| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/17/2005 | US20050037619 Method and apparatus for supporting a semiconductor wafer during processing |
| 02/17/2005 | US20050037618 Singulation method used in leadless packaging process |
| 02/17/2005 | US20050037617 Methods and apparatus for in situ substrate temperature monitoring by electromagnetic radiation emission |
| 02/17/2005 | US20050037616 Method of improving surface planarity |
| 02/17/2005 | US20050037614 Method for manufacturing wiring and method for manufacturing semiconductor device |
| 02/17/2005 | US20050037613 Diffusion barrier for copper lines in integrated circuits |
| 02/17/2005 | US20050037612 Superconductor device and method of manufacturing the same |
| 02/17/2005 | US20050037611 EMI and noise shielding for multi-metal layer high frequency integrated circuit processes |
| 02/17/2005 | US20050037610 Methods of filling trenches using high-density plasma deposition (HDP) |
| 02/17/2005 | US20050037609 Semiconductor device and production method therefor |
| 02/17/2005 | US20050037608 Deep filled vias |
| 02/17/2005 | US20050037606 Insulative materials including voids and precursors thereof |
| 02/17/2005 | US20050037605 Method of forming metal interconnection layer of semiconductor device |
| 02/17/2005 | US20050037604 Multilayer interconnect structure containing air gaps and method for making |
| 02/17/2005 | US20050037603 Method for forming, under a thin layer of a first material, portions of another material and/or empty areas |
| 02/17/2005 | US20050037602 Semiconductor device using bumps, method for fabricating same, and method for forming bumps |
| 02/17/2005 | US20050037601 Semiconductor package substrate having contact pad protective layer formed thereon and method for fabricating the same |
| 02/17/2005 | US20050037600 Method for implanting ions into semiconductor substrate |
| 02/17/2005 | US20050037599 Process for fabricating strained layers of silicon or of a silicon/germanium alloy |
| 02/17/2005 | US20050037598 Method for producing polycrystalline silicon germanium and suitable for micromachining |
| 02/17/2005 | US20050037597 Semiconductor processing system and method |
| 02/17/2005 | US20050037596 Internal gettering in SIMOX SOI silicon substrates |
| 02/17/2005 | US20050037595 Method of recovering and reproducing substrates and method of producing semiconductor wafers |
| 02/17/2005 | US20050037594 [method of doping sidewall of isolation trench] |
| 02/17/2005 | US20050037593 Process for producing an integrated electronic circuit comprising superposed components and integrated electronic circuit thus obtained |
| 02/17/2005 | US20050037592 Devices having improved capacitance and methods of their fabrication |
| 02/17/2005 | US20050037591 Method for producing a capacitor |
| 02/17/2005 | US20050037590 Semiconductor device and method for manufacturing same |
| 02/17/2005 | US20050037589 Method for forming inductor in semiconductor device |
| 02/17/2005 | US20050037588 Method for manufacturing and structure of semiconductor device with sinker contact region |
| 02/17/2005 | US20050037587 Heterojunction bipolar transistor |
| 02/17/2005 | US20050037586 Method for manufacturing a bipolar transistor |
| 02/17/2005 | US20050037585 Semiconductor device including air gap between semiconductor substrate and L-shaped spacer and method of fabricating the same |
| 02/17/2005 | US20050037584 Methods of forming a transistor with an integrated metal silicide gate electrode |
| 02/17/2005 | US20050037583 Semiconductor transistors and methods of fabricating the same |
| 02/17/2005 | US20050037582 Device threshold control of front-gate silicon-on-insulator mosfet using a self-aligned back-gate |
| 02/17/2005 | US20050037581 Multibit ROM cell and method therefor |
| 02/17/2005 | US20050037580 Manufacturing method for semiconductor device |
| 02/17/2005 | US20050037579 Method of fabricating semiconductor device |
| 02/17/2005 | US20050037578 [method for forming an oxide/ nitride/oxide stacked layer] |
| 02/17/2005 | US20050037577 Method of fabricating local sonos type gate structure and method of fabricating nonvolatile memory cell having the same |
| 02/17/2005 | US20050037576 Method of manufacturing an array of bi-directional nonvolatile memory cells |
| 02/17/2005 | US20050037575 Nonvolatile memory devices and methods of fabricating the same |
| 02/17/2005 | US20050037574 Semiconductor memory device and manufacturing method thereof |
| 02/17/2005 | US20050037573 Flash memories and methods of fabricating the same |
| 02/17/2005 | US20050037572 Methods of fabricating flash memory devices including word lines with parallel sidewalls and related devices |
| 02/17/2005 | US20050037571 Fowler-Nordheim block alterable EEPROM memory cell |
| 02/17/2005 | US20050037570 Semiconductor capacitor structure and method to form same |
| 02/17/2005 | US20050037569 Semiconductor device and method of manufacturing the same |
| 02/17/2005 | US20050037568 Metal-insulator-metal capacitor |
| 02/17/2005 | US20050037567 [split gate flash memory cell and manufacturing method thereof] |
