Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2005
09/06/2005US6940150 Semiconductor wafer device having separated conductive patterns in peripheral area and its manufacture method
09/06/2005US6940149 Structure and method of forming a bipolar transistor having a void between emitter and extrinsic base
09/06/2005US6940148 Semiconductor device capable of adjusting input resistance without changing input terminal capacitance
09/06/2005US6940147 Integrated inductor having magnetic layer
09/06/2005US6940146 Interconnect structure with an enlarged air gaps disposed between conductive structures or surrounding a conductive structure within the same
09/06/2005US6940145 Termination structure for a semiconductor device
09/06/2005US6940144 Semiconductor equipment
09/06/2005US6940143 Semiconductor thin-film manufacturing method, semiconductor device manufacturing method, semiconductor device, integrated circuit, electro-optical device, and electronic appliance
09/06/2005US6940141 Flip-chip image sensor packages and methods of fabrication
09/06/2005US6940140 Package structure of solid-state image sensor
09/06/2005US6940138 Semiconductor device, semiconductor gate array, electro-optical device, and electronic equipment
09/06/2005US6940137 Semiconductor device having an angled compensation implant and method of manufacture therefor
09/06/2005US6940135 Mask-ROM process and device to prevent punch through using a halo implant process
09/06/2005US6940134 Semiconductor with contact contacting diffusion adjacent gate electrode
09/06/2005US6940133 Integrated trim structure utilizing dynamic doping
09/06/2005US6940132 Semiconductor device and method of manufacturing the same
09/06/2005US6940130 Body contact MOSFET
09/06/2005US6940129 Double gate MOS transistors
09/06/2005US6940128 Semiconductor device for power MOS transistor module
09/06/2005US6940127 Equipment for communication system and semiconductor integrated circuit device
09/06/2005US6940125 Vertical NROM and methods for making thereof
09/06/2005US6940124 Semiconductor device and manufacturing method thereof
09/06/2005US6940123 Memory cell array
09/06/2005US6940122 Flash EEPROM unit cell and memory array architecture including the same
09/06/2005US6940120 Non-volatile semiconductor memory device and method of fabricating thereof
09/06/2005US6940119 Non-volatile programmable and electrically erasable memory with a single layer of gate material
09/06/2005US6940118 Semiconductor device with high permittivity gate dielectric film
09/06/2005US6940117 Prevention of Ta2O5 mim cap shorting in the beol anneal cycles
09/06/2005US6940116 Semiconductor device comprising a highly-reliable, constant capacitance capacitor
09/06/2005US6940114 Integrated circuit devices including a MIM capacitor
09/06/2005US6940112 Integrated capacitors fabricated with conductive metal oxides
09/06/2005US6940111 Radiation protection in integrated circuits
09/06/2005US6940110 SiC-MISFET and method for fabricating the same
09/06/2005US6940109 High density 3d rail stack arrays and method of making
09/06/2005US6940106 Semiconductor device formed in semiconductor layer on insulating film
09/06/2005US6940103 Nitride semiconductor growth method, nitride semiconductor substrate and nitride semiconductor device
09/06/2005US6940098 Semiconductor base and its manufacturing method, and semiconductor crystal manufacturing method
09/06/2005US6940096 Double gate field effect transistor with diamond film
09/06/2005US6940095 Method of fabricating thin film transistor array
09/06/2005US6940094 used to overcome the problem of heat resistance and difficulty in forming contact holes of aluminum wiring; prevents hillock or whisker from generating; liquid crystal display device
09/06/2005US6940090 Wideband gap having a low on-resistance and having a high avalanche capability
09/06/2005US6940089 Semiconductor device structure
09/06/2005US6940079 Method of correction for wafer crystal cut error in semiconductor processing
09/06/2005US6940053 Chip bonding heater with differential heat transfer
09/06/2005US6940047 Heat treatment apparatus with temperature control system
09/06/2005US6940022 Protective coating for an electronic device
09/06/2005US6939913 Radically polymerizable phosphoric ester of ethyl methacrylic compounds, silicone partides, a curing agent capable of generating a free radical upon heating; improve adhesive bonding strength to electronics, electrodes
09/06/2005US6939817 Removal of carbon from an insulative layer using ozone
09/06/2005US6939816 Method to improve the uniformity and reduce the surface roughness of the silicon dielectric interface
