Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2006
12/06/2006CN1288741C Shallow channel isolation method with single mask
12/06/2006CN1288740C Integrated manufacturing process for stacked aluminum metal capacitor and inductor
12/06/2006CN1288739C Light shield detecting method for mask ROM
12/06/2006CN1288738C Apparatus for compensatnig deviation of test temperature is semiconductor device processing machine
12/06/2006CN1288737C Detection device, testing device of semiconductor device and testing method
12/06/2006CN1288736C Method for manufacturing semiconductor device
12/06/2006CN1288735C Semiconductor device test system
12/06/2006CN1288734C Measurement, check, manufacturing method and check device for semiconductor device
12/06/2006CN1288733C Method and apparatus for connecting conductor
12/06/2006CN1288732C Connecting gasket and its manufacturing method
12/06/2006CN1288731C Semiconductor device, adhesive and adhesive film
12/06/2006CN1288730C Method for packaging image sensor
12/06/2006CN1288729C Semiconductor packaging member and method for making same
12/06/2006CN1288728C Packaging method of wafer
12/06/2006CN1288727C Forming of embedded seal cavity in low-temp. co-sintered ceramic
12/06/2006CN1288726C Method of producing Schottky varicap
12/06/2006CN1288725C Plasma machining apparatus
12/06/2006CN1288724C Method for forming a cavity structure on SOI substrate
12/06/2006CN1288723C Pattern forming method
12/06/2006CN1288722C Chemical and mechanical polishing size and chemical and mechanical polishing method using said size
12/06/2006CN1288721C Method for changing inclination angle of hydride gas phase transverse epitaxy GaN film
12/06/2006CN1288720C Film forming method and device manufactured by the method and manufacturing method of device
12/06/2006CN1288719C Microprocess for pattern photoresist
12/06/2006CN1288718C Substrate processor
12/06/2006CN1288717C Semiconductor substrate and producing method, semiconductor device and producing method thereof
12/06/2006CN1288716C Method for preparing semiconductor quantum-point material by low-temperature solvent method
12/06/2006CN1288715C Silicon film crystallization method, thin film transistor using said method and its plate display
12/06/2006CN1288714C Universal modular wafer transport system
12/06/2006CN1288713C Heating system and method of reactor for heating atmosphere
12/06/2006CN1288712C Method for creating ultra-clean mini-environment through localized air flow augentation
12/06/2006CN1288711C Diffuser and rapid cycle chamber
12/06/2006CN1288710C Semiconductor device and its manufacture
12/06/2006CN1288709C Power distribution printed circuit board for semiconductor processing system
12/06/2006CN1288704C Method of injecting crystal using plasma
12/06/2006CN1288664C Semiconductor storage device using magnetic-resistance effect
12/06/2006CN1288508C Inspecting method of functions of projection optical system of exposure device and photomask for inspection
12/06/2006CN1288507C Energy beam exposure method and device
12/06/2006CN1288506C Method for manufacturing photoetching equipment and device
12/06/2006CN1288505C System and method for improving line width control in photoetching apparatus
12/06/2006CN1288504C Method for producing photoetching device and equipment
12/06/2006CN1288503C Method and apparatus for patterning a workpiece
12/06/2006CN1288501C Photoresist composition having a high heat resistance
12/06/2006CN1288500C Resist material and microfabrication method
12/06/2006CN1288496C Method for making sub-wavelength structure
12/06/2006CN1288489C Film transistor, TFT substrate and LCD
12/06/2006CN1288487C Inner switch-over mode liquid crystal display and its producing method
12/06/2006CN1288477C Array substrate for liquid crystal display device and producing method thereof
12/06/2006CN1288450C Method of manufacturing a probe card
12/06/2006CN1288277C Decision system during dry cleaning for semiconductor manufacture equipment
12/06/2006CN1288219C Adhesive composition, adhesive composition for circuit connection, connected circuit structure, and semiconductor devices
12/06/2006CN1288108C Anti-plasma member,its producing method and method for forming heat spraying coating
