Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2008
05/20/2008US7376928 Basic cell, edge cell, wiring shape, wiring method, and shield wiring structure
05/20/2008US7376923 Semiconductor integrated circuit, method of manufacturing semiconductor integrated circuit, charge pump circuit, layout designing apparatus, and layout designing program
05/20/2008US7376801 Power saving data storage circuit, data writing method in the same, and data storage device
05/20/2008US7376543 Simulation method and system for design of aperture in exposure apparatus and recording medium in which the simulation method is recorded
05/20/2008US7376490 Operational control device, operational control method, program and storage medium thereof, for a plurality of power consumption systems
05/20/2008US7376486 Board positioning device and board positioning method
05/20/2008US7376479 Process monitoring device for sample processing apparatus and control method of sample processing apparatus
05/20/2008US7376318 Circuit board and its manufacturing method
05/20/2008US7376305 Echelle gratings with low Polarization Dependent Loss (PDL) using metal coating on the reflecting facets only
05/20/2008US7376010 Nonvolatile semiconductor memory device having protection function for each memory block
05/20/2008US7376005 Thin film magnetic memory device including memory cells having a magnetic tunnel junction
05/20/2008US7376004 Increased magnetic memory array sizes and operating margins
05/20/2008US7376003 Magnetic random access memory
05/20/2008US7376002 Semiconductor memory device
05/20/2008US7375947 Method of feedback control of ESC voltage using wafer voltage measurement at the bias supply output
05/20/2008US7375874 Light modulator with integrated drive and control circuitry
05/20/2008US7375831 Line width measuring method, substrate processing method, substrate processing apparatus and substrate cooling processing unit
05/20/2008US7375829 Method for inspecting an insulator with a library of optic images
05/20/2008US7375810 Overlay error detection
05/20/2008US7375798 Projection system for EUV lithography
05/20/2008US7375796 Lithographic apparatus and device manufacturing method
05/20/2008US7375787 Liquid crystal display devices
05/20/2008US7375782 Method of manufacturing a semiconductor device
05/20/2008US7375774 Method of manufacturing semiconductor device
05/20/2008US7375773 Active matrix substrate and display device
05/20/2008US7375715 Active matrix type display device
05/20/2008US7375603 Integrated coupler
05/20/2008US7375574 Semiconductor device
05/20/2008US7375545 Semiconductor device with bus terminating function
05/20/2008US7375540 Process monitor for monitoring and compensating circuit performance
05/20/2008US7375538 Method of inspecting pattern and inspecting instrument
05/20/2008US7375537 Method and apparatus for measuring relative dielectric constant
05/20/2008US7375505 Method and apparatus for testing function of active microstructural elements and method for producing microstructural elements using the test method
05/20/2008US7375479 Apparatus for processing an object with high position accurancy
05/20/2008US7375435 Chip package structure
05/20/2008US7375430 Semiconductor device and method of manufacture thereof
05/20/2008US7375429 Integrated circuit component and mounting method thereof
05/20/2008US7375425 Fabricating stacked chips using fluidic templated-assembly
05/20/2008US7375421 High density multilayer circuit module
05/20/2008US7375419 Stacked mass storage flash memory package
05/20/2008US7375411 Method and structure for forming relatively dense conductive layers
05/20/2008US7375410 Ultra-thin SOI vertical bipolar transistors with an inversion collector on thin-buried oxide (BOX) for low substrate-bias operation and methods thereof
05/20/2008US7375409 Semiconductor device including transistors having different drain breakdown voltages on a single substrate
05/20/2008US7375403 Semiconductor device and method of manufacturing the same
05/20/2008US7375401 Static random access memory using thin film transistors
05/20/2008US7375399 Semiconductor memory device
05/20/2008US7375391 Semiconductor device with split gate electrode structure and method for manufacturing the semiconductor device
