Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2006
07/11/2006US7074664 Dual metal gate electrode semiconductor fabrication process and structure thereof
07/11/2006US7074663 Method of making semiconductor device including a first set of windows in a mask with larger ratio of surface area than a second set of windows
07/11/2006US7074662 Methods for fabricating fin field effect transistors using a protective layer to reduce etching damage
07/11/2006US7074661 Method for fabricating semiconductor device with use of partial gate recessing process
07/11/2006US7074660 FinFet device and method of fabrication
07/11/2006US7074659 Method of fabricating a lateral double-diffused MOSFET (LDMOS) transistor
07/11/2006US7074658 Structure for an LDMOS transistor and fabrication method for thereof
07/11/2006US7074657 Low-power multiple-channel fully depleted quantum well CMOSFETs
07/11/2006US7074656 Doping of semiconductor fin devices
07/11/2006US7074655 Gate material for semiconductor device fabrication
07/11/2006US7074654 Tape supported memory card leadframe structure
07/11/2006US7074653 Heatsink apparatus and thermally-conductive intermediate material for dissipating heat in semiconductor packages
07/11/2006US7074652 Method for separating sapphire wafer into chips
07/11/2006US7074651 Packaging method for integrated circuits
07/11/2006US7074650 Flip-chip type semiconductor device and method of manufacturing the same
07/11/2006US7074649 Method for producing an integrated circuit with a rewiring device and corresponding integrated circuit
07/11/2006US7074648 Method for packaging flip-chip semiconductor assemblies
07/11/2006US7074647 Semiconductor component comprising leadframe, semiconductor chip and integrated passive component in vertical relationship to each other
07/11/2006US7074646 In-line die attaching and curing apparatus for a multi-chip package
07/11/2006US7074645 Fabrication method of semiconductor package with heat sink
07/11/2006US7074644 Method of manufacturing thin film element, thin film transistor circuit substrate, active matrix display device, electro-optical device, and electronic apparatus
07/11/2006US7074643 Silicon carbide power devices with self-aligned source and well regions and methods of fabricating same
07/11/2006US7074641 Method of forming silicon-based thin film, silicon-based thin film, and photovoltaic element
07/11/2006US7074640 Method of making barrier layers
07/11/2006US7074639 Fabrication of a high-precision blooming control structure for an image sensor
07/11/2006US7074638 Solid-state imaging device and method of manufacturing said solid-state imaging device
07/11/2006US7074637 Forming channel in encapsulating layer; supplying antistriction fluid; sealing, plugging closures; prevention vibration, deflection
07/11/2006US7074636 Methods and apparatus for attaching getters to MEMS device housings
07/11/2006US7074635 MEMS structure and method for fabricating the same
07/11/2006US7074634 Surface micromachining process for manufacturing electro-acoustic transducers, particularly ultrasonic transducers, obtained transducers and intermediate products
07/11/2006US7074633 Nitride semiconductor laser diode and method for manufacturing the same
07/11/2006US7074632 Miniature optical element for wireless bonding in an electronic instrument
07/11/2006US7074631 Light emitting device methods
07/11/2006US7074630 Method of forming light emitter layer
07/11/2006US7074628 Test structure and method for yield improvement of double poly bipolar device
07/11/2006US7074627 Lead solder indicator and method
07/11/2006US7074626 Method and apparatus for providing intra-tool monitoring and control
07/11/2006US7074625 Semiconductor device and method of manufacturing the same
07/11/2006US7074624 Ferroelectric film, method of manufacturing ferroelectric film, ferroelectric capacitor, method of manufacturing ferroelectric capacitor, and ferroelectric memory
07/11/2006US7074623 Methods of forming strained-semiconductor-on-insulator finFET device structures
07/11/2006US7074548 Using raw material fluid containing alcohol, supercritical fluid or liquid, and a condensation polymer containing an element of a target metal oxide compound, which may be prepared from a metal oxide.
