| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 01/10/2006 | US6985219 Optical coupling for testing integrated circuits |
| 01/10/2006 | US6985218 Method of determining at least one parameter that is characteristic of the angular distribution of light illuminating an object in a projection exposure apparatus |
| 01/10/2006 | US6985215 Plasma processing method and plasma processing apparatus |
| 01/10/2006 | US6985211 photolithography apparatus comprising reflection multilayer stacks of molybdenum, rhodium, palladium, platinum, ruthenium, silicon and/or yttrium, and light sources, used for focussing patterned radiation beams on target substrates |
| 01/10/2006 | US6985210 Projection system for EUV lithography |
| 01/10/2006 | US6985208 Apparatus and method for retaining mirror, and mirror exchange method |
| 01/10/2006 | US6985196 Mask for manufacturing a substrate with light reflecting film having random light transmitting parts and non-light transmitting parts |
| 01/10/2006 | US6985194 Matrix array substrate |
| 01/10/2006 | US6985193 Liquid crystal display device and method for manufacturing the same |
| 01/10/2006 | US6985055 Transmission line comprised of interconnected parallel line segments |
| 01/10/2006 | US6985026 Semiconductor integrated circuit device and cellular terminal using the same |
| 01/10/2006 | US6985023 Selective switching of a transistor's back gate potential |
| 01/10/2006 | US6985022 Semiconductor device |
| 01/10/2006 | US6985004 Wiring optimizations for power |
| 01/10/2006 | US6985000 Thermal control of a DUT using a thermal control substrate |
| 01/10/2006 | US6984973 Part transfer apparatus, control method for part transfer apparatus, IC test method, IC handler, and IC test apparatus |
| 01/10/2006 | US6984972 Carrier transporting apparatus, method of transporting a carrier and transporting apparatus |
| 01/10/2006 | US6984945 Linear motor apparatus |
| 01/10/2006 | US6984941 Extreme UV radiation source and semiconductor exposure device |
| 01/10/2006 | US6984935 Method for precise molding and alignment of structures on a substrate using a stretchable mold |
| 01/10/2006 | US6984927 Display unit |
| 01/10/2006 | US6984895 Bonding pad structure of a semiconductor device |
| 01/10/2006 | US6984894 Semiconductor package having a partial slot cover for encapsulation process |
| 01/10/2006 | US6984893 Low temperature nitride used as Cu barrier layer |
| 01/10/2006 | US6984892 Semiconductor structure implementing low-K dielectric materials and supporting stubs |
| 01/10/2006 | US6984891 electrical and electronic apparatus comprising dielectric layers having apertures and diffusion barriers on diffusion barrier semiconductor wafers; connecting microstructure transistors and resistors |
| 01/10/2006 | US6984890 Chip-scale package |
| 01/10/2006 | US6984884 Electric power semiconductor device |
| 01/10/2006 | US6984882 Semiconductor device with reduced wiring paths between an array of semiconductor chip parts |
| 01/10/2006 | US6984880 Leadframe, resin-molded semiconductor device including the leadframe, method of making the leadframe and method for manufacturing the device |
| 01/10/2006 | US6984879 Clamp for pattern recognition |
| 01/10/2006 | US6984878 lead-free semiconductor package comprises semiconductor chips, metal connectors supports for the chip and packaging for encapsulating the chips; miniaturization; efficiency |
| 01/10/2006 | US6984877 Bumped chip carrier package using lead frame and method for manufacturing the same |
| 01/10/2006 | US6984875 Semiconductor device with improved reliability and manufacturing method of the same |
| 01/10/2006 | US6984873 Method of forming a stacked device filler |
| 01/10/2006 | US6984872 Method for fabricating an NPN transistor in a BICMOS technology |
| 01/10/2006 | US6984871 Semiconductor device with high structural reliability and low parasitic capacitance |
| 01/10/2006 | US6984868 Semiconductor device having a structure for isolating elements |
| 01/10/2006 | US6984867 Magnetic memory device |
| 01/10/2006 | US6984865 Magnetic random access memory |
| 01/10/2006 | US6984864 Semiconductor device with MISFET having low leakage current |
| 01/10/2006 | US6984863 Semiconductor decive and semiconductor memory using the same |
| 01/10/2006 | US6984861 Semiconductor memory device having a ferroelectric capacitor |
| 01/10/2006 | US6984860 Semiconductor device with high frequency parallel plate trench capacitor structure |
| 01/10/2006 | US6984859 Semiconductor memory device with static memory cells |
| 01/10/2006 | US6984858 Semiconductor device and manufacturing method thereof |
| 01/10/2006 | US6984857 Hydrogen barrier for protecting ferroelectric capacitors in a semiconductor device and methods for fabricating the same |
| 01/10/2006 | US6984855 Manufacturing method of semiconductor device and semiconductor device |
| 01/10/2006 | US6984853 Integrated circuit with enhancement mode pseudomorphic high electron mobility transistors having on-chip electrostatic discharge protection |
| 01/10/2006 | US6984850 Semiconductor light-emitting diode |
| 01/10/2006 | US6984848 Thin film transistor with buffer layer for promoting electron mobility |
