Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2006
07/13/2006DE102004059668B3 Halbleitertechnologieverfahren zur Herstellung einer leitfähigen Schicht Semiconductor technology process for producing a conductive layer
07/13/2006DE102004055183B3 Integrierte Schaltung und Verfahren zur Herstellung einer integrierten Schaltung auf einem Halbleiterplättchen Integrated circuit and method of fabricating an integrated circuit on a semiconductor chip
07/13/2006DE102004053557B4 Verfahren und Vorrichtungen zum Drucken leitfähiger Dickfilme über Dickfilmdielektrika Methods and apparatus for printing conductive thick films on Dickfilmdielektrika
07/13/2006DE102004044958B4 Struktur zum Unterdrücken von Kerbwirkung in einer Ecke Structure for suppressing stress concentration at a corner
07/13/2006DE102004029212B4 Vorrichtung und Verfahren zur optischen Auf- und/oder Durchlichtinspektion von Mikrostrukturen im IR Apparatus and method for optical-up and / or transmitted light inspection of microstructures in the IR
07/13/2006DE102004023405B4 Dicing ultra-thin wafer in to multiple integrated circuits, by fixing carrier wafer to front of product wafer, forming separating trenches between integrated circuits
07/13/2006DE102004020187B4 Umverdrahtungssubstratstreifen mit mehreren Halbleiterbauteilpositionen Rewiring substrate having a plurality of semiconductor component positions
07/13/2006DE102004017690B4 Vorrichtung und Verfahren zur Aufnahme eines Gesamtbildes einer Oberfläche eines Halbleitersubstrats Device and method for recording an overall image of a surface of a semiconductor substrate
07/13/2006DE10142580B4 Verfahren zur Herstellung einer Grabenstrukturkondensatoreinrichtung A method of manufacturing a capacitor device structure grave
07/13/2006DE10132385B4 Elektronisches Bauteil, einen Nutzen und einen Systemträger für ein derartiges Bauteil mit auf ihren Unterseiten verteilten Außenkontakten, sowie Verfahren zur Herstellung derselben Electronic component, a benefit and a carrier system for such a component with distributed on their undersides external contacts, and processes for preparing the same
07/13/2006DE10129958B4 Speicherzellenanordnung und Herstellungsverfahren Memory cell array and manufacturing method
07/13/2006DE10059637B4 Gerät und Verfahren zur Substratbearbeitung Apparatus and method for substrate processing
07/13/2006DE10055712B4 Verfahren zur Herstellung von Grabenkondensatoren für hochintegrierte Halbleiterspeicher Process for the preparation of grave capacitors for highly integrated semiconductor memory
07/13/2006DE10050047B4 Trockenreinigungsverfahren statt der herkömmlichen Nassreinigung nach der Ätzung von Metallen Dry cleaning process instead of the conventional wet cleaning after etching of metals
07/12/2006EP1679743A2 Semiconductor integrated circuit and fabrication process thereof
07/12/2006EP1679742A2 Semiconductor device and method of manufacturing the same
07/12/2006EP1679741A1 Method of quartz etching
07/12/2006EP1679740A1 Gallium nitride semiconductor substrate and process for producing the same
07/12/2006EP1679739A1 Sheet-peeling device and method
07/12/2006EP1679737A1 Exposure apparatus and device producing method
07/12/2006EP1679719A1 Magnetoresistive element, magnetic memory cell, and magnetic memory device
07/12/2006EP1679548A1 Apparatus and method for measuring etch depth of a substrate
07/12/2006EP1679541A1 Specimen observation method and microscope, and, for use therein, solid immersion lens and optical contact liquid
07/12/2006EP1679537A1 Apparatus for compensating transients heat loads in a lithography mirror
07/12/2006EP1679361A1 Cleaning agent for substrate and cleaning method
07/12/2006EP1679276A1 Adhesive tape peeling device
07/12/2006EP1679184A1 Laminate and method for formation thereof, insulating film, semiconductor device, and composition for forming film
07/12/2006EP1678991A1 A method of producing a conductive layer on a substrate
07/12/2006EP1678989A1 Method of conformal coating using noncontact dispensing
07/12/2006EP1678795A1 Method for manufacturing gratings in semiconductor materials that readily oxidise
07/12/2006EP1678767A1 Method for producing a vertical field effect transistor
07/12/2006EP1678763A2 Single mask via method and device
07/12/2006EP1678761A1 Electrical connection of components
07/12/2006EP1678760A2 Semiconductor device package utilizing proud interconnect material
07/12/2006EP1678757A1 Method for providing double-sided cooling of leadframe-based wire-bonded electronic packages and device produced thereby
07/12/2006EP1678755A1 Method for the catastrophic transfer of a thin layer after co-implantation
07/12/2006EP1678754A1 Method for self- supported transfer of a fine layer by pulsation after implantation or co-implantation
07/12/2006EP1678753A2 High performance strained cmos devices
07/12/2006EP1678752A1 Method of making a mems electrostatic chuck
07/12/2006EP1678751A1 Gripping method and device for removing balls from a bulk container
07/12/2006EP1678750A1 Semiconductor device and method of manufacturing such a semiconductor device
