| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 08/10/2004 | US6773973 Semiconductor transistor having a polysilicon emitter and methods of making the same |
| 08/10/2004 | US6773971 Method of manufacturing a semiconductor device having lightly-doped drain (LDD) regions |
| 08/10/2004 | US6773970 Method of producing a semiconductor device having improved gate structure |
| 08/10/2004 | US6773969 Method of forming a thin film transistor |
| 08/10/2004 | US6773967 Method to prevent antifuse Si damage using sidewall spacers |
| 08/10/2004 | US6773966 Method of manufacturing semiconductor device |
| 08/10/2004 | US6773961 Singulation method used in leadless packaging process |
| 08/10/2004 | US6773960 Methods for forming a slot with a laterally recessed area at an end thereof through an interposer or other carrier substrate |
| 08/10/2004 | US6773959 Method for stacking semiconductor package units and stacked package |
| 08/10/2004 | US6773958 Integrated assembly-underfill flip chip process |
| 08/10/2004 | US6773957 Stereolithographic method and apparatus for fabricating spacers for semiconductor devices and resulting structures |
| 08/10/2004 | US6773956 Method for contact-connecting a semiconductor component |
| 08/10/2004 | US6773951 Method of manufacture of a semiconductor structure |
| 08/10/2004 | US6773947 Method of manufacturing semiconductor device including an opening formed by a laser |
| 08/10/2004 | US6773946 Method for fabricating light-emitting diode using nanosize nitride semiconductor multiple quantum wells |
| 08/10/2004 | US6773944 Method of manufacturing a semiconductor device |
| 08/10/2004 | US6773943 Display unit and method of fabricating the same |
| 08/10/2004 | US6773941 Pixellated devices such as active matrix liquid crystal displays and methods of manufacturing such |
| 08/10/2004 | US6773937 Method of verifying a mask for a mask ROM |
| 08/10/2004 | US6773936 Method of reducing low-frequency noise for semiconductor devices and circuits |
| 08/10/2004 | US6773935 Confocal 3D inspection system and process |
| 08/10/2004 | US6773933 Method of boosting wafer cleaning efficiency and increasing process yield |
| 08/10/2004 | US6773931 Dynamic targeting for a process control system |
| 08/10/2004 | US6773930 Method of forming an FeRAM capacitor having a bottom electrode diffusion barrier |
| 08/10/2004 | US6773929 Ferroelectric memory device and method for manufacturing the same |
| 08/10/2004 | US6773873 pH buffered compositions useful for cleaning residue from semiconductor substrates |
| 08/10/2004 | US6773867 Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices |
| 08/10/2004 | US6773866 Aromatic polyimide precursor, wherein a 10 mu m thick polyimide film made from the resin and deposited on a silicon substrate has light transmittance at a wavelength of 365 nm of at least 1% and a residual stress of at most 25 mpa. |
| 08/10/2004 | US6773863 Positive-working chemical-amplification photoresist composition |
| 08/10/2004 | US6773862 Negative resist composition |
| 08/10/2004 | US6773854 Calibrating elasticity; determination deformation force; cutting pattern |
| 08/10/2004 | US6773853 Exposing a partial area of a resist film formed on a surface of a substrate to light of different intensities; developing the resist film exposed |
| 08/10/2004 | US6773762 Plasma treatment method |
| 08/10/2004 | US6773751 Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereof |
| 08/10/2004 | US6773750 Chemical vapor deposition method and related material |
| 08/10/2004 | US6773617 Method and apparatus for restricting process fluid flow within a showerhead assembly |
| 08/10/2004 | US6773576 Anode assembly for plating and planarizing a conductive layer |
| 08/10/2004 | US6773570 An electroplating solution, an electroetching solution, and a nonabrasive slurry dispensed on a polishing pad and in a sequence of process steps the substrate is held against the pad with a variable force; chemical mechanical polishing |
| 08/10/2004 | US6773562 Shadow frame for substrate processing |
| 08/10/2004 | US6773560 Dry contact assemblies and plating machines with dry contact assemblies for plating microelectronic workpieces |
| 08/10/2004 | US6773559 Processing apparatus including a reactor for electrochemically etching a microelectronic workpiece |
| 08/10/2004 | US6773544 Magnetic barrier for plasma in chamber exhaust |
| 08/10/2004 | US6773543 Method and apparatus for the multiplexed acquisition of a bare die from a wafer |
| 08/10/2004 | US6773536 Method and apparatus for bonding protection film onto silicon wafer |
| 08/10/2004 | US6773534 Sample processing apparatus and method |
| 08/10/2004 | US6773523 Automated method of attaching flip chip devices to a substrate |
| 08/10/2004 | US6773510 Substrate processing unit |
| 08/10/2004 | US6773508 Single crystal silicon carbide thin film fabrication method and fabrication apparatus of the same |
| 08/10/2004 | US6773506 Method for producing thin film |
