H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2006
10/18/2006	CN1849699A Semiconductor substrate cutting method
10/18/2006	CN1849698A Techniques for patterning features in semiconductor devices
10/18/2006	CN1849697A Substrate support having dynamic temperature control
10/18/2006	CN1849687A Well formation
10/18/2006	CN1849599A Method and system of diagnosing a processing system using adaptive multivariate analysis
10/18/2006	CN1849588A A system and method for testing and configuring semiconductor functional circuits
10/18/2006	CN1849561A Adaptive thermal control of lithographic chemical processes
10/18/2006	CN1849559A Positive photoresist composition and resist pattern formation
10/18/2006	CN1849386A Cleaning composition, method of cleaning semiconductor substrate, and method of forming wiring on semiconductor substrate
10/18/2006	CN1849379A Abrasive partilcle for chemical mechanical polishing
10/18/2006	CN1849378A Chemical-mechanical polishing composition and method for using the same
10/18/2006	CN1849264A Cerium salt, process for producing the same, cerium oxide, and cerium-based abrasive material
10/18/2006	CN1849260A Metal nanoparticle and method for producing same, liquid dispersion of metal nanoparticle and method for producing same, metal thin line, metal film and method for producing same
10/18/2006	CN1849251A Access to one or more levels of material storage shelves by an overhead hoist transport vehicle from a single track position
10/18/2006	CN1849198A Polished state monitoring apparatus and polishing apparatus using the same
10/18/2006	CN1849183A Acoustic diffusers for acoustic field uniformity
10/18/2006	CN1849180A Deposition and patterning process
10/18/2006	CN1849100A Device for cutting or heating medical implants
10/18/2006	CN1849034A Plasma processing apparatus, slot antenna and plasma processing method
10/18/2006	CN1849033A Signal transmitting device for electrostatic cartridge
10/18/2006	CN1848627A Linear actuator comprising velocity sensor
10/18/2006	CN1848469A Compact light emitting device package with enhanced heat dissipation and method for making the package
10/18/2006	CN1848458A 半导体存储器 Semiconductor memory
10/18/2006	CN1848456A Semiconductor device, electronic apparatus, method of manufacturing semiconductor device, and method of manufacturing electronic apparatus
10/18/2006	CN1848455A Semiconductor device and method of manufacturing the same
10/18/2006	CN1848454A Structure and method for manufacturing strained finfet
10/18/2006	CN1848453A Semiconductor device and method of manufacturing same
10/18/2006	CN1848452A Gallium nitride based semiconductor device and method of manufacturing same
10/18/2006	CN1848451A Electro-optical device and an electronic apparatus
10/18/2006	CN1848450A Electro-optical device and an electronic apparatus
10/18/2006	CN1848449A Electro-optical device and an electronic apparatus
10/18/2006	CN1848447A Display device and a method of manufacturing the display device
10/18/2006	CN1848443A Image sensor and method of fabricating the same
10/18/2006	CN1848442A Image sensing components packaging method
10/18/2006	CN1848437A 半导体装置及其制造方法 Semiconductor device and manufacturing method thereof
10/18/2006	CN1848431A Semiconductor device and method of manufacturing same
10/18/2006	CN1848430A System chip capable of integrating micro-antenna
10/18/2006	CN1848427A Electronic apparatus and method for manufacturing the same
10/18/2006	CN1848422A Lead wire frame, semiconductor device and method of manufacture, and injection mold
10/18/2006	CN1848419A Structure for mounting semiconductor and method of manufacturing mounting substrate used therein
10/18/2006	CN1848418A Optical device cavity structure, optical device, and method for manufacturing an optical device cavity structure
10/18/2006	CN1848417A Top via pattern for bond pad structure and making method thereof
10/18/2006	CN1848413A Strain silicon wafer with a crystal orientation (100) in flip chip bga package
10/18/2006	CN1848412A Substrate structure for image sensing chip package and producing method thereof
10/18/2006	CN1848411A Method for fabricating an electrical component
10/18/2006	CN1848410A Semiconductor devices having a bottle-shaped deep trench capacitor and methods for making the same using EPI-SI growth process
10/18/2006	CN1848409A Ferroelectric memory device and method of manufacture of same
10/18/2006	CN1848408A Semiconductor device and method of manufacturing the same
