| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 08/03/2004 | US6771481 Plasma processing apparatus for processing semiconductor wafer using plasma |
| 08/03/2004 | US6771372 Rotational stage with vertical axis adjustment |
| 08/03/2004 | US6771371 Particle detection and removal apparatus for use on wafer fabrication equipment to lower tool related defects from particle contamination |
| 08/03/2004 | US6771364 Surface inspecting apparatus |
| 08/03/2004 | US6771354 Vibration damping apparatus, control method therefor, exposure apparatus having the vibration damping apparatus, maintenance method therefor, semiconductor device fabrication method, and semiconductor fabrication factory |
| 08/03/2004 | US6771353 Exposure apparatus and method, device manufacturing method, and discharge lamp |
| 08/03/2004 | US6771352 Lithographic apparatus and device manufacturing method |
| 08/03/2004 | US6771351 Projection exposure method and apparatus |
| 08/03/2004 | US6771350 Exposure apparatus and exposure method capable of controlling illumination distribution |
| 08/03/2004 | US6771343 Liquid crystal display |
| 08/03/2004 | US6771328 Active matrix organic electroluminescent device simplifying a fabricating process and a fabricating method thereof |
| 08/03/2004 | US6771258 Semiconductor device |
| 08/03/2004 | US6771117 Semiconductor device less susceptible to variation in threshold voltage |
| 08/03/2004 | US6771112 Semiconductor integrated circuit having pads with less input signal attenuation |
| 08/03/2004 | US6771109 Semiconductor device with interface circuitry having operating speed during low voltage mode improved |
| 08/03/2004 | US6771090 Indexing rotatable chuck for a probe station |
| 08/03/2004 | US6770987 Brushless electric motors with reduced stray AC magnetic fields |
| 08/03/2004 | US6770982 Semiconductor device power distribution system and method |
| 08/03/2004 | US6770978 Metal line, method for fabricating the metal line, thin film transistor employing the metal line and display device |
| 08/03/2004 | US6770977 Semiconductor device and method for fabricating the same |
| 08/03/2004 | US6770975 Integrated circuits with multiple low dielectric-constant inter-metal dielectrics |
| 08/03/2004 | US6770974 Semiconductor device and its manufacturing method |
| 08/03/2004 | US6770973 Semiconductor apparatus including a multi-layer wiring configuration and manufacturing method therefor |
| 08/03/2004 | US6770972 Method for electrical interconnection employing salicide bridge |
| 08/03/2004 | US6770970 High-frequency module, method of manufacturing thereof and method of molding resin |
| 08/03/2004 | US6770968 Method for bonding heat sinks to overmolds and device formed thereby |
| 08/03/2004 | US6770966 Electronic assembly including a die having an integrated circuit and a layer of diamond to transfer heat |
| 08/03/2004 | US6770965 Substrate with embedding resin containing thermoplastic resin, acid anhydride curing agent, curing accelerator and filler with specified particle size; low viscosity, high reliability by matching thermal expansion coefficients |
| 08/03/2004 | US6770964 Semiconductor device including intermediate wiring element |
| 08/03/2004 | US6770962 Disposable mold runner gate for substrate based electronic packages |
| 08/03/2004 | US6770961 Carrier frame and semiconductor package including carrier frame |
| 08/03/2004 | US6770960 Transferring semiconductor crystal from a substrate to a resin |
| 08/03/2004 | US6770959 Semiconductor package without substrate and method of manufacturing same |
| 08/03/2004 | US6770958 Under bump metallization structure |
| 08/03/2004 | US6770957 Adhesives, adhesive films and electric devices |
| 08/03/2004 | US6770954 Semiconductor device with SI-GE layer-containing low resistance, tunable contact |
| 08/03/2004 | US6770953 Bipolar transistor |
| 08/03/2004 | US6770952 Integrated process for high voltage and high performance silicon-on-insulator bipolar devices |
| 08/03/2004 | US6770950 Non-volatile semiconductor memory structure |
| 08/03/2004 | US6770948 Integrated fuse with regions of different doping within the fuse neck |
| 08/03/2004 | US6770944 Semiconductor device having counter and channel impurity regions |
| 08/03/2004 | US6770942 Semiconductor device having silicide film formed in a part of source-drain diffusion layers and method of manufacturing the same |
| 08/03/2004 | US6770941 Semiconductor device and method of manufacturing a semiconductor device |
| 08/03/2004 | US6770940 Semiconductor integrated circuit and method for fabricating the same |
| 08/03/2004 | US6770936 Thin film transistors, and liquid crystal display device and electronic apparatus using the same |
| 08/03/2004 | US6770935 Array of transistors with low voltage collector protection |
| 08/03/2004 | US6770934 Flash memory device structure and manufacturing method thereof |
| 08/03/2004 | US6770933 Single poly eeprom with improved coupling ratio |
| 08/03/2004 | US6770932 Semiconductor memory device having a memory region and a peripheral region, and a manufacturing method thereof |
| 08/03/2004 | US6770931 Nonvolatile semiconductor memory device and method for fabricating the same |
