Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2005
07/05/2005US6914327 Semiconductor device and manufacturing method thereof
07/05/2005US6914324 Memory expansion and chip scale stacking system and method
07/05/2005US6914320 Bilayer HDP CVD/PE CVD cap in advanced BEOL interconnect structures and method thereof
07/05/2005US6914319 Semiconductor device having a fuse
07/05/2005US6914318 Interconnect structure with an enlarged air gaps disposed between conductive structures or surrounding a conductive structure within the same
07/05/2005US6914317 Thin microelectronic substrates and methods of manufacture
07/05/2005US6914316 Semiconductor trench isolation structure
07/05/2005US6914315 GaN-based heterostructure photodiode
07/05/2005US6914313 Process for integration of a high dielectric constant gate insulator layer in a CMOS device
07/05/2005US6914312 Field effect transistor having a MIS structure and method of fabricating the same
07/05/2005US6914311 Semiconductor device having doped gate electrode
07/05/2005US6914310 Semiconductor isolator system
07/05/2005US6914309 Semiconductor device with double sidewall spacer and layered contact
07/05/2005US6914308 Vertical PNP bipolar transistor
07/05/2005US6914307 Semiconductor device and method of manufacturing the same
07/05/2005US6914306 Electrostatic discharge protection device
07/05/2005US6914305 Circuits and methods for electrostatic discharge protection in integrated circuits
07/05/2005US6914303 Ultra thin channel MOSFET
07/05/2005US6914302 Semiconductor device and manufacturing method thereof
07/05/2005US6914301 CMOS integrated circuit devices and substrates having buried silicon germanium layers therein and methods of forming same
07/05/2005US6914300 Semiconductor device
07/05/2005US6914299 Horizontal surrounding gate MOSFETs
07/05/2005US6914295 Tri-gate devices and methods of fabrication
07/05/2005US6914294 Semiconductor device
07/05/2005US6914293 Nonvolatile semiconductor memory device and method for manufacturing same
07/05/2005US6914292 Floating gate field-effect transistor
07/05/2005US6914291 Self-aligned floating-gate structure for flash memory device
07/05/2005US6914290 Split-gate type nonvolatile memory devices
07/05/2005US6914288 EEPROM and EEPROM manufacturing method
07/05/2005US6914287 Semiconductor processing methods of forming transistors, semiconductor processing methods of forming dynamic random access memory circuitry, and related integrated circuitry
07/05/2005US6914286 Semiconductor memory devices using sidewall spacers
07/05/2005US6914285 Semiconductor device having different thickness gate oxides
07/05/2005US6914284 Magnetic memory device and method of manufacturing the same
07/05/2005US6914283 Semiconductor element
07/05/2005US6914282 Ferroelectric device and method for making
07/05/2005US6914281 Nonvolatile semiconductor storage device
07/05/2005US6914280 Switching circuit device
07/05/2005US6914278 High permeability thin films and patterned thin films to reduce noise in high speed interconnections
07/05/2005US6914277 Merged FinFET P-channel/N-channel pair
07/05/2005US6914274 Thin-film semiconductor epitaxial substrate having boron containing interface layer between a collector layer and a sub-collector layer
07/05/2005US6914273 GaN-type enhancement MOSFET using hetero structure
07/05/2005US6914270 IGBT with PN insulation and production method
07/05/2005US6914268 LED device, flip-chip LED package and light reflecting structure
07/05/2005US6914259 Multi-chip module, semiconductor chip, and interchip connection test method for multi-chip module
07/05/2005US6914256 Optoelectronic devices having arrays of quantum-dot compound semiconductor superlattices therein
07/05/2005US6914252 Charged beam exposure apparatus having blanking aperture and basic figure aperture
07/05/2005US6914251 Alignment structure and method for mating a wafer delivery device to a wafer treatment tool
07/05/2005US6914249 Particle-optical apparatus, electron microscopy system and electron lithography system
07/05/2005US6914248 Particle-optical apparatus and method for operating the same
07/05/2005US6914233 Wafer mapping system
07/05/2005US6914230 System and method for reducing trapped charge effects in a CMOS photodetector
07/05/2005US6914222 Wafer heating apparatus
07/05/2005US6914218 Vacuum oven, system incorporating the same and method of using the same
