Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2008
07/01/2008US7393758 Wafer level packaging process
07/01/2008US7393757 Method for separating semiconductor wafer from supporting member, and apparatus using the same
07/01/2008US7393756 Method for fabricating a trench isolation structure having a high aspect ratio
07/01/2008US7393755 Dummy fill for integrated circuits
07/01/2008US7393754 Tape carrier type semiconductor device and method of producing the same
07/01/2008US7393753 Method for forming a storage cell capacitor compatible with high dielectric constant materials
07/01/2008US7393752 Semiconductor devices and method of fabrication
07/01/2008US7393751 Semiconductor structure including laminated isolation region
07/01/2008US7393750 Method for manufacturing a semiconductor device
07/01/2008US7393749 Charge balance field effect transistor
07/01/2008US7393748 Method of fabricating a semiconductor memory device
07/01/2008US7393747 Nonvolatile semiconductor memory and a fabrication method thereof
07/01/2008US7393746 Post-silicide spacer removal
07/01/2008US7393745 Method for fabricating self-aligned double layered silicon-metal nanocrystal memory element
07/01/2008US7393744 Method of manufacturing dielectric film of flash memory device
07/01/2008US7393743 Methods of forming a plurality of capacitors
07/01/2008US7393742 Semiconductor device having a capacitor and a fabrication method thereof
07/01/2008US7393741 Methods of forming pluralities of capacitors
07/01/2008US7393740 Methods for making fixed parallel plate MEMS capacitor microsensors and microsensor arrays
07/01/2008US7393739 Demultiplexers using transistors for accessing memory cell arrays
07/01/2008US7393738 Subground rule STI fill for hot structure
07/01/2008US7393737 Semiconductor device and a method of manufacturing the same
07/01/2008US7393736 Atomic layer deposition of Zrx Hfy Sn1-x-y O2 films as high k gate dielectrics
07/01/2008US7393735 Structure for and method of fabricating a high-mobility field-effect transistor
07/01/2008US7393734 Method of fabricating polysilicon film
07/01/2008US7393733 Methods of forming hybrid fin field-effect transistor structures
07/01/2008US7393732 Double silicon-on-insulator (SOI) metal oxide semiconductor field effect transistor (MOSFET) structures
07/01/2008US7393731 Semiconductor device and method of manufacturing the same
07/01/2008US7393730 Coplanar silicon-on-insulator (SOI) regions of different crystal orientations and methods of making the same
07/01/2008US7393729 Method for fabricating semiconductor device
07/01/2008US7393728 Method of manufacturing an array substrate of a transflective liquid crystal display
07/01/2008US7393727 Manufacturing method of thin-film transistor, thin-film transistor sheet, and electric circuit
07/01/2008US7393726 Thin film transistor array panel and methods for manufacturing the same
07/01/2008US7393725 Method of manufacturing thin film device electro-optic device, and electronic instrument
07/01/2008US7393724 Reduced dielectric breakdown/leakage semiconductor device and a method of manufacturing the same, integrated circuit, electro-optical device, and electric apparatus
07/01/2008US7393723 Method of manufacturing a semiconductor device
07/01/2008US7393722 Reprogrammable metal-to-metal antifuse employing carbon-containing antifuse material
07/01/2008US7393721 Semiconductor chip with metallization levels, and a method for formation in interconnect structures
07/01/2008US7393720 Method for fabricating electrical interconnect structure
07/01/2008US7393719 Increased stand-off height integrated circuit assemblies, systems, and methods
07/01/2008US7393718 Unmolded package for a semiconductor device
07/01/2008US7393717 Diamond-based electrical resistor component
07/01/2008US7393716 Encapsulated organic semiconductor device and method
07/01/2008US7393715 Manufacturing method for image pickup apparatus
07/01/2008US7393714 Method of manufacturing external force detection sensor
07/01/2008US7393713 Method of fabricating near field optical probe
07/01/2008US7393712 Fluidic MEMS device
07/01/2008US7393711 Method of producing a digital fingerprint sensor and the corresponding sensor
07/01/2008US7393710 Fabrication method of multi-wavelength semiconductor laser device
07/01/2008US7393708 Method of manufacturing light emitting device
07/01/2008US7393707 Method for manufacturing an electro-optical device
07/01/2008US7393706 Method of manufacturing optical semiconductor device, package molding jig, method of manufacturing package molding jig and manufacturing apparatus for package molding jig
07/01/2008US7393705 Methods of fabricating light emitting diodes that radiate white light
07/01/2008US7393704 Electroluminescent devices
