| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/05/2009 | WO2009017271A2 Metal-based package substrate, three-dimensional multi-layered package module using the same, and manufacturing method thereof |
| 02/05/2009 | WO2009017253A1 Liquid resin composition for adhesive, semiconductor device, and process for producing semiconductor device |
| 02/05/2009 | WO2009017247A1 Polymer for forming insulating film, composition for forming insulating film, insulating film, and electronic device having insulating film |
| 02/05/2009 | WO2009017223A1 Semiconductor evaluation circuit |
| 02/05/2009 | WO2009017221A1 High-strength columnar crystal silicon and plasma etching device part formed by the high-strength columnar crystal silicon |
| 02/05/2009 | WO2009017200A1 Circuit connection material, and connection structure of circuit member and connection method of circuit member using the circuit connection material |
| 02/05/2009 | WO2009017146A1 Cu wiring film |
| 02/05/2009 | WO2009017111A1 Method for adjusting exposure apparatus, exposure apparatus and device manufacturing method |
| 02/05/2009 | WO2009017095A1 Polishing liquid for metal and method of polishing |
| 02/05/2009 | WO2009017088A1 Method of manufacturing electrostatic chuck mechanism |
| 02/05/2009 | WO2009017073A1 Polyimide film and wiring board |
| 02/05/2009 | WO2009017020A1 Quartz glass member for plasma etching |
| 02/05/2009 | WO2009016980A1 Plated material having metal thin film formed by electroless plating, and method for production thereof |
| 02/05/2009 | WO2009016979A1 Plated material having metal thin film formed by electroless plating, and method for production thereof |
| 02/05/2009 | WO2009016951A1 Method for manufacturing semiconductor device, semiconductor device, and exposure apparatus |
| 02/05/2009 | WO2009016928A1 Semiconductor device and method for manufacturing the same |
| 02/05/2009 | WO2009016920A1 Floating transfer apparatus, and treating system having the floating transfer apparatus |
| 02/05/2009 | WO2009016919A1 Processing apparatus and clean system including processing apparatus |
| 02/05/2009 | WO2009016918A1 Direction change device and levitation transportation system including direction change device |
| 02/05/2009 | WO2009016880A1 Semiconductor device |
| 02/05/2009 | WO2009016870A1 Heat treatment apparatus and heat treatment method |
| 02/05/2009 | WO2009016795A1 Bonded wafer manufacturing method |
| 02/05/2009 | WO2009016794A1 Epitaxial wafer manufacturing method and epitaxial wafer |
| 02/05/2009 | WO2009016778A1 Semiconductor device and method for manufacturing the same |
| 02/05/2009 | WO2009016742A1 Semiconductor device, and noise measuring method |
| 02/05/2009 | WO2009016739A1 Semiconductor device and its manufacturing method |
| 02/05/2009 | WO2009016732A1 Substrate inspection apparatus and substrate inspection method |
| 02/05/2009 | WO2009016495A1 Semiconductor device having a bump electrode and method for its manufacture |
| 02/05/2009 | WO2009016438A1 Method of forming openings in a semiconductor device and semiconductor device |
| 02/05/2009 | WO2009016437A1 Method of manufacturing a semiconductor device and semiconductor device obtainable therewith |
| 02/05/2009 | WO2009016408A1 Flexible joint |
| 02/05/2009 | WO2009016304A2 Method for coating two elements hybridized by means of a soldering material |
| 02/05/2009 | WO2009016134A1 Production of isolation trenches with different sidewall dopings |
| 02/05/2009 | WO2009016126A1 Method for manufacturing a module and module |
| 02/05/2009 | WO2009016041A1 Method for producing an electronic component and electronic component |
| 02/05/2009 | WO2009015923A1 Small area, robust silicon via structure and process |
| 02/05/2009 | WO2009015742A2 Device and method for holding and transporting substrates |
| 02/05/2009 | WO2008147433A3 Methods and devices employing metal layers in gates to introduce channel strain |
| 02/05/2009 | WO2008145085A4 Gripper, in particular a bernoulli gripper |
| 02/05/2009 | WO2008143885A3 Protection layer for fabricating a solar cell |
| 02/05/2009 | WO2008142546A3 An antireflective coating composition comprising fused aromatic rings |
| 02/05/2009 | WO2008119038A3 Improved method of reducing channeling of ion implants using a sacrificial scattering layer |
| 02/05/2009 | WO2008115266A3 Growth of metallic nanodots using specific precursors |
| 02/05/2009 | WO2008112673A3 Dynamic temperature backside gas control for improved within-substrate processing uniformity |
| 02/05/2009 | WO2008099767A3 Curable liquid composition, method of coating, inorganic substrate, and semiconductor device |
| 02/05/2009 | WO2007131057A3 Vacuum processing chamber suitable for etching high aspect ratio features and components of same |
| 02/05/2009 | WO2007110515A8 Method of detaching a thin film by melting precipitates |
| 02/05/2009 | WO2007078572A3 Apparatus and method for controlling plasma density profile |