07/05/2005US6914208 Method that completely removes contaminating residue found on the surface of a semiconductor wafer after etching
07/05/2005US6914196 Reel-deployed printed circuit board
07/05/2005US6914147 Preparing a polyalkylene oxide porogen by employing hydrosiylation or nucleophilic substitution or esterification or hydrogenolysis or carbonation
07/05/2005US6914114 Absorbing compounds for spin-on-glass anti-reflective coatings for photolithography
07/05/2005US6914039 Etching liquid composition
07/05/2005US6914016 HDP-CVD deposition process for filling high aspect ratio gaps
07/05/2005US6914015 HDP process for high aspect ratio gap filling
07/05/2005US6914014 Method for curing low dielectric constant film using direct current bias
07/05/2005US6914013 Method of forming semiconductor device containing oxide/nitride/oxide dielectric layer
07/05/2005US6914012 Article comprising an oxide layer on a GaAs-based semiconductor structure and method of forming same
07/05/2005US6914011 Film deposition system and method of fabricating semiconductor device employing the film deposition system
07/05/2005US6914010 Plasma etching method
07/05/2005US6914009 Method of making small transistor lengths
07/05/2005US6914007 In-situ discharge to avoid arcing during plasma etch processes
07/05/2005US6914006 Wafer scribing method and wafer scribing device
07/05/2005US6914004 Method for via etching in organo-silica-glass
07/05/2005US6914003 Method for manufacturing magnetic random access memory
07/05/2005US6914002 Differential planarization
07/05/2005US6914001 A CMP oxide slurry includes an aqueous solution containing abrasive particles and two or more different passivation agents. Preferably, the aqueous solution is made up of deionized water, and the abrasive particles are a metal oxide
07/05/2005US6914000 Polishing method, polishing system and process-managing system
07/05/2005US6913999 Semiconductor device with components embedded in backside diamond layer
07/05/2005US6913997 Method of using tantalum-aluminum-nitrogen material as diffusion barrier and adhesion layer in semiconductor devices
07/05/2005US6913996 Method of forming metal wiring and semiconductor manufacturing apparatus for forming metal wiring
07/05/2005US6913995 Method of forming a barrier metal in a semiconductor device
07/05/2005US6913994 Method to form Cu/OSG dual damascene structure for high performance and reliable interconnects
07/05/2005US6913993 Chemical-mechanical polishing method
07/05/2005US6913992 Method of modifying interlayer adhesion
07/05/2005US6913990 Method of forming isolation dummy fill structures
07/05/2005US6913988 Methods for fabricating semiconductor device test apparatus that include protective structures for intermediate conductive elements
07/05/2005US6913987 Method for fabricating self-aligned contact connections on buried bit lines
07/05/2005US6913986 Method and apparatus for fabricating a thin film and thin film transistor and method of fabricating same
07/05/2005US6913985 Method of manufacturing a semiconductor device
07/05/2005US6913984 Method of manufacturing memory with nano dots
07/05/2005US6913983 Integrated circuit arrangement and method for the manufacture thereof
07/05/2005US6913981 Method of fabricating a bipolar transistor using selective epitaxially grown SiGe base layer
07/05/2005US6913980 Process method of source drain spacer engineering to improve transistor capacitance
07/05/2005US6913979 Method of manufacturing a metal oxide semiconductor transistor
07/05/2005US6913978 Method for forming shallow trench isolation structure
07/05/2005US6913977 Triple-diffused trench MOSFET and method of fabricating the same
07/05/2005US6913976 Method of manufacturing semiconductor device
07/05/2005US6913975 Non-volatile floating gate memory cell with floating gates formed in cavities, and array thereof, and method of formation
07/05/2005US6913974 Flash memory device structure and manufacturing method thereof
07/05/2005US6913973 Semiconductor device including transistor with composite gate structure and transistor with single gate structure, and method for manufacturing the same
07/05/2005US6913972 Method of fabrication on a gate pattern of a non-volatile memory device
07/05/2005US6913971 Layer transfer methods
07/05/2005US6913970 Semiconductor device and method of manufacturing the same
07/05/2005US6913969 EEPROM and method of fabricating the same