Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/1996
05/28/1996US5521400 Semiconductor photoelectrically sensitive device with low sodium concentration
05/28/1996US5521399 Advanced silicon on oxide semiconductor device structure for BiCMOS integrated circuit
05/28/1996US5521396 Semiconductor light emitting device
05/28/1996US5521127 Re-oxidized nitrided oxides and re-annealed nitrided oxides prepared by rapid thermal processing
05/28/1996US5521126 Vapor deposition of silicones on whole chip surface, then plasma oxidation to silicon dioxide yields high density film with smooth surface
05/28/1996US5521125 Precision dicing of silicon chips from a wafer
05/28/1996US5521122 Process of manufacturing a multichip module using a temporary support base
05/28/1996US5521121 Oxygen plasma etch process post contact layer etch back
05/28/1996US5521120 Method for the formation of tin barrier layer with preferential (111) crystallographic orientation
05/28/1996US5521119 Post treatment of tungsten etching back
05/28/1996US5521118 Sidewall strap
05/28/1996US5521117 Process for active device constructed in opening formed in insulation layer with a resistor
05/28/1996US5521116 Sidewall formation process for a top lead fuse
05/28/1996US5521115 Method of making double grid substrate plate DRAM cell array
05/28/1996US5521114 Trench sidewall structure
05/28/1996US5521112 Method of making capacitor for stack dram cell
05/28/1996US5521111 Process of fabricating memory cell with a switching transistor and a trench-stacked capacitor coupled in series
05/28/1996US5521110 Method of making EEPROM devices with smaller cell size
05/28/1996US5521109 Method for fabricating a high coupling ratio flash memory with a very narrow tunnel layer
05/28/1996US5521108 Process for making a conductive germanium/silicon member with a roughened surface thereon suitable for use in an integrated circuit structure
05/28/1996US5521107 Method for forming a field-effect transistor including anodic oxidation of the gate
05/28/1996US5521106 Process for fabricating complementary field effect transistors having a direct contact electrode
05/28/1996US5521105 Method of forming counter-doped island in power MOSFET
05/28/1996US5521104 Applying protective coating to dielectrics and metal connectors before dry etching
05/28/1996US5521052 Semiconductors
05/28/1996US5521033 Process for manufacturing semiconductor integrated circuit device, exposure method and mask for the process
05/28/1996US5521031 Pattern delineating apparatus for use in the EUV spectrum
05/28/1996US5520994 Addition polymer core layer, polyester support layers, release layers; for production of ceramic capacitor
05/28/1996US5520992 Electrodes for high dielectric constant materials
05/28/1996US5520986 Diffusion patterning process and screen therefor
05/28/1996US5520878 Aluminum nitride body and method for forming said body utilizing a vitreous sintering additive
05/28/1996US5520858 Liquid vaporizing apparatus
05/28/1996US5520784 Ultrasonic enhancement of aluminum step coverage and apparatus
05/28/1996US5520770 Method of fabricating semiconductor device
05/28/1996US5520769 Quantitative analysis of dopes in semiconductors, etching an oxide, measurement of topography
05/28/1996US5520744 Hermetic sealing a chamber, rinsing baths, substrate holders and depressurization
05/28/1996US5520743 Processing apparatus with means for rotating an object mounting means and a disk body located in the mounting means differently relative to each other
05/28/1996US5520742 Thermal processing apparatus with heat shielding member
05/28/1996US5520733 Deposition apparatus and profile-following device suitable for apparatuses such as those for deposition
05/28/1996US5520501 Wafer holding apparatus
05/28/1996US5520297 Aperture plate and a method of manufacturing the same
05/28/1996US5520276 Method and apparatus for carrying and locating sheet frame
05/28/1996US5520205 Apparatus for wafer cleaning with rotation
05/28/1996US5520142 Decompression container
05/28/1996US5519938 Process for producing a heat sink fin
05/28/1996US5519936 Method of making an electronic package with a thermally conductive support member having a thin circuitized substrate and semiconductor device bonded thereto
05/28/1996CA2070880C Structure and method for direct calibration of registration measurement systems to actual semiconductor wafer process topography
05/23/1996WO1996015557A1 Silicon carbide semiconductor devices having buried silicon carbide conduction barrier layers therein and methods of forming same