09/06/2005US6939815 Method for making a semiconductor device having a high-k gate dielectric
09/06/2005US6939814 Increasing carrier mobility in NFET and PFET transistors on a common wafer
09/06/2005US6939813 Apparatus for improved low pressure inductively coupled high density plasma reactor
09/06/2005US6939812 Method of forming an etch stop layer in a semiconductor device
09/06/2005US6939811 Apparatus and method for controlling etch depth
09/06/2005US6939810 Method of forming isolation film
09/06/2005US6939808 Undoped and fluorinated amorphous carbon film as pattern mask for metal etch
09/06/2005US6939807 Apparatus for manufacturing semiconductor devices with a moveable shield
09/06/2005US6939806 Etching memory
09/06/2005US6939805 Method of etching a layer in a trench and method of fabricating a trench capacitor
09/06/2005US6939804 Formation of composite tungsten films
09/06/2005US6939803 Method for forming conductor reservoir volume for integrated circuit interconnects
09/06/2005US6939802 Method of manufacturing a semiconductor device
09/06/2005US6939801 Selective deposition of a barrier layer on a dielectric material
09/06/2005US6939800 Dielectric barrier films for use as copper barrier layers in semiconductor trench and via structures
09/06/2005US6939799 Method of forming a field effect transistor and methods of forming integrated circuitry
09/06/2005US6939798 Method for forming T-shaped conductor wires of semiconductor device
09/06/2005US6939797 Advanced BEOL interconnect structures with low-k PE CVD cap layer and method thereof
09/06/2005US6939796 System, method and apparatus for improved global dual-damascene planarization
09/06/2005US6939795 Selective dry etching of tantalum and tantalum nitride
09/06/2005US6939794 Boron-doped amorphous carbon film for use as a hard etch mask during the formation of a semiconductor device
09/06/2005US6939793 Dual damascene integration scheme for preventing copper contamination of dielectric layer
09/06/2005US6939792 Low-k dielectric layer with overlying adhesion layer
09/06/2005US6939791 Contact capping local interconnect
09/06/2005US6939790 Wafer bumping process with solder balls bonded to under bump metallurgy layer formed over active surface by forming flux on solder ball surfaces and reflowing the solder
09/06/2005US6939788 Semiconductor device with inductive component and method of making
09/06/2005US6939787 Method for fabricating semiconductor device having gate electrode with polymetal structure of polycrystalline silicon film and metal film
09/06/2005US6939786 Method of manufacturing a semiconductor device having self-aligned contacts
09/06/2005US6939785 Process for manufacturing a semiconductor chip
09/06/2005US6939784 Wafer scale package and method of assembly
09/06/2005US6939783 Preventive treatment method for a multilayer semiconductor wafer
09/06/2005US6939782 Method for producing thin layers on a specific support and an application thereof
09/06/2005US6939781 Method of manufacturing a semiconductor component that includes self-aligning a gate electrode to a field plate
09/06/2005US6939780 Methods of forming trench isolated integrated circuit devices including grooves
09/06/2005US6939779 Method of manufacturing semiconductor device
09/06/2005US6939778 Method of joining an insulator element to a substrate
09/06/2005US6939777 Method for manufacturing semiconductor device
09/06/2005US6939776 Semiconductor device and a method of fabricating the same
09/06/2005US6939774 Low freezing electrolyte for an electrolytic capacitor
09/06/2005US6939773 Semiconductor devices and manufacturing methods thereof
09/06/2005US6939772 Bipolar transistor and fabrication method thereof
09/06/2005US6939771 Discontinuous dielectric interface for bipolar transistors
09/06/2005US6939770 Method of fabricating semiconductor device having triple LDD structure and lower gate resistance formed with a single implant process
09/06/2005US6939769 Method for manufacturing a semiconductor device with using double implanting boron and boron difluoride
09/06/2005US6939768 Method of forming self-aligned contacts
09/06/2005US6939767 Multi-bit non-volatile integrated circuit memory and method therefor
09/06/2005US6939766 Method for fabricating a flash memory device
09/06/2005US6939765 Integration method of a semiconductor device having a recessed gate electrode
09/06/2005US6939764 Methods of forming memory cells having self-aligned silicide
09/06/2005US6939763 DRAM cell arrangement with vertical MOS transistors, and method for its fabrication
09/06/2005US6939762 Semiconductor devices and methods for manufacturing the same
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