Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2006
01/18/2006CN1237582C Abrasive cloth, polishing device and method for manufacturing semiconductor device
01/18/2006CN1237581C Method for preparing low-resistance P-type GaN based material by ohmic contact
01/18/2006CN1237580C Semiconductor device with welding block button metallization structure and mfg process
01/18/2006CN1237579C Method for plasma corrosion of irdium-tantalum-oxide electrode, and method for cleaning after corrosion
01/18/2006CN1237578C Nitride semiconductor element and prduction method thereof
01/18/2006CN1237577C Method for producing gallium nitride film semiconductor and colligation production method
01/18/2006CN1237576C Gasifier and gasifying supply equipment
01/18/2006CN1237575C Method for producing Si1 Ge film on silicon substrate
01/18/2006CN1237574C Mfg. method for semiconductor device
01/18/2006CN1237512C Magnet head, magnetic disk device
01/18/2006CN1237423C Method, equipment and system for flow control of process gas in semiconductor manufacture
01/18/2006CN1237402C System and method for coating and developing
01/18/2006CN1237400C Photosensitive resin composition
01/18/2006CN1237399C Organis antireflective coating composition and method for forming photoresist pattern with the same composition
01/18/2006CN1237397C Device isolating process flow for ARS system
01/18/2006CN1237396C Light mark, focusing monitoring method, light exposure monitoring method, and manufacturing method of semiconductor device
01/18/2006CN1237386C Manufacturing method of liquid crystal display device
01/18/2006CN1237384C array basal plate of transmitting and reflecting liquid crystal device and manufacturing method thereof
01/18/2006CN1237373C Liquid crystal display device and its producing method
01/18/2006CN1237343C Optical inspection method and apparatus using collection angle design
01/18/2006CN1237205C Solution for forming strong dielectric film and process for forming strong dielectric film
01/18/2006CN1237204C High-density plasma chemical vapour-phase deposition equipment
01/18/2006CN1237203C Semiconductor or liquid crystal producing device
01/18/2006CN1237202C Visibly marked parts and method for using same
01/18/2006CN1237200C Silicon dioxide deposition by plasma activated evaporation process
01/18/2006CN1236895C Chemical machinery flattening system, chemical machinery polishing system and adjustable plate
01/18/2006CN1236890C Chip soldering apparatus
01/18/2006CN1236845C Bis (perfluoroalkanesulfonyl)imides and their salts as surfactants/additives for applications having extreme environments and methods thereof
01/17/2006US6988259 semiconductor layout is first processed by a rule-based optical proximity correction system and then subsequently processed by a model-based optical proximity correction system
01/17/2006US6988254 Method for designing semiconductor integrated circuit
01/17/2006US6988045 Dynamic metrology sampling methods, and system for performing same
01/17/2006US6988017 Adaptive sampling method for improved control in semiconductor manufacturing
01/17/2006US6988016 Method for evaluating lithography process margins
01/17/2006US6987983 Radio frequency monolithic integrated circuit and method for manufacturing the same
01/17/2006US6987894 Appearance inspection apparatus and method in which plural threads are processed in parallel
01/17/2006US6987874 Method and apparatus for managing surface image of thin film device, and method and apparatus for manufacturing thin film device using the same
01/17/2006US6987873 Automatic defect classification with invariant core classes
01/17/2006US6987830 Radiation generating apparatus, radiation generating method, exposure apparatus, and exposure method
01/17/2006US6987786 Controlling laser polarization
01/17/2006US6987690 Thin film magnetic memory device for programming required information with an element similar to a memory cell and information programming method
01/17/2006US6987653 Magnetoresistive element and magnetic memory device
01/17/2006US6987652 Tapered angle magnetoresistive element and nonvolatile solid-state memory using the same
01/17/2006US6987599 Pattern generator mirror configurations
01/17/2006US6987572 Methods and systems for lithography process control
01/17/2006US6987569 Dynamic interferometer controlling direction of input beam
01/17/2006US6987557 Enhanced lithographic displacement measurement system
01/17/2006US6987556 Lithographic projection apparatus, a method for determining a position of a substrate alignment mark, a device manufacturing method and device manufactured thereby