05/23/1996WO1996015554A1 Transistor structure with specific gate and pad areas
05/23/1996WO1996015553A1 Transistor structure with specific gate and pad areas
05/23/1996WO1996015552A1 Forming a planar surface over a substrate by modifying the topography of the substrate
05/23/1996WO1996015551A1 Mounting electronic components to a circuit board
05/23/1996WO1996015550A1 Silicon-germanium-carbon compositions and processes thereof
05/23/1996WO1996015549A2 Use of oblique implantation in forming base of bipolar transistor
05/23/1996WO1996015545A1 Inductive plasma reactor
05/23/1996WO1996015459A1 Mounting spring elements on semiconductor devices, and wafer-level testing methodology
05/23/1996WO1996015458A1 Probe card assembly and kit, and methods of using same
05/23/1996WO1996015289A1 Method for directly depositing metal containing patterned films
05/23/1996WO1996015287A2 Method and apparatus for isolating a susceptor heating element from a chemical vapor deposition environment
05/23/1996WO1996014944A1 Ultra-low particle semiconductor cleaner
05/23/1996WO1996012048A3 Conformal titanium-based films and method for their preparation
05/23/1996WO1996010659A3 An epitaxial reactor, susceptor and gas-flow system
05/23/1996DE4445177A1 Verfahren zur Herstellung polykristalliner Siliziumschichten mit einstellbaren Schichtspannungen A process for producing polycrystalline silicon layers with adjustable layer stresses
05/23/1996DE19542818A1 Resist pattern model evaluation method for semiconductor component mfr.
05/23/1996DE19542411A1 Semiconductor device
05/23/1996DE19524739A1 Inhomogeneous composition bump contact for surface mounted device flip-chip technology
05/23/1996DE19505269C1 Transistor working current stabilisation circuit
05/23/1996CA2202074A1 Method and apparatus for isolating a susceptor heating element from a chemical vapor deposition environment
05/23/1996CA2158775A1 Single-polysilicon cmos active pixel
05/22/1996EP0713253A1 Trench capacitor DRAM cell
05/22/1996EP0713249A1 Method for forming semiconductor devices with oxide layers having different thicknesses
05/22/1996EP0713248A2 Molding method and apparatus
05/22/1996EP0713247A2 Method of fabricating semiconductor device and method of fabricating high-frequency semiconductor device
05/22/1996EP0713246A1 Modular moulding apparatus
05/22/1996EP0713245A2 A heat treatment jig for semiconductor wafers and a method for treating a surface of the same
05/22/1996EP0713239A1 Ion generating source for use in an ion implanter
05/22/1996EP0713235A1 Micromechanical electrostatic relay
05/22/1996EP0713163A1 Protection circuit and method for power transistors, voltage regulator using the same
05/22/1996EP0713142A2 Combined attenuated-alternating phase shifting mask structure and fabrication methods therefor
05/22/1996EP0712693A1 Nozzle apparatus for producing aerosol
05/22/1996EP0712692A1 An improved aerosol cleaning apparatus
05/22/1996EP0712691A1 Apparatus for producing cryogenic aerosol
05/22/1996EP0712690A1 Mounting apparatus for cryogenic aerosol cleaning
05/22/1996EP0712548A1 Architecture and interconnect scheme for programmable logic circuits
05/22/1996EP0712535A1 Trenched dmos transistor with channel block at cell trench corners
05/22/1996EP0712447A1 Welded susceptor assembly
05/22/1996EP0692146A4 Charge-coupled device array for spectroscopic detection
05/22/1996EP0658272B1 Coil molded into magnetic stator and method for its manufacture
05/22/1996EP0559855B1 Flat module
05/22/1996EP0506859B1 Flip chip technology using electrically conductive polymers and dielectrics
05/22/1996CN1122973A Digital-to-analog converter with reduced number of resistors
05/22/1996CN1122956A Method for fabricating capacitors of semiconductor device
05/22/1996CN1122955A Method for the fabrication of a semiconductor device
05/22/1996CN1122954A Method for forming charge storage electrodes of semiconductor device
05/22/1996CN1122953A Laser processing method
05/22/1996CN1122943A Voltage boosting circuit of a semiconductor memory device
05/22/1996CN1122849A Vapor growth apparatus and vapor growth method capable of growing a compound semicondcutor layer having an evenness and an interfacial sharpness in units of atomic layers with good productivity
05/22/1996CN1122846A Cleaning agent comprising plural components and cleaning method using the same
05/22/1996CN1031854C Semi-conductor device
05/22/1996CN1031852C Process for the wet-chemical treatment of workpieces
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