Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2013
09/17/2013US8535964 Frame assembly extending donor film, method of manufacturing donor film used in laser induced thermal imaging(LITI), and method of manufacturing organic light emitting device
09/17/2013US8535963 Method for manufacturing electronic device and electronic device
09/17/2013US8535961 Light emitting diode (LED) package and method
09/17/2013US8535960 Method for packaging light emitting diode having fluorescent material directly coated on LED die thereof
09/17/2013US8535959 Method for producing large lighting with power LED
09/17/2013US8535958 Method for fabricating light emitting diode
09/17/2013US8535957 Dopant metrology with information feedforward and feedback
09/17/2013US8535955 Method for assembling a multi-component electronic apparatus
09/17/2013US8535954 Magnetoresistive random access memory element and fabrication method thereof
09/17/2013US8535953 Process for selectively patterning a magnetic film structure
09/17/2013US8535952 Method for manufacturing non-volatile magnetic memory
09/17/2013US8535856 Lithographic mask and manufacturing method thereof
09/17/2013US8535854 Reflective exposure mask, method of fabricating reflective exposure mask, method of inspecting reflective exposure mask, and method of cleaning reflective exposure mask
09/17/2013US8535767 Method for repairing damage of dielectric film by hydrocarbon restoration and hydrocarbon depletion using UV irradiation
09/17/2013US8535551 Plasma etching method
09/17/2013US8535549 Method for forming stair-step structures
09/17/2013US8535512 Devices and methods for sequencing nucleic acids
09/17/2013US8535479 Manufacturing method of semiconductor device, and semiconductor device
09/17/2013US8535451 Method and apparatus for cleaning semiconductor wafers using compressed and/or pressurized foams, bubbles, and/or liquids
09/17/2013US8535393 Method and apparatus for measurement and control of photomask to substrate alignment
09/17/2013US8535323 Constraining ring inserter
09/17/2013US8535117 Method and apparatus for polishing a substrate having a grinded back surface
09/17/2013US8534975 Substrate transport apparatus and method for manufacturing magnetic recording medium
09/17/2013US8534532 Method of manufacturing semiconductor device
09/17/2013US8533895 Methods and materials for making a monolithic porous pad cast onto a rotatable base
09/17/2013CA2701523C Method of fastening lamellar of a lamellar material to a suitable substrate
09/12/2013WO2013134631A1 Wafer inspection with multi-spot illumination and multiple channels
09/12/2013WO2013134568A1 Shielded probe array
09/12/2013WO2013134564A1 Transferring electronic probe assemblies to space transformers
09/12/2013WO2013134561A1 Fine pitch probe array from bulk material
09/12/2013WO2013134487A1 Imaging overlay metrology target and complimentary overlay metrology measurement system
09/12/2013WO2013134422A1 Probe assembly and method for contactless electrical characterization of buried conducting layers
09/12/2013WO2013134151A1 Split pumping method, apparatus, and system
09/12/2013WO2013134075A1 Detecting membrane breakage in a carrier head
09/12/2013WO2013134068A1 Wafer and reticle inspection systems and method for selecting illumination pupil configurations
09/12/2013WO2013134054A1 3d packaging with low-force thermocompression bonding of oxidizable materials
09/12/2013WO2013134023A1 Controlling data center cooling
09/12/2013WO2013134010A2 A method of manufacturing silicon-on-insulator wafers
09/12/2013WO2013133983A1 Substrate support with ceramic insulation
09/12/2013WO2013133974A1 Fitting of optical model to measured spectrum
09/12/2013WO2013133953A1 Schottky contact
09/12/2013WO2013133942A1 Flowable films using alternative silicon precursors
09/12/2013WO2013133919A1 Self-aligned stack gate structure for use in a non-volatile memory array
09/12/2013WO2013133809A1 An interposer to regulate current for wafer test tooling
09/12/2013WO2013133552A1 Plasma processing method and substrate processing apparatus
09/12/2013WO2013133401A1 Substrate processing method and substrate processing apparatus
09/12/2013WO2013133396A1 Actinic ray-sensitive or radiation-sensitive resin composition, and, actinic ray-sensitive or radiation-sensitive film and pattern forming method, each using the composition
09/12/2013WO2013133353A1 Sputtering target
09/12/2013WO2013133321A1 Mask, mask unit, exposure device, substrate treatment apparatus and method for manufacturing device
09/12/2013WO2013133275A1 Adhesive sheet and method for manufacturing semiconductor device
09/12/2013WO2013133268A1 Sheet for forming resin film for chips
