| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/17/2006 | US6987060 Semiconductor device having improved contact hole structure and method for fabricating the same |
| 01/17/2006 | US6987059 Method and structure for creating ultra low resistance damascene copper wiring |
| 01/17/2006 | US6987058 Methods for underfilling and encapsulating semiconductor device assemblies with a single dielectric material |
| 01/17/2006 | US6987057 Method making bonding pad |
| 01/17/2006 | US6987056 Method of forming gates in semiconductor devices |
| 01/17/2006 | US6987055 Methods for deposition of semiconductor material |
| 01/17/2006 | US6987054 Method of fabricating a semiconductor device having a groove formed in a resin layer |
| 01/17/2006 | US6987053 Method of evaluating reticle pattern overlay registration |
| 01/17/2006 | US6987052 Method for making enhanced substrate contact for a semiconductor device |
| 01/17/2006 | US6987051 Method of making cavities in a semiconductor wafer |
| 01/17/2006 | US6987050 Self-aligned silicide (salicide) process for low resistivity contacts to thin film silicon-on-insulator and bulk MOSFETS and for shallow junctions |
| 01/17/2006 | US6987049 Semiconductor transistors and methods of fabricating the same |
| 01/17/2006 | US6987048 Memory device having silicided bitlines and method of forming the same |
| 01/17/2006 | US6987047 Method of manufacturing a nonvolatile semiconductor memory device having a stacked gate structure |
| 01/17/2006 | US6987046 Method for manufacturing flash memory device |
| 01/17/2006 | US6987045 Semiconductor device and method of manufacturing the same |
| 01/17/2006 | US6987044 Volatile memory structure and method for forming the same |
| 01/17/2006 | US6987043 Method of manufacturing semiconductor device having a plurality of trench-type data storage capacitors |
| 01/17/2006 | US6987042 Method of forming a collar using selective SiGe/Amorphous Si Etch |
| 01/17/2006 | US6987041 Semiconductor device having both memory and logic circuit and its manufacture |
| 01/17/2006 | US6987040 Trench MOSFET with increased channel density |
| 01/17/2006 | US6987039 Forming lateral bipolar junction transistor in CMOS flow |
| 01/17/2006 | US6987038 Method for fabricating MOS field effect transistor |
| 01/17/2006 | US6987037 Strained Si/SiGe structures by ion implantation |
| 01/17/2006 | US6987036 Method for forming crystalline semiconductor film and apparatus for forming the same |
| 01/17/2006 | US6987035 Method and apparatus for forming crystallized semiconductor layer, and method for manufacturing semiconductor apparatus |
| 01/17/2006 | US6987034 Method of making a semiconductor package device that includes singulating and trimming a lead |
| 01/17/2006 | US6987033 Method for making electronic devices including silicon and LTCC and devices produced thereby |
| 01/17/2006 | US6987032 Ball grid array package and process for manufacturing same |
| 01/17/2006 | US6987031 Multiple chip semiconductor package and method of fabricating same |
| 01/17/2006 | US6987030 Method of manufacturing semiconductor device |
| 01/17/2006 | US6987029 ZnO based compound semiconductor light emitting device and method for manufacturing the same |
| 01/17/2006 | US6987028 Method of fabricating a microelectronic die |
| 01/17/2006 | US6987027 Microscale vacuum tube device and method for making same |
| 01/17/2006 | US6986981 Amplified photoresist |
| 01/17/2006 | US6986975 sensing the first and the second pattern, with the distance being established such that the first and the second pattern form a desired moire pattern when the template and the substrate are in a desired spatial relationship |
| 01/17/2006 | US6986973 Test photomask, flare evaluation method, and flare compensation method |
| 01/17/2006 | US6986965 Device enclosures and devices with integrated battery |
| 01/17/2006 | US6986925 Single crystal silicon having improved gate oxide integrity |
| 01/17/2006 | US6986914 Vapor deposition using metal halide; removal by-products; using scavenger |
| 01/17/2006 | US6986851 Dry developing method |
| 01/17/2006 | US6986834 Hafnium silicide target and manufacturing method for preparation thereof |
| 01/17/2006 | US6986798 Cerium-based abrasive, production process thereof |
| 01/17/2006 | US6986739 Architecture tool and methods of use |
| 01/17/2006 | US6986701 Polishing pad with built-in optical sensor |
| 01/17/2006 | US6986699 Method and apparatus for determining polishing endpoint with multiple light sources |
| 01/17/2006 | US6986693 Group III-nitride layers with patterned surfaces |
| 01/17/2006 | US6986667 Inset mechanism for electronic assemblies |
| 01/17/2006 | US6986636 Device for positioning disk-shaped objects |
| 01/17/2006 | US6986418 Conveyor belt cleaner scraper blade with sensor and control system therefor |
| 01/17/2006 | US6986284 System and method for characterizing a textured surface |