01/17/2006US6987554 Temperature adjusting system and exposure apparatus incorporating the same
01/17/2006US6987548 Liquid crystal display device and method for manufacturing the same
01/17/2006US6987415 Semiconductor integrated circuit
01/17/2006US6987398 System for evaluating probing networks
01/17/2006US6987335 Alignment apparatus and exposure apparatus using the same
01/17/2006US6987322 Contact etching utilizing multi-layer hard mask
01/17/2006US6987321 for forming dual damascene interconnect structure; semiconductors; depositing copper sulfide interface layer as sidewalls to the opening deters migration or diffusion of copper ions into the dielectric material
01/17/2006US6987320 Pressure-welded semiconductor device
01/17/2006US6987319 Wafer-level chip-scale package
01/17/2006US6987315 Ceramic multilayer substrate
01/17/2006US6987313 Semiconductor device
01/17/2006US6987311 Thin film transistors of a thin film transistor liquid crystal display and method for fabricating the same
01/17/2006US6987310 Multi-layered structure including an epitaxial layer having a low dislocation defect density, semiconductor device comprising the same, and method of fabricating the semiconductor device
01/17/2006US6987309 Semiconductor device applied to a variable capacitance capacitor and amplifier
01/17/2006US6987308 Ferroelectric capacitors with metal oxide for inhibiting fatigue
01/17/2006US6987307 Stand-alone organic-based passive devices
01/17/2006US6987305 Integrated FET and schottky device
01/17/2006US6987303 Silicon-controlled rectifier structures on silicon-on insulator with shallow trench isolation
01/17/2006US6987299 High-voltage lateral transistor with a multi-layered extended drain structure
01/17/2006US6987298 Circuit layout and structure for a non-volatile memory
01/17/2006US6987297 Semiconductor memory device and manufacturing method thereof
01/17/2006US6987296 Semiconductor device having contact hole with improved aspect ratio
01/17/2006US6987295 Trench capacitor and method for fabricating the trench capacitor
01/17/2006US6987294 Charge-coupled device and method of fabricating the same
01/17/2006US6987293 Semiconductor integrated circuit device and standard cell placement design method
01/17/2006US6987291 Integrated transistor circuitry
01/17/2006US6987290 Current-jump-control circuit including abrupt metal-insulator phase transition device
01/17/2006US6987289 High-density FinFET integration scheme
01/17/2006US6987284 Active matrix type display device and method of manufacturing the same
01/17/2006US6987283 Semiconductor device structure
01/17/2006US6987279 Light source device and exposure equipment using the same
01/17/2006US6987278 Gas flushing system with recovery system for use in lithographic apparatus
01/17/2006US6987276 Gas supply unit, gas supply method and exposure system
01/17/2006US6987275 Lithographic apparatus and device manufacturing method
01/17/2006US6987272 Work piece transfer system for an ion beam implanter
01/17/2006US6987271 Chamber sensor port, chamber and electron beam processor
01/17/2006US6987265 Method and an apparatus of an inspection system using an electron beam
01/17/2006US6987240 Thermal flux processing by scanning
01/17/2006US6987198 Acid generator and thin film composition containing the same
01/17/2006US6987147 A polymeric network comprises a plurality of monomers that include a cage compound with at least three arms, wherein at least one of the arms has two or more branches, and wherein each of the branches further comprises a reactive group and
01/17/2006US6987073 Low selectivity deposition methods
01/17/2006US6987072 Method of producing semiconductor crystal
01/17/2006US6987071 Solvent vapor infiltration of organic materials into nanostructures
01/17/2006US6987070 Method for forming low-k dielectric layer of semiconductor device
01/17/2006US6987069 Fabrication process of a semiconductor integrated circuit device
01/17/2006US6987068 Methods to planarize semiconductor device and passivation layer
01/17/2006US6987067 Semiconductor copper line cutting method
01/17/2006US6987066 Dry etching method and semiconductor device manufacturing method
01/17/2006US6987065 Method of manufacturing self aligned electrode with field insulation
01/17/2006US6987064 Method and composition to improve a nitride/oxide wet etching selectivity
01/17/2006US6987063 Method to reduce impurity elements during semiconductor film deposition
01/17/2006US6987062 Manufacturing method of semiconductor device
01/17/2006US6987061 Dual salicide process for optimum performance