Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2005
09/01/2005US20050191819 Methods of forming capacitors, methods of forming capacitor-over-bit line memory circuitry, and related integrated circuitry constructions
09/01/2005US20050191818 Integrated circuit with a strongly-conductive buried layer
09/01/2005US20050191817 Semiconductor device and method of fabricating the same
09/01/2005US20050191816 Implanting carbon to form P-type source drain extensions
09/01/2005US20050191815 Metal-oxide-semiconductor device including a buried lightly-doped drain region
09/01/2005US20050191813 Asymmetric source/drain transistor employing selective epitaxial growth (SEG) layer and method of fabricating same
09/01/2005US20050191812 Spacer-less transistor integration scheme for high-k gate dielectrics and small gate-to-gate spaces applicable to Si, SiGe strained silicon schemes
09/01/2005US20050191811 Film forming ring and method of manufacturing semiconductor device
09/01/2005US20050191810 Semiconductor device and method of manufacturing the same
09/01/2005US20050191809 Common MOSFET process for plural devices
09/01/2005US20050191808 Method for removing nanoclusters from selected regions
09/01/2005US20050191807 Method for forming shallow trench in deep trench structure
09/01/2005US20050191806 Method for fabricating a memory cell
09/01/2005US20050191805 Semiconductor fabrication using a collar
09/01/2005US20050191804 Method for forming a reduced active area in a phase change memory structure
09/01/2005US20050191803 Method of forming a metal film for electrode
09/01/2005US20050191802 Method of integrating the formation of a shallow junction N channel device with the formation of P channel, ESD and input/output devices
09/01/2005US20050191801 Method for fabricating a field effect transistor
09/01/2005US20050191800 Method for integrated manufacturing of split gate flash memory with high voltage MOSFETS
09/01/2005US20050191799 Thin film transistor with multiple gates using metal induced lateral crystallization and method of fabricating the same
09/01/2005US20050191798 Thin film transistor with multiple gates using metal induced lateral crystallization and method of fabricating the same
09/01/2005US20050191797 Semiconductor device and method of manufacturing the same
09/01/2005US20050191796 Method for manufacturing thin film transistor
09/01/2005US20050191795 Method of manufacture of FinFET devices with T-shaped fins and devices manufactured thereby
09/01/2005US20050191794 Method for forming a trench MOSFET having self-aligned features
09/01/2005US20050191793 Semiconductor packaging techniques for use with non-ceramic packages
09/01/2005US20050191792 Component for fabricating an electronic device and method of fabricating an electronic device
09/01/2005US20050191791 Methods for dicing wafer stacks to provide access to interior structures
09/01/2005US20050191787 Methods of fabrication of package assemblies for optically interactive electronic devices
09/01/2005US20050191786 Integrated circuit packaging using electrochemically fabricated structures
09/01/2005US20050191785 Via structure of packages for high frequency semiconductor devices
09/01/2005US20050191783 Method of forming electrode for flat display panel
09/01/2005US20050191782 PMOS TFT including lightly doped drain region and method of fabricating the same
09/01/2005US20050191781 Method of forming thin film pattern, method of manufacturing device, electro-optical apparatus and electronic apparatus
09/01/2005US20050191779 Methods for producing a semiconductor entity
09/01/2005US20050191777 Method for producing light emitting diode with plated substrate
09/01/2005US20050191776 Buffer layers for organic electroluminescent devices and methods of manufacture and use
09/01/2005US20050191775 Nitride-based semiconductor device and method of fabricating the same
09/01/2005US20050191773 Nitride III-V compound semiconductor substrate, its manufacturing method, manufacturing method of a semiconductor light emitting device, and manufacturing method of a semiconductor device
09/01/2005US20050191772 Manufacturing method of semiconductor device
09/01/2005US20050191769 System, method and apparatus for automatic control of an RF generator for maximum efficiency
09/01/2005US20050191768 Apparatus and method for measuring substrates
09/01/2005US20050191767 Focused ion beam circuit repair using a hardmask and wet chemistry
09/01/2005US20050191766 Constructions comprising perovskite-type dielectric
09/01/2005US20050191765 Thin film capacitor with substantially homogenous stoichiometry
09/01/2005US20050191764 Method of forming a magnetic random access memory structure
09/01/2005US20050191763 Superconducting integrated circuit and method for fabrication thereof
09/01/2005US20050191630 Bioarray chip reaction apparatus and its manufacture
09/01/2005US20050191584 Rinsing with aqueous ammonium hydroxide and hydrogen peroxide; removing residual resist prior to patterning; preventing contamination; simple, low cost, standard equipment
