| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 12/07/2004 | US6828173 Semiconductor device including edge bond pads and methods |
| 12/07/2004 | US6828171 Systems and methods for thermal isolation of a silicon structure |
| 12/07/2004 | US6828169 Method of forming group-III nitride semiconductor layer on a light-emitting device |
| 12/07/2004 | US6828167 Method for manufacturing a thin film transistor for a liquid crystal display |
| 12/07/2004 | US6828165 Semiconductor plasma processing apparatus with first and second processing state monitoring units |
| 12/07/2004 | US6828163 Wafer shape evaluating method and device producing method, wafer and wafer selecting method |
| 12/07/2004 | US6828162 System and method for active control of BPSG deposition |
| 12/07/2004 | US6828161 Method of forming an FeRAM having a multi-layer hard mask and patterning thereof |
| 12/07/2004 | US6828160 Method of forming ferroelectric random access memory cell |
| 12/07/2004 | US6828085 Printing fine pattern and masking pattern overcoating substrate; exposure to light source |
| 12/07/2004 | US6828083 Comprising photoactive component and polymer that comprises groups reactive to crosslinking and photoacid-labile groups |
| 12/07/2004 | US6828082 Method to pattern small features by using a re-flowable hard mask |
| 12/07/2004 | US6828081 Method and system for lithography using phase-change material |
| 12/07/2004 | US6828080 Pattern forming method and method of fabricating device |
| 12/07/2004 | US6828079 Chemical amplification type positive resist composition |
| 12/07/2004 | US6828068 Binary half tone photomasks and microscopic three-dimensional devices and method of fabricating the same |
| 12/07/2004 | US6828039 Magnetoresistive sensor and manufacturing method therefor |
| 12/07/2004 | US6828002 Substrate strip with sides having flanges and recesses |
| 12/07/2004 | US6827979 Improving imaging resolution; coating with hydrophobic material that overcomes water condensation interference |
| 12/07/2004 | US6827978 Deposition of tungsten films |
| 12/07/2004 | US6827973 Substrate processing method |
| 12/07/2004 | US6827871 Ruthenium and ruthenium dioxide removal method and material |
| 12/07/2004 | US6827870 Method and apparatus for etching and deposition using micro-plasmas |
| 12/07/2004 | US6827869 Method of micromachining a multi-part cavity |
| 12/07/2004 | US6827835 Method for electroplated metal annealing process |
| 12/07/2004 | US6827816 In situ module for particle removal from solid-state surfaces |
| 12/07/2004 | US6827814 Processing apparatus, processing system and processing method |
| 12/07/2004 | US6827809 Method of transferring a substantially disc-shaped workpiece, and device for carrying out this method |
| 12/07/2004 | US6827793 Drip manifold for uniform chemical delivery |
| 12/07/2004 | US6827789 Isolation chamber arrangement for serial processing of semiconductor wafers for the electronic industry |
| 12/07/2004 | US6827788 Substrate processing device and through-chamber |
| 12/07/2004 | US6827787 Conveyor device and film formation apparatus for a flexible substrate |
| 12/07/2004 | US6827782 Chemical treating apparatus |
| 12/07/2004 | US6827779 Selective mass transfer hoist |
| 12/07/2004 | US6827752 Cerium oxide slurry, and method of manufacturing substrate |
| 12/07/2004 | US6827639 Polishing particles and a polishing agent |
| 12/07/2004 | US6827636 Semiconductor device production method and apparatus |
| 12/07/2004 | US6827633 Polishing method |
| 12/07/2004 | US6827630 Method and apparatus for wireless transfer of chemical-mechanical planarization measurements |
| 12/07/2004 | US6827629 Method of and apparatus for controlling the chemical mechanical polishing of multiple layers on a substrate |
| 12/07/2004 | US6827584 Interconnect for microelectronic structures with enhanced spring characteristics |
| 12/07/2004 | US6827546 Modular frame for a wafer fabrication system |
| 12/07/2004 | US6827248 Cutting device for bonded wires |
| 12/07/2004 | US6827240 Liquid crystal dispensing apparatus |
| 12/07/2004 | US6827218 Packaging container for electronic components |
| 12/07/2004 | US6827130 Heatsink assembly and method of manufacturing the same |
| 12/07/2004 | US6827092 Wafer backside plate for use in a spin, rinse, and dry module and methods for making and implementing the same |
| 12/07/2004 | US6826977 Drive system for multiple axis robot arm |
| 12/07/2004 | US6826971 Fabrication method for sample to be analyzed |
| 12/07/2004 | US6826928 Methods for positioning and bonding elements in substrates |
| 12/07/2004 | US6826840 Semiconductor wafer scribing system |
