Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2005
08/31/2005CN1661792A Method for fabricating semiconductor device
08/31/2005CN1661791A Semiconductor device and its mfg. method
08/31/2005CN1661790A Particle removing member of substrate processing equipment
08/31/2005CN1661789A Apparatus and method for wafer attachment
08/31/2005CN1661788A Integrated circuit package provided with cooperatively arranged illumination and sensing capabilities
08/31/2005CN1661787A Lead frame and method for manufacturing semiconductor package with the same
08/31/2005CN1661786A Lead frame for semiconductor package and method of fabricating semiconductor package
08/31/2005CN1661785A Field effect transistor and method for manufacturing the same
08/31/2005CN1661784A Self-aligned split-gate nonvolatile memory structure and a method of making the same
08/31/2005CN1661783A Thin film transistor and process for making an array panel
08/31/2005CN1661782A Method for forming oxide film in semiconductor device
08/31/2005CN1661781A Amorphous dielectric thin film and manufacturing method thereof
08/31/2005CN1661780A CMP apparatus and polishing method
08/31/2005CN1661779A T-gate formation
08/31/2005CN1661778A Method of fabrication of semiconductor device
08/31/2005CN1661777A Structural material of Nano ZnO Column matrix and preparation technique
08/31/2005CN1661776A Barrier film material and pattern formation method using the same
08/31/2005CN1661775A Substrate having film pattern and manufacturing method of the same, manufacturing method of semiconductor device, liquid crystal television, and el television
08/31/2005CN1661774A Donor sheet, method of manufacturing the same, method of manufacturing transistor and display
08/31/2005CN1661773A Mask data correction method, photomask, optical image prediction method
08/31/2005CN1661772A Optical device manufacturing method
08/31/2005CN1661771A Method for aligning wafer
08/31/2005CN1661770A Method to predict and identify defocus wafers and system thereof
08/31/2005CN1661769A Micro-switching element fabrication method and micro-switching element
08/31/2005CN1661763A Ion implantation method and apparatus
08/31/2005CN1661723A Semiconductor integrated circuit
08/31/2005CN1661722A 半导体器件 Semiconductor devices
08/31/2005CN1661651A Method for manufacturing an electro-optical device
08/31/2005CN1661650A Apparatus for manufacturing flat-panel display
08/31/2005CN1661647A Apparatus for manufacturing flat-panel display
08/31/2005CN1661602A Integrated circuit logic with self compensating block delays
08/31/2005CN1661481A Lithographic apparatus and device manufacturing method
08/31/2005CN1661479A Eigen decomposition based OPC model
08/31/2005CN1661473A Maskless optical writer
08/31/2005CN1661472A Method for forming pattemized photoresistive layer and fab ricating device
08/31/2005CN1661433A Processing apparatus and method for removing particles therefrom
08/31/2005CN1661424A Liquid crystal display device and method of fabricating the same
08/31/2005CN1661388A System-on-chip (SOC) having built-in-self-test circuits and a self-test method of the SOC
08/31/2005CN1661387A Inspection system, inspection method, and method for manufacturing semiconductor device
08/31/2005CN1661376A 探针卡 Probe Card
08/31/2005CN1661375A 探针卡 Probe Card
08/31/2005CN1661130A Plasma processing apparatus, semiconductor manufacturing apparatus and electrostatic chucking unit used thereof
08/31/2005CN1660952A Adhering sheet for barrel wafer processing
08/31/2005CN1660951A 抛光组合物和抛光方法 Polishing composition and polishing method
08/31/2005CN1660923A Compositions and methods for chemical mechanical polishing silica and silicon nitride
08/31/2005CN1660679A Method of mfg. semiconductor device
08/31/2005CN1660560A Film splicer and film carrier tape for mounting electronic components
08/31/2005CN1660543A Method of forming a layered polishing pad
08/31/2005CN1217420C Photoelectric component and assembly
08/31/2005CN1217419C Method for minimizing short channel effect of semiconductor devices and transistors
