with recirculated coolant
04/03/1996CN1119552A Sputtering apparatus
04/02/1996US5504831 System for compensating against wafer edge heat loss in rapid thermal processing
04/02/1996US5504830 Optical fibers
04/02/1996US5504709 Semiconductor memory device
04/02/1996US5504708 Flash EEPROM array with P-tank insulated from substrate by deep N-tank
04/02/1996US5504705 Semiconductor memory device
04/02/1996US5504704 Semiconductor memory device
04/02/1996US5504702 Dram cell
04/02/1996US5504691 Method and device for tracking down a prespecified subcircuit in an electrical circuit, method for constructing integrated circuit masks using the method
04/02/1996US5504627 Projection exposure system
04/02/1996US5504612 Synchronized XY laser scanner
04/02/1996US5504451 Gated thyristor and process for its simultaneous fabrication with high- and low-voltage semiconductor devices, integrated circuit containing the same, systems and methods.
04/02/1996US5504450 High voltage components for EEPROM system
04/02/1996US5504437 Apparatus and method for electrical measurement of semiconductor wafers
04/02/1996US5504436 Socket apparatus for member testing
04/02/1996US5504434 Instrument for the measurement of electrical characteristics during manufacturing processes
04/02/1996US5504376 Stacked-type semiconductor device
04/02/1996US5504374 Microcircuit package assembly utilizing large size die and low temperature curing organic die attach material
04/02/1996US5504364 CMOS locos isolation for self-aligned NPN BJT in a BiCMOS process
04/02/1996US5504363 Integrated circuit
04/02/1996US5504361 Polarity-reversal protection for integrated electronic circuits in CMOS technology
04/02/1996US5504359 Vertical FET device with low gate to source overlap capacitance
04/02/1996US5504358 On a semiconductor substrate
04/02/1996US5504357 Dynamic random access memory having a vertical transistor
04/02/1996US5504354 Interconnect substrate with circuits for field-programmability and testing of multichip modules and hybrid circuits
04/02/1996US5504353 Having double-recess structure which is precisely etched and stably fabricated
04/02/1996US5504352 Semiconductor MESFET device with edge portion
04/02/1996US5504349 Optoelectronic device
04/02/1996US5504347 Lateral resonant tunneling device having gate electrode aligned with tunneling barriers
04/02/1996US5504346 Insitu detection of tube sagging in semiconductor diffusion furnace using a laser beam that is blocked when tube sags
04/02/1996US5504345 Dual beam sensor and edge detection system and method
04/02/1996US5504339 Method of repairing a pattern using a photomask pattern repair device
04/02/1996US5504277 Solder ball array
04/02/1996US5504043 Barrier layers and aluminum contacts
04/02/1996US5504042 Porous dielectric material with improved pore surface properties for electronics applications
04/02/1996US5504041 Conductive exotic-nitride barrier layer for high-dielectric-constant materials
04/02/1996US5504040 Planarized material layer deposition using condensed-phase processing
04/02/1996US5504039 Method for making a self-aligned oxide gate cap
04/02/1996US5504038 Method for selective tungsten sidewall and bottom contact formation
04/02/1996US5504036 Method of manufacturing semiconductor devices with semiconductor elements formed in a layer of semiconductor material provided on a support slice
04/02/1996US5504035 Process for solder ball interconnecting a semiconductor device to a substrate using a noble metal foil embedded interposer substrate
04/02/1996US5504034 Local oxidation method with bird's beak suppression
04/02/1996US5504033 Method for forming recessed oxide isolation containing deep and shallow trenches