Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/1996
10/08/1996US5563683 Substrate holder
10/08/1996US5563682 Exposing apparatus with mask alignment system and method of aligning, exposing and transferring work
10/08/1996US5563546 Selector circuit selecting and outputting voltage applied to one of first and second terminal in response to voltage level applied to first terminal
10/08/1996US5563522 Microwave band probing apparatus
10/08/1996US5563521 Membrane connector with stretch induced micro scrub
10/08/1996US5563520 Probe system
10/08/1996US5563517 Dual channel d.c. low noise measurement system and test methodology
10/08/1996US5563448 Ohmic contact structure of a highly integrated semiconductor device having two resistance control layers formed between a metal electrode and the substrate
10/08/1996US5563445 Semiconductor device
10/08/1996US5563442 For an electronic package
10/08/1996US5563441 Lead frame assembly including a semiconductor device and a resistance wire
10/08/1996US5563440 Semiconductor device and method for forming the same
10/08/1996US5563436 Forward overvoltage protection circuit for a vertical semiconductor component
10/08/1996US5563433 French-type semiconductor memory device with enhanced trench capacitor-transistor connection
10/08/1996US5563432 Thin-film transistor and display device using the same
10/08/1996US5563430 Gate array base cell
10/08/1996US5563428 Layered structure of a substrate, a dielectric layer and a single crystal layer
10/08/1996US5563427 Active matrix panel and manufacturing method including TFTs having variable impurity concentration levels
10/08/1996US5563426 Thin film transistor
10/08/1996US5563422 Gallium nitride-based III-V group compound semiconductor device and method of producing the same
10/08/1996US5563419 Electron beam exposure system capable of correcting proximity effect
10/08/1996US5563380 Apparatus for mounting integrated circuit chips on a Mini-Board
10/08/1996US5563105 PECVD method of depositing fluorine doped oxide using a fluorine precursor containing a glass-forming element
10/08/1996US5563104 Reduction of pattern sensitivity in ozone-teos deposition via a two-step (low and high temperature) process
10/08/1996US5563103 Method for manufacturing thermoplastic resin molded semiconductor
10/08/1996US5563102 Method of sealing integrated circuits
10/08/1996US5563101 Substrate for semiconductor apparatus
10/08/1996US5563100 Fabrication method of semiconductor device with refractory metal silicide formation by removing native oxide in hydrogen
10/08/1996US5563098 Buried contact oxide etch with poly mask procedure
10/08/1996US5563097 Forming insulation layer on semiconductor substrates, etching to form holes, forming titanium nitride layer, planarizing insulation and burying in apertures
10/08/1996US5563096 Semiconductor device fabrication with planar gate interconnect surface
10/08/1996US5563095 Containing the substrate, deposition coating processes and etching processes within a series of process chambers without exposure to airborne impurities and contact with manufacturing personnel
10/08/1996US5563093 P-n transistors with insulating films
10/08/1996US5563092 Method of producing a substrate for an amorphous semiconductor
10/08/1996US5563091 Depositing polysilicon to fill spaces left by etching of oxide pad underlying nitride layer for reducing diffusion of oxide and dopants during of during oxidation
10/08/1996US5563090 Method for forming rugged tungsten film and method for fabricating semiconductor device utilizing the same
10/08/1996US5563089 Method of forming a bit line over capacitor array of memory cells and an array of bit line over capacitor array of memory cells
10/08/1996US5563088 Method for fabricating a stacked capacitor in a DRAM cell
10/08/1996US5563087 On a multilayer gallium arsenide substrate, crystallization a buffer layer on substrate forming indium arsenide or antimonate layer
10/08/1996US5563085 Method of manufacturing a semiconductor device
10/08/1996US5563084 Method of making a three-dimensional integrated circuit
10/08/1996US5563083 Method of fabricating non-volatile sidewall memory cell
10/08/1996US5563082 Method of manufacturing a Xmos insulated transistor
10/08/1996US5563080 Method of manufacturing a high voltage transistor in a semiconductor device
10/08/1996US5563079 Method of making a field effect transistor
