Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
02/2006
02/07/2006US6995451 Buried collar trench capacitor formed by LOCOS using self starved ALD nitride as an oxidation mask
02/07/2006US6995450 Semiconductor device with a frequency selective guard ring
02/07/2006US6995449 Deep trench isolation region with reduced-size cavities in overlying field oxide
02/07/2006US6995448 Semiconductor package including passive elements and method of manufacture
02/07/2006US6995447 Silicon on insulator device having trench isolation layer and method for manufacturing the same
02/07/2006US6995442 Total internal reflection (TIR) CMOS imager
02/07/2006US6995439 Method of fabricating low dielectric constant dielectric films
02/07/2006US6995437 Semiconductor device with core and periphery regions
02/07/2006US6995436 Nonvolatile semiconductor memory device
02/07/2006US6995434 Semiconductor device and method of fabricating the same
02/07/2006US6995432 Semiconductor device having a gate oxide film with some NTFTS with LDD regions and no PTFTS with LDD regions
02/07/2006US6995431 System and method to reduce noise in a substrate
02/07/2006US6995430 Strained-semiconductor-on-insulator device structures
02/07/2006US6995429 Semiconductor device with inverted thin film transistor structure that includes a body contact
02/07/2006US6995428 High voltage LDMOS transistor having an isolated structure
02/07/2006US6995427 Semiconductor structure for providing strained crystalline layer on insulator and method for fabricating same
02/07/2006US6995425 Semiconductor memory device having memory cell section and peripheral circuit section and method of manufacturing the same
02/07/2006US6995424 Non-volatile memory devices with charge storage insulators
02/07/2006US6995422 High-density three-dimensional memory
02/07/2006US6995421 Cell structure of non-volatile memory device and method for fabricating the same
02/07/2006US6995420 Semiconductor device and method of manufacturing the same
02/07/2006US6995419 Semiconductor constructions having crystalline dielectric layers
02/07/2006US6995418 Integrated semiconductor storage with at least a storage cell and procedure
02/07/2006US6995417 Semiconductor device having ferroelectric capacitors
02/07/2006US6995416 Memory device for storing electrical charge and method for fabricating the same
02/07/2006US6995415 Semiconductor device and its manufacturing method
02/07/2006US6995414 Semiconductor memory device including multi-layer gate structure
02/07/2006US6995413 Semiconductor memory device
02/07/2006US6995412 Integrated circuit with capacitors having a fin structure
02/07/2006US6995409 Module for high voltage power for converting a base of IGBT components
02/07/2006US6995407 Photonic digital-to-analog converter employing a plurality of heterojunction thyristor devices
02/07/2006US6995398 Methods of treating a silicon carbide substrate for improved epitaxial deposition and resulting structures and devices
02/07/2006US6995397 Semiconductor device
02/07/2006US6995396 Semiconductor substrate, semiconductor device and method for fabricating the same
02/07/2006US6995395 Multilayer optical compensator, liquid crystal display, and process
02/07/2006US6995394 Thin film transistor panel liquid crystal display
02/07/2006US6995388 Phase changeable memory devices and methods of forming the same in which an upper electrode includes a tip that extends toward a lower electrode
02/07/2006US6995382 Arrangement for the generation of intensive short-wave radiation based on a plasma
02/07/2006US6995379 Lithographic apparatus, device manufacturing method, and device manufactured thereby
02/07/2006US6995378 Lens array with a laterally movable optical axis for corpuscular rays
02/07/2006US6995371 Steady-state non-equilibrium distribution of free carriers and photon energy up-conversion using same
02/07/2006US6995342 Apparatus and method for bonding electronic component, circuit board, and electronic component mounting apparatus
02/07/2006US6995097 Method for thermal nitridation and oxidation of semiconductor surface
02/07/2006US6995096 Method for forming multi-layer wiring structure
02/07/2006US6995095 Methods of simultaneously fabricating isolation structures having varying dimensions
02/07/2006US6995094 One step process in one chamber, using a patterned hardmasks with an HBr, NF3, O2 at high power, low pressure to open a hole in wafer, through silicon and silicon dioxide layers; maintains structural integrity, etch selectivity; semiconductors
02/07/2006US6995093 Polysilicon etching method
02/07/2006US6995092 Method for manufacturing an electronic device
02/07/2006US6995091 Process for chemically mechanically polishing wafers
