| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/09/2005 | CN1577105A Exposure apparatus |
| 02/09/2005 | CN1577104A Lithographic apparatus and device manufacturing method |
| 02/09/2005 | CN1577103A Lithographic apparatus and integrated circuit manufacturing method |
| 02/09/2005 | CN1577102A Large field of view protection optical system with aberration correctability for flat panel displays |
| 02/09/2005 | CN1577101A Immersion photolithography system and method using inverted wafer-projection optics interface |
| 02/09/2005 | CN1577100A Lithographic apparatus and device manufacturing method |
| 02/09/2005 | CN1577099A Method and apparatus of simultaneous optimization for na-sigma exposure settings and scattering bars OPC using a device layout |
| 02/09/2005 | CN1577098A Lithographic apparatus and device manufacturing method |
| 02/09/2005 | CN1577097A Laser produced plasma radiation system with contamination barrier |
| 02/09/2005 | CN1577096A Calibration method for a lithographic apparatus and device manufacturing method |
| 02/09/2005 | CN1577095A Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 02/09/2005 | CN1577094A Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 02/09/2005 | CN1577093A Lithographic apparatus and device manufacturing method |
| 02/09/2005 | CN1577092A Method for producing semiconductor device using illuminating system including diffraction optical element |
| 02/09/2005 | CN1577091A Method and apparatus for manufacturing multiple circuit patterns using a multiple project mask |
| 02/09/2005 | CN1577090A Method of exposing layer with light and method of manufacturing thin film transistor substrate for liquid crytal display device using the same |
| 02/09/2005 | CN1577085A Method for producing grey mask and grey mask |
| 02/09/2005 | CN1577084A Method for producing grey mask |
| 02/09/2005 | CN1577083A Stencil mask having main and auxiliary strut and method of forming the same |
| 02/09/2005 | CN1577082A Temperature calibration method for baking processing apparatus, adjustment method for development processing apparatus, and method of manufacturing semiconductor apparatus |
| 02/09/2005 | CN1577081A Layout method for miniaturized memory array area |
| 02/09/2005 | CN1577080A Marker structure for alignment or overlay, mask pattern defined it and lithographic projector using the same |
| 02/09/2005 | CN1577028A Display device |
| 02/09/2005 | CN1577025A Thin film transistor array panel and producing method thereof |
| 02/09/2005 | CN1577020A Connecting structure for conduction thin film and thin film transistor array panel including the same connection structure |
| 02/09/2005 | CN1577018A Circuit array substrate and method of manufacturing the same |
| 02/09/2005 | CN1577017A Method for manufacturing thin film transistor array |
| 02/09/2005 | CN1577016A 电光装置和电子装置 An electro-optical device and electronic apparatus |
| 02/09/2005 | CN1577014A In-plane switching mode liquid crystal display device and method for fabricating the same |
| 02/09/2005 | CN1577012A Cassette for receiving glass substrates |
| 02/09/2005 | CN1577011A Liquid crystal display device having polycrystalline silicon thin film transistor and method of fabricating the same |
| 02/09/2005 | CN1576989A Substrate bonding apparatus for liquid crystal display device panel |
| 02/09/2005 | CN1576978A Liquid crystal dispensing apparatus |
| 02/09/2005 | CN1576967A Sequential lateral solidification device |
| 02/09/2005 | CN1576908A Polarizer, projection lens system, exposure device and exposure method |
| 02/09/2005 | CN1576903A Mirror and lithographic apparatus with mirror |
| 02/09/2005 | CN1576871A System and method for testing semiconductor devices |
| 02/09/2005 | CN1576870A Conductive pattern check-up apparatus |
| 02/09/2005 | CN1576868A Semiconductor integrated circuit, and electrostatic withstand voltage test method and apparatus therefor |
| 02/09/2005 | CN1576853A 半导体器件 Semiconductor devices |
| 02/09/2005 | CN1576831A Wiring pattern check up apparatus |
| 02/09/2005 | CN1576827A Multipurpose platform in substrate check up device |
| 02/09/2005 | CN1576824A Missing die detection |
| 02/09/2005 | CN1576782A Pattern inspection method and apparatus, and pattern alignment method |
| 02/09/2005 | CN1576778A Original and its producing method, exposure apparatus inspection system and method |
| 02/09/2005 | CN1576777A Inspection apparatus and inspection method |
| 02/09/2005 | CN1576763A Substrate drying apparatus and substrate drying method |
| 02/09/2005 | CN1576661A Opening and closing apparatus for cover |
| 02/09/2005 | CN1576392A Surface wave plasma treatment apparatus using multi-slot antenna |
