Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2013
06/12/2013CN103151310A Deeply-grooved power MOS (Metal Oxide Semiconductor) device and production method thereof
06/12/2013CN103151309A Deeply-grooved power MOS (Metal Oxide Semiconductor) device and preparation method thereof
06/12/2013CN103151308A Method for manufacturing semiconductor device
06/12/2013CN103151307A Trench scribing apparatus and trench scribing method
06/12/2013CN103151306A Method for manufacturing flexible electronic device
06/12/2013CN103151305A Thin film transistor array substrate, preparing method and display device
06/12/2013CN103151304A An array substrate of a display panel and a manufacture method thereof
06/12/2013CN103151303A Method for forming Damascus copper metal layer
06/12/2013CN103151302A Method for preparing low-resistance tantalum and tantalum nitride double-layer barrier layer by utilizing nitrogen-containing plasma
06/12/2013CN103151301A Semiconductor device forming method
06/12/2013CN103151300A Method for removing defects in hard mask structure
06/12/2013CN103151299A Multilayer wiring aluminum interconnection technique method, aluminum wire interconnection through hole and semiconductor product
06/12/2013CN103151298A Through silicon via manufacturing method
06/12/2013CN103151297A Manufacturing method of semiconductor device
06/12/2013CN103151296A Integrated technology for partial air gap low K deposition
06/12/2013CN103151295A Manufacturing method of semiconductor device
06/12/2013CN103151294A Device isolation structure and manufacturing method thereof
06/12/2013CN103151293A Forming method of radio-frequency transmission structure
06/12/2013CN103151292A Integrated method of raise source leakage structure complementary metal-oxide-semiconductor transistor (CMOS) and Bipolar device
06/12/2013CN103151291A Wafer-clamping rotary device and wafer-washing groove
06/12/2013CN103151290A Apparatus and method for supporting, positioning and rotating substrate in processing chamber
06/12/2013CN103151289A Crystal boat and crystal boat transfer device and wafer transfer system containing crystal boat and crystal boat transfer device
06/12/2013CN103151288A Variable-step plastic package product pusher dog mechanism
06/12/2013CN103151287A Method for judging problem process range according to wafer defect clustering position
06/12/2013CN103151286A Automatic store and method for storing plates of electronic circuits
06/12/2013CN103151285A Apparatus and methods for treating a substrate
06/12/2013CN103151284A Systems and methods of automatic boundary control for semiconductor processes
06/12/2013CN103151283A Method and device for detecting crystalline orientation of polycrystalline silicon wafer
06/12/2013CN103151282A Inspection system and method for inspecting multiple wafers
06/12/2013CN103151281A Monitoring method for ion implantation technology
06/12/2013CN103151280A Connection method of gold wire and copper foil
06/12/2013CN103151279A Semiconductor packaging method
06/12/2013CN103151278A Encapsulation technology
06/12/2013CN103151277A Method for improving machine table bonding efficiency in integrated circuit encapsulation
06/12/2013CN103151276A Integration method of high integration density power thin film hybrid integrated circuit
06/12/2013CN103151275A Manufacturing method for flip chip gold bumps
06/12/2013CN103151274A Semiconductor component and manufacturing method thereof
06/12/2013CN103151273A Diode packaging equipment
06/12/2013CN103151272A Diode packaging device
06/12/2013CN103151271A Distribution method of heat-radiating cover adhesive glue
06/12/2013CN103151270A Manufacturing method for schottky barrier component of grooved metal-oxide semiconductor
06/12/2013CN103151269A Method for preparing source drain quasi-SOI (silicon-on-insulator) multi-grid structural element
06/12/2013CN103151268A Vertical double-diffused field-effect tube and manufacturing process thereof
06/12/2013CN103151267A Doping method of NMOS (N-channel metal oxide semiconductor) pipe
06/12/2013CN103151266A Method for manufacturing semiconductor device
06/12/2013CN103151265A Manufacturing method of silicon (Si) substrate upper side grid grapheme field effect tube based on copper (Cu) film annealing
06/12/2013CN103151264A Manufacturing method of semiconductor device
06/12/2013CN103151263A Preparation method of thyristor chip
06/12/2013CN103151262A Planar insulated gate bipolar transistor and preparation method thereof
06/12/2013CN103151261A Trench schottky diode and manufacturing method thereof