10/18/2006	CN1848407A Semiconductor device and manufacture method of the same
10/18/2006	CN1848406A Taiwan semiconductor mfg
10/18/2006	CN1848405A Wafer lifting device and lifting method
10/18/2006	CN1848404A Electrostatic chuck
10/18/2006	CN1848403A System for fast controlling electrostatic chuck temperature
10/18/2006	CN1848402A Electrostatic chuck mounting and dismounting tool
10/18/2006	CN1848401A Method for placing silicon chip center on electrostatic chuck center
10/18/2006	CN1848400A Mechanical structure of apparatus for holding chip with multi-clamping finger
10/18/2006	CN1848399A Silicon chip transmitting system with CCD sensor and transmitting method thereof
10/18/2006	CN1848398A Silicon chip transmitting system with visual sensor and transmitting method thereof
10/18/2006	CN1848397A Wafer for evaluation, evaluation method and method of manufacturing semiconductor device
10/18/2006	CN1848396A Measuring low dielectric constant film properties during processing
10/18/2006	CN1848395A Method for monitoring abnormality of technology process in semiconductor equipment
10/18/2006	CN1848394A Preset conductive thin film structure and forming method thereof
10/18/2006	CN1848393A Method for producing integrated circuit board
10/18/2006	CN1848392A Semiconductor device and method of manufacture
10/18/2006	CN1848391A Thin film transistor and method of manufacturing same, flat panel display device and method of manufacturing same
10/18/2006	CN1848390A Method for producing poly crystalline silicon grid transistor capable of reducing poly crystalline silicon depletion effect
10/18/2006	CN1848389A Etching technology for reducing plasma damage
10/18/2006	CN1848388A Method for controlling key size deviation in chip etching technology
10/18/2006	CN1848387A Etching technology for preventing device plasma from damaging in poly crystalline silicon etching
10/18/2006	CN1848386A Grate etching method
10/18/2006	CN1848385A Inductive coupling plasma device
10/18/2006	CN1848384A Silicon gate etching method
10/18/2006	CN1848383A Method for removing residual polymer in polysilicon etching technology
10/18/2006	CN1848382A Treatment of semiconductor wafers
10/18/2006	CN1848381A Method for forming low-stress multi-layer metallized structure and leadless solder end electrode
10/18/2006	CN1848380A Device and method for chemical vapour deposition (CVD)
10/18/2006	CN1848379A Silicon layer with high-resistance and producing method thereof
10/18/2006	CN1848378A Method for producing chip fuse and products thereof
10/18/2006	CN1848377A Gate valve apparatus and processing system
10/18/2006	CN1848376A Semiconductor processing system reaction chamber
10/18/2006	CN1848375A Method for releasing chip static electricity thoroughly in chip etching equipment
10/18/2006	CN1848374A Method for controlling formula in silicon chip etching technology
10/18/2006	CN1848373A Fault detection method in chip etching technology
10/18/2006	CN1848372A Plasma reaction device
10/18/2006	CN1848371A Plasma etching apparatus
10/18/2006	CN1848370A Fault detecting method for semiconductor etching equipment
10/18/2006	CN1848369A Silicon chip unloading technology capable of raising production volume and reducing silicon chip surface roughness
10/18/2006	CN1848368A Plasma etching device capable of raising etching uniformity
10/18/2006	CN1848367A Plasma reaction chamber
10/18/2006	CN1848366A Gas temperature controllable plasma etching device
10/18/2006	CN1848365A Method of manufacturing polysilicon thin film and method of manufacturing thin film transistor having the same
10/18/2006	CN1848364A Method for reducing idle time of machine and producing system using the same method
10/18/2006	CN1848313A Inductive coupling coil
10/18/2006	CN1848015A Gas calibration method for semiconductor equipment
10/18/2006	CN1848014A Chip taking conveying method for chip etching equipment
10/18/2006	CN1848008A Method of controlling semiconductor etching equipment
10/18/2006	CN1848006A Quality control system, quality control method, and method of lot-to-lot wafer processing
10/18/2006	CN1848005A Gas path controlling method for chip etching equipment
10/18/2006	CN1847987A Lithographic apparatus and device manufacturing method
10/18/2006	CN1847986A Thin film transistor, integrated circuit, liquid crystal display, method of producing thin film transistor, and method of exposure using attenuated type mask

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