| 02/09/2005 | CN1576391A Gas injector for use in semiconductor fabricating apparatus |
| 02/09/2005 | CN1576390A Mechanical enhancer additives for low dielectric films |
| 02/09/2005 | CN1576347A Aqueous dispersion for chemical - mechanical grinding and chemical-mechanical grinding method thereof |
| 02/09/2005 | CN1576345A Aqueous dispersion for chemical/mechanical polishing |
| 02/09/2005 | CN1576344A Method for producing a semiconductor-molding tablet, a semiconductor-molding tablet obtained thereby and a semiconductor device using the same |
| 02/09/2005 | CN1576343A 粘胶膜 Adhesive film |
| 02/09/2005 | CN1576299A Siloxane-based resin containing germanium and an interlayer insulating film for a semiconductor device using the same |
| 02/09/2005 | CN1576297A Siloxane-based resin and a semiconductor interlayer insulating film using the same |
| 02/09/2005 | CN1576257A Plasma resistant structural parts |
| 02/09/2005 | CN1576203A Transport method and transport apparatus for semiconductor wafer |
| 02/09/2005 | CN1576202A Wafer carrier load port transfer device |
| 02/09/2005 | CN1576199A Apparatus for conveying substrate in horizontal and verticle direction |
| 02/09/2005 | CN1576196A Parts transporting device |
| 02/09/2005 | CN1576184A Wafer shipper with orientation control |
| 02/09/2005 | CN1575909A Machining apparatus utilizing laser beam |
| 02/09/2005 | CN1575908A Laser beam processing method and laser beam processing machine |
| 02/09/2005 | CN1575872A A cleaning device and cleaning method |
| 02/09/2005 | CN1575870A Substrate cleaning device and substrate cleaning method |
| 02/09/2005 | CN1189070C Device for positioning electronic circuits arranged on membrane |
| 02/09/2005 | CN1188912C Vertical fuse and making method thereof |
| 02/09/2005 | CN1188911C Security method and device for a chip stack with a multidimensional structure |
| 02/09/2005 | CN1188910C Semiconductor chip and producing method thereof |
| 02/09/2005 | CN1188909C Programming and erasing method for non-volatile memory unit |
| 02/09/2005 | CN1188908C Metallizing system |
| 02/09/2005 | CN1188907C Electroplating appts. |
| 02/09/2005 | CN1188906C Manufacturing method of stack chip package |
| 02/09/2005 | CN1188905C Method for manufacturing metal oxide semicondustor transistor |
| 02/09/2005 | CN1188904C Method for cleaning polymer on aluminium/copper metal connection wire after reaction ion etching |
| 02/09/2005 | CN1188902C Method for shaping layered patterns |
| 02/09/2005 | CN1188901C Method for preparing 3-D orientation zinc oxide film |
| 02/09/2005 | CN1188900C Method for producing thin membrane and produced membrane structure |
| 02/09/2005 | CN1188899C Method for detecting corrected accuracy of optical cover machine table |
| 02/09/2005 | CN1188898C Method for producing semiconductor parts and method for producing solar cell |
| 02/09/2005 | CN1188897C Method for preparing nano ordered microcrack on substrate of strontium titanate |
| 02/09/2005 | CN1188865C Method and device of using compressed data in far-end box to initialize integrated circuit |
| 02/09/2005 | CN1188839C IC chip, magnetic head suspended assembly with IC chip and method for producing IC chip and magnetic head suspended assembly |
| 02/09/2005 | CN1188738C Method for producing at least one thin film transistor |
| 02/09/2005 | CN1188542C Film coating device for roughly flat sheet shaped substrate |
| 02/09/2005 | CN1188251C Method of polishing semiconductor wafer by using double-sided polisher |
| 02/08/2005 | US6854105 Chip arrangement determining apparatus and method |
| 02/08/2005 | US6854104 Optical proximity correction system for local correction of an aerial image produced from a mask defining a target design; includes an analyzer and a controller, |
| 02/08/2005 | US6854100 Methodology to characterize metal sheet resistance of copper damascene process |
| 02/08/2005 | US6854095 Designing method and a manufacturing method of an electronic device |
| 02/08/2005 | US6854094 Method and apparatus for laying out power supply wiring |
| 02/08/2005 | US6853953 Method for characterizing the performance of an electrostatic chuck |
| 02/08/2005 | US6853876 Distributed control system architecture and method for a material transport system |
| 02/08/2005 | US6853872 Operating method of vacuum processing system and vacuum processing system |
| 02/08/2005 | US6853871 Exposure apparatus |
| 02/08/2005 | US6853870 Semiconductor processing process control system and its control method |
| 02/08/2005 | US6853802 Heat treatment for edges of multilayer semiconductor wafers |
| 02/08/2005 | US6853743 Mask pattern correction method, mask pattern creation system using the correction method, and computer-readable recording medium |