Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2005
09/01/2005US20050189328 Laser annealing apparatus and method
09/01/2005US20050189323 Recycling by mechanical means of a wafer comprising a multilayer structure after taking-off a thin layer thereof
09/01/2005US20050189322 Compositions and methods for chemical mechanical polishing silica and silicon nitride
09/01/2005US20050189320 Plasma processing method
09/01/2005US20050189319 One step copper damascene CMP process and slurry
09/01/2005US20050189318 Method for forming macropores in a layer and products obtained thereof
09/01/2005US20050189315 Method for manufacturing gratings in semiconductor materials
09/01/2005US20050189253 Glass substrate transport box containing disposable support boards
09/01/2005US20050189233 electrochemical plating (ECP) electrolyte solutions comprising a bath solution and cationic polymer adjuvants, used for electrodeposition of metal layers on surfaces of semiconductor wafer substrates; optimizing gap filling
09/01/2005US20050189229 Method and apparatus for electroplating a semiconductor wafer
09/01/2005US20050189228 Electroplating apparatus
09/01/2005US20050189217 Method and apparatus for forming a barrier layer on a substrate
09/01/2005US20050189214 Apparatus and methods for electrochemical processing of microelectronic workpieces
09/01/2005US20050189213 Method and apparatus for copper plating using electroless plating and electroplating
09/01/2005US20050189075 Pre-clean chamber with wafer heating apparatus and method of use
09/01/2005US20050189074 Gas processing apparatus and method and computer storage medium storing program for controlling same
09/01/2005US20050189072 Method and apparatus of generating PDMAT precursor
09/01/2005US20050189071 Processing apparatus and method for removing particles therefrom
09/01/2005US20050189070 Plasma processing apparatus and processing method
09/01/2005US20050189068 Plasma processing apparatus and method of plasma processing
09/01/2005US20050189065 Method of forming a layered polishing pad
09/01/2005US20050189001 Method for cleaning substrates using supercritical fluids
09/01/2005US20050188924 Method of controlling mover device, cooperative device of mover device, cooperative method of mover device, semiconductor manufacturing device, liquid crystal manufacturing device, and mechanical scan ion implantation device
09/01/2005US20050188923 Substrate carrier for parallel wafer processing reactor
09/01/2005US20050188919 Solvent bath and drain
09/01/2005US20050188918 Device for the production of crystal rods having a defined cross-section and column-shaped polycrystallization structure by means of floating-zone continuous crystallization
09/01/2005US20050188915 Method of manufacturing a wafer
09/01/2005US20050188535 Methods for manufacturing lead frame connectors for optical transceiver modules
09/01/2005DE4447264B4 Verfahren zur Herstellung einer Halbton-Phasenverschiebungsmaske A method for producing a halftone phase shift mask
09/01/2005DE19680786B4 Halbleiterbauelement-Testgerät The semiconductor device testing apparatus
09/01/2005DE112004000058T5 Organosilicatpolymer-Verbundmaterial mit niedriger Dielektrizitätskonstante Organosilicate polymer composite material of low dielectric constant
09/01/2005DE10393565T5 Halbleiterelement mit einer U-förmigen Gate-Struktur Semiconductor element having a U-shaped gate structure
09/01/2005DE10393277T5 System und Verfahren zum Entfernen von Material System and method for removing material
09/01/2005DE10393243T5 Messung und Fehlerausgleichung bei Interferometern Measurement and error evaluation equation with interferometers
09/01/2005DE10393241T5 Verfahren zur Herstellung von Halbleiterlaserdioden A process for the fabrication of semiconductor laser diode
09/01/2005DE10393214T5 Solarzelle und Verfahren zur Herstellung derselben Solar cell and method of manufacturing the same
09/01/2005DE10392480T5 Dielektrische Filme Dielectric films
09/01/2005DE10356981B3 Mounting semiconductor chip on substrate, especially circuit board, involves arranging solder filling with solder bead, underfill materials on chip, applying to chip with adhesive band, mounting on substrate, melting by heat treatment
09/01/2005DE10332295B4 Verfahren zur Entfernung von Metallspuren aus festem Silizium A process for removing trace metals from solid silicon
09/01/2005DE10297755T5 Konfektionierung einer Mikrochip-Vorrichtung Packaging a microchip device
09/01/2005DE102005005554A1 Verfahren zur Überprüfung eines Halbleitersensors für eine dynamische Grösse A method for checking a semiconductor dynamic quantity sensor
09/01/2005DE102005004615A1 Oberflächenmontierbare Leuchtdiode und Verfahren zu deren Herstellung A surface-mountable luminescent diode and methods for their preparation
09/01/2005DE102005002778A1 Halbleiterbauteil und Verfahren zu seiner Herstellung Semiconductor device and process for its preparation
09/01/2005DE102005001168A1 Erzeugen einer Mehrzahl von Dünnfilmvorrichtungen Generating a plurality of thin-film devices
09/01/2005DE102004062955A1 Halbleitervorrichtung und Verfahren zu deren Herstellung Semiconductor device and process for their preparation
09/01/2005DE102004059185A1 Elektronenstrahl-Testsystem mit intergrierter Substratüberführungseinheit Electron beam test system with integrated substrate transfer unit
09/01/2005DE102004053587A1 Flüssigkristalldisplay-Tafel und Verfahren zu deren Herstellung Liquid crystal display panel and process for their preparation