| 01/10/2006 | US6984845 Single-electron transistor using nanoparticles |
| 01/10/2006 | US6984844 Semiconductor device having heterojunction type MIS transistor which can operate at reduced voltage while maintaining high operation speed |
| 01/10/2006 | US6984843 Board for electronic device, electronic device, ferroelectric memory, electronic apparatus, ink-jet recording head, and ink-jet printer |
| 01/10/2006 | US6984840 Optical semiconductor device having an epitaxial layer of III-V compound semiconductor material containing N as a group V element |
| 01/10/2006 | US6984839 Wafer processing apparatus capable of mapping wafers |
| 01/10/2006 | US6984838 Surface position detection apparatus and method, and exposure apparatus and device manufacturing method using the exposure apparatus |
| 01/10/2006 | US6984836 System and method for monitoring the topography of a wafer surface during lithographic processing |
| 01/10/2006 | US6984833 Ion implanter and method for controlling the same |
| 01/10/2006 | US6984822 Apparatus and method for secondary electron emission microscope |
| 01/10/2006 | US6984595 Layer member forming method |
| 01/10/2006 | US6984594 Deposition method of insulating layers having low dielectric constant of semiconductor devices |
| 01/10/2006 | US6984593 Beta control using a rapid thermal oxidation |
| 01/10/2006 | US6984592 Systems and methods for forming metal-doped alumina |
| 01/10/2006 | US6984591 Precursor source mixtures |
| 01/10/2006 | US6984590 Method of manufacturing an EEPROM device |
| 01/10/2006 | US6984589 Method for determining etching process conditions and controlling etching process |
| 01/10/2006 | US6984588 Compositions for oxide CMP |
| 01/10/2006 | US6984587 Integrated polishing and electroless deposition |
| 01/10/2006 | US6984586 Method of thinning semiconductor wafer capable of preventing its front from being contaminated and back grinding device for semiconductor wafers |
| 01/10/2006 | US6984585 Method for removal of residue from a magneto-resistive random access memory (MRAM) film stack using a sacrificial mask layer |
| 01/10/2006 | US6984584 Contamination suppression in chemical fluid deposition |
| 01/10/2006 | US6984583 Stereolithographic method for forming insulative coatings for via holes in semiconductor devices |
| 01/10/2006 | US6984582 Method of making semiconductor device by polishing with intermediate clean polishing |
| 01/10/2006 | US6984581 Structural reinforcement of highly porous low k dielectric films by ILD posts |
| 01/10/2006 | US6984580 Dual damascene pattern liner |
| 01/10/2006 | US6984579 Ultra low k plasma CVD nanotube/spin-on dielectrics with improved properties for advanced nanoelectronic device fabrication |
| 01/10/2006 | US6984578 Method for the production of an integrated circuit |
| 01/10/2006 | US6984577 Damascene interconnect structure and fabrication method having air gaps between metal lines and metal layers |
| 01/10/2006 | US6984576 Method of connecting an additively and subtractively formed conductive trace and an insulative base to a semiconductor chip |
| 01/10/2006 | US6984575 Fabrication process of a semiconductor integrated circuit device |
| 01/10/2006 | US6984574 Cobalt silicide fabrication using protective titanium |
| 01/10/2006 | US6984573 Laser irradiation method and apparatus |
| 01/10/2006 | US6984572 Method for manufacturing electronic component |
| 01/10/2006 | US6984571 Three dimensional device integration method and integrated device |
| 01/10/2006 | US6984570 Wafer bonding method of forming silicon-on-insulator comprising integrated circuitry |
| 01/10/2006 | US6984569 Shallow trench isolation (STI) region with high-K liner and method of formation |
| 01/10/2006 | US6984568 Semiconductor memory device having multi-layered storage node contact plug and method for fabricating the same |
| 01/10/2006 | US6984567 Nonvolatile semiconductor memory device and manufacturing method thereof |
| 01/10/2006 | US6984566 Damascene gate process |
| 01/10/2006 | US6984565 Method of manufacturing a semiconductor device |
| 01/10/2006 | US6984564 Structure and method to improve SRAM stability without increasing cell area or off current |
| 01/10/2006 | US6984563 Floating gate semiconductor component and method of manufacture |
| 01/10/2006 | US6984562 Method for forming dielectric layer between gates in flash memory device |
| 01/10/2006 | US6984561 Method for making high density nonvolatile memory |
| 01/10/2006 | US6984560 Methods of forming quantum dots in semiconductor devices |
| 01/10/2006 | US6984559 Method of fabricating a flash memory |
| 01/10/2006 | US6984558 Method of manufacturing a semiconductor device with non-volatile memory comprising a memory cell with an access gate and with a control gate and a charge storage region |
| 01/10/2006 | US6984557 Method of manufacturing a semiconductor device with non-volatile memory comprising a memory cell with an access gate and with a control gate and a charge storage region |
| 01/10/2006 | US6984556 Method of forming an isolation layer and method of manufacturing a trench capacitor |