07/12/2006EP1678749A1 Oxide-nitride stack gate dielectric and formation process
07/12/2006EP1678748A1 Masking structure including an amorphous carbon layer
07/12/2006EP1678747A1 A processing liquid coating apparatus and a processing liquid coating method
07/12/2006EP1678746A2 Method for forming a dielectric on a metallic layer and capacitor assembly
07/12/2006EP1678744A1 Positioning device and method for transferring electronic components
07/12/2006EP1678743A2 Thin buried oxides by low-dose oxygen implantation into modified silicon
07/12/2006EP1678722A1 Programming method based on the behavior of non-volatile memory cells
07/12/2006EP1678551A2 Electro-optic displays
07/12/2006EP1678495A2 Nanoscale transduction systems for detecting molecular interactions
07/12/2006EP1678352A2 Method and apparatus for fluid processing a workpiece
07/12/2006EP1678269A1 Chemical-mechanical polishing (cmp) slurry and method of planarizing surfaces
07/12/2006EP1678075A1 Etch masks based on template-assembled nanoclusters
07/12/2006EP1536920B1 Polishing pad
07/12/2006EP1390972B1 Method of fabicating low-dielectric constant interlevel dielectric films for beol interconnects with enhanced adhesion and low-defect density
07/12/2006EP1374033B1 Improved high speed data capture circuit for a digital device
07/12/2006EP1345848B1 Composition comprising an oxidizing and complexing compound
07/12/2006EP1319254B1 Method for producing a semiconductor-metal contact through a dielectric layer
07/12/2006EP1290730B1 Method for producing input/output permutation of several conductive strips with parallel branches of an integrated circuit and resulting circuit
07/12/2006EP1177572B1 Device for treating wafers
07/12/2006EP1131168B1 Methods of forming metal contact pads on a metal support substrate
07/12/2006EP1052692B1 Container for dust free articles (FOUP)
07/12/2006EP0979529B1 DESIGN AND FABRICATION OF ELECTRONIC DEVICES WITH InAlAsSb/AlSb BARRIER

07/12/2006EP0978141B1 Method of making nmos and pmos devices with reduced masking steps
07/12/2006EP0828292B1 Manufacture of a semiconductor device
07/12/2006CN2796103Y Structure having semiconductor on insulation layer with concaved resistance buried insulation layer
07/12/2006CN2796102Y Metal/ insulator/ metal capacitor structure semiconductor device
07/12/2006CN2796099Y Shadow groove isolation structure
07/12/2006CN2796098Y Six plase rotary power supply device
07/12/2006CN2796097Y Wafer locating device
07/12/2006CN2796096Y Six phase power device for wafer static adsorption
07/12/2006CN2796095Y 防污染离子分析器 Pollution ion analyzer
07/12/2006CN2796094Y False distributing system for control liquid
07/12/2006CN2796093Y Semiconductor module producing system
07/12/2006CN2796083Y Scanning generator
07/12/2006CN2796082Y Faraday device for detecting bundle
07/12/2006CN2795916Y Photoelectric code motor controller
07/12/2006CN2795158Y Port structure in semiconductor processing device
07/12/2006CN2794658Y Gas distrubutor having directed gas flow
07/12/2006CN1802758A Parameterised semiconductor structure comprising integrated doping channels, method for producing said structure and use thereof
07/12/2006CN1802755A LED fabrication via ion implant isolation
07/12/2006CN1802752A 半导体元件 Semiconductor device
07/12/2006CN1802751A Electroric device, integrated circuit, and method of manufacturing the same
07/12/2006CN1802749A Frequency conversion circuit for direct conversion receiving, semiconductor integrated circuit therefor, and direct conversion receiver
07/12/2006CN1802746A Package for a high-frequency electronic device
07/12/2006CN1802744A Electric interconnect structure of integrate circuit and manufacture methods thereof
07/12/2006CN1802739A A method of preparation of an epitaxial substrate
07/12/2006CN1802738A Method of manufacturing multi-level contacts by sizing of contact sizes in integrated circuits
07/12/2006CN1802737A Method for obtaining a structure having a supporting substrate and an ultra-thin layer
07/12/2006CN1802736A Thin sheet-like article displacement detection method and displacement correction method
07/12/2006CN1802735A Collet, chip bonder and chip pick-up method
07/12/2006CN1802734A Shaped nanocrystal particles and methods for working the same
07/12/2006CN1802733A Method and apparatus for planarization of a material by growing a sacrificial film with customized thickness profile
07/12/2006CN1802732A Method and system for etching a high-k dielectric material
07/12/2006CN1802731A Removal of post-etch residues in semiconductor processing
07/12/2006CN1802730A Method for plasma etching using periodic modulation of gas chemistry
07/12/2006CN1802729A Method, apparatus and magnet assembly for enhancing and localizing a capacitively coupled plasma
07/12/2006CN1802728A N-type ohmic electrode for n-type group iii nitride semiconductor, semiconductor light-emitting device with the electrode, and method for forming n-type ohmic electrode
07/12/2006CN1802727A Methods and apparatus for patterned deposition of nanostructure-containing materials by self-assembly and related articles
07/12/2006CN1802726A Exposure apparatus, and device manufacturing method