02/07/2006US6995090 Polishing slurry for use in CMP of SiC series compound, polishing method, and method of manufacturing semiconductor device
02/07/2006US6995089 Method to remove copper without pattern density effect
02/07/2006US6995088 Surface treatment of copper to improve interconnect formation
02/07/2006US6995087 Integrated circuit with simultaneous fabrication of dual damascene via and trench
02/07/2006US6995086 Method for fabricating a through hole on a semiconductor substrate
02/07/2006US6995085 Underlayer protection for the dual damascene etching
02/07/2006US6995084 Method for forming robust solder interconnect structures by reducing effects of seed layer underetching
02/07/2006US6995083 Method for producing an electrical and/or mechanical connection between flexible thin-film substrates
02/07/2006US6995082 Bonding pad of a semiconductor device and formation method thereof
02/07/2006US6995081 Systems and methods for forming tantalum silicide layers
02/07/2006US6995080 Methods of forming transistor gates
02/07/2006US6995079 Ion implantation method and method for manufacturing semiconductor device
02/07/2006US6995078 Method of forming a relaxed semiconductor buffer layer on a substrate with a large lattice mismatch
02/07/2006US6995077 Epitaxially coated semiconductor wafer and process for producing it
02/07/2006US6995076 Relaxed SiGe films by surfactant mediation
02/07/2006US6995075 Process for forming a fragile layer inside of a single crystalline substrate
02/07/2006US6995074 Method for manufacturing a semiconductor wafer
02/07/2006US6995073 Air gap integration
02/07/2006US6995072 Method of making sacrificial self-aligned interconnection structure
02/07/2006US6995071 Methods of forming MIM type capacitor structures using low temperature plasma processing
02/07/2006US6995070 Fabricating method of thin film capacitor
02/07/2006US6995069 Dielectric capacitor manufacturing method and semiconductor storage device manufacturing method
02/07/2006US6995068 Double-implant high performance varactor and method for manufacturing same
02/07/2006US6995067 Megasonic cleaning efficiency using auto-tuning of an RF generator at constant maximum efficiency
02/07/2006US6995066 Method of fabricating semiconductor device by using sacrifice layer for forming diffusion regions
02/07/2006US6995065 Selective post-doping of gate structures by means of selective oxide growth
02/07/2006US6995064 Halogen gettering method for forming field effect transistor (FET) device
02/07/2006US6995063 Method of fabricating memory cell in semiconductor device
02/07/2006US6995062 Method to improve flash forward tunneling voltage (FTV) performance
02/07/2006US6995061 Multi-bit stacked-type non-volatile memory and manufacture method thereof
02/07/2006US6995060 Fabrication of integrated circuit elements in structures with protruding features
02/07/2006US6995059 Methods of forming capacitors, methods of forming capacitor-over-bit line memory circuitry, and related integrated circuitry constructions
02/07/2006US6995058 Semiconductor memory device and manufacturing method thereof
02/07/2006US6995057 Folded bit line DRAM with vertical ultra thin body transistors
02/07/2006US6995056 Method for fabricating semiconductor device capable of preventing damage by wet cleaning process
02/07/2006US6995055 Structure of a semiconductor integrated circuit and method of manufacturing the same
02/07/2006US6995054 Method of manufacturing a semiconductor device
02/07/2006US6995052 Method and structure for double dose gate in a JFET
02/07/2006US6995051 Irradiation assisted reactive ion etching
02/07/2006US6995050 Thin film transistor and fabrication method for same
02/07/2006US6995049 Method for forming semiconductor device
02/07/2006US6995048 Thin film transistor and active matrix type display unit production methods therefor
02/07/2006US6995047 Thin film transistor having a short channel formed by using an exposure mask with slits
02/07/2006US6995046 Process for making byte erasable devices having elements made with nanotubes
02/07/2006US6995045 Thin film transistor and method of forming thin film transistor
02/07/2006US6995044 Manufacturing method of a semiconductor device incorporating a passive element and a redistribution board
02/07/2006US6995043 Methods for fabricating routing elements for multichip modules
02/07/2006US6995042 Method for fabricating preplated nickel/palladium and tin leadframes
02/07/2006US6995041 Semiconductor package with circuit side polymer layer and wafer level fabrication method
02/07/2006US6995040 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
02/07/2006US6995039 Method and apparatus for electrostatically aligning integrated circuits