06/12/2013CN103151260A Apparatus and method utilizing forced convection for uniform thermal treatment of thin film devices
06/12/2013CN103151259A Method for removing passivation layer of chip
06/12/2013CN103151258A Manufacturing method of semiconductor device
06/12/2013CN103151257A Method for manufacturing sigma-shaped silicon grooves
06/12/2013CN103151256A Dry etching method for removing residual polycrystalline silicon below grid side wall
06/12/2013CN103151255A Semiconductor grid structure and formation method thereof
06/12/2013CN103151254A Preparation method for germanium-based schottky junction
06/12/2013CN103151253A Method for making signal wire, thin film transistor, array substrate and display device
06/12/2013CN103151252A Manufacturing method of medium auxiliary two-time formed T-shaped grating
06/12/2013CN103151251A Groove type insulated gate bipolar transistor and preparation method thereof
06/12/2013CN103151250A Manufacturing method of semiconductor device
06/12/2013CN103151249A Manufacturing method of semiconductor device
06/12/2013CN103151248A Zinc diffusion device and diffusion method thereof in manufacturing of photoelectric detector
06/12/2013CN103151247A Method for preparing non-polar GaN film on r-face sapphire substrate
06/12/2013CN103151246A Side grid grapheme transistor manufacturing method based on copper (Cu) film annealing and chlorine reaction
06/12/2013CN103151245A Thin film patterning method
06/12/2013CN103151244A Stackable capacitor and manufacturing method thereof
06/12/2013CN103151243A Novel sealed container for production of electronic component
06/12/2013CN103149810A Techniques providing photoresist removal
06/12/2013CN103149764A Thin film transistor array substrate, display device and method
06/12/2013CN103149763A TFT-LCD (thin film transistor-liquid crystal display) array substrate and display panel as well as manufacturing method thereof
06/12/2013CN103149760A Thin film transistor array substrate, manufacturing method and display device
06/12/2013CN103149754A TFT (Thin Film Transistor) liquid crystal display device and manufacturing method thereof
06/12/2013CN103148255A Valve control system and method thereof
06/12/2013CN103147132A Cleaning method for monocrystalline silicon wafer
06/12/2013CN103147069A Manufacturing method for metalorganic epitaxial thin film
06/12/2013CN103146314A Adhesive composition for semiconductor and adhesive film comprising the same
06/12/2013CN103145116A Preparation method of selective reduction-oxidation grapheme and electric storage
06/12/2013CN103144029A Method for adhering works and work adhering apparatus
06/12/2013CN103144024A Process for manufacturing 300mm silicon polished wafer by using high-temperature heat treatment
06/12/2013CN103144012A Method of preparing substrate
06/12/2013CN103143798A Ntegrated reflow and cleaning process and apparatus for performing the same
06/12/2013CN102655146B Array substrate, array substrate preparation method and display device
06/12/2013CN102646634B Manufacturing method for TFT-LCD (Thin Film Transistor-Liquid Crystal Display) array substrate
06/12/2013CN102629589B Array substrate and manufacturing method thereof, and display apparatus
06/12/2013CN102456571B Method for manufacturing doped polycrystalline silicon of emitting electrode
06/12/2013CN102417792B Preparation method of antifouling material having crossed regular microstructure on surface
06/12/2013CN102412275B Vertical PNP device in SiGe BiCMOS technology and manufacturing method thereof
06/12/2013CN102412263B Semiconductor device with pre-metal dielectric filling structure and preparation method thereof
06/12/2013CN102403216B Wet etching method for preparation of super-junction device
06/12/2013CN102394254B Crystal silicon solar battery dry etching clamp
06/12/2013CN102386131B Technology for simultaneously realizing drift drain metal oxide semiconductor (DDMOS) drift region and lateral diffused metal oxide semiconductor (LDMOS) drift region
06/12/2013CN102386116B Method for extracting length of effective grid electrode
06/12/2013CN102386089B Method for preparing semiconductor device structure
06/12/2013CN102386059B Method for forming small-spacing pattern
06/12/2013CN102376757B Transverse parasitic PNP device in SiGe HBT technology and manufacture method thereof
06/12/2013CN102376553B Grid etching method
06/12/2013CN102375328B Testing photo mask template and application thereof
06/12/2013CN102364670B Manufacturing method of metal copper Damascus interconnection structure
06/12/2013CN102347333B One time programmable read only memory (OTPROM), manufacturing method and operation method thereof