05/20/2008US7375390 Semiconductor memory device having high electrical performance and mask and photolithography friendliness
05/20/2008US7375389 Semiconductor device having a capacitor-under-bitline structure and method of manufacturing the same
05/20/2008US7375388 Device having improved surface planarity prior to MRAM bit material deposition
05/20/2008US7375387 Method for producing semiconductor memory devices and integrated memory device
05/20/2008US7375385 Semiconductor heterostructures having reduced dislocation pile-ups
05/20/2008US7375383 Gallium nitride based III-V group compound semiconductor device and method of producing the same
05/20/2008US7375377 Ingan-based light-emitting diode chip and a method for the production thereof
05/20/2008US7375376 Semiconductor display device and method of manufacturing the same
05/20/2008US7375375 Semiconductor device and method for forming the same
05/20/2008US7375373 Thin film transistor array panel
05/20/2008US7375372 Thin film transistor
05/20/2008US7375369 Spin-coatable liquid for formation of high purity nanotube films
05/20/2008US7375356 Electron-beam exposure system
05/20/2008US7375354 Ion implanting method and apparatus
05/20/2008US7375352 Photomask defect correction method employing a combined device of a focused electron beam device and an atomic force microscope
05/20/2008US7375346 Positioning device and method of initializing a positioning device
05/20/2008US7375324 Stylus system for modifying small structures
05/20/2008US7375323 Electron beam apparatus with aberration corrector
05/20/2008US7375066 Semiconductor wafer cleaning agent and cleaning method
05/20/2008US7375041 Transfer chamber for cluster system
05/20/2008US7375040 Etch stop layer
05/20/2008US7375039 Local plasma processing
05/20/2008US7375038 Method for plasma etching a chromium layer through a carbon hard mask suitable for photomask fabrication
05/20/2008US7375037 Fabrication method for semiconductor integrated circuit device
05/20/2008US7375036 Anisotropic etch method
05/20/2008US7375035 Host and ancillary tool interface methodology for distributed processing
05/20/2008US7375034 Recessing trench to target depth using feed forward data
05/20/2008US7375033 Multi-layer interconnect with isolation layer
05/20/2008US7375032 Semiconductor substrate thinning method for manufacturing thinned die
05/20/2008US7375031 Technique for forming interconnect structures with reduced electro and stress migration and/or resistivity
05/20/2008US7375030 Method to assay sacrificial light absorbing materials and spin on glass materials for chemical origin of defectivity
05/20/2008US7375029 Method for fabricating contact holes in a semiconductor body and a semiconductor structure
05/20/2008US7375028 Method for manufacturing a semiconductor device
05/20/2008US7375027 Method of providing contact via to a surface
05/20/2008US7375026 Local multilayered metallization
05/20/2008US7375025 Method for forming a metal silicide layer in a semiconductor device
05/20/2008US7375024 Method for fabricating metal interconnection line with use of barrier metal layer formed in low temperature
05/20/2008US7375023 Method and apparatus for chemical mechanical polishing of semiconductor substrates
05/20/2008US7375022 Method of manufacturing wiring board
05/20/2008US7375021 Method and structure for eliminating aluminum terminal pad material in semiconductor devices
05/20/2008US7375020 Method of forming bumps
05/20/2008US7375019 Image sensor and method for fabricating the same
05/20/2008US7375018 Method of manufacturing semiconductor device
05/20/2008US7375017 Method for fabricating semiconductor device having stacked-gate structure
05/20/2008US7375016 Method for fabricating semiconductor device
05/20/2008US7375015 Manufacturing method which prevents abnormal gate oxidation
05/20/2008US7375014 Methods of electrochemically treating semiconductor substrates
05/20/2008US7375013 Semiconductor integrated circuit device and process for manufacturing the same
05/20/2008US7375012 Method of forming multilayer film
05/20/2008US7375011 Ex-situ doped semiconductor transport layer
05/20/2008US7375010 Laser irradiation device
05/20/2008US7375009 Method of forming a conductive via through a wafer
05/20/2008US7375008 Recycling by mechanical means of a wafer comprising a multilayer structure after taking-off a thin layer thereof