Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2004
08/03/2004US6771481 Plasma processing apparatus for processing semiconductor wafer using plasma
08/03/2004US6771372 Rotational stage with vertical axis adjustment
08/03/2004US6771371 Particle detection and removal apparatus for use on wafer fabrication equipment to lower tool related defects from particle contamination
08/03/2004US6771364 Surface inspecting apparatus
08/03/2004US6771354 Vibration damping apparatus, control method therefor, exposure apparatus having the vibration damping apparatus, maintenance method therefor, semiconductor device fabrication method, and semiconductor fabrication factory
08/03/2004US6771353 Exposure apparatus and method, device manufacturing method, and discharge lamp
08/03/2004US6771352 Lithographic apparatus and device manufacturing method
08/03/2004US6771351 Projection exposure method and apparatus
08/03/2004US6771350 Exposure apparatus and exposure method capable of controlling illumination distribution
08/03/2004US6771343 Liquid crystal display
08/03/2004US6771328 Active matrix organic electroluminescent device simplifying a fabricating process and a fabricating method thereof
08/03/2004US6771258 Semiconductor device
08/03/2004US6771117 Semiconductor device less susceptible to variation in threshold voltage
08/03/2004US6771112 Semiconductor integrated circuit having pads with less input signal attenuation
08/03/2004US6771109 Semiconductor device with interface circuitry having operating speed during low voltage mode improved
08/03/2004US6771090 Indexing rotatable chuck for a probe station
08/03/2004US6770987 Brushless electric motors with reduced stray AC magnetic fields
08/03/2004US6770982 Semiconductor device power distribution system and method
08/03/2004US6770978 Metal line, method for fabricating the metal line, thin film transistor employing the metal line and display device
08/03/2004US6770977 Semiconductor device and method for fabricating the same
08/03/2004US6770975 Integrated circuits with multiple low dielectric-constant inter-metal dielectrics
08/03/2004US6770974 Semiconductor device and its manufacturing method
08/03/2004US6770973 Semiconductor apparatus including a multi-layer wiring configuration and manufacturing method therefor
08/03/2004US6770972 Method for electrical interconnection employing salicide bridge
08/03/2004US6770970 High-frequency module, method of manufacturing thereof and method of molding resin
08/03/2004US6770968 Method for bonding heat sinks to overmolds and device formed thereby
08/03/2004US6770966 Electronic assembly including a die having an integrated circuit and a layer of diamond to transfer heat
08/03/2004US6770965 Substrate with embedding resin containing thermoplastic resin, acid anhydride curing agent, curing accelerator and filler with specified particle size; low viscosity, high reliability by matching thermal expansion coefficients
08/03/2004US6770964 Semiconductor device including intermediate wiring element
08/03/2004US6770962 Disposable mold runner gate for substrate based electronic packages
08/03/2004US6770961 Carrier frame and semiconductor package including carrier frame
08/03/2004US6770960 Transferring semiconductor crystal from a substrate to a resin
08/03/2004US6770959 Semiconductor package without substrate and method of manufacturing same
08/03/2004US6770958 Under bump metallization structure
08/03/2004US6770957 Adhesives, adhesive films and electric devices
08/03/2004US6770954 Semiconductor device with SI-GE layer-containing low resistance, tunable contact
08/03/2004US6770953 Bipolar transistor
08/03/2004US6770952 Integrated process for high voltage and high performance silicon-on-insulator bipolar devices
08/03/2004US6770950 Non-volatile semiconductor memory structure
08/03/2004US6770948 Integrated fuse with regions of different doping within the fuse neck
08/03/2004US6770944 Semiconductor device having counter and channel impurity regions
08/03/2004US6770942 Semiconductor device having silicide film formed in a part of source-drain diffusion layers and method of manufacturing the same
08/03/2004US6770941 Semiconductor device and method of manufacturing a semiconductor device
08/03/2004US6770940 Semiconductor integrated circuit and method for fabricating the same
08/03/2004US6770936 Thin film transistors, and liquid crystal display device and electronic apparatus using the same
08/03/2004US6770935 Array of transistors with low voltage collector protection
08/03/2004US6770934 Flash memory device structure and manufacturing method thereof
08/03/2004US6770933 Single poly eeprom with improved coupling ratio
08/03/2004US6770932 Semiconductor memory device having a memory region and a peripheral region, and a manufacturing method thereof
08/03/2004US6770931 Nonvolatile semiconductor memory device and method for fabricating the same
