Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2005
09/14/2005CN1669110A Plasma implantation system and method with target movement
09/14/2005CN1669109A Plasma processing apparatus and plasma processing method
09/14/2005CN1669108A Capacitively coupled plasma reactor with magnetic plasma control
09/14/2005CN1669107A Adjustable implantation angle workpiece support structure for an ion beam implanter
09/14/2005CN1668984A Projection optical system and method for photolithography and exposure apparatus and method using same
09/14/2005CN1668982A Composition for antireflection film formation
09/14/2005CN1668981A Photosensitive composition for interlayer dielectric and method of forming patterned interlayer dielectric
09/14/2005CN1668979A Pattern size correcting device and pattern size correcting method
09/14/2005CN1668931A Probe card for testing integrated circuits
09/14/2005CN1668929A Assembly for electrically connecting a test component to a testing machine for testing electrical circuits on the test component
09/14/2005CN1668928A Fiducial alignment mark on microelectronic spring contact
09/14/2005CN1668915A Method and apparatus for measuring critical size
09/14/2005CN1668786A Silicon wafer for epitaxial growth, epitaxial wafer, and its manufacturing method
09/14/2005CN1668716A Photocurable adhesive compositions, reaction products of which have low halide ion content
09/14/2005CN1668715A Silicone-based adhesive sheet, method of bonding a semiconductor chip to a chip attachment component, and a semiconductor device
09/14/2005CN1668714A Polishing composition containing conducting polymer
09/14/2005CN1668446A Device and method for processing carrier tape
09/14/2005CN1668437A Imprint lithography processes and systems
09/14/2005CN1668424A Carriage robot system and its controlling method
09/14/2005CN1668179A Electronic component mounting apparatus
09/14/2005CN1668167A A method of manufacturing an electronic component and electronic component thereof
09/14/2005CN1668163A Anisotropic conductive sheet
09/14/2005CN1668151A Flat panel display and method of manufacturing the same
09/14/2005CN1667892A Wire bonding apparatus having actuated flame-off wand
09/14/2005CN1667846A Light-emitting device and method of manufacturing the same
09/14/2005CN1667845A Process for producing optical semiconductor device
09/14/2005CN1667840A Thin film transistor, semiconductor device, and method for manufacturing the same
09/14/2005CN1667839A Thin film device supply body and method of fabricating the same and its use in a transfer method
09/14/2005CN1667837A Semiconductor device and method for fabricating the same
09/14/2005CN1667836A Heterojunction bipolar transistor and manufacturing method thereof
09/14/2005CN1667835A Semiconductor element and method for fabricating the same
09/14/2005CN1667834A Method of base formation in a BiCMOS process
09/14/2005CN1667833A Semiconductor device and manufacturing method thereof
09/14/2005CN1667831A Image sensor having holes and method for manufacturing same
09/14/2005CN1667830A Nonvolatile memory and nonvolatile memory manufacturing method
09/14/2005CN1667829A Semiconductor integrated circuit and method of redesigning same
09/14/2005CN1667828A Integrated circuit structure and method for making same
09/14/2005CN1667825A Plain conductor structure and process thereof
09/14/2005CN1667824A 半导体器件及其制造方法 Semiconductor device and manufacturing method thereof
09/14/2005CN1667823A Chip packaging member and method of manufacture
09/14/2005CN1667820A Semiconductor device and method for manufacturing the same
09/14/2005CN1667819A Circuit board and method for manufacturing the same
09/14/2005CN1667818A Ion implantation mask type read-only memory and its manufacture method
09/14/2005CN1667817A Method for manufacturing tungsten/polysilicon word line structure in vertical DRAM and device manufactured thereby
09/14/2005CN1667816A CMOS well structure and method of forming the same
09/14/2005CN1667815A 半导体集成电路 The semiconductor integrated circuit
09/14/2005CN1667814A Interference analysis method and interference analysis device
09/14/2005CN1667813A Semiconductor device
09/14/2005CN1667812A Semiconductor device and method of fabricating the same
09/14/2005CN1667811A Method of forming wiring structure and semiconductor device
09/14/2005CN1667810A Method for simulating reliability of semiconductor device