07/11/2006US7074547 Photomask and method of fabricating semiconductor device by use of same
07/11/2006US7074543 Positive resist composition and method of forming resist pattern from the same
07/11/2006US7074530 Continuous gray levels, the change in light intensity between each gray level is both finite and linear, produces a smoother and more linear profile on the object being made, meets the sub-resolution requirements of most optical tools
07/11/2006US7074526 Prevention damage; isolation patterns of light blocking and light transmission zones; photolithography
07/11/2006US7074525 Projecting light through a photomask using an optical projection system, sub-resolution features in clear areas adjacent to lines and spaces reduce transparency of the clear areas reduce light scattering and flare, greater degree of defocus in the pattern, less resist stripping
07/11/2006US7074524 Photomask, method for detecting pattern defect of the same, and method for making pattern using the same
07/11/2006US7074507 Structures including perovskite dielectric layers and variable oxygen concentration gradient layers
07/11/2006US7074498 Influence of surface geometry on metal properties
07/11/2006US7074489 Organofluorosilicate glass films containing both organic species and inorganic fluorines, exclusive of significant amounts of fluorocarbon species; insulating layers for integrated circuits and associated electronic devices
07/11/2006US7074481 Adhesive for joining surface of semiconductor
07/11/2006US7074480 Porous body and method of manufacturing the same
07/11/2006US7074461 plasma enhanced chemical vapor deposition of bis-trimethylsilylmethane and an oxygen retaining gas, such as oxygen, ozone, nitrous oxide, or hydrogen peroxide, in the presence of hydrogen; carbon loss in the SiOC film during post processing is minimized due to the supplied hydrogen
07/11/2006US7074377 Production of tetrafluorosilane
07/11/2006US7074317 Method for fabricating trench capacitors for large scale integrated semiconductor memories
07/11/2006US7074298 High density plasma CVD chamber
07/11/2006US7074278 Removable lid and floating pivot
07/11/2006US7074270 Method for predicting the behavior of dopant and defect components
07/11/2006US7074246 Modular semiconductor workpiece processing tool
07/11/2006US7074113 Methods and apparatus for removing conductive material from a microelectronic substrate
07/11/2006US7074000 Method and apparatus for undocking substrate pod with door status check
07/11/2006US7073999 Receiving container body for object to be processed
07/11/2006US7073924 Projection exposure apparatus with line width calculator controlled diaphragm unit
07/11/2006US7073702 Self-locking wire bond structure and method of making the same
07/11/2006US7073667 Photochromic substrate container
07/11/2006US7073644 Anti-vibration system for use in exposure apparatus
07/11/2006US7073542 Liquid quantity determination unit, photolithography apparatus, and liquid quantity determination method
07/11/2006US7073522 Apparatus for applying disparate etching solutions to interior and exterior surfaces
07/11/2006US7073521 Substrate processing apparatus comprising ring-shaped motor
07/11/2006US7073387 Pressure sensors having neutral plane positioned transducers
07/11/2006US7073383 Apparatus and method for determining clamping status of semiconductor wafer
07/11/2006US7073254 Method for mounting a plurality of spring contact elements
07/11/2006CA2404137C Flexural plate wave sensor and array
07/11/2006CA2229476C Fluid control apparatus
07/06/2006WO2006072087A1 Wire bonds having pressure-absorbing balls
07/06/2006WO2006072022A2 Electronic device including a guest material within a layer and a process for forming the same
07/06/2006WO2006071924A2 Hydrodynamic cavitation crystallization device and process
07/06/2006WO2006071724A2 Mtj elements with high spin polarization layers configured for spin-transfer switching and spintronics devices using the magnetic elements
07/06/2006WO2006071671A2 System for and method of forming via holes by multiple deposition events in a continuous inline shadow mask deposition process
07/06/2006WO2006071617A2 Semiconductor structures utilizing thin film resistors and tungsten plug connectors and methods for making the same
07/06/2006WO2006071552A2 Cleaning methods for silicon electrode assembly surface contamination removal
07/06/2006WO2006071535A2 Silicon electrode assembly surface decontamination by acidic solution
07/06/2006WO2006071475A2 Wafer planarization composition and method of use
07/06/2006WO2006071406A2 Method for sequencing substrates
07/06/2006WO2006071398A1 Method and apparatus to facilitate electrostatic discharge resiliency
07/06/2006WO2006071371A2 Radio frequency circuit with integrated on-chip radio frequency signal coupler
07/06/2006WO2006071341A2 Method and apparatus to determine consumable part condition
07/06/2006WO2006071327A1 The encapsulation and packaging of ultraviolet and deep-ultraviolet light emitting diodes
07/06/2006WO2006071115A1 Lock enabling materials to be fed from and to a closed space in which a defined gas atmosphere is present, and a method for moving materials to a closed space with the aid of the lock
07/06/2006WO2006071114A1 Vertical furnace for processing materials consisting of semiconductors at high temperature
07/06/2006WO2006070959A1 Fluid supply system used in an apparatus for manufacturing integrated circuits
07/06/2006WO2006070825A1 Method for cutting brittle material substrate and substrate cutting system
07/06/2006WO2006070808A1 Semiconductor chip and method for manufacturing same, electrode structure of semiconductor chip and method for forming same, and semiconductor device
07/06/2006WO2006070803A1 Magnetic random access memory and method for manufacturing same
07/06/2006WO2006070800A1 Precursor film and method of forming the same
07/06/2006WO2006070773A1 Switching element, rewritable logical integrated circuit, and memory element
07/06/2006WO2006070748A1 Maintenance method, exposure device, and maintenance member
07/06/2006WO2006070745A1 Method for forming light absorbing layer in cis-based thin film solar battery
07/06/2006WO2006070709A1 Cleaning liquid for lithography and method of cleaning therewith
07/06/2006WO2006070698A1 Switching device, driving method and manufacturing method of switching device, integrated circuit device, and memory device