07/01/2008US7393703 Method for reducing within chip device parameter variations
07/01/2008US7393702 Characterizing the integrity of interconnects
07/01/2008US7393701 Method of adjusting buried resistor resistance
07/01/2008US7393700 Low temperature methods of etching semiconductor substrates
07/01/2008US7393699 NANO-electronics
07/01/2008US7393644 Method for real-time detection of polymerase chain reaction
07/01/2008US7393566 During the performance of a series of treatments, performing between the treatments a number of pre-dispenses for different purposes; a recipe of the treatment solution to be pre-dispensed or a start condition of the pre-dispense is determined for each of the pre-dispenses
07/01/2008US7393563 Exposing a conductively doped silicon surface to TiCl4 without exposing it to any measurable silane for a first period of time and then exposing the surface to a mixture of TiCl4 and a silane for a second period of time
07/01/2008US7393561 Depositing material on substrate by atomic layer processing including injecting series of gases sequentially into reactant chamber without purging one gas from chamber prior to injection of another gas
07/01/2008US7393489 Mold die for molding chip array, molding equipment including the same, and method for molding chip array
07/01/2008US7393469 Reacting an alkyl or dialkyl substituted trialkoxysilane or dialkoxysilane with a silanediol (e.g., diphenylsilanediol or 1,3-Bis (3-hydroxypropyl)tetramethyldisiloxane) optionally with a coupling agent and/or a phosphor dopant; may be used in encapsulation of a light-emitting device or in wafer bonding
07/01/2008US7393460 Plasma processing method and plasma processing apparatus
07/01/2008US7393459 Method for automatic determination of substrates states in plasma processing chambers
07/01/2008US7393433 Plasma processing apparatus, semiconductor manufacturing apparatus and electrostatic chucking unit used thereof
07/01/2008US7393432 RF ground switch for plasma processing system
07/01/2008US7393431 Bubble plate for etching and etching apparatus using the same
07/01/2008US7393418 Susceptor
07/01/2008US7393417 Semiconductor-manufacturing apparatus
07/01/2008US7393414 Methods and systems for processing a microelectronic topography
07/01/2008US7393413 Coating apparatus and organic electronic device fabricating method
07/01/2008US7393412 Method for manufacturing compound semiconductor epitaxial substrate
07/01/2008US7393410 Method of manufacturing nano-wire
07/01/2008US7393409 Method for making large-volume CaF2 single cystals with reduced scattering and improved laser stability, the crystals made by the method and uses thereof
07/01/2008US7393213 Method for material growth of GaN-based nitride layer
07/01/2008US7393207 Wafer support tool for heat treatment and heat treatment apparatus
07/01/2008US7393172 Untreated body transfer device and semiconductor manufacturing device with the untreated body transfer device
07/01/2008US7393159 Inline transfer system and method
07/01/2008US7393081 Droplet jetting device and method of manufacturing pattern
07/01/2008US7392825 Arrangement for tool equipment
07/01/2008US7392815 Chamber for wafer cleaning and method for making the same
07/01/2008US7392812 Substrate processing apparatus and substrate transporting device mounted thereto
07/01/2008US7392760 Microwave-excited plasma processing apparatus
07/01/2008US7392759 Remote plasma apparatus for processing substrate with two types of gases
07/01/2008US7392599 Dummy substrate processing method with chemical resistant resin layer coating plate surface
07/01/2008US7392582 Socket and/or adapter device, and an apparatus and process for loading a socket and/or adapter device with a corresponding semi-conductor component
06/2008
06/26/2008WO2008077048A2 Substrate processing apparatus and method
06/26/2008WO2008077020A2 Safe handling of low energy, high dose arsenic, phosphorus, and boron implanted wafers
06/26/2008WO2008077018A1 Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor
06/26/2008WO2008076978A1 Dual-bit memory device having trench isolation material disposed near bit line contact areas
06/26/2008WO2008076955A2 Microball mounting method and mounting device
06/26/2008WO2008076812A2 Methods for recess etching
06/26/2008WO2008076756A2 Method of making semiconductor-based electronic devices on a wire and by forming freestanding semiconductor structures, and devices that can be made thereby
06/26/2008WO2008076744A1 Methods of forming an epitaxial layer on a group iv semiconductor substrate
06/26/2008WO2008076733A1 Integrated vacuum metrology for cluster tool
06/26/2008WO2008076678A1 Methods and systems for low interfacial oxide contact between barrier and copper metallization
06/26/2008WO2008076677A1 Methods and systems for barrier layer surface passivation