Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/1996
05/07/1996US5514622 Method for the formation of interconnects and landing pads having a thin, conductive film underlying the plug or an associated contact of via hole
05/07/1996US5514621 Method of etching polysilicon using a thin oxide mask formed on the polysilicon while doping
05/07/1996US5514620 Method of producing PN junction device
05/07/1996US5514618 Process for manufacture of flat panel liquid crystal display using direct laser etch
05/07/1996US5514617 Method of making a variable resistance polysilicon conductor for an SRAM device
05/07/1996US5514616 Depositing and densifying glass to planarize layers in semi-conductor devices based on CMOS structures
05/07/1996US5514614 Method for producing quantization functional device utilizing a resonance tunneling effect
05/07/1996US5514613 Parallel manufacturing of semiconductor devices and the resulting structure
05/07/1996US5514612 Method of making a semiconductor device with integrated RC network and schottky diode
05/07/1996US5514611 Method of manufacturing a semiconductor memory device having a read-only memory cell
05/07/1996US5514610 Method of making an optimized code ion implantation procedure for read only memory devices
05/07/1996US5514609 Through glass ROM code implant to reduce product delivering time
05/07/1996US5514608 Method of making lightly-doped drain DMOS with improved breakdown characteristics
05/07/1996US5514607 Method of manufacturing a semiconductor memory device
05/07/1996US5514606 Formation of stable source, drain and gate contacts while eliminating critical processing steps
05/07/1996US5514605 Fabrication process for compound semiconductor device
05/07/1996US5514604 Vertical channel silicon carbide metal-oxide-semiconductor field effect transistor with self-aligned gate for microwave and power applications, and method of making
05/07/1996US5514603 Manufacturing method for diamond semiconductor device
05/07/1996US5514515 Photoactive compounds having a heterocyclic group used in photoresist compositions
05/07/1996US5514500 Half-tone type phase shift mask and method for fabricating the same
05/07/1996US5514484 Epitaxial or buffer layer of perovskite metal oxide on magnesium oxide; semiconductors
05/07/1996US5514449 Interconnect substrate comprising a metal-polymer composite incorporating microelectronic circuitry
05/07/1996US5514439 Wafer support fixtures for rapid thermal processing
05/07/1996US5514425 Plasma vapor deposition on bottom of tapered groove, etching undesired film from sidewalls, integrated circuits
05/07/1996US5514334 Workable, stable
05/07/1996US5514259 Sputtering apparatus
05/07/1996US5514247 Process for plasma etching of vias
05/07/1996US5514245 Method for chemical planarization (CMP) of a semiconductor wafer to provide a planar surface free of microscratches
05/07/1996US5514243 Dry etching apparatus
05/07/1996US5514235 Method of making bonded wafers
05/07/1996US5514217 Microwave plasma CVD apparatus with a deposition chamber having a circumferential wall comprising a curved moving substrate web and a microwave applicator means having a specific dielectric member on the exterior thereof
05/07/1996US5514215 Treating liquid supplying apparatus for a substrate spin treating apparatus
05/07/1996US5514150 Micromachined conveyor devices
05/07/1996US5514025 Apparatus and method for chamfering the peripheral edge of a wafer to specular finish
05/07/1996US5513948 Universal specimen prealigner
05/07/1996US5513792 Bonding apparatus
05/07/1996US5513765 Plasma generating apparatus and method
05/07/1996US5513668 Support for disk-shaped articles
05/07/1996US5513594 Clamp with wafer release for semiconductor wafer processing equipment
05/07/1996US5513593 Liquid-phase heteroepitaxy method
05/07/1996US5513429 For an electrical circuit device
05/05/1996CA2135125A1 Film depositing apparatus and process for preparing layered structure including oxide superconductor thin film
05/02/1996WO1996013067A1 Method of, and apparatus for, producing thin film transistor
05/02/1996WO1996013066A1 Method of attaching integrated circuit dies by rolling adhesives onto semiconductor wafers
05/02/1996WO1996013064A1 Process for producing a read-only storage cell arrangement with vertical mos transistors
05/02/1996WO1996013063A1 A method of manufacturing thin-film solar cells
05/02/1996WO1996013062A1 Apparatus and method of manufacturing stacked wafer array
05/02/1996WO1996013061A1 Method of forming a thermally stable silicide