10/08/1996US5563077 Method of fabricating a thin film transistor having vertical channel
10/08/1996US5563022 Positive-working radiation-sensitive mixture and the production of relief patterns
10/08/1996US5563018 (1,2-naphthoquinone 2-diazide) sulfonic acid esters, radiation-sensitive mixture prepared therewith and radiation-sensitive recording material
10/08/1996US5563012 Printing composite pattern into photoresist
10/08/1996US5563010 Plurality of light screen patterns on substrate prevents necking effect; achieves accurate dimension in film pattern
10/08/1996US5563009 Photomask for forming a micropattern of a semiconductor device
10/08/1996US5562973 Ceramic multi-layer wiring board
10/08/1996US5562971 Multilayer printed wiring board
10/08/1996US5562970 Multilayer circuit structure having projecting via lead
10/08/1996US5562947 Vapor deposition of semiconductors
10/08/1996US5562837 Method for connecting electronic circuits in a multi-chip module having a co-fired substrate and multi-chip module obtained thereby
10/08/1996US5562802 Method of producing a quantum device which utilizes the quantum effect
10/08/1996US5562801 Method of etching an oxide layer
10/08/1996US5562800 Wafer transport method
10/08/1996US5562778 Ultrasonic jet semiconductor wafer cleaning method
10/08/1996US5562775 Plasma downstream processing
10/08/1996US5562774 Coated quartz glass component
10/08/1996US5562770 Semiconductor manufacturing process for low dislocation defects
10/08/1996US5562539 For use by a worker
10/08/1996US5562396 Non-contact type moving table
10/08/1996US5562395 For a semiconductor processing machine
10/08/1996US5562387 Device for transferring plate-like objects
10/08/1996US5562383 Treatment apparatus
10/08/1996US5562382 Substrate transport apparatus and substrate transport path adjustment method
10/08/1996US5562132 Bulk containers for high purity chemical delivery systems
10/08/1996US5562113 Centrifugal wafer carrier cleaning apparatus
10/03/1996WO1996031102A1 Arrangement for the manufacture of multilayers
10/03/1996WO1996030949A1 Flash eprom cell and method of manufacturing the same
10/03/1996WO1996030947A1 Punch-through field effect transistor
10/03/1996WO1996030946A1 Semiconductor device and its manufacture
10/03/1996WO1996030942A1 Components for housing an integrated circuit device
10/03/1996WO1996030941A2 Method of manufacturing a semiconductor device with a bicmos circuit
10/03/1996WO1996030940A2 METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE WITH BiCMOS CIRCUIT
10/03/1996WO1996030939A1 Process for surface contacting electronic components
10/03/1996WO1996030938A2 Process for fabricating layered superlattice materials and making electronic devices including same
10/03/1996WO1996030937A1 A curing method and equipment design for epoxy mounted flip chip devices
10/03/1996WO1996030936A1 Self-alignment technique for semiconductor devices
10/03/1996WO1996030935A2 Method of manufacturing an electronic multilayer component
10/03/1996WO1996030934A1 Carrier matrix for integrated microanalysis systems, method for the production thereof and use of the same
10/03/1996WO1996030933A2 Solder bump fabrication methods and structure including a titanium barrier layer
10/03/1996WO1996030932A2 Microcircuit via interconnect
10/03/1996WO1996030896A1 Time optimal trajectory for cluster tool robots
10/03/1996WO1996030772A1 Interface apparatus for automatic test equipment
10/03/1996WO1996030729A1 Apparatus for weighing a grown crystal
10/03/1996WO1996030163A1 A wafer retainer for retaining a wafer to be polished and a method for attaching/detaching the wafer retainer to/from a base plate of a polishing machine
10/03/1996WO1996015652A3 Tuning system with dc-dc converter
10/03/1996CA2211913A1 Microcircuit via interconnect
10/02/1996EP0735684A2 BiCMOS logical integrated circuit
10/02/1996EP0735682A1 MOS transistor switching circuit without body effect
10/02/1996EP0735640A1 Protection circuit for semiconductor devices
10/02/1996EP0735604A1 Planar dielectric line and integrated circuit using the same
10/02/1996EP0735599A2 Method for growth of a nitrogen-doped gallium phosphide epitaxial layer
10/02/1996EP0735597A2 Silicon solar cell and fabrication method thereof
10/02/1996EP0735595A2 Integrated circuit capacitor having a conductive trench
10/02/1996EP0735594A2 Semiconductor device on insulator and method of manufacturing the same
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