| 08/03/2004 | US6770930 Semiconductor device having MIM structure capacitor |
| 08/03/2004 | US6770929 Surrounding an active area or array to be polished with a border of the active material so the border is wider than a single active area within the array |
| 08/03/2004 | US6770928 Semiconductor memory with vertical selection transistor |
| 08/03/2004 | US6770927 Structures comprising transistor gates |
| 08/03/2004 | US6770926 Semiconductor device with via-contact plugs |
| 08/03/2004 | US6770925 Flush memory having source and drain edges in contact with the stacked gate structure |
| 08/03/2004 | US6770924 Amorphous TiN films for an integrated capacitor dielectric/bottom plate using high dielectric constant materials |
| 08/03/2004 | US6770923 High K dielectric film |
| 08/03/2004 | US6770922 Semiconductor device composed of a group III-V nitride semiconductor |
| 08/03/2004 | US6770921 Sidewall strap for complementary semiconductor structures and method of making same |
| 08/03/2004 | US6770920 Nonvolatile memory devices |
| 08/03/2004 | US6770919 Indium phosphide heterojunction bipolar transistor layer structure and method of making the same |
| 08/03/2004 | US6770918 Electrostatic discharge protection silicon controlled rectifier (ESD-SCR) for silicon germanium technologies |
| 08/03/2004 | US6770917 High-voltage diode |
| 08/03/2004 | US6770914 III nitride semiconductor substrate for ELO |
| 08/03/2004 | US6770912 Semiconductor device and method for producing the same |
| 08/03/2004 | US6770903 Silicon based substrate with intermediate layer nanometer scaled in thickness for promoting tunneling of electrons responsive to predetermined bias voltage, including oxide or nitride material, metal layer formed on intermediate layer |
| 08/03/2004 | US6770902 Charge carrier extracting transistor |
| 08/03/2004 | US6770899 Work piece feeding machine |
| 08/03/2004 | US6770896 Method for generating extreme ultraviolet radiation based on a radiation-emitting plasma |
| 08/03/2004 | US6770895 Method and apparatus for isolating light source gas from main chamber gas in a lithography tool |
| 08/03/2004 | US6770894 Illumination system with field mirrors for producing uniform scanning energy |
| 08/03/2004 | US6770890 Stage devices including linear motors that produce reduced beam-perturbing stray magnetic fields, and charged-particle-beam microlithography systems comprising same |
| 08/03/2004 | US6770889 Method of controlling electrostatic lens and ion implantation apparatus |
| 08/03/2004 | US6770852 Etching system having device measuring critical dimension test features along profile of wafer at preset locations, etching chamber with chuck supporting wafer, heating elements adjacent locations, controller adjusting temperature, reduces variation |
| 08/03/2004 | US6770851 Method and apparatus for the treatment of substrates |
| 08/03/2004 | US6770837 Method for connecting a printed circuit to a liquid crystal display |
| 08/03/2004 | US6770726 β-substituted organosilsesquioxane polymers |
| 08/03/2004 | US6770720 A copolymer of styrene and hdyroxyalkyl acrylate or hydroxyalkyl methacrylate |
| 08/03/2004 | US6770575 Method for improving thermal stability of fluorinated amorphous carbon low dielectric constant materials |
| 08/03/2004 | US6770574 Method of forming a dielectric layer |
| 08/03/2004 | US6770573 Method for fabricating an ultralow dielectric constant material |
| 08/03/2004 | US6770572 Use of multifunctional si-based oligomer/polymer for the surface modification of nanoporous silica films |
| 08/03/2004 | US6770571 Barrier in gate stack for improved gate dielectric integrity |
| 08/03/2004 | US6770570 Method of forming a semiconductor device with a substantially uniform density low-k dielectric layer |
| 08/03/2004 | US6770568 Selective etching using sonication |
| 08/03/2004 | US6770567 Method of reducing particulates in a plasma etch chamber during a metal etch process |
| 08/03/2004 | US6770566 Methods of forming semiconductor structures, and articles and devices formed thereby |
| 08/03/2004 | US6770565 System for planarizing metal conductive layers |
| 08/03/2004 | US6770564 Method of etching metallic thin film on thin film resistor |
| 08/03/2004 | US6770563 Process of forming a bottle-shaped trench |
| 08/03/2004 | US6770561 Method for depositing metal film through chemical vapor deposition process |
| 08/03/2004 | US6770560 Method of forming metal wiring |
| 08/03/2004 | US6770559 Method of forming wiring by implantation of seed layer material |
| 08/03/2004 | US6770558 Selective filling of electrically conductive vias for three dimensional device structures |
| 08/03/2004 | US6770557 Semiconductor device and method of fabricating the same |
| 08/03/2004 | US6770556 Method of depositing a low dielectric with organo silane |
| 08/03/2004 | US6770555 Process for fabricating semiconductor integrated circuit device having polycide line and impurity region respectively exposed to contact holes different in depth |
| 08/03/2004 | US6770554 On-chip interconnect circuits with use of large-sized copper fill in CMP process |
| 08/03/2004 | US6770552 Method of forming a semiconductor device having T-shaped gate structure |