| 01/17/2006 | US6986280 Integrated measuring instrument |
| 01/17/2006 | US6986261 Method and system for controlling chiller and semiconductor processing system |
| 01/17/2006 | US6986214 Low-pressure dryer and low-pressure drying method |
| 01/17/2006 | US6986197 Method of manufacturing an IC package |
| 01/17/2006 | CA2327863C Control circuit for semiconductor device with overheat protecting function |
| 01/12/2006 | WO2006004989A2 Methof for etching microchannel networks within liquid crystal polymer substrates |
| 01/12/2006 | WO2006004927A1 Atomic layer deposited tantalum containing adhesion layer |
| 01/12/2006 | WO2006004921A2 Micro-castellated interposer |
| 01/12/2006 | WO2006004809A1 Methods of forming lead free solder bumps and related structures |
| 01/12/2006 | WO2006004779A1 Substrate with patterned conductive layer |
| 01/12/2006 | WO2006004751A2 Methods and apparatus for attaching a die to a substrate |
| 01/12/2006 | WO2006004744A2 Method of determining the correct average bias compensation voltage during a plasma process |
| 01/12/2006 | WO2006004693A2 Method for bilayer resist plasma etch |
| 01/12/2006 | WO2006004625A1 Method of detecting defects in tft-arrays and a tft-array testing system incorporating the same |
| 01/12/2006 | WO2006004271A1 Iii-nitride compound emiconductor light emitting device |
| 01/12/2006 | WO2006004259A1 Plasma chamber having plasma source coil and method for etching the wafer using the same |
| 01/12/2006 | WO2006004258A1 Chemical mechanical polishing slurry composition for shallow trench isolation process of semiconductor |
| 01/12/2006 | WO2006004255A1 ETCHANT FOR WET ETCHING AlXGaI-XAs EPITAXIAL LAYER AND METHOD FOR MANUFACTURING SEMI¬ CONDUCTOR DEVICE USING THE ETCHANT |
| 01/12/2006 | WO2006004254A1 Controlled airflow stock shelf |
| 01/12/2006 | WO2006004224A1 Plasma treatment method and plasma etching method |
| 01/12/2006 | WO2006004171A1 Photosensitive film, process for producing the same, process for forming permanent pattern |
| 01/12/2006 | WO2006004135A1 Exposure apparatus and device manufacturing method |
| 01/12/2006 | WO2006003912A1 Method for forming quartz glass |
| 01/12/2006 | WO2006003619A1 A thin film transistor, method of producing same and active matrix display |
| 01/12/2006 | WO2006003584A2 Field-effect transistors fabricated by wet chemical deposition |
| 01/12/2006 | WO2006003579A1 Field effect transistor method and device |
| 01/12/2006 | WO2006003104A1 Method and structure for strained finfet devices |
| 01/12/2006 | WO2006003061A1 STRAINED SILICON-ON-INSULATOR BY ANODIZATION OF A BURIED p+ SILICON GERMANIUM LAYER |
| 01/12/2006 | WO2005112537A9 Part feeding head device and part mounting head device |
| 01/12/2006 | WO2005112124A3 Isolation trench |
| 01/12/2006 | WO2005109473A3 Adhesion improvement for dielectric layers to conductive materials |
| 01/12/2006 | WO2005101943A3 Electronic component mounting apparatus and method of mounting electronic components |
| 01/12/2006 | WO2005101515A3 Process to improve transistor drive current through the use of strain |
| 01/12/2006 | WO2005101496A3 Method for structured application of a laminatable film to a substrate for a semiconductor module |
| 01/12/2006 | WO2005097930A3 Dispersion for the chemical-mechanical polishing of metal surfaces containing metal oxide particles and a cationic polymer |
| 01/12/2006 | WO2005083752A3 Contaminant reducing support system |
| 01/12/2006 | WO2005071750A3 Conductive material compositions, apparatus, systems, and methods |
| 01/12/2006 | WO2005040459A3 Electroplating compositions and methods for electroplating |
| 01/12/2006 | WO2005029138A3 Systems and methods for inducing crystallization of thin films using multiple optical paths |
| 01/12/2006 | US20060010417 Apparatus, method and program product for suppressing waviness of features to be printed using photolithographic systems |
| 01/12/2006 | US20060009583 Method of producing (meth) acrylic acid derivative polymer for resist |
| 01/12/2006 | US20060009575 Coating liquid for forming amorphous silica-based coating film with low dielectric constant and method for preparing the same |
| 01/12/2006 | US20060009395 Compounds for control of appetite, blood pressure, cardiovascular response, libido, and circadian rhythm |
| 01/12/2006 | US20060009136 Fixed-abrasive chemical-mechanical planarization of titanium nitride |
| 01/12/2006 | US20060009130 Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device |
| 01/12/2006 | US20060009129 Feedforward and feedback control for conditioning of chemical mechanical polishing pad |
| 01/12/2006 | US20060009128 Eddy current sensing of metal removal for chemical mechanical polishing |
| 01/12/2006 | US20060009047 Modular tool unit for processing microelectronic workpieces |
| 01/12/2006 | US20060009046 Manufacturing method of polymetal gate electrode |