12/06/2006CN1288093C Elimination method of eliminated article
12/06/2006CN1288052C Moving loading device for plate shape substrates and its storing device
12/06/2006CN1288050C Base board transport device
12/06/2006CN1287977C Coupling structure for component and coupling method
12/06/2006CN1287945C A laser machining system and method
12/05/2006USRE39418 Mounting apparatus for ball grid array device
12/05/2006US7146599 Method for using asymmetric OPC structures on line ends of semiconductor pattern layers
12/05/2006US7146597 CAD method for arranging via-holes, a CAD tool, photomasks produced by the CAD method, a semiconductor integrated circuit manufactured with photomasks and a computer program product for executing the CAD method
12/05/2006US7146593 Method of implementing polishing uniformity and modifying layout data
12/05/2006US7146592 Integrated logic circuit and hierarchical design method thereof
12/05/2006US7146550 Isolation testing circuit and testing circuit optimization method
12/05/2006US7146549 Scan-path flip-flop circuit for integrated circuit memory
12/05/2006US7146547 Semiconductor device
12/05/2006US7146546 Semiconductor device
12/05/2006US7146035 Pattern image comparison method, pattern image comparison device, and program
12/05/2006US7145925 Laser oscillation apparatus, exposure apparatus, semiconductor device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method
12/05/2006US7145813 Semiconductor device with circuit for detecting abnormal waveform of signal and preventing the signal from being transmitted
12/05/2006US7145808 Nonvolatile semiconductor memory apparatus and method of producing the same
12/05/2006US7145807 Method for operating an electrical writable and erasable memory cell and a memory device for electrical memories
12/05/2006US7145797 Selecting a magnetic memory cell write current
12/05/2006US7145796 Semiconductor integrated circuit device
12/05/2006US7145795 Multi-cell resistive memory array architecture with select transistor
12/05/2006US7145793 Electrically addressable memory switch
12/05/2006US7145792 Semiconductor integrated circuit device
12/05/2006US7145791 Memory device having variable resistive memory element
12/05/2006US7145720 Objective with fluoride crystal lenses
12/05/2006US7145667 Semiconductor device manufacturing method, semiconductor device manufacturing apparatus, semiconductor device manufacturing system, and cleaning method for semiconductor device manufacturing apparatus
12/05/2006US7145666 Position detecting method and apparatus
12/05/2006US7145658 Apparatus and method for evaluating semiconductor material
12/05/2006US7145644 Device and method for testing an exposure apparatus
12/05/2006US7145643 Interface unit, lithographic projection apparatus comprising such an interface unit and a device manufacturing method
12/05/2006US7145642 Wafer support device and a wafer support method
12/05/2006US7145640 Lithographic apparatus, device manufacturing method and variable attenuator
12/05/2006US7145639 Projecting exposure method
12/05/2006US7145638 Alignment apparatus, exposure apparatus, and device manufacturing method
12/05/2006US7145635 Exposure method and apparatus
12/05/2006US7145632 Cooling apparatus
12/05/2006US7145629 Exposure technique
12/05/2006US7145623 Flat panel display having concentrated switching element arrangement and method of manufacturing the same
12/05/2006US7145416 Resonator device, electronic equipment provided with resonator device and method of manufacturing resonator device
12/05/2006US7145412 Electronic and optical devices and methods of forming these devices
12/05/2006US7145407 Radio frequency voltage controlled oscillator
12/05/2006US7145383 Voltage supply with low power and leakage current
12/05/2006US7145365 Logic processing apparatus, semiconductor device and logic circuit
12/05/2006US7145356 Circuits for transistor testing
12/05/2006US7145286 Wedge shaped uniform energy megasonic transducer
12/05/2006US7145270 Driving unit, exposure apparatus using the same, and device fabrication method
12/05/2006US7145269 Lithographic apparatus, Lorentz actuator, and device manufacturing method
12/05/2006US7145254 Transfer-molded power device and method for manufacturing transfer-molded power device