08/31/2005CN1217418C Power metal oxide semiconductcor field effect transistor device and its manufacture method
08/31/2005CN1217417C Semiconductor device and its mfg. method
08/31/2005CN1217415C Semiconductor memory device
08/31/2005CN1217414C Semiconductor device
08/31/2005CN1217413C Slot type capacitor with insulating ring and its mfg. method
08/31/2005CN1217411C Integrated circuit chip made secure against the action of electromagnetic radiation
08/31/2005CN1217409C Insulating grid bipolar transistor modular block capable of preventing short circuit
08/31/2005CN1217406C Sheet material for forming chip protection film and method for making semiconductor chip
08/31/2005CN1217405C Semiconductor device and its mfg. method, electrooptical device and electronic machine
08/31/2005CN1217404C Method for making flashing storage element
08/31/2005CN1217403C Multilayer wire distribution device and method thereof, wire distribution characteristic analysing and predicting method
08/31/2005CN1217402C Mfg method with regular embedded structure outline
08/31/2005CN1217401C Technology manufacturing contact plug of embedded memeory
08/31/2005CN1217400C Shalow groove isolation manufacturing method for preventign acute angle
08/31/2005CN1217399C Method for detecting wafer level defect
08/31/2005CN1217398C Control chip for daily monitoring for rapid theremal annealing process
08/31/2005CN1217397C Method for measuring overlap deviation ratio between grid structure and active zone
08/31/2005CN1217394C Manufacure of metal-oxide semiconductor transistor
08/31/2005CN1217393C Method for thermal processing silicon chip and silicon chip produced with the same method
08/31/2005CN1217392C Method and apparatus for forming epitaxial silicon wafer with denuded zone
08/31/2005CN1217391C Method for preparing semiconductor device
08/31/2005CN1217390C Device and method for plasma processing and slow-wave plate
08/31/2005CN1217389C Dielectric material layer arrangtement
08/31/2005CN1217388C Plasma processing device and exhaust ring
08/31/2005CN1217387C Wafer manufacturing method, polishing apparatus, and wafer
08/31/2005CN1217386C Blade-type substrate cleaning method and apparatus
08/31/2005CN1217385C Grid insulated film forming method
08/31/2005CN1217384C Mothod of forming resistance electrode
08/31/2005CN1217383C Process for forming borderless contact window in semiconductor device
08/31/2005CN1217382C Method for fabricating polysilicon thin films
08/31/2005CN1217381C Method for making substrate in particular for optics, electronics or optoelectronics and resulting substrate
08/31/2005CN1217380C Single crystal wafer and solar battery cell
08/31/2005CN1217379C Method of removing covered aligning aligning indexing substance
08/31/2005CN1217237C Self-compensating mark arrangement for stepper alignment
08/31/2005CN1217236C Photoresist remover composition comprising ammonium fluoride
08/31/2005CN1217234C Substrate treatment device and method
08/31/2005CN1217197C Probe card for LCD detection
08/31/2005CN1217186C Capacitance investigating type sensor and production method thereof
08/31/2005CN1216953C Polishing composition for metal CMP and method of polishing susbstroote
08/31/2005CN1216926C Organic anti-reflective paint polymer and its preparing method
08/31/2005CN1216739C Compliant pre-form interconnect
08/30/2005US6938238 Method of manufacturing electronic device
08/30/2005US6938232 Floorplanning apparatus deciding floor plan using logic seeds associated with hierarchical blocks
08/30/2005US6938231 Method and system for designing circuit layout
08/30/2005US6937963 Method for avoiding irregular shutoff of production equipment and system for avoiding irregular shutoff
08/30/2005US6937917 Substrate processing apparatus, operation method thereof and program
08/30/2005US6937916 Automatic recognition of locator die in partial wafermap process
08/30/2005US6937915 Apparatus and methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control
08/30/2005US6937911 Compensating for cable drag forces in high precision stages
08/30/2005US6937754 Inspection equipment