09/12/2013WO2013133261A1 Method for continuously producing optical display panel and system for continuously producing optical display panel
09/12/2013WO2013133250A1 Copolymer for lithography and method for manufacturing same, resist composition, and method for manufacturing substrate
09/12/2013WO2013133204A1 Susceptor
09/12/2013WO2013133198A1 Polishing composition and method using said polishing composition to manufacture compound semiconductor substrate
09/12/2013WO2013133134A1 Semiconductor device and method of manufacture thereof
09/12/2013WO2013133116A1 Connection method using anisotropic conductive material and anisotropic conductive connected structure
09/12/2013WO2013133101A1 Substrate processing apparatus, semiconductor device manufacturing method, and substrate processing method
09/12/2013WO2013133088A1 Composition for forming highly adhesive resist underlayer film
09/12/2013WO2013133085A1 Sintered silver microparticle compact
09/12/2013WO2013133060A1 Semiconductor contact structure and method for forming same
09/12/2013WO2013133044A1 Microcrystalline silicon, microcrystalline-silicon manufacturing method, and solar cell provided with said microcrystalline silicon
09/12/2013WO2013133019A1 Pattern forming method
09/12/2013WO2013133015A1 Method and apparatus for manufacturing semiconductor device
09/12/2013WO2013132993A1 Method for manufacturing element
09/12/2013WO2013132979A1 Pattern forming method
09/12/2013WO2013132955A1 Heat processing device
09/12/2013WO2013132953A1 Bonding method, electronic device manufacturing method, and electronic component
09/12/2013WO2013132939A1 Evaluation device and computer program
09/12/2013WO2013132937A1 Method for manufacturing thin film transistor and method for manufacturing display device
09/12/2013WO2013132911A1 Slug tuner, microwave plasma source using same, and microwave plasma processing device
09/12/2013WO2013132882A1 Glass substrate conveyance device and conveyance method
09/12/2013WO2013132881A1 Liquid processing method, liquid processing device, and storage medium
09/12/2013WO2013132854A1 Energy consumption monitoring system for substrate treatment device and energy consumption monitoring method for substrate treatment device
09/12/2013WO2013132841A1 Semiconductor integrated circuit device
09/12/2013WO2013132825A1 Semiconductor device and manufacturing method therefor
09/12/2013WO2013132812A1 Nitride semiconductor light-emitting element, light source, and method for manufacturing same
09/12/2013WO2013132804A1 Transfer apparatus and ceramic member
09/12/2013WO2013132803A1 Transfer apparatus and ceramic member
09/12/2013WO2013132766A1 Method for manufacturing semiconductor device
09/12/2013WO2013132758A1 Printed semiconductor, fabrication method for same, and stamp
09/12/2013WO2013132749A1 Semiconductor device, semiconductor device manufacturing method, and semiconductor manufacturing apparatus
09/12/2013WO2013132693A1 Method for manufacturing resin-sealed electronic component and device for manufacturing resin-sealed electronic component
09/12/2013WO2013132353A2 Sequential stage mixing for single substrate strip processing
09/12/2013WO2013132332A1 Methods for forming semiconductor structures including iii-v semiconductor material using substrates comprising molybdenum, and structures formed by such methods
09/12/2013WO2013132301A1 Method of testing a semiconductor on insulator structure and application of said test to the fabrication of such a structure
09/12/2013WO2013132236A1 Mesoporous single crystal semiconductors
09/12/2013WO2013131868A2 Method for producing a doped region in a semiconductor layer
09/12/2013WO2013131748A1 Substrate holder arrangement, coating system with substrate holder arrangement and method for performing a coating process
09/12/2013WO2013131729A1 Method for producing an optoelectronic semiconductor chip
09/12/2013WO2013131690A1 Method for forming a contact on a semiconductor substrate and semiconductor device
09/12/2013WO2013131449A1 Methods for manufacturing isolated deep trench and high-voltage led chip
09/12/2013WO2013131384A1 Thin-film transistor array substrate, manufacturing method therefor, and electronic device
09/12/2013WO2013131380A1 Array substrate, manufacturing method thereof and display device thereof
09/12/2013WO2013131312A1 Sige-hbt transistor and manufacturing method thereof
09/12/2013WO2013131284A1 Method for manufacturing array substrate of transflective liquid crystal display
09/12/2013WO2013131283A1 Method for manufacturing array substrate of transmissive liquid crystal display
09/12/2013WO2013131282A1 Method for manufacturing array substrate of transflective liquid crystal display
09/12/2013WO2013109593A3 Laser assisted transfer welding process
09/12/2013WO2013034411A3 Vacuum coating apparatus