05/02/1996WO1996013060A1 Method for directly connecting flat bodies and articles produced according to said method from said flat bodies
05/02/1996WO1996013058A2 Apparatus and method for temperature control of workpieces in vacuum
05/02/1996WO1996013054A2 Integrated circuit package and method of making the same
05/02/1996WO1996013051A1 Inductively coupled plasma sputter chamber with conductive material sputtering capabilities
05/02/1996WO1996012939A1 Defect detection in patterned substrates using optical computing
05/02/1996WO1996012571A1 Cleaning agent, method and equipment
05/02/1996WO1996007300A3 Manufacture of electronic devices comprising thin-film circuitry
05/02/1996WO1996007199A3 Quartz glass jig for the heat treatment of silicon wafers and method and device for producing same
05/02/1996WO1996002066A3 Novolac polymer planarization films for microelectronic structures
05/02/1996DE4438283A1 Narrow band emission laser, esp. excimer laser for microlithography
05/02/1996DE4437581A1 Verfahren zur Herstellung einer Festwertspeicherzellenanordnung mit vertikalen MOS-Transistoren A method of manufacturing a read-only memory cell arrangement with vertical MOS transistors,
05/02/1996DE4345203C2 Semiconductor device with improved operational speed
05/02/1996DE19540621A1 Function testing apparatus for integrated circuit
05/02/1996DE19539541A1 Lateral trench MISFET for e.g. integrated control circuit of motor or liquid crystal display
05/02/1996DE19538991A1 Mirror polishing device for semiconductor wafer surface
05/02/1996DE19529620A1 Semiconductor memory with static memory cells
05/02/1996DE19529141A1 Integrated semiconductor circuit e.g. DRAM
05/02/1996CA2202530A1 Inductively coupled plasma sputter chamber with conductive material sputtering capabilities
05/01/1996EP0710058A2 Inhibiting short-circuits between electrically conductive paths
05/01/1996EP0710055A1 Plasma reactors for processing semi-conductor wafers
05/01/1996EP0709956A1 Method and circuit for protection against latch-down transistor and voltage regulator using the method
05/01/1996EP0709911A2 Improved switches
05/01/1996EP0709900A2 Porous silicon trench and capacitor structures
05/01/1996EP0709898A2 Semiconductor diode and method of fabricating the same
05/01/1996EP0709897A1 Semiconductor device
05/01/1996EP0709895A2 A quantum effect device
05/01/1996EP0709894A1 High-frequency bipolar transistor structure, and related manufacturing process
05/01/1996EP0709893A2 Semiconductor device, signal converter, and signal processing system using the same semiconductor device
05/01/1996EP0709891A1 Logic level controllable thyristor
05/01/1996EP0709890A1 Driving circuit for electronic semiconductor devices including at least a power transistor
05/01/1996EP0709888A2 Low inductance conductor topography for MOSFET circuit
05/01/1996EP0709886A1 Anisotropic film conductor for microconnections
05/01/1996EP0709882A2 Semiconductor device with passivation layer made out of benzocyclobutene polymer and silicon powder
05/01/1996EP0709880A2 Method of forming raised source/drain regions in an integrated circuit
05/01/1996EP0709879A1 Method for manufacturing semiconductor
05/01/1996EP0709878A1 Method for the preparation of discrete substrate plates of semiconductor silicon wafer
05/01/1996EP0709877A1 Plasma processing method
05/01/1996EP0709876A1 Separating slice base mount and jig for it
05/01/1996EP0709875A1 A processing chamber gas distribution manifold
05/01/1996EP0709874A1 Diagnostic wafer
05/01/1996EP0709869A1 Field emission devices employing enhanced diamond field emitters
05/01/1996EP0709805A2 Method for producing data carriers with embedded elements and device for carrying out this method
05/01/1996EP0709804A1 Process of fabricating contactless cards
05/01/1996EP0709741A1 Photolithographic process for circular dense patterns
05/01/1996EP0709740A1 Integrated circuit and method of making the same
05/01/1996EP0709736A1 Positive chemically amplified resist composition and method for producing compounds used therein
05/01/1996EP0709735A2 Self-aligned alignment marks for phase-shifting masks
05/01/1996EP0709498A1 Heat-treatment method of groups III - V compound semiconductor materials
05/01/1996EP0709489A1 Method and apparatus for vapor phase growth
05/01/1996EP0709488A1 Method and apparatus for thin film growth
05/01/1996EP0709486A1 Substrate processing reactors
05/01/1996EP0709410A2 Polymers
1 ... 5972 5973 5974 5975 5976 5977 5978 5979 5980 5981 5982 5983 5984 5985 5986 5987 5988 5989 5990 5991 5992 ... 6590