| 12/07/2004 | US6826830 Multi-layered interconnect structure using liquid crystalline polymer dielectric |
| 12/07/2004 | US6826829 Method for attaching a die with a low melting metal |
| 12/07/2004 | US6826828 Electrostatic discharge-free container comprising a cavity surrounded by surfaces of PMMA-poly covered metal-PMMA |
| 12/07/2004 | CA2311132C Gan single crystalline substrate and method of producing the same |
| 12/07/2004 | CA2139551C Process for crystal growth of iii-v group compound semiconductor |
| 12/02/2004 | WO2004105456A1 Transfer assembly for manufacturing electronic devices |
| 12/02/2004 | WO2004105454A1 Wiring board manufacturing method |
| 12/02/2004 | WO2004105435A2 Retention mechanism for heating coil of high temperature diffusion furnace |
| 12/02/2004 | WO2004105139A1 Field effect transistor using insulator-semiconductor transition material layer as channel material and method of manufacturing the same |
| 12/02/2004 | WO2004105138A1 A method for making a semiconductor device having a metal gate electrode |
| 12/02/2004 | WO2004105134A1 An integrated circuit package |
| 12/02/2004 | WO2004105133A1 Wire bonding on in-line connection pads |
| 12/02/2004 | WO2004105132A1 An electrical connection for a microelectronic chip, and a method for manufacturing such a connection |
| 12/02/2004 | WO2004105124A1 Methods of pore sealing and metal encapsulation in porous low k interconnect |
| 12/02/2004 | WO2004105123A1 Semiconductor device |
| 12/02/2004 | WO2004105122A1 Method of manufacturing a substrate, having a porous dielectric layer and air gaps, and a substrate |
| 12/02/2004 | WO2004105121A1 Method for manufacturing a multi-level interconnect structure |
| 12/02/2004 | WO2004105120A1 Lsi package, lsi device testing method, semiconductor device manufacturing method |
| 12/02/2004 | WO2004105119A2 Method for the production of a chip arrangement and varnish comprising magnetically conductive particles for electrically contacting the chip |
| 12/02/2004 | WO2004105118A1 Stencil and method for depositing material onto a substrate |
| 12/02/2004 | WO2004105117A2 Production of an optoelectronic component that is encapsulated in plastic, and corresponding methods |
| 12/02/2004 | WO2004105116A1 P-channel power mis field effect transistor and swiching circuit |
| 12/02/2004 | WO2004105115A1 Cvd method for forming silicon nitride film |
| 12/02/2004 | WO2004105114A1 Method of forming fluorinated carbon film |
| 12/02/2004 | WO2004105112A1 Substrate holding apparatus and polishing apparatus |
| 12/02/2004 | WO2004105111A1 Electron beam microprocessing method |
| 12/02/2004 | WO2004105110A1 Laser dicing device |
| 12/02/2004 | WO2004105109A1 Dicing device |
| 12/02/2004 | WO2004105108A2 Manufacturing gallium nitride substrates by lateral overgrowth through masks and devices fabricated thereof |
| 12/02/2004 | WO2004105103A1 Semiconductor manufacturing device and its heating unit |
| 12/02/2004 | WO2004105102A1 Retaining and positioning device, and method for machining a disk-shaped object |
| 12/02/2004 | WO2004105101A2 A process system health index and method of using the same |
| 12/02/2004 | WO2004105099A2 Group ii-vi semiconductor devices |
| 12/02/2004 | WO2004105098A2 P-type group ii-vi semiconductor compounds |
| 12/02/2004 | WO2004105097A2 Fabrication of p-type group ii-vi semiconductors |
| 12/02/2004 | WO2004105096A2 Method of making barrier layers |
| 12/02/2004 | WO2004105093A2 Tetra-organic ammonium fluoride and hf in supercritical fluid for photoresist and residue removal |
| 12/02/2004 | WO2004105092A2 Esd protection for semiconductor products |
| 12/02/2004 | WO2004105090A2 Structure and method for forming a trench mosfet having self-aligned features |
| 12/02/2004 | WO2004105086A2 Schotty-barrier tunneling transistor |
| 12/02/2004 | WO2004105084A2 Method of room temperature covalent bonding |
| 12/02/2004 | WO2004105083A2 System and method for forming multi-component dielectric films |
| 12/02/2004 | WO2004105053A1 Conductive ball, method of forming electrode of electronic part, electronic part and electronic equipment |
| 12/02/2004 | WO2004105039A2 STACKED 1T-nMEMORY CELL STRUCTURE |
| 12/02/2004 | WO2004104975A1 Pixel circuit, display unit, and pixel circuit drive method |
| 12/02/2004 | WO2004104911A1 Ic card and ic card making method |
| 12/02/2004 | WO2004104716A1 Scheduling multi-robot processing systems |
| 12/02/2004 | WO2004104708A2 Seal and support structure for semiconductor wafer |
| 12/02/2004 | WO2004104700A1 Pattern dimension correction device and method, photo mask, and test photo mask |