09/01/2005DE102004039402A1 Bidirektionale Vorrichtung, Verfahren zur Herstellung derselben und Halbleitervorrichtung Bi-directional device, method of manufacturing the same, and semiconductor device
09/01/2005DE102004020935B3 Production of a memory component, with a contact hole plane, uses a semiconductor substrate with prepared cell field and logic zones and surface gate electrode conductor paths
09/01/2005DE102004019786B3 Production of a first contact hole of a memory component comprises forming a semiconductor substrate having a cell field region and a logic region, producing an insulating layer on the semiconductor surface, and further processing
09/01/2005DE102004007952B3 Determining depth of recesses formed in supporting substrate involves recording and evaluating time profile of reduction in weight of substrate during evaporation of moistening substance
09/01/2005DE102004007124A1 Wet etching semiconductors comprises contacting the semiconductor with an electrolyte liquid and then irradiating the contact surface formed with UV light
09/01/2005DE102004006505A1 Charge-Trapping-Speicherzelle und Herstellungsverfahren Charge-trapping memory cell, and manufacturing method
09/01/2005DE102004005702A1 Halbleiterscheibe, Vorrichtung und Verfahren zur Herstellung der Halbleiterscheibe Semiconductor wafer, the device and method of manufacturing the semiconductor wafer
09/01/2005DE102004005361A1 Verfahren zur Herstellung von metallischen Leitbahnen und Kontaktflächen auf elektronischen Bauelementen A process for the production of metallic interconnects and contact surfaces on electronic components
09/01/2005DE102004005247A1 Imprint-lithographic process for manufacturing e.g. MOSFET, involves structuring polymerized gate dielectric layer by imprint stamp that is used to form hole on layer, and etching base of hole till preset thickness of layer is reached
09/01/2005CA2556066A1 Vapor phase growth apparatus
08/2005
08/31/2005EP1569503A1 Method for supplying solder
08/31/2005EP1569282A2 Group III nitride compound semiconductor light emitting device and method for producing the same
08/31/2005EP1569274A1 Process for manufacturing semiconductor integrated non volatile memory devices
08/31/2005EP1569273A2 Conductive lines embedded in isolation regions
08/31/2005EP1569272A2 Apparatus and method for die attachement
08/31/2005EP1569271A1 Semiconductor producing device using mini-environment system
08/31/2005EP1569270A2 Manufacturing method of semiconductor device
08/31/2005EP1569269A1 Epitaxial growing method and substrate for epitaxial growth
08/31/2005EP1569268A1 Plasma processing system and method and electrode plate of plasma processing system
08/31/2005EP1569267A1 Cleaning composition, method for cleaning semiconductor substrate, and process for manufacturing semiconductor device
08/31/2005EP1569266A2 Method for fabricating a silicide film, multilayered intermediate structure and multilayered structure
08/31/2005EP1569265A2 Semiconductor device having trenches and method of forming trenches
08/31/2005EP1569264A1 Method for producing silicon epitaxial wafer
08/31/2005EP1569263A2 Method for joining two wafers and wafer assembly
08/31/2005EP1569262A2 Methods and apparatus for enhanced operation of substrate carrier handlers
08/31/2005EP1569261A2 Method and apparatus for transferring a substrate carrier
08/31/2005EP1569035A1 Lithographic apparatus and device manufacturing method
08/31/2005EP1569034A1 Lithographic apparatus and device manufacturing method
08/31/2005EP1569033A2 Exposure apparatus and method
08/31/2005EP1569000A2 Probe card
08/31/2005EP1568976A1 Exposure apparatus mounted with measuring apparatus
08/31/2005EP1568949A1 Gas heating method and gas heating device
08/31/2005EP1568797A2 In-situ dry clean chamber for front end of line fabrication
08/31/2005EP1568746A1 Polishing composition and polishing method
08/31/2005EP1568744A1 Composition for porous film formation, porous film, process for producing the same, interlayer insulation film and semiconductor device
08/31/2005EP1568457A1 Device and method for determining the orientation of a crystallographic plane in relation to a crystal surface
08/31/2005EP1568087A1 Non-volatile memory cell, memory cell arrangement and method for production of a non-volatile memory cell
08/31/2005EP1568085A1 Silicon nitrade charge trapping memory device
08/31/2005EP1568084A2 Scalable nano-transistor and memory using back-side trapping
08/31/2005EP1568083A2 Gallium nitride-based devices and manufacturing process
08/31/2005EP1568082A2 Buffer layer comprising quaternary and ternary alloys in semiconductor devices
08/31/2005EP1568081A1 Method of producing a laterally doped channel
08/31/2005EP1568078A1 Forming a copper diffusion barrier
08/31/2005EP1568077A2 Method and device for pre-treating surfaces of substrates to be bonded
08/31/2005EP1568076A2 Composite leadframe led package and method of making the same
08/31/2005EP1568075A2 Nitridation of high-k dielectrics
08/31/2005EP1568074A1 Carrier head for chemical mechanical polishing apparatus
08/31/2005EP1568073A1 Manufacturing process for a multilayer structure
08/31/2005EP1568072A1 Method of producing an n-type diamond with high electrical conductivity
08/31/2005EP1568069A2 Active matrix backplane for controlling controlled elements and method of manufacture thereof
08/31/2005EP1568068A1 Backside heating chamber for emissivity independent thermal processes
08/31/2005EP1567915A1 Pattern forming materials and pattern formation method using the materials
08/31/2005EP1567913A1 A chucking system and method for modulating shapes of substrates
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