Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2005
03/10/2005US20050051195 Substrate processing system and substarate processing method
03/10/2005US20050051194 Contacting with high pressure fluids; depressurization; controlling temperature by adiabatic expansion
03/10/2005US20050051191 [cleaning method used in interconnect process]
03/10/2005US20050051102 Apparatus for processing substrate in chamber and maintenance method therefor
03/10/2005US20050051101 Method and device for rotating a wafer
03/10/2005US20050051100 Variable gas conductance control for a process chamber
03/10/2005US20050051098 Plasma processing apparatus
03/10/2005US20050051096 Ion implantation ion source, system and method
03/10/2005US20050051095 Plasma process device
03/10/2005US20050051093 Vacuum processing apparatus
03/10/2005US20050051092 Vacuum processing apparatus
03/10/2005US20050051091 Vacuum processing apparatus
03/10/2005US20050051087 Primer tank with nozzle assembly
03/10/2005US20050051083 Apparatus for carrying reticles and method of using the same to process reticles
03/10/2005US20050051082 Methods of forming hemisperical grained silicon on a template on a semiconductor work object
03/10/2005US20050051081 Process for producing polysilicon film
03/10/2005US20050051023 Compress and position apparatus
03/10/2005US20050050977 Wrist assembly for robotic arm
03/10/2005US20050050946 Cleaning evaluation method for a substrate
03/10/2005US20050050859 Low temperature methods for hermetically sealing reservoir devices
03/10/2005US20050050803 Polishing fluid and polishing method
03/10/2005US20050050760 Substrate drying method, substrate drying apparatus, and semiconductor device manufacturing method
03/10/2005US20050050757 Microstructure drying treatment method and its apparatus and its high pressure vessel
03/10/2005US20050050752 Transfer apparatus
03/10/2005CA2537688A1 No-flow underfill material having low coefficient of thermal expansion and good solder ball fluxing performance
03/09/2005EP1513382A2 Conductive sheet having conductive layer with improved adhesion and product including the same
03/09/2005EP1513233A1 InGaAs/GaAs lasers on Silicon produced by LEPECVD and MOCVD
03/09/2005EP1513203A2 Semiconductor light emitting device and method of manufacturing the same
03/09/2005EP1513198A1 Semiconductor substrate manufacturing method and semiconductor device manufacturing method, and semiconductor substrate and semiconductor device manufactured by the methods
03/09/2005EP1513197A2 Power integrated circuit with distributed gate driver
03/09/2005EP1513193A1 Method for manufacturing silicon wafer
03/09/2005EP1513192A1 Semiconductor wafer
03/09/2005EP1513191A2 Heating apparatus having electrostatic adsorption function
03/09/2005EP1513190A1 Positioning device
03/09/2005EP1513170A2 A spiral inductor formed in a semiconductor substrate and a method for forming the inductor
03/09/2005EP1513167A2 Magnetoresistance effect film, magnetoresistance effect head and solid state memory
03/09/2005EP1513160A1 A non-volatile flash memory
03/09/2005EP1513159A2 Memory devices based on electric field programmable films
03/09/2005EP1513158A1 Magnetoresistive element, magnetic memory cell, and magnetic memory device
03/09/2005EP1513023A1 Method of evaluating optical element
03/09/2005EP1513019A2 Projection optical system, exposure apparatus and device fabricating method
03/09/2005EP1513018A1 Lithographic apparatus and device manufacturing method
03/09/2005EP1513017A1 Lithographic apparatus and device manufacturing method
03/09/2005EP1513013A2 Resist pattern thickening material, process for forming resist pattern, and process for manufacturing semiconductor device
03/09/2005EP1513012A2 Method and apparatus for performing model based placement of phase-balanced scattering bars for sub-wavelength optical lithography
03/09/2005EP1513005A1 Semiconductor device, reflection type liquid crystal display device, and reflection type liquid crystal projector
03/09/2005EP1512956A2 Method of expetiously using a focused-beam apparatus to extract samples for analysis from workpieces
03/09/2005EP1512772A1 Method and apparatus for production of metal film
03/09/2005EP1512771A1 Method and apparatus for production of metal film
03/09/2005EP1512770A1 Method and apparatus for production of metal film