08/03/2004US6770930 Semiconductor device having MIM structure capacitor
08/03/2004US6770929 Surrounding an active area or array to be polished with a border of the active material so the border is wider than a single active area within the array
08/03/2004US6770928 Semiconductor memory with vertical selection transistor
08/03/2004US6770927 Structures comprising transistor gates
08/03/2004US6770926 Semiconductor device with via-contact plugs
08/03/2004US6770925 Flush memory having source and drain edges in contact with the stacked gate structure
08/03/2004US6770924 Amorphous TiN films for an integrated capacitor dielectric/bottom plate using high dielectric constant materials
08/03/2004US6770923 High K dielectric film
08/03/2004US6770922 Semiconductor device composed of a group III-V nitride semiconductor
08/03/2004US6770921 Sidewall strap for complementary semiconductor structures and method of making same
08/03/2004US6770920 Nonvolatile memory devices
08/03/2004US6770919 Indium phosphide heterojunction bipolar transistor layer structure and method of making the same
08/03/2004US6770918 Electrostatic discharge protection silicon controlled rectifier (ESD-SCR) for silicon germanium technologies
08/03/2004US6770917 High-voltage diode
08/03/2004US6770914 III nitride semiconductor substrate for ELO
08/03/2004US6770912 Semiconductor device and method for producing the same
08/03/2004US6770903 Silicon based substrate with intermediate layer nanometer scaled in thickness for promoting tunneling of electrons responsive to predetermined bias voltage, including oxide or nitride material, metal layer formed on intermediate layer
08/03/2004US6770902 Charge carrier extracting transistor
08/03/2004US6770899 Work piece feeding machine
08/03/2004US6770896 Method for generating extreme ultraviolet radiation based on a radiation-emitting plasma
08/03/2004US6770895 Method and apparatus for isolating light source gas from main chamber gas in a lithography tool
08/03/2004US6770894 Illumination system with field mirrors for producing uniform scanning energy
08/03/2004US6770890 Stage devices including linear motors that produce reduced beam-perturbing stray magnetic fields, and charged-particle-beam microlithography systems comprising same
08/03/2004US6770889 Method of controlling electrostatic lens and ion implantation apparatus
08/03/2004US6770852 Etching system having device measuring critical dimension test features along profile of wafer at preset locations, etching chamber with chuck supporting wafer, heating elements adjacent locations, controller adjusting temperature, reduces variation
08/03/2004US6770851 Method and apparatus for the treatment of substrates
08/03/2004US6770837 Method for connecting a printed circuit to a liquid crystal display
08/03/2004US6770726 β-substituted organosilsesquioxane polymers
08/03/2004US6770720 A copolymer of styrene and hdyroxyalkyl acrylate or hydroxyalkyl methacrylate
08/03/2004US6770575 Method for improving thermal stability of fluorinated amorphous carbon low dielectric constant materials
08/03/2004US6770574 Method of forming a dielectric layer
08/03/2004US6770573 Method for fabricating an ultralow dielectric constant material
08/03/2004US6770572 Use of multifunctional si-based oligomer/polymer for the surface modification of nanoporous silica films
08/03/2004US6770571 Barrier in gate stack for improved gate dielectric integrity
08/03/2004US6770570 Method of forming a semiconductor device with a substantially uniform density low-k dielectric layer
08/03/2004US6770568 Selective etching using sonication
08/03/2004US6770567 Method of reducing particulates in a plasma etch chamber during a metal etch process
08/03/2004US6770566 Methods of forming semiconductor structures, and articles and devices formed thereby
08/03/2004US6770565 System for planarizing metal conductive layers
08/03/2004US6770564 Method of etching metallic thin film on thin film resistor
08/03/2004US6770563 Process of forming a bottle-shaped trench
08/03/2004US6770561 Method for depositing metal film through chemical vapor deposition process
08/03/2004US6770560 Method of forming metal wiring
08/03/2004US6770559 Method of forming wiring by implantation of seed layer material
08/03/2004US6770558 Selective filling of electrically conductive vias for three dimensional device structures
08/03/2004US6770557 Semiconductor device and method of fabricating the same
08/03/2004US6770556 Method of depositing a low dielectric with organo silane
08/03/2004US6770555 Process for fabricating semiconductor integrated circuit device having polycide line and impurity region respectively exposed to contact holes different in depth
08/03/2004US6770554 On-chip interconnect circuits with use of large-sized copper fill in CMP process
08/03/2004US6770552 Method of forming a semiconductor device having T-shaped gate structure