| 02/17/2005 | US20050037566 [split gate flash memory cell and manufacturing method thereof] |
| 02/17/2005 | US20050037565 Method of fabricating an oxide collar for a trench capacitor |
| 02/17/2005 | US20050037564 Method and structure of an auxiliary transistor arrangement used for fabricating a semiconductor memory device |
| 02/17/2005 | US20050037563 Capacitor structures |
| 02/17/2005 | US20050037562 Semiconductor capacitor structure and method for manufacturing the same |
| 02/17/2005 | US20050037561 Self-aligned drain/channel junction in vertical pass transistor dram cell design for device scaling |
| 02/17/2005 | US20050037560 Data storage medium |
| 02/17/2005 | US20050037559 Method of manufacturing a semiconductor device |
| 02/17/2005 | US20050037558 Method for fabricating transistor having fully silicided gate |
| 02/17/2005 | US20050037557 Transition metal alloys for use as a gate electrode and devices incorporating these alloys |
| 02/17/2005 | US20050037556 Formation of self-organized stacked islands for self-aligned contacts of low dimensional structures |
| 02/17/2005 | US20050037555 Semiconductor device having a random grained polysilicon layer and a method for its manufacture |
| 02/17/2005 | US20050037554 Method for manufacturing semiconductor device |
| 02/17/2005 | US20050037553 Laser irradiation method, method for manufacturing a semiconductor device, and a semiconductor device |
| 02/17/2005 | US20050037552 Beam irradiation apparatus, beam irradiation method, and method for manufacturing semiconductor device |
| 02/17/2005 | US20050037551 Isotropic polycrystalline silicon and method for producing same |
| 02/17/2005 | US20050037550 Thin film transistor using polysilicon and a method for manufacturing the same |
| 02/17/2005 | US20050037549 Semiconductor device and method for forming the same |
| 02/17/2005 | US20050037548 SOI field effect transistor element having a recombination region and method of forming same |
| 02/17/2005 | US20050037547 Nanotube device structure and methods of fabrication |
| 02/17/2005 | US20050037545 Flip chip on lead frame |
| 02/17/2005 | US20050037544 Method of forming a leadframe for a semiconductor package |
| 02/17/2005 | US20050037542 Process for producing a semiconductor device |
| 02/17/2005 | US20050037541 Wafer processing method |
| 02/17/2005 | US20050037540 Three-dimensional module comprised of layers containing IC chips with overlying interconnect layers and a method of making the same |
| 02/17/2005 | US20050037539 Semiconductor package, semiconductor device, electronic device, and method for producing semiconductor package |
| 02/17/2005 | US20050037538 Method for manufacturing solid-state imaging devices |
| 02/17/2005 | US20050037537 Method for manufacturing semiconductor devices |
| 02/17/2005 | US20050037536 Semiconductor packaging structure and method for forming the same |
| 02/17/2005 | US20050037534 MEMS device and interposer and method for integrating MEMS device and interposer |
| 02/17/2005 | US20050037533 Method of controlling a capacitance of a thin film transistor liquid crystal display (TFT-LCD) storage capacitor |
| 02/17/2005 | US20050037531 Method for manufacturing micro-structural unit |
| 02/17/2005 | US20050037530 Floating gate memory structures and fabrication methods |
| 02/17/2005 | US20050037529 Method of fabricating display device |
| 02/17/2005 | US20050037528 Thin film transistor liquid crystal display and fabrication method thereof |
| 02/17/2005 | US20050037527 Light emitting element, method of manufacturing the same, and semiconductor device having light emitting element |
| 02/17/2005 | US20050037526 Nitride semiconductor substrate production method thereof and semiconductor optical device using the same |
| 02/17/2005 | US20050037524 Method of manufacturing semiconductor device having trench isolation |
| 02/17/2005 | US20050037522 Dummy fill for integrated circuits |
| 02/17/2005 | US20050037521 Methods and apparatus for processing semiconductor devices by gas annealing |
| 02/17/2005 | US20050037520 Method for obtaining reversible resistance switches on a PCMO thin film when integrated with a highly crystallized seed layer |
| 02/17/2005 | US20050037291 Method for forming fine resist pattern |
| 02/17/2005 | US20050037289 monomers that can be homopolymerized or copolymerized with other reactive components to make resins within sub-200 nanometer (nm) photoresist compositions |
| 02/17/2005 | US20050037275 Pattern forming method and wiring pattern forming method, and electro-optic device and electronic equipment |
| 02/17/2005 | US20050037272 Method and apparatus for manufacturing semiconductor |
| 02/17/2005 | US20050037271 For resist pattern; observation data such as electron microscopy is applied to model data created beforehand in accordance with the exposure conditions to estimate fluctuations in the exposure dose and the focal position |
| 02/17/2005 | US20050037270 Method for measuring overlay shift |
| 02/17/2005 | US20050037267 Illumination multilayer, vertical pattern through mask |
| 02/17/2005 | US20050037154 Method for forming thin film |