| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/14/2006 | US6998302 Method of manufacturing mosfet having a fine gate width with improvement of short channel effect |
| 02/14/2006 | US6998301 Method for forming a tri-gate MOSFET |
| 02/14/2006 | US6998300 Methods for manufacturing semiconductor devices |
| 02/14/2006 | US6998299 Semiconductor device and method of manufacturing thereof |
| 02/14/2006 | US6998298 Thyristor semiconductor memory device and method of manufacture |
| 02/14/2006 | US6998297 Wafer level packaging |
| 02/14/2006 | US6998296 Electronic component and method for its production |
| 02/14/2006 | US6998295 Method of manufacturing a device package |
| 02/14/2006 | US6998293 Flip-chip bonding method |
| 02/14/2006 | US6998292 Apparatus and method for inter-chip or chip-to-substrate connection with a sub-carrier |
| 02/14/2006 | US6998291 Cost-reducing and process-simplifying wiring board and manufacturing method thereof |
| 02/14/2006 | US6998290 Economical high density chip carrier |
| 02/14/2006 | US6998289 Multiple layer phase-change memory |
| 02/14/2006 | US6998288 Use of doped silicon dioxide in the fabrication of solar cells |
| 02/14/2006 | US6998287 Polycrystalline liquid crystal display device having large width channel and method of fabricating the same |
| 02/14/2006 | US6998286 Thin film-structure and a method for producing the same |
| 02/14/2006 | US6998285 Charge separation type heterojunction structure and manufacturing method therefor |
| 02/14/2006 | US6998284 Semiconductor device having quantum well structure, and method of forming the same |
| 02/14/2006 | US6998283 In-plane switching mode liquid crystal display device and method for fabricating the same |
| 02/14/2006 | US6998282 Method of manufacturing a semiconductor device |
| 02/14/2006 | US6998281 Solid state lighting device with reduced form factor including LED with directional emission and package with microoptics |
| 02/14/2006 | US6998280 Wafer packaging process of packaging light emitting diode |
| 02/14/2006 | US6998279 Method of mounting light emitting element |
| 02/14/2006 | US6998278 Method of fabricating a micro-electromechanical actuator that includes drive circuitry |
| 02/14/2006 | US6998277 Method of planarizing spin-on material layer and manufacturing photoresist layer |
| 02/14/2006 | US6998276 Magnetoresistive memory device and method for fabricating the same |
| 02/14/2006 | US6998275 Hydrogen-less CVD TiN process for FeRAM VIA0 barrier application |
| 02/14/2006 | US6998225 Lift-off process; resist remover consists of an amine or a cyclic nitrogen compound so that the residual resist mask need not be removed by ashing. |
| 02/14/2006 | US6998224 Plasma deposited optical waveguide |
| 02/14/2006 | US6998221 patterning an opening of predetermined width in a photoresist layer located over an intermediate layer covering a substrate, etching into the intermediate layer such that an intermediate opening is formed with decreased width, forming a via opening |
| 02/14/2006 | US6998220 Resistor and contact layers are structured by laser light; one step; lithography |
| 02/14/2006 | US6998216 Mechanically robust interconnect for low-k dielectric material using post treatment |
| 02/14/2006 | US6998206 coating a photomask substrate with a chemically amplified photoresist containing a modified phenolic polymer, and an onium salt-containing chemical amplifier; coating ; baking such chemically amplified photoresist on said photomask substrate |
| 02/14/2006 | US6998200 Reflection layer on a substrate, an absorber pattern on the reflection layer, and a capping layer on the reflection layer. The capping layer may be selected to decrease a reflectivity of the reflection photomask by less than about |
| 02/14/2006 | US6998199 Alternating phase shifting masking; generating destructive interference |
| 02/14/2006 | US6998198 Contact hole printing by packing and unpacking |
| 02/14/2006 | US6998178 Organic compositions |
| 02/14/2006 | US6998175 Heat-peelable pressure-sensitive adhesive sheet |
| 02/14/2006 | US6998153 Nitriding silicon surface of wafer with nitrogen plasma; overcoating with nickel; annealing |
| 02/14/2006 | US6998148 Porous materials |
| 02/14/2006 | US6998066 and a chelating agent forming a chemical mechanical polishing emulsion; chemical stability, improved selectivity, corrosion inhibition, broad pH operating range |
| 02/14/2006 | US6998059 Method for manufacturing a silicon sensor and a silicon sensor |
| 02/14/2006 | US6998033 Providing an annular adapter body; providing an annular electrical-insulator ring; providing a replaceable annular adapter shield attachable to the outside surface of the body; providing a replaceable annular dark-space shield attachable |
| 02/14/2006 | US6998027 Highly efficient compact capacitance coupled plasma reactor/generator and method |
| 02/14/2006 | US6998014 Apparatus and method for plasma assisted deposition |