03/09/2005EP1512769A1 Method and apparatus for production of metal film
03/09/2005EP1512732A1 Polishing composition
03/09/2005EP1512485A1 Method and apparatus for mounting electronic part applying ultrasonic vibrating in a plurality of directions, and electronic circuit apparatus
03/09/2005EP1512457A1 Continuous dissolving device, continuous dissolving method, and gas-dissolved water supply
03/09/2005EP1512184A2 Electrodes for optoelectronic components and the use thereof
03/09/2005EP1512179A1 Method for producing nrom-memory cells with trench transistors
03/09/2005EP1512176A1 Die connected with integrated circuit component
03/09/2005EP1512173A1 Wafer level electroless copper metallization and bumping process, and plating solutions for semiconductor wafer and microchip
03/09/2005EP1512172A1 Method of fabrication sige heterojunction bipolar transistor
03/09/2005EP1512171A2 Hafnium nitride buffer layers for growth of gan on silicon
03/09/2005EP1512170A2 Method for improving nitrogen profile in plasma nitrided gate dielectric layers
03/09/2005EP1512169A1 Methods and systems for dopant profiling
03/09/2005EP1512168A2 Subpad having robust, sealed edges
03/09/2005EP1512165A2 Plasma apparatus and method for processing a substrate
03/09/2005EP1512164A1 Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a mutli-part electrode
03/09/2005EP1512112A2 Use of overlay diagnostics for enhanced automatic process control
03/09/2005EP1512050A2 Cleaning compositions for microelectronic substrates
03/09/2005EP1512048A2 Method and system for fabricating nanoscale patterns in light curable compositions using an electric field
03/09/2005EP1511996A1 A cantilever sensor with a current shield and a method for its production
03/09/2005EP1511876A2 Sputtering cathode adapter
03/09/2005EP1346367B1 A ferroelectric memory circuit and method for its fabrication
03/09/2005EP1344071B1 Asynchronous reset circuit testing
03/09/2005EP1316090B1 Non-volatile passive matrix and method for readout of the same
03/09/2005EP1222688A4 Apparatus and method for providing mechanically pre-formed conductive leads
03/09/2005EP1218573B1 Method and device for depositing materials with a large electronic energy gap and high binding energy
03/09/2005EP1216125B1 A homogenization enhancing thermoplastic foam extrusion screw
03/09/2005EP1183718B1 Method of manufacturing a NON-VOLATILE SEMICONDUCTOR MEMORY CELL
03/09/2005EP1148976B1 Method and apparatus for deposition on and polishing of a semiconductor surface
03/09/2005EP1121712B1 Sorting/storage device for wafers and method for handling thereof
03/09/2005CN2684374Y Pin adjusting machine with two-way pin adjusting function
03/09/2005CN2684373Y Heat treatment vessel and longitudinal heat treatment equipment
03/09/2005CN2684372Y Vacuum baking packaging box for component device
03/09/2005CN1593073A Wafer holder and system for producing semiconductor
03/09/2005CN1592970A Method for producing laminated wafer
03/09/2005CN1592969A Semiconductor device and manufacturing method
03/09/2005CN1592968A Module part
03/09/2005CN1592965A Chip and wafer integration process using vertical connections
03/09/2005CN1592964A Method of implantation after copper seed deposition
03/09/2005CN1592963A Method of using ternary copper alloy to obtain a low resistance and large grain size interconnect
03/09/2005CN1592962A Production method for semiconductor device
03/09/2005CN1592961A Adhesive sheet stamping device, adhesive sheet stamping method, part mounter, and display panel manufacturing method
03/09/2005CN1592960A Method of forming narrow trenches in semiconductor substrates
03/09/2005CN1592959A Method for forming an oxynitride spacer for a metal gate electrode using a PECVD process with a silicon-starving atmosphere
03/09/2005CN1592958A Method and device for forming oxide film
03/09/2005CN1592957A Semiconductor device and its manufacturing method
03/09/2005CN1592956A Etching method, etching apparatus, and method for manufacturing semiconductor device
03/09/2005CN1592954A Method of etching high aspect ratio features
03/09/2005CN1592953A Method for manufacturing semiconductor chip
03/09/2005CN1592952A Semiconductor wafer processing to increase the usable planar surface area
03/09/2005CN1592951A Integrated circuit having interconnect to a substrate and method therefor
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