09/14/2005CN1667809A Semiconductor storage device, semiconductor device, and manufacturing method therefor
09/14/2005CN1667808A Method for reducing the contact resistance of the connection regions of a semiconductor device
09/14/2005CN1667807A Method for fabricating metal-oxide-semiconductor transistors
09/14/2005CN1667806A Structure of metal-oxide-semiconductor transistor and process for forming same
09/14/2005CN1667805A Vertical field-effect transistor, method of manufacturing the same, and display device having the same
09/14/2005CN1667804A Heterojunction bipolar transistor and manufacturing method thereof
09/14/2005CN1667803A Silicon carbide heat treatment apparatus and process
09/14/2005CN1667802A Plating method
09/14/2005CN1667801A Semiconductor device and manufacturing method for same
09/14/2005CN1667800A Trench method for metal wires
09/14/2005CN1667799A Device for two-sided lapping wafer type workpiece simultaneously
09/14/2005CN1667798A Method and apparatus for cleaving a wafer, method and apparatus for manufacturing semiconductor device
09/14/2005CN1667797A Method for manufacturing semiconductor device
09/14/2005CN1667796A Method for forming capacitor of semiconductor device
09/14/2005CN1667795A Substrate processing apparatus and substrate processing method
09/14/2005CN1667794A Strained finFETs and method of manufacture
09/14/2005CN1667793A Electrode wire structure for inhibiting coupled crosstalk between adjacent channels and method for manufacturing same
09/14/2005CN1667791A Ion implant dose control
09/14/2005CN1667688A Power supply circuit, driver IC using the power supply circuit, liquid crystal display device, and electronic instrument
09/14/2005CN1667649A Manufacturing method of non-contact chip card and non-contact chip card
09/14/2005CN1667603A Method of configuring information processing system and semiconductor integrated circuit
09/14/2005CN1667540A Semiconductor device
09/14/2005CN1667539A Voltage regulator and method of manufacturing the same
09/14/2005CN1667516A Lithographic apparatus and device manufacturing method
09/14/2005CN1667515A Lithographic apparatus, lorentz actuator and device manufacturing method
09/14/2005CN1667514A System and method for controlling composition for lithography process in real-time using near-infrared spectrometer
09/14/2005CN1667513A Exposure apparatus and method
09/14/2005CN1667511A Positive photoresist composition for non-spincoating type and anti-corrosive pattern forming method
09/14/2005CN1667510A Photoresist composition
09/14/2005CN1667505A Layout data verification method, mask pattern verification method and circuit operation verification method
09/14/2005CN1667459A Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same
09/14/2005CN1667449A Micro electromechanical actuator having a plurality of face comb electrodes and method for manufacturing the same
09/14/2005CN1667448A Optical modulator and manufacturing method of optical modulator
09/14/2005CN1667421A Sensor device
09/14/2005CN1667026A Polishing slurry, method of producing same, and method of polishing substrate
09/14/2005CN1666851A Resin sealing device and method
09/14/2005CN1666844A Dresser for polishing cloth and method for producing the same
09/14/2005CN1219334C Gamma-LiAlO2/alpha-Al2O3 flexible underlaying material and preparing process thereof
09/14/2005CN1219329C Self-alignment dual gate metal oxide semi-conductor field-effect transistor having separating gate
09/14/2005CN1219328C Field effect transistors with improved implants and method for making such transistors
09/14/2005CN1219326C 半导体集成装置及其制造方法 The semiconductor integrated device and manufacturing method thereof
09/14/2005CN1219324C Non-volatile semiconductor memory and method
09/14/2005CN1219323C Interconnection structure and method for making same
09/14/2005CN1219322C Resin sealed semiconductor device and its producing method
09/14/2005CN1219321C Lead frame and manufacturing method of resin sealed semiconductor device using same
09/14/2005CN1219320C Semiconductor device
09/14/2005CN1219318C Breakdown barrier and oxygen barrier for dielectric integrated circuit with low dielectric constant
09/14/2005CN1219317C Method for forming metallic silicide protective circuit by utilizing organic material
09/14/2005CN1219316C Manufacturing method of self-aligned metallic silicide with improved electric characteristics on contact surface