09/01/2005US20050191583 Exposure apparatus and method
09/01/2005US20050191579 Protecting groups in polymers, photoresists and processes for microlithography
09/01/2005US20050191576 Water-soluble material, chemically amplified resist and pattern formation method using the same
09/01/2005US20050191572 Aperture masks for circuit fabrication
09/01/2005US20050191566 Quick and accurate modeling of transmitted field
09/01/2005US20050191564 Annealing amorphous liner layer to increase degree of crystallisation and generate semi-crystalline liner layer with higher etching rate; implantating extrinsic boron ions to improve etch selectivity
09/01/2005US20050191562 Method of increasing the shelf life of a photomask substrate
09/01/2005US20050191514 Amorphous dielectric thin film and manufacturing method thereof
09/01/2005US20050191511 For forming conductor patterns; thermosetting resins; electroless plating; electrostatic latent imaging
09/01/2005US20050191499 Particle-removing wafer
09/01/2005US20050191495 Nanotube films and articles
09/01/2005US20050191456 Adhesive sheet roll for wafer processing
09/01/2005US20050191448 Donor sheet, method of manufacturing the same, method of manufacturing TFT using the donor sheet, and method of manufacturing flat panel display device using the donor sheet
09/01/2005US20050191437 Method of forming a catalytic surface comprising at least one of Pt, Pd, Co and Au in at least one of elemental and alloy forms
09/01/2005US20050191420 Coaoting apparatus and coating method using the same
09/01/2005US20050191413 Apparatus and method for applying a material to an object
09/01/2005US20050191411 forming apertures in dielectric layers formed on an electrocondutive layer, to expose segments of the electroconductive layer, then doping, filling with conductors and annealing; semiconductor interconnects having electromigration resistance
09/01/2005US20050191409 Ion beam monitoring arrangement
09/01/2005US20050191179 Structure and manufacturing of gallium nitride light emitting diode
09/01/2005US20050191162 Method for integrating interbay and intrabay material transportation systems within an integrated circuit factory
09/01/2005US20050191155 Sheet-like electronic component clean transfer device and sheet-like electronic component manufacturing system
09/01/2005US20050191051 Method and device for processing substrate
09/01/2005US20050191044 Backside rapid thermal processing of patterned wafers
09/01/2005US20050190956 Mounting-error inspecting method and substrate inspecting apparatus using the method
09/01/2005US20050190880 Stress measurement method using X-ray diffraction
09/01/2005US20050190801 Laser unit, exposure apparatus and method
09/01/2005US20050190702 Delay time verifying method with less processing load
09/01/2005US20050190636 Semiconductor device having storage circuit which stores data in nonvolatile manner by using fuse element
09/01/2005US20050190628 Semiconductor integrated circuit device
09/01/2005US20050190624 Semiconductor device
09/01/2005US20050190617 Folded bit line DRAM with vertical ultra thin body transistors
09/01/2005US20050190608 Method of forming a CMOS structure having gate insulation films of different thicknesses
09/01/2005US20050190606 Method of making a multibit non-volatile memory
09/01/2005US20050190605 Semiconductor memory and method of manufacturing the same
09/01/2005US20050190600 Nonvolatile semiconductor memory device including improved gate electrode
09/01/2005US20050190598 Non-volatile memory technology compatible with 1T-RAM process
09/01/2005US20050190596 Method of controlling threshold voltage of NROM cell
09/01/2005US20050190595 Split-gate P-channel flash memory cell with programming by band-to-band hot electron method
09/01/2005US20050190590 Gate controlled floating well vertical mosfet
09/01/2005US20050190589 Capacitor, semiconductor device, and method of manufacturing the semiconductor device
09/01/2005US20050190528 Electronic component, method of manufacturing the electronic component, and electronic apparatus
09/01/2005US20050190459 Laminated diffractive optical element
09/01/2005US20050190450 Ultra high transmission phase shift mask blanks
09/01/2005US20050190430 Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields
09/01/2005US20050190421 Integrated circuit with multiple spacer insulating region widths
09/01/2005US20050190381 Method and apparatus for controlling a calibration cycle or a metrology tool
09/01/2005US20050190378 Exposure apparatus mounted with measuring apparatus
09/01/2005US20050190377 Point diffraction interferometer and exposure apparatus and method using the same
09/01/2005US20050190375 Stage apparatus and control method therefor
09/01/2005US20050190355 Apparatus and system for improving phase shift mask imaging performance and associated methods
09/01/2005US20050190354 Lithographic apparatus and device manufacturing method