| 08/10/2004 | US6773504 Oxygen doping method to gallium nitride single crystal substrate and oxygen-doped N-type gallium nitride freestanding single crystal substrate |
| 08/10/2004 | US6773503 Method of heat-treating fluoride crystal, method of producing optical part, and optical apparatus |
| 08/10/2004 | US6773502 Method of forming a crystalline phase material |
| 08/10/2004 | US6773495 Solutions of metal-comprising materials |
| 08/10/2004 | US6773476 Silicon dioxide or aluminum oxide abrasive; polyether; citric acid, oxalic acid, tartaric acid, glycine, alpha -alanine or histidine accelerant; benzotriazole, benzimidazole, triazole, imidazole or tolyltriazole stabilizer; h2o2 and water |
| 08/10/2004 | US6773467 Storage capacitor of planar display and process for fabricating same |
| 08/10/2004 | US6773338 Polishing head and chemical mechanical polishing apparatus including the same |
| 08/10/2004 | US6773335 Apparatus for polishing periphery of device wafer and polishing method |
| 08/10/2004 | US6773333 Method for cutting slices from a workpiece |
| 08/10/2004 | US6773332 Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization |
| 08/10/2004 | US6773247 Die used for resin-sealing and molding an electronic component |
| 08/10/2004 | US6773220 Semi-conductor wafer cassettes modular stocker |
| 08/10/2004 | US6773158 Resonant circuit for measuring temperature profile of a semiconductor substrate |
| 08/10/2004 | US6772992 Memory cell structure integrated on semiconductor |
| 08/10/2004 | US6772827 Suspended gas distribution manifold for plasma chamber |
| 08/10/2004 | US6772805 In-situ purge system for article containers |
| 08/10/2004 | US6772710 From bis(trimethylsilyl)methane and oxygen retaining gas and hydrogen |
| 08/10/2004 | US6772620 Method of generating calibration data for relative height measurement |
| 08/10/2004 | US6772612 Door-in-door front opening unified pod |
| 08/10/2004 | US6772512 Method of fabricating a flip-chip ball-grid-array package without causing mold flash |
| 08/10/2004 | US6772511 Method for producing a semiconductor device |
| 08/10/2004 | US6772509 Improved procedure for separating and handling very thin dice for better throughput and yield. |
| 08/05/2004 | WO2004066397A2 Rugged fred and fabrication |
| 08/05/2004 | WO2004066394A1 Semiconductor device |
| 08/05/2004 | WO2004066391A1 Semiconductor device |
| 08/05/2004 | WO2004066390A1 Soi wafer and production method therefor |
| 08/05/2004 | WO2004066389A2 Floating gate isolation and method of making |
| 08/05/2004 | WO2004066388A1 Ferroelectric capacitor and method for fabricating the same |
| 08/05/2004 | WO2004066387A1 Magnetic storage cell, magnetic memory device, and magnetic memory device manufacturing method |
| 08/05/2004 | WO2004066382A1 Method of manufacturing semiconductor device and cutting apparatus for cutting semiconductor wafer |
| 08/05/2004 | WO2004066381A1 Method for the filling of contact holes or trenches in si semiconductor structures |
| 08/05/2004 | WO2004066380A1 A layer transfer method |
| 08/05/2004 | WO2004066379A1 Substrate processing device |
| 08/05/2004 | WO2004066378A1 Probe device with optical length-measuring device and method of inspecting probe |
| 08/05/2004 | WO2004066377A1 Method of cvd for forming silicon nitride film on substrate |
| 08/05/2004 | WO2004066376A1 Dielectric film forming method |
| 08/05/2004 | WO2004066375A1 Steam oxidization apparatus |
| 08/05/2004 | WO2004066374A1 Fluorine-free plasma curing process for porous low-k-materials |
| 08/05/2004 | WO2004066373A1 Method for producing a defined doping region in a semiconductor material |
| 08/05/2004 | WO2004066372A1 Crystallized semiconductor device, method for producing same and crystallization apparatus |
| 08/05/2004 | WO2004066370A1 Mask, method for manufacturing mask and method for manufacturing semiconductor device |
| 08/05/2004 | WO2004066369A2 Carrier, holder, laser cutting device and method for separating semiconductor products using laser light |
| 08/05/2004 | WO2004066368A2 Shallow trench isolation process for strained silicon processes |
| 08/05/2004 | WO2004066367A2 Low-gidl mosfet structure and method for fabrication |
| 08/05/2004 | WO2004066364A2 Binder diffusion patterning of a thick film paste layer |
| 08/05/2004 | WO2004066359A2 Apparatus and method for treating surfaces of semiconductor wafers using ozone |
| 08/05/2004 | WO2004066358A2 Binary half tone photomasks and microscopic three-dimensional devices and method of fabricating the same |
| 08/05/2004 | WO2004066356A2 Structures, materials and methods for fabrication of nanostructures by transposed split of ion cut materials |
| 08/05/2004 | WO2004066350A2 Embedded capacitor associated with a sram cell |
| 08/05/2004 | WO2004066348A2 Organic electronic component and method for producing organic electronic devices |
| 08/05/2004 | WO2004066347A2 Device for producing electroconductive passages in a semiconductor wafer by means of thermomigration |