| 02/05/2009 | US20090037852 Pattern data generation method and pattern data generation program |
| 02/05/2009 | US20090036835 Catheter securement device |
| 02/05/2009 | US20090036041 Cmp pad dresser and cmp apparatus using the same |
| 02/05/2009 | US20090036024 Cmp apparatus and method of polishing wafer using cmp |
| 02/05/2009 | US20090035952 Methods for low temperature oxidation of a semiconductor device |
| 02/05/2009 | US20090035951 Manufacturing method of semiconductor device |
| 02/05/2009 | US20090035950 Nitriding method of gate oxide film |
| 02/05/2009 | US20090035949 Method of depositing rare earth oxide thin films |
| 02/05/2009 | US20090035948 Substrate processing apparatus, heating apparatus for use in the same, method of manufacturing semiconductors with those apparatuses, and heating element supporting structure |
| 02/05/2009 | US20090035947 Manufacturing Method of Semiconductor Device, and Substrate Processing Apparatus |
| 02/05/2009 | US20090035946 In situ deposition of different metal-containing films using cyclopentadienyl metal precursors |
| 02/05/2009 | US20090035945 Manufacturing method of semiconductor integrated circuit device |
| 02/05/2009 | US20090035944 Methods of for forming ultra thin structures on a substrate |
| 02/05/2009 | US20090035943 Method of Fabricating for Semiconductor Device Fabrication |
| 02/05/2009 | US20090035942 Ruthenium CMP compositions and methods |
| 02/05/2009 | US20090035941 Methods and apparatus for manufacturing a semiconductor device in a processing chamber |
| 02/05/2009 | US20090035940 Copper metallization of through silicon via |
| 02/05/2009 | US20090035939 Fabrication method to minimize ballast layer defects |
| 02/05/2009 | US20090035938 Methods of Forming CoSi2, Methods of Forming Field Effect Transistors, and Methods of Forming Conductive Contacts |
| 02/05/2009 | US20090035937 In-Situ Deposition for Cu Hillock Suppression |
| 02/05/2009 | US20090035936 Semiconductor device having a grain orientation layer |
| 02/05/2009 | US20090035935 Method of forming a metal wiring |
| 02/05/2009 | US20090035934 Self-Aligned Cross-Point Memory Fabrication |
| 02/05/2009 | US20090035933 Dendrite growth control circuit |
| 02/05/2009 | US20090035932 Method for forming vias in a substrate |
| 02/05/2009 | US20090035931 Method for forming vias in a substrate |
| 02/05/2009 | US20090035930 Method of forming a wire structure |
| 02/05/2009 | US20090035929 Method of manufacturing semiconductor device |
| 02/05/2009 | US20090035928 Method of processing a high-k dielectric for cet scaling |
| 02/05/2009 | US20090035927 Method of forming dielectric layers on a substrate and apparatus therefor |
| 02/05/2009 | US20090035926 Methods of Fabricating Silicon Carbide Devices Incorporating Multiple Floating Guard Ring Edge Terminations |
| 02/05/2009 | US20090035925 Gallium Nitride Semiconductor Device |
| 02/05/2009 | US20090035924 Method of forming a semiconductor structure comprising an implantation of ions of a non-doping element |
| 02/05/2009 | US20090035923 Method for manufacturing a semiconductor device |
| 02/05/2009 | US20090035922 Semiconductor device and manufacturing method thereof |
| 02/05/2009 | US20090035921 Formation of lattice-tuning semiconductor substrates |
| 02/05/2009 | US20090035920 Process for fabricating a substrate of the silicon-on-insulator type with reduced roughness and uniform thickness |
| 02/05/2009 | US20090035919 In-place bonding of microstructures |
| 02/05/2009 | US20090035918 Post deposition plasma treatment to increase tensile stress of hdp-cvd sio2 |
| 02/05/2009 | US20090035917 Method for forming device isolation structure of semiconductor device using annealing steps to anneal flowable insulation layer |
| 02/05/2009 | US20090035916 Method for manufacturing semiconductor device having fin gate |
| 02/05/2009 | US20090035915 Method of high density plasma gap-filling with minimization of gas phase nucleation |
| 02/05/2009 | US20090035914 Isolation trench processing for strain control |
| 02/05/2009 | US20090035913 High-capacitance density thin film dielectrics having columnar grains formed on base-metal foils |
| 02/05/2009 | US20090035912 Semiconductor Device and Fabrication Method Thereof |
| 02/05/2009 | US20090035911 Method for forming a semiconductor device having abrupt ultra shallow epi-tip regions |
| 02/05/2009 | US20090035910 Method of Forming The NDMOS Device Body With The Reduced Number of Masks |
| 02/05/2009 | US20090035909 Method of fabrication of a finfet element |
| 02/05/2009 | US20090035908 Process for fabricating a nanowire-based vertical transistor structure |
| 02/05/2009 | US20090035907 Method of forming stacked gate structure for semiconductor memory |
| 02/05/2009 | US20090035906 Method of manufacturing a non-volatile semiconductor device |
| 02/05/2009 | US20090035905 Insitu formation of inverse floating gate poly structures |