| 02/14/2006 | US6998002 Method of manufacturing ceramic package sealing structure and ceramic package having said sealing structure |
| 02/14/2006 | US6998000 degassing and semi-hardening adhesive capable of hardening by heating, discharging desired amount of semi-hardened adhesive on substrate, mounting semiconductor chip to be affixed to substrate; bubble-free |
| 02/14/2006 | US6997993 Susceptor supporting construction |
| 02/14/2006 | US6997988 System for processing a workpiece |
| 02/14/2006 | US6997985 Semiconductor, semiconductor device, and method for fabricating the same |
| 02/14/2006 | US6997793 Polishing pad, polishing apparatus having the same, and bonding apparatus |
| 02/14/2006 | US6997791 CMP polishing heads and methods of using the same |
| 02/14/2006 | US6997782 Polishing apparatus and a method of polishing and cleaning and drying a wafer |
| 02/14/2006 | US6997781 Fixed-abrasive chemical-mechanical planarization of titanium nitride |
| 02/14/2006 | US6997779 Device for the simultaneous double-side grinding of a workpiece in wafer form |
| 02/14/2006 | US6997778 Polishing apparatus |
| 02/14/2006 | US6997776 Process for producing a semiconductor wafer |
| 02/14/2006 | US6997670 Semiconductor wafer transfer apparatus |
| 02/14/2006 | US6997403 Liquid vaporizer with positive liquid shut-off |
| 02/14/2006 | US6997226 Method of transferring a substantially disc-shaped workpiece, and device for carrying out this method |
| 02/14/2006 | US6997217 Gas conduit for a load lock chamber |
| 02/14/2006 | US6997197 Apparatus and method for rapid thermal control of a workpiece in liquid or dense phase fluid |
| 02/14/2006 | US6997192 Control of dissolved gas levels in deionized water |
| 02/14/2006 | US6997049 Wind tunnel and collector configuration therefor |
| 02/14/2006 | US6996889 Electronic part mounting apparatus and method |
| 02/14/2006 | CA2386577C System and method for making wallboard or backerboard sheets including aerated concrete |
| 02/14/2006 | CA2278751C Atmospheric-pressure plasma jet |
| 02/14/2006 | CA2251737C Silicon carbide cmos and method of fabrication |
| 02/09/2006 | WO2006073622A2 Low-pressure removal of photoresist and etch residue |
| 02/09/2006 | WO2006015254A2 Quick swap load port |
| 02/09/2006 | WO2006015246A2 Method and system for fabricating a strained semiconductor layer |
| 02/09/2006 | WO2006014783A2 Method for manufacturing a semiconductor device having silicided regions |
| 02/09/2006 | WO2006014612A2 Method of controlling the film properties of a cvd-deposited silicon nitride film |
| 02/09/2006 | WO2006014600A1 A method to form an interconnect |
| 02/09/2006 | WO2006014472A1 Iii-nitride materials including low dislocation densities and methods associated with the same |
| 02/09/2006 | WO2006014421A2 METHOD FOR WAFER BONDING (Al, In, Ga)N AND Zn(S, Se) FOR OPTOELECTRONIC APPLICATIONS |
| 02/09/2006 | WO2006014401A1 A method for making a semiconductor device having a high-k gate dielectric layer and a metal gate electrode |
| 02/09/2006 | WO2006014346A2 Silicon-rich nickel-silicide ohmic contacts for sic semiconductor devices |
| 02/09/2006 | WO2006014249A2 Use of a chalcogen plasma to form chalcogenide switching materials for nanoscale electronic devices |
| 02/09/2006 | WO2006014241A2 Activation of carbon nanotubes for field emission applications |
| 02/09/2006 | WO2006014231A2 High density bonding of electrical devices |
| 02/09/2006 | WO2006014193A1 Processing system and method for chemically treating a tera layer |
| 02/09/2006 | WO2006014188A2 Fully silicided metal gates |
| 02/09/2006 | WO2006014003A1 Semiconductor device manufacturing method and tape for processing wafer |
| 02/09/2006 | WO2006014000A1 Wafer processing tape |
| 02/09/2006 | WO2006013974A1 Plasma ion source for metal-carbon binary cluster production apparatus |
| 02/09/2006 | WO2006013968A1 Thin-film forming apparatus |
| 02/09/2006 | WO2006013898A1 Semiconductor device manufacturing method |
| 02/09/2006 | WO2006013867A1 Transparent electrode for semiconductor light-emitting device |
| 02/09/2006 | WO2006013856A1 Stage device and exposure system |
| 02/09/2006 | WO2006013850A1 Coating film forming apparatus and coating film forming method |
| 02/09/2006 | WO2006013846A1 Method for forming p-type semiconductor region, and semiconductor element |
| 02/09/2006 | WO2006013814A1 Method for forming crystallization film and its equipment |
| 02/09/2006 | WO2006013808A1 Heat treatment apparatus and method of producing substrate |
| 02/09/2006 | WO2006013806A1 Exposure equipment, exposure method and device manufacturing method |
| 02/09/2006 | WO2006013773A1 Contact load measuring apparatus and inspecting apparatus |
| 02/09/2006 | WO2006013763A1 Laser processing method and semiconductor device |
| 02/09/2006 | WO2006013751A1 Bonding structure, wire bonding method, actuator device and liquid injecting head |
| 02/09/2006 | WO2006013720A1 Thin film forming method and thin film forming apparatus |
| 02